JPWO2023190068A1 - - Google Patents

Info

Publication number
JPWO2023190068A1
JPWO2023190068A1 JP2024512292A JP2024512292A JPWO2023190068A1 JP WO2023190068 A1 JPWO2023190068 A1 JP WO2023190068A1 JP 2024512292 A JP2024512292 A JP 2024512292A JP 2024512292 A JP2024512292 A JP 2024512292A JP WO2023190068 A1 JPWO2023190068 A1 JP WO2023190068A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024512292A
Other languages
Japanese (ja)
Other versions
JPWO2023190068A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023190068A1 publication Critical patent/JPWO2023190068A1/ja
Publication of JPWO2023190068A5 publication Critical patent/JPWO2023190068A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2024512292A 2022-03-29 2023-03-23 Pending JPWO2023190068A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022054373 2022-03-29
PCT/JP2023/011601 WO2023190068A1 (ja) 2022-03-29 2023-03-23 電磁波偏向装置及び電磁波走査装置

Publications (2)

Publication Number Publication Date
JPWO2023190068A1 true JPWO2023190068A1 (https=) 2023-10-05
JPWO2023190068A5 JPWO2023190068A5 (https=) 2024-12-13

Family

ID=88202070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024512292A Pending JPWO2023190068A1 (https=) 2022-03-29 2023-03-23

Country Status (3)

Country Link
US (1) US20250224607A1 (https=)
JP (1) JPWO2023190068A1 (https=)
WO (1) WO2023190068A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201002607A (en) * 2008-07-02 2010-01-16 Touch Micro System Tech Method of modulating resonant frequency of torsional MEMS device
JP5736766B2 (ja) * 2010-12-22 2015-06-17 ミツミ電機株式会社 光走査装置
JP6533365B2 (ja) * 2014-03-13 2019-06-19 株式会社リコー 光偏向装置、光偏向ミラー及び画像表示装置
JP2016110008A (ja) * 2014-12-10 2016-06-20 スタンレー電気株式会社 二軸光偏向器
JP2017116842A (ja) * 2015-12-25 2017-06-29 株式会社リコー 光偏向器及び画像投影装置
JP6771132B2 (ja) * 2016-03-03 2020-10-21 北陽電機株式会社 光偏向装置
JP7132481B2 (ja) * 2018-02-23 2022-09-07 ミツミ電機株式会社 アクチュエータ及び光走査装置

Also Published As

Publication number Publication date
WO2023190068A1 (ja) 2023-10-05
US20250224607A1 (en) 2025-07-10

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240903

A621 Written request for application examination

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Effective date: 20260302