JPWO2022071226A1 - - Google Patents
Info
- Publication number
- JPWO2022071226A1 JPWO2022071226A1 JP2022553954A JP2022553954A JPWO2022071226A1 JP WO2022071226 A1 JPWO2022071226 A1 JP WO2022071226A1 JP 2022553954 A JP2022553954 A JP 2022553954A JP 2022553954 A JP2022553954 A JP 2022553954A JP WO2022071226 A1 JPWO2022071226 A1 JP WO2022071226A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
- B32B15/088—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising polyamides
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
- C08F290/14—Polymers provided for in subclass C08G
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
- C08F290/14—Polymers provided for in subclass C08G
- C08F290/145—Polyamides; Polyesteramides; Polyimides
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/22—Polybenzoxazoles
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3412—Heterocyclic compounds having nitrogen in the ring having one nitrogen atom in the ring
- C08K5/3415—Five-membered rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
- C08L71/02—Polyalkylene oxides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/45—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their insulating parts
- H10W20/48—Insulating materials thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Laminated Bodies (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020164047 | 2020-09-29 | ||
| JP2020164047 | 2020-09-29 | ||
| PCT/JP2021/035395 WO2022071226A1 (ja) | 2020-09-29 | 2021-09-27 | 樹脂組成物、硬化物、積層体、硬化物の製造方法、及び、半導体デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022071226A1 true JPWO2022071226A1 (https=) | 2022-04-07 |
| JP7558293B2 JP7558293B2 (ja) | 2024-09-30 |
Family
ID=80951639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022553954A Active JP7558293B2 (ja) | 2020-09-29 | 2021-09-27 | 樹脂組成物、硬化物、積層体、硬化物の製造方法、及び、半導体デバイス |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7558293B2 (https=) |
| KR (1) | KR102857827B1 (https=) |
| TW (1) | TWI904246B (https=) |
| WO (1) | WO2022071226A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2024070713A1 (https=) * | 2022-09-30 | 2024-04-04 | ||
| TWI886465B (zh) * | 2023-04-12 | 2025-06-11 | 奇美實業股份有限公司 | 感光性樹脂組成物、硬化膜圖案及其製作方法 |
| CN118878824B (zh) * | 2024-08-19 | 2025-09-16 | 湖南大学 | 一种紫外阻隔性聚酰亚胺树脂及其制备方法和应用 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03271272A (ja) * | 1990-03-20 | 1991-12-03 | Hitachi Chem Co Ltd | 重合性イミド単量体及びその製造法並びに光硬化性組成物 |
| JP2003026727A (ja) * | 2001-07-19 | 2003-01-29 | Hitachi Chemical Dupont Microsystems Ltd | 重合性イミド単量体及びその製造方法、光硬化性組成物並びに半導体チップ |
| JP2004189768A (ja) * | 2002-12-06 | 2004-07-08 | Hitachi Chemical Dupont Microsystems Ltd | 重合性イミド単量体及びその製造法並びに光硬化性組成物 |
| JP2005320411A (ja) * | 2004-05-07 | 2005-11-17 | Hitachi Chemical Dupont Microsystems Ltd | 重合性イミド単量体及びその製造法並びに光硬化性組成物 |
| JP2006133568A (ja) * | 2004-11-08 | 2006-05-25 | Kyocera Chemical Corp | 感光性重合体組成物およびパターン形成方法 |
| WO2015141618A1 (ja) * | 2014-03-17 | 2015-09-24 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物、硬化レリーフパターンの製造方法、並びに半導体装置 |
| JP2018160665A (ja) * | 2017-03-22 | 2018-10-11 | 旭化成株式会社 | 半導体装置、及びその製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07300458A (ja) | 1994-04-28 | 1995-11-14 | Three Bond Co Ltd | 重合性イミド化合物及び光硬化性組成物 |
| JP2002148804A (ja) * | 2000-11-08 | 2002-05-22 | Nitto Denko Corp | 感光性樹脂組成物および回路基板 |
| JP4789657B2 (ja) | 2006-03-13 | 2011-10-12 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物 |
| JP5814749B2 (ja) * | 2011-11-10 | 2015-11-17 | 日東電工株式会社 | ポリイミド前駆体組成物およびそれを用いた配線回路基板 |
-
2021
- 2021-09-24 TW TW110135438A patent/TWI904246B/zh active
- 2021-09-27 KR KR1020237010408A patent/KR102857827B1/ko active Active
- 2021-09-27 WO PCT/JP2021/035395 patent/WO2022071226A1/ja not_active Ceased
- 2021-09-27 JP JP2022553954A patent/JP7558293B2/ja active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03271272A (ja) * | 1990-03-20 | 1991-12-03 | Hitachi Chem Co Ltd | 重合性イミド単量体及びその製造法並びに光硬化性組成物 |
| JP2003026727A (ja) * | 2001-07-19 | 2003-01-29 | Hitachi Chemical Dupont Microsystems Ltd | 重合性イミド単量体及びその製造方法、光硬化性組成物並びに半導体チップ |
| JP2004189768A (ja) * | 2002-12-06 | 2004-07-08 | Hitachi Chemical Dupont Microsystems Ltd | 重合性イミド単量体及びその製造法並びに光硬化性組成物 |
| JP2005320411A (ja) * | 2004-05-07 | 2005-11-17 | Hitachi Chemical Dupont Microsystems Ltd | 重合性イミド単量体及びその製造法並びに光硬化性組成物 |
| JP2006133568A (ja) * | 2004-11-08 | 2006-05-25 | Kyocera Chemical Corp | 感光性重合体組成物およびパターン形成方法 |
| WO2015141618A1 (ja) * | 2014-03-17 | 2015-09-24 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物、硬化レリーフパターンの製造方法、並びに半導体装置 |
| JP2018160665A (ja) * | 2017-03-22 | 2018-10-11 | 旭化成株式会社 | 半導体装置、及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202225268A (zh) | 2022-07-01 |
| TWI904246B (zh) | 2025-11-11 |
| KR20230057444A (ko) | 2023-04-28 |
| KR102857827B1 (ko) | 2025-09-10 |
| JP7558293B2 (ja) | 2024-09-30 |
| WO2022071226A1 (ja) | 2022-04-07 |
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