JPWO2023032083A1 - - Google Patents

Info

Publication number
JPWO2023032083A1
JPWO2023032083A1 JP2023544876A JP2023544876A JPWO2023032083A1 JP WO2023032083 A1 JPWO2023032083 A1 JP WO2023032083A1 JP 2023544876 A JP2023544876 A JP 2023544876A JP 2023544876 A JP2023544876 A JP 2023544876A JP WO2023032083 A1 JPWO2023032083 A1 JP WO2023032083A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023544876A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023032083A1 publication Critical patent/JPWO2023032083A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2023544876A 2021-09-01 2021-09-01 Pending JPWO2023032083A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/032145 WO2023032083A1 (ja) 2021-09-01 2021-09-01 荷電粒子ビーム装置及び荷電粒子ビーム装置の調整方法

Publications (1)

Publication Number Publication Date
JPWO2023032083A1 true JPWO2023032083A1 (ja) 2023-03-09

Family

ID=85410929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023544876A Pending JPWO2023032083A1 (ja) 2021-09-01 2021-09-01

Country Status (2)

Country Link
JP (1) JPWO2023032083A1 (ja)
WO (1) WO2023032083A1 (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60136141A (ja) * 1983-12-23 1985-07-19 Hitachi Ltd 荷電粒子照射装置
JPH06349435A (ja) * 1993-06-04 1994-12-22 Hitachi Ltd 電子顕微鏡の自動可動絞り装置
JP5033314B2 (ja) * 2004-09-29 2012-09-26 株式会社日立ハイテクノロジーズ イオンビーム加工装置及び加工方法
JP4789260B2 (ja) * 2006-08-23 2011-10-12 エスアイアイ・ナノテクノロジー株式会社 荷電粒子ビーム装置及びアパーチャの軸調整方法

Also Published As

Publication number Publication date
WO2023032083A1 (ja) 2023-03-09

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231211