JPWO2022180840A1 - - Google Patents
Info
- Publication number
- JPWO2022180840A1 JPWO2022180840A1 JP2023502000A JP2023502000A JPWO2022180840A1 JP WO2022180840 A1 JPWO2022180840 A1 JP WO2022180840A1 JP 2023502000 A JP2023502000 A JP 2023502000A JP 2023502000 A JP2023502000 A JP 2023502000A JP WO2022180840 A1 JPWO2022180840 A1 JP WO2022180840A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/007529 WO2022180840A1 (en) | 2021-02-26 | 2021-02-26 | Optical integrated circuit manufacturing system and manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022180840A1 true JPWO2022180840A1 (en) | 2022-09-01 |
Family
ID=83048717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023502000A Pending JPWO2022180840A1 (en) | 2021-02-26 | 2021-02-26 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2022180840A1 (en) |
| WO (1) | WO2022180840A1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6413867B1 (en) * | 1999-12-23 | 2002-07-02 | Applied Materials, Inc. | Film thickness control using spectral interferometry |
| JP2003232948A (en) * | 2001-12-03 | 2003-08-22 | Furukawa Electric Co Ltd:The | Method of manufacturing optical waveguide, optical waveguide device using the method, and waveguide type optical multiplexer/demultiplexer |
| JP2004206016A (en) * | 2002-12-26 | 2004-07-22 | Hitachi Chem Co Ltd | Optical waveguide structure and its manufacturing method |
| US8200448B2 (en) * | 2008-02-21 | 2012-06-12 | Southwell William H | Optical monitor for rugate filter deposition |
| JPWO2015111600A1 (en) * | 2014-01-24 | 2017-03-23 | 技術研究組合光電子融合基盤技術研究所 | Optical device manufacturing method and optical device |
-
2021
- 2021-02-26 JP JP2023502000A patent/JPWO2022180840A1/ja active Pending
- 2021-02-26 WO PCT/JP2021/007529 patent/WO2022180840A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022180840A1 (en) | 2022-09-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230608 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240416 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240611 |