JPWO2022097726A1 - - Google Patents

Info

Publication number
JPWO2022097726A1
JPWO2022097726A1 JP2022560830A JP2022560830A JPWO2022097726A1 JP WO2022097726 A1 JPWO2022097726 A1 JP WO2022097726A1 JP 2022560830 A JP2022560830 A JP 2022560830A JP 2022560830 A JP2022560830 A JP 2022560830A JP WO2022097726 A1 JPWO2022097726 A1 JP WO2022097726A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022560830A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022097726A1 publication Critical patent/JPWO2022097726A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0275—Details making use of sensor-related data, e.g. for identification of sensor parts or optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2853—Averaging successive scans or readings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2859—Peak detecting in spectrum
    • G01J2003/2863—Peak detecting in spectrum and calculating peak area

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2022560830A 2020-11-09 2021-11-05 Pending JPWO2022097726A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020186652 2020-11-09
PCT/JP2021/040846 WO2022097726A1 (ja) 2020-11-09 2021-11-05 波長測定装置及び波長測定方法

Publications (1)

Publication Number Publication Date
JPWO2022097726A1 true JPWO2022097726A1 (ja) 2022-05-12

Family

ID=81458339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022560830A Pending JPWO2022097726A1 (ja) 2020-11-09 2021-11-05

Country Status (4)

Country Link
JP (1) JPWO2022097726A1 (ja)
KR (1) KR20230079215A (ja)
CN (1) CN116457642A (ja)
WO (1) WO2022097726A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024057889A1 (ja) * 2022-09-16 2024-03-21 コニカミノルタ株式会社 波長測定装置、データ処理装置、波長測定方法及びプログラム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109186946B (zh) * 2018-09-25 2019-11-08 厦门大学 发光器件微区光度和色度学参数的测量方法及其测量装置
EP3644045A1 (en) * 2018-10-26 2020-04-29 Julius-Maximilians-Universität Würzburg Hyperspectral imaging for spectral and spatial characterization of quantum dots
US10801953B2 (en) * 2019-01-11 2020-10-13 Kla-Tencor Corporation Semiconductor metrology based on hyperspectral imaging
KR102606269B1 (ko) * 2019-03-28 2023-11-29 하마마츠 포토닉스 가부시키가이샤 검사 장치 및 검사 방법

Also Published As

Publication number Publication date
WO2022097726A1 (ja) 2022-05-12
CN116457642A (zh) 2023-07-18
KR20230079215A (ko) 2023-06-05

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240625