JPWO2023218899A1 - - Google Patents
Info
- Publication number
- JPWO2023218899A1 JPWO2023218899A1 JP2024520344A JP2024520344A JPWO2023218899A1 JP WO2023218899 A1 JPWO2023218899 A1 JP WO2023218899A1 JP 2024520344 A JP2024520344 A JP 2024520344A JP 2024520344 A JP2024520344 A JP 2024520344A JP WO2023218899 A1 JPWO2023218899 A1 JP WO2023218899A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C3/00—Measuring distances in line of sight; Optical rangefinders
- G01C3/02—Details
- G01C3/06—Use of electric means to obtain final indication
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022079310 | 2022-05-13 | ||
| JP2023035884 | 2023-03-08 | ||
| PCT/JP2023/015843 WO2023218899A1 (ja) | 2022-05-13 | 2023-04-21 | 計測システムおよび計測方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023218899A1 true JPWO2023218899A1 (https=) | 2023-11-16 |
| JPWO2023218899A5 JPWO2023218899A5 (https=) | 2025-01-24 |
Family
ID=88730282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024520344A Pending JPWO2023218899A1 (https=) | 2022-05-13 | 2023-04-21 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20250035434A1 (https=) |
| JP (1) | JPWO2023218899A1 (https=) |
| WO (1) | WO2023218899A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026053403A1 (ja) * | 2024-09-09 | 2026-03-12 | Ｎｔｔ株式会社 | 汚染度評価方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7714995B2 (en) * | 1997-09-22 | 2010-05-11 | Kla-Tencor Corporation | Material independent profiler |
| EP1400802A1 (en) * | 2002-09-23 | 2004-03-24 | Ford Global Technologies, Inc. | Method and arrangement for detecting and evaluating surface irregularities |
| JP4012798B2 (ja) * | 2002-10-03 | 2007-11-21 | 株式会社東洋精機製作所 | レーザ反射光による表面粗さ測定方法及びその装置 |
| US7742168B2 (en) * | 2003-04-29 | 2010-06-22 | Surfoptic Limited | Measuring a surface characteristic |
| US20070146685A1 (en) * | 2005-11-30 | 2007-06-28 | Yoo Woo S | Dynamic wafer stress management system |
| DE102007010588B3 (de) * | 2007-03-05 | 2008-06-12 | Carl Zeiss Smt Ag | Verfahren und Vorrichtung zum Vermessen einer Oberfläche eines Objekts und Verfahren zur Herstellung eines Objekts |
| JP2012078144A (ja) * | 2010-09-30 | 2012-04-19 | Kaneka Corp | 透明体シート状物の表面欠陥検査装置 |
| JP2016024060A (ja) * | 2014-07-22 | 2016-02-08 | キヤノン株式会社 | 計測条件の決定方法および計測装置 |
| KR102044196B1 (ko) * | 2016-07-19 | 2019-11-13 | 닛폰세이테츠 가부시키가이샤 | 조도 측정 장치 및 조도 측정 방법 |
| JP7215568B2 (ja) * | 2019-04-03 | 2023-01-31 | 日本電気株式会社 | 表面異常検知装置、及びシステム |
| FR3109626B1 (fr) * | 2020-04-27 | 2022-06-03 | Michelin & Cie | Procede d’obtention du profil d’une surface en mouvement par rapport au systeme |
| DE102021105946A1 (de) * | 2021-03-11 | 2022-09-15 | Asml Netherlands B.V. | Messvorrichtung und Verfahren zur Rauheits- und/oder Defektmessung an einer Oberfläche |
-
2023
- 2023-04-21 JP JP2024520344A patent/JPWO2023218899A1/ja active Pending
- 2023-04-21 WO PCT/JP2023/015843 patent/WO2023218899A1/ja not_active Ceased
-
2024
- 2024-10-16 US US18/916,777 patent/US20250035434A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023218899A1 (ja) | 2023-11-16 |
| US20250035434A1 (en) | 2025-01-30 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20241122 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20260227 |