JPWO2023243063A1 - - Google Patents
Info
- Publication number
- JPWO2023243063A1 JPWO2023243063A1 JP2024528048A JP2024528048A JPWO2023243063A1 JP WO2023243063 A1 JPWO2023243063 A1 JP WO2023243063A1 JP 2024528048 A JP2024528048 A JP 2024528048A JP 2024528048 A JP2024528048 A JP 2024528048A JP WO2023243063 A1 JPWO2023243063 A1 JP WO2023243063A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/222—Image processing arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/153—Correcting image defects, e.g. stigmators
- H01J2237/1534—Aberrations
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/024228 WO2023243063A1 (ja) | 2022-06-16 | 2022-06-16 | 透過型荷電粒子ビーム装置、及びロンチグラム撮像方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2023243063A1 true JPWO2023243063A1 (https=) | 2023-12-21 |
Family
ID=89192608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024528048A Pending JPWO2023243063A1 (https=) | 2022-06-16 | 2022-06-16 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20250336641A1 (https=) |
| JP (1) | JPWO2023243063A1 (https=) |
| WO (1) | WO2023243063A1 (https=) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11250847A (ja) * | 1998-02-27 | 1999-09-17 | Hitachi Ltd | 収束荷電粒子線装置およびそれを用いた検査方法 |
| US6552340B1 (en) * | 2000-10-12 | 2003-04-22 | Nion Co. | Autoadjusting charged-particle probe-forming apparatus |
| JP2006173027A (ja) * | 2004-12-20 | 2006-06-29 | Hitachi High-Technologies Corp | 走査透過電子顕微鏡、及び収差測定方法、ならびに収差補正方法 |
| JP2008270056A (ja) * | 2007-04-24 | 2008-11-06 | National Institute For Materials Science | 走査型透過電子顕微鏡 |
| JP2012104426A (ja) * | 2010-11-12 | 2012-05-31 | Hitachi High-Technologies Corp | 荷電粒子光学装置及びレンズ収差測定方法 |
| JP2015056376A (ja) * | 2013-09-13 | 2015-03-23 | 株式会社日立ハイテクノロジーズ | 走査透過電子顕微鏡及びその収差測定方法 |
| JP2018139174A (ja) * | 2017-02-24 | 2018-09-06 | 株式会社ホロン | サンプル傾斜自動補正装置およびサンプル傾斜自動補正方法 |
| JP2019040726A (ja) * | 2017-08-24 | 2019-03-14 | 日本電子株式会社 | 収差測定方法および電子顕微鏡 |
-
2022
- 2022-06-16 JP JP2024528048A patent/JPWO2023243063A1/ja active Pending
- 2022-06-16 WO PCT/JP2022/024228 patent/WO2023243063A1/ja not_active Ceased
- 2022-06-16 US US18/866,838 patent/US20250336641A1/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11250847A (ja) * | 1998-02-27 | 1999-09-17 | Hitachi Ltd | 収束荷電粒子線装置およびそれを用いた検査方法 |
| US6552340B1 (en) * | 2000-10-12 | 2003-04-22 | Nion Co. | Autoadjusting charged-particle probe-forming apparatus |
| JP2006173027A (ja) * | 2004-12-20 | 2006-06-29 | Hitachi High-Technologies Corp | 走査透過電子顕微鏡、及び収差測定方法、ならびに収差補正方法 |
| JP2008270056A (ja) * | 2007-04-24 | 2008-11-06 | National Institute For Materials Science | 走査型透過電子顕微鏡 |
| JP2012104426A (ja) * | 2010-11-12 | 2012-05-31 | Hitachi High-Technologies Corp | 荷電粒子光学装置及びレンズ収差測定方法 |
| JP2015056376A (ja) * | 2013-09-13 | 2015-03-23 | 株式会社日立ハイテクノロジーズ | 走査透過電子顕微鏡及びその収差測定方法 |
| JP2018139174A (ja) * | 2017-02-24 | 2018-09-06 | 株式会社ホロン | サンプル傾斜自動補正装置およびサンプル傾斜自動補正方法 |
| JP2019040726A (ja) * | 2017-08-24 | 2019-03-14 | 日本電子株式会社 | 収差測定方法および電子顕微鏡 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20250336641A1 (en) | 2025-10-30 |
| WO2023243063A1 (ja) | 2023-12-21 |
Similar Documents
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