JPWO2022123674A1 - - Google Patents

Info

Publication number
JPWO2022123674A1
JPWO2022123674A1 JP2022567936A JP2022567936A JPWO2022123674A1 JP WO2022123674 A1 JPWO2022123674 A1 JP WO2022123674A1 JP 2022567936 A JP2022567936 A JP 2022567936A JP 2022567936 A JP2022567936 A JP 2022567936A JP WO2022123674 A1 JPWO2022123674 A1 JP WO2022123674A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022567936A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022123674A1 publication Critical patent/JPWO2022123674A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
JP2022567936A 2020-12-09 2020-12-09 Pending JPWO2022123674A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/045804 WO2022123674A1 (ja) 2020-12-09 2020-12-09 締結構造体、およびプラズマ発生装置

Publications (1)

Publication Number Publication Date
JPWO2022123674A1 true JPWO2022123674A1 (ja) 2022-06-16

Family

ID=81973371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022567936A Pending JPWO2022123674A1 (ja) 2020-12-09 2020-12-09

Country Status (2)

Country Link
JP (1) JPWO2022123674A1 (ja)
WO (1) WO2022123674A1 (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI224815B (en) * 2001-08-01 2004-12-01 Tokyo Electron Ltd Gas processing apparatus and gas processing method
JP2006283878A (ja) * 2005-03-31 2006-10-19 Matsushita Electric Ind Co Ltd 締結装置
JP4439501B2 (ja) * 2006-08-31 2010-03-24 シャープ株式会社 プラズマプロセス装置およびプラズマ装置用電極ユニット
US9449795B2 (en) * 2013-02-28 2016-09-20 Novellus Systems, Inc. Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor

Also Published As

Publication number Publication date
WO2022123674A1 (ja) 2022-06-16

Similar Documents

Publication Publication Date Title
BR112023005462A2 (ja)
BR112023012656A2 (ja)
BR112021014123A2 (ja)
BR112022024743A2 (ja)
BR102021015500A2 (ja)
BR112022009896A2 (ja)
BR102021007058A2 (ja)
BR102020022030A2 (ja)
BR112023011738A2 (ja)
BR112023016292A2 (ja)
BR112023004146A2 (ja)
BR112023011539A2 (ja)
BR112023011610A2 (ja)
BR112023008976A2 (ja)
BR112023009656A2 (ja)
BR112023006729A2 (ja)
BR102021018926A2 (ja)
BR102021016176A2 (ja)
BR112021017747A2 (ja)
BR112021013417A2 (ja)
BR102021009555A2 (ja)
BR102021009475A2 (ja)
BR102021007978A2 (ja)
BR102021004425A2 (ja)
BR112023008622A2 (ja)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231010

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240402

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20240521