JPWO2023032075A1 - - Google Patents
Info
- Publication number
- JPWO2023032075A1 JPWO2023032075A1 JP2023544869A JP2023544869A JPWO2023032075A1 JP WO2023032075 A1 JPWO2023032075 A1 JP WO2023032075A1 JP 2023544869 A JP2023544869 A JP 2023544869A JP 2023544869 A JP2023544869 A JP 2023544869A JP WO2023032075 A1 JPWO2023032075 A1 JP WO2023032075A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/032121 WO2023032075A1 (ja) | 2021-09-01 | 2021-09-01 | 荷電粒子ビーム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023032075A1 true JPWO2023032075A1 (ja) | 2023-03-09 |
| JPWO2023032075A5 JPWO2023032075A5 (ja) | 2024-03-13 |
Family
ID=85410988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023544869A Pending JPWO2023032075A1 (ja) | 2021-09-01 | 2021-09-01 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2023032075A1 (ja) |
| WO (1) | WO2023032075A1 (ja) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05217536A (ja) * | 1992-02-03 | 1993-08-27 | Hitachi Ltd | 電子顕微鏡の絞り装置 |
| JP5509239B2 (ja) * | 2004-09-29 | 2014-06-04 | 株式会社日立ハイテクノロジーズ | イオンビーム加工装置及び加工方法 |
| JP5378185B2 (ja) * | 2009-12-08 | 2013-12-25 | 株式会社日立ハイテクノロジーズ | 集束イオンビーム装置、及び集束イオンビーム加工方法 |
-
2021
- 2021-09-01 WO PCT/JP2021/032121 patent/WO2023032075A1/ja active Application Filing
- 2021-09-01 JP JP2023544869A patent/JPWO2023032075A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023032075A1 (ja) | 2023-03-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231207 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20231207 |