JPWO2022254620A1 - - Google Patents
Info
- Publication number
- JPWO2022254620A1 JPWO2022254620A1 JP2023525250A JP2023525250A JPWO2022254620A1 JP WO2022254620 A1 JPWO2022254620 A1 JP WO2022254620A1 JP 2023525250 A JP2023525250 A JP 2023525250A JP 2023525250 A JP2023525250 A JP 2023525250A JP WO2022254620 A1 JPWO2022254620 A1 JP WO2022254620A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/021042 WO2022254620A1 (ja) | 2021-06-02 | 2021-06-02 | 粒子解析装置および粒子解析方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022254620A1 true JPWO2022254620A1 (ja) | 2022-12-08 |
Family
ID=84322880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023525250A Pending JPWO2022254620A1 (ja) | 2021-06-02 | 2021-06-02 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2022254620A1 (ja) |
| WO (1) | WO2022254620A1 (ja) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5006520B2 (ja) * | 2005-03-22 | 2012-08-22 | 株式会社日立ハイテクノロジーズ | 欠陥観察装置及び欠陥観察装置を用いた欠陥観察方法 |
| JP4855726B2 (ja) * | 2005-07-15 | 2012-01-18 | 株式会社キーエンス | 拡大観察装置、拡大観察装置の操作方法、拡大観察装置操作プログラムおよびコンピュータで読み取り可能な記録媒体並びに記録した機器 |
| JP2019087369A (ja) * | 2017-11-06 | 2019-06-06 | 日本電子株式会社 | 電子顕微鏡及びプログラム |
| KR20240018686A (ko) * | 2018-08-28 | 2024-02-13 | 에이에스엠엘 네델란즈 비.브이. | 시간 의존적 결함 검사 장치 |
-
2021
- 2021-06-02 JP JP2023525250A patent/JPWO2022254620A1/ja active Pending
- 2021-06-02 WO PCT/JP2021/021042 patent/WO2022254620A1/ja active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022254620A1 (ja) | 2022-12-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20231107 |