JPWO2022137600A1 - - Google Patents
Info
- Publication number
- JPWO2022137600A1 JPWO2022137600A1 JP2022571017A JP2022571017A JPWO2022137600A1 JP WO2022137600 A1 JPWO2022137600 A1 JP WO2022137600A1 JP 2022571017 A JP2022571017 A JP 2022571017A JP 2022571017 A JP2022571017 A JP 2022571017A JP WO2022137600 A1 JPWO2022137600 A1 JP WO2022137600A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q40/00—Calibration, e.g. of probes
- G01Q40/02—Calibration standards and methods of fabrication thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q40/00—Calibration, e.g. of probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020211165 | 2020-12-21 | ||
| PCT/JP2021/021849 WO2022137600A1 (ja) | 2020-12-21 | 2021-06-09 | 探針の評価方法およびｓｐｍ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022137600A1 true JPWO2022137600A1 (ja) | 2022-06-30 |
| JPWO2022137600A5 JPWO2022137600A5 (ja) | 2023-09-06 |
Family
ID=82158898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022571017A Pending JPWO2022137600A1 (ja) | 2020-12-21 | 2021-06-09 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20240069064A1 (ja) |
| JP (1) | JPWO2022137600A1 (ja) |
| WO (1) | WO2022137600A1 (ja) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6489611B1 (en) * | 1998-10-07 | 2002-12-03 | Massachusetts Institute Of Technology | Atomic force microscope for profiling high aspect ratio samples |
| JP2001165844A (ja) * | 1999-12-06 | 2001-06-22 | Seiko Instruments Inc | 走査型プローブ顕微鏡 |
| US6545273B1 (en) * | 2000-10-24 | 2003-04-08 | Advanced Micro Devices, Inc. | Use of multiple tips on AFM to deconvolve tip effects |
| JP2006308313A (ja) * | 2005-04-26 | 2006-11-09 | Hitachi Kenki Fine Tech Co Ltd | 走査型プローブ顕微鏡およびその探針評価方法 |
| JP2006308312A (ja) * | 2005-04-26 | 2006-11-09 | Hitachi Kenki Fine Tech Co Ltd | 走査型プローブ顕微鏡の探針先端評価方法 |
| JP4803440B2 (ja) * | 2005-08-16 | 2011-10-26 | 独立行政法人産業技術総合研究所 | 探針形状評価用標準試料 |
| KR20080069325A (ko) * | 2007-01-23 | 2008-07-28 | 삼성전자주식회사 | 패턴 두께 측정기의 이상 판정 방법 |
-
2021
- 2021-06-09 WO PCT/JP2021/021849 patent/WO2022137600A1/ja active Application Filing
- 2021-06-09 US US18/268,299 patent/US20240069064A1/en active Pending
- 2021-06-09 JP JP2022571017A patent/JPWO2022137600A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022137600A1 (ja) | 2022-06-30 |
| US20240069064A1 (en) | 2024-02-29 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230620 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230620 |
|
| A80 | Written request to apply exceptions to lack of novelty of invention |
Free format text: JAPANESE INTERMEDIATE CODE: A801 Effective date: 20230620 |
|
| A80 | Written request to apply exceptions to lack of novelty of invention |
Free format text: JAPANESE INTERMEDIATE CODE: A80 Effective date: 20230620 |