JPWO2023181247A1 - - Google Patents

Info

Publication number
JPWO2023181247A1
JPWO2023181247A1 JP2024509570A JP2024509570A JPWO2023181247A1 JP WO2023181247 A1 JPWO2023181247 A1 JP WO2023181247A1 JP 2024509570 A JP2024509570 A JP 2024509570A JP 2024509570 A JP2024509570 A JP 2024509570A JP WO2023181247 A1 JPWO2023181247 A1 JP WO2023181247A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024509570A
Other languages
Japanese (ja)
Other versions
JPWO2023181247A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023181247A1 publication Critical patent/JPWO2023181247A1/ja
Publication of JPWO2023181247A5 publication Critical patent/JPWO2023181247A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/383Quantum effect devices, e.g. of devices using quantum reflection, diffraction or interference effects
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/383Quantum effect devices, e.g. of devices using quantum reflection, diffraction or interference effects
    • H10D48/3835Semiconductor qubit devices comprising a plurality of quantum mechanically interacting semiconductor quantum dots, e.g. Loss-DiVincenzo spin qubits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/10Junction-based devices
    • H10N60/12Josephson-effect devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/10Junction-based devices
    • H10N60/128Junction-based devices having three or more electrodes, e.g. transistor-like structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • H10W20/031Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/01Manufacture or treatment
    • H10W20/071Manufacture or treatment of dielectric parts thereof
    • H10W20/081Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/66Conductive materials thereof
    • H10W70/668Superconducting materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69Insulating materials thereof
    • H10W70/698Semiconductor materials that are electrically insulating, e.g. undoped silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/881Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being a two-dimensional material
    • H10D62/883Transition metal dichalcogenides, e.g. MoSe2
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/608Electrodes characterised by their materials being superconducting
JP2024509570A 2022-03-24 2022-03-24 Pending JPWO2023181247A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/013903 WO2023181247A1 (ja) 2022-03-24 2022-03-24 電子装置、量子コンピュータ及び電子装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2023181247A1 true JPWO2023181247A1 (https=) 2023-09-28
JPWO2023181247A5 JPWO2023181247A5 (https=) 2024-11-28

Family

ID=88100651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024509570A Pending JPWO2023181247A1 (https=) 2022-03-24 2022-03-24

Country Status (3)

Country Link
US (1) US20250015169A1 (https=)
JP (1) JPWO2023181247A1 (https=)
WO (1) WO2023181247A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008010290A1 (en) * 2006-07-21 2008-01-24 Renesas Technology Corp. Semiconductor device
JP7666617B2 (ja) * 2021-09-21 2025-04-22 富士通株式会社 量子ビット、量子演算装置及び量子ビットの製造方法
JP7729398B2 (ja) * 2021-11-26 2025-08-26 富士通株式会社 構造体及び構造体の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11037776B1 (en) * 2019-12-17 2021-06-15 Honeywell International Inc. Apparatuses, systems, and methods for ion traps

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008010290A1 (en) * 2006-07-21 2008-01-24 Renesas Technology Corp. Semiconductor device
JP7666617B2 (ja) * 2021-09-21 2025-04-22 富士通株式会社 量子ビット、量子演算装置及び量子ビットの製造方法
JP7729398B2 (ja) * 2021-11-26 2025-08-26 富士通株式会社 構造体及び構造体の製造方法

Also Published As

Publication number Publication date
US20250015169A1 (en) 2025-01-09
WO2023181247A1 (ja) 2023-09-28

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