JPWO2022149341A1 - - Google Patents
Info
- Publication number
- JPWO2022149341A1 JPWO2022149341A1 JP2022573929A JP2022573929A JPWO2022149341A1 JP WO2022149341 A1 JPWO2022149341 A1 JP WO2022149341A1 JP 2022573929 A JP2022573929 A JP 2022573929A JP 2022573929 A JP2022573929 A JP 2022573929A JP WO2022149341 A1 JPWO2022149341 A1 JP WO2022149341A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021001685 | 2021-01-07 | ||
| PCT/JP2021/040758 WO2022149341A1 (ja) | 2021-01-07 | 2021-11-05 | 位置合わせ方法、積層体の製造方法、位置合わせ装置、積層体製造装置、及び積層体 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022149341A1 true JPWO2022149341A1 (ja) | 2022-07-14 |
Family
ID=82357410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022573929A Pending JPWO2022149341A1 (ja) | 2021-01-07 | 2021-11-05 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240042674A1 (ja) |
| EP (1) | EP4276406A1 (ja) |
| JP (1) | JPWO2022149341A1 (ja) |
| WO (1) | WO2022149341A1 (ja) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7804994B2 (en) * | 2002-02-15 | 2010-09-28 | Kla-Tencor Technologies Corporation | Overlay metrology and control method |
| NL1036351A1 (nl) * | 2007-12-31 | 2009-07-01 | Asml Netherlands Bv | Alignment system and alignment marks for use therewith cross-reference to related applications. |
| JP5409237B2 (ja) * | 2009-09-28 | 2014-02-05 | キヤノン株式会社 | パターン検出装置、その処理方法及びプログラム |
| JP6864443B2 (ja) * | 2016-08-04 | 2021-04-28 | 旭化成株式会社 | 位置合わせ方法、インプリント方法およびインプリント装置 |
| JP6987363B2 (ja) | 2018-12-11 | 2021-12-22 | 株式会社オンダ製作所 | 管体接続装置及び座部材 |
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2021
- 2021-11-05 WO PCT/JP2021/040758 patent/WO2022149341A1/ja active Application Filing
- 2021-11-05 EP EP21917566.8A patent/EP4276406A1/en active Pending
- 2021-11-05 JP JP2022573929A patent/JPWO2022149341A1/ja active Pending
- 2021-11-05 US US18/265,711 patent/US20240042674A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP4276406A1 (en) | 2023-11-15 |
| WO2022149341A1 (ja) | 2022-07-14 |
| US20240042674A1 (en) | 2024-02-08 |