JPWO2023162077A1 - - Google Patents
Info
- Publication number
- JPWO2023162077A1 JPWO2023162077A1 JP2023500379A JP2023500379A JPWO2023162077A1 JP WO2023162077 A1 JPWO2023162077 A1 JP WO2023162077A1 JP 2023500379 A JP2023500379 A JP 2023500379A JP 2023500379 A JP2023500379 A JP 2023500379A JP WO2023162077 A1 JPWO2023162077 A1 JP WO2023162077A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
- G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/24—Pc safety
- G05B2219/24069—Diagnostic
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing And Monitoring For Control Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2022/007541 WO2023162077A1 (ja) | 2022-02-24 | 2022-02-24 | 診断装置及び診断方法並びに半導体製造装置システム及び半導体装置製造システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2023162077A1 true JPWO2023162077A1 (ja) | 2023-08-31 |
JP7358679B1 JP7358679B1 (ja) | 2023-10-10 |
Family
ID=87764978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023500379A Active JP7358679B1 (ja) | 2022-02-24 | 2022-02-24 | 診断装置及び診断方法並びに半導体製造装置システム及び半導体装置製造システム |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7358679B1 (ja) |
KR (1) | KR20230129001A (ja) |
CN (1) | CN116941010A (ja) |
WO (1) | WO2023162077A1 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004186445A (ja) * | 2002-12-03 | 2004-07-02 | Omron Corp | モデル化装置及びモデル解析方法並びにプロセス異常検出・分類システム及びプロセス異常検出・分類方法並びにモデル化システム及びモデル化方法並びに故障予知システム及びモデル化装置の更新方法 |
JP5427107B2 (ja) * | 2010-05-20 | 2014-02-26 | 株式会社日立製作所 | 監視診断装置および監視診断方法 |
JP5501903B2 (ja) * | 2010-09-07 | 2014-05-28 | 株式会社日立製作所 | 異常検知方法及びそのシステム |
JP6105141B1 (ja) * | 2016-09-30 | 2017-03-29 | 株式会社日立パワーソリューションズ | プリプロセッサおよび診断装置 |
JP7204584B2 (ja) | 2019-06-14 | 2023-01-16 | ルネサスエレクトロニクス株式会社 | 異常検知システム、異常検知装置および異常検知方法 |
-
2022
- 2022-02-24 CN CN202280005996.8A patent/CN116941010A/zh active Pending
- 2022-02-24 WO PCT/JP2022/007541 patent/WO2023162077A1/ja active Application Filing
- 2022-02-24 JP JP2023500379A patent/JP7358679B1/ja active Active
- 2022-02-24 KR KR1020237004877A patent/KR20230129001A/ko unknown
Also Published As
Publication number | Publication date |
---|---|
TW202334772A (zh) | 2023-09-01 |
JP7358679B1 (ja) | 2023-10-10 |
CN116941010A (zh) | 2023-10-24 |
KR20230129001A (ko) | 2023-09-05 |
WO2023162077A1 (ja) | 2023-08-31 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230105 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230829 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230927 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7358679 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |