JPWO2022249575A1 - - Google Patents

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Publication number
JPWO2022249575A1
JPWO2022249575A1 JP2023523985A JP2023523985A JPWO2022249575A1 JP WO2022249575 A1 JPWO2022249575 A1 JP WO2022249575A1 JP 2023523985 A JP2023523985 A JP 2023523985A JP 2023523985 A JP2023523985 A JP 2023523985A JP WO2022249575 A1 JPWO2022249575 A1 JP WO2022249575A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023523985A
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Japanese (ja)
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JP7802782B2 (ja
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Publication date
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Publication of JPWO2022249575A1 publication Critical patent/JPWO2022249575A1/ja
Application granted granted Critical
Publication of JP7802782B2 publication Critical patent/JP7802782B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182Colour image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8053Colour filters
JP2023523985A 2021-05-27 2022-02-14 固体撮像素子、固体撮像素子の製造方法および電子機器 Active JP7802782B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021089185 2021-05-27
JP2021089185 2021-05-27
PCT/JP2022/005561 WO2022249575A1 (ja) 2021-05-27 2022-02-14 固体撮像素子、固体撮像素子の製造方法および電子機器

Publications (2)

Publication Number Publication Date
JPWO2022249575A1 true JPWO2022249575A1 (https=) 2022-12-01
JP7802782B2 JP7802782B2 (ja) 2026-01-20

Family

ID=84229793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023523985A Active JP7802782B2 (ja) 2021-05-27 2022-02-14 固体撮像素子、固体撮像素子の製造方法および電子機器

Country Status (6)

Country Link
US (1) US20240258348A1 (https=)
EP (1) EP4350770A4 (https=)
JP (1) JP7802782B2 (https=)
CN (1) CN117321772A (https=)
TW (1) TW202247445A (https=)
WO (1) WO2022249575A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12176364B2 (en) * 2021-12-27 2024-12-24 Omnivision Technologies, Inc. Passivation-enhanced image sensor and surface-passivation method
JP2025024416A (ja) * 2023-08-07 2025-02-20 ソニーセミコンダクタソリューションズ株式会社 光検出装置及び電子機器
CN121816844A (zh) * 2023-10-06 2026-04-07 索尼半导体解决方案公司 光检测装置和电子设备
WO2025169620A1 (ja) * 2024-02-09 2025-08-14 ソニーセミコンダクタソリューションズ株式会社 光検出装置および電子機器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170373108A1 (en) * 2016-06-24 2017-12-28 SK Hynix Inc. Image sensor including transfer gates in deep trenches
US20190296060A1 (en) * 2018-03-21 2019-09-26 SK Hynix Inc. Image sensor having pd bias patterns
WO2019220945A1 (ja) * 2018-05-18 2019-11-21 ソニーセミコンダクタソリューションズ株式会社 撮像素子、電子機器
WO2020262131A1 (ja) * 2019-06-26 2020-12-30 ソニーセミコンダクタソリューションズ株式会社 撮像装置
US20210020675A1 (en) * 2019-07-19 2021-01-21 Stmicroelectronics (Crolles 2) Sas Image sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4621719B2 (ja) 2007-09-27 2011-01-26 富士フイルム株式会社 裏面照射型撮像素子

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170373108A1 (en) * 2016-06-24 2017-12-28 SK Hynix Inc. Image sensor including transfer gates in deep trenches
US20190296060A1 (en) * 2018-03-21 2019-09-26 SK Hynix Inc. Image sensor having pd bias patterns
WO2019220945A1 (ja) * 2018-05-18 2019-11-21 ソニーセミコンダクタソリューションズ株式会社 撮像素子、電子機器
WO2020262131A1 (ja) * 2019-06-26 2020-12-30 ソニーセミコンダクタソリューションズ株式会社 撮像装置
US20220238590A1 (en) * 2019-06-26 2022-07-28 Sony Semiconductor Solutions Corporation Imaging device
US20210020675A1 (en) * 2019-07-19 2021-01-21 Stmicroelectronics (Crolles 2) Sas Image sensor

Also Published As

Publication number Publication date
CN117321772A (zh) 2023-12-29
WO2022249575A1 (ja) 2022-12-01
EP4350770A4 (en) 2024-08-07
JP7802782B2 (ja) 2026-01-20
TW202247445A (zh) 2022-12-01
EP4350770A1 (en) 2024-04-10
US20240258348A1 (en) 2024-08-01

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