JPWO2023167013A1 - - Google Patents

Info

Publication number
JPWO2023167013A1
JPWO2023167013A1 JP2024504611A JP2024504611A JPWO2023167013A1 JP WO2023167013 A1 JPWO2023167013 A1 JP WO2023167013A1 JP 2024504611 A JP2024504611 A JP 2024504611A JP 2024504611 A JP2024504611 A JP 2024504611A JP WO2023167013 A1 JPWO2023167013 A1 JP WO2023167013A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024504611A
Other languages
Japanese (ja)
Other versions
JPWO2023167013A5 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023167013A1 publication Critical patent/JPWO2023167013A1/ja
Publication of JPWO2023167013A5 publication Critical patent/JPWO2023167013A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2024504611A 2022-03-04 2023-02-17 Pending JPWO2023167013A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022033439 2022-03-04
PCT/JP2023/005699 WO2023167013A1 (en) 2022-03-04 2023-02-17 Semiconductor test apparatus

Publications (2)

Publication Number Publication Date
JPWO2023167013A1 true JPWO2023167013A1 (en) 2023-09-07
JPWO2023167013A5 JPWO2023167013A5 (en) 2024-06-07

Family

ID=87883479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024504611A Pending JPWO2023167013A1 (en) 2022-03-04 2023-02-17

Country Status (2)

Country Link
JP (1) JPWO2023167013A1 (en)
WO (1) WO2023167013A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009128188A (en) * 2007-11-22 2009-06-11 Fuji Electric Device Technology Co Ltd Device and method for testing element
JP2009128190A (en) * 2007-11-22 2009-06-11 Fuji Electric Device Technology Co Ltd Device and method for testing element
JP2009128189A (en) * 2007-11-22 2009-06-11 Fuji Electric Device Technology Co Ltd Device and method for testing element
JP6289287B2 (en) * 2014-06-27 2018-03-07 三菱電機株式会社 Semiconductor test equipment
JP6265872B2 (en) * 2014-09-22 2018-01-24 三菱電機株式会社 Semiconductor test apparatus and semiconductor test method
JP6956598B2 (en) * 2017-11-09 2021-11-02 三菱電機株式会社 Separation method of semiconductor test equipment and semiconductor elements
JP7123271B2 (en) * 2019-10-30 2022-08-22 三菱電機株式会社 Hermetically sealed semiconductor device

Also Published As

Publication number Publication date
WO2023167013A1 (en) 2023-09-07

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Legal Events

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Effective date: 20240314

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