JPWO2022065273A1 - - Google Patents

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Publication number
JPWO2022065273A1
JPWO2022065273A1 JP2022551976A JP2022551976A JPWO2022065273A1 JP WO2022065273 A1 JPWO2022065273 A1 JP WO2022065273A1 JP 2022551976 A JP2022551976 A JP 2022551976A JP 2022551976 A JP2022551976 A JP 2022551976A JP WO2022065273 A1 JPWO2022065273 A1 JP WO2022065273A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022551976A
Other versions
JP7428819B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022065273A1 publication Critical patent/JPWO2022065273A1/ja
Application granted granted Critical
Publication of JP7428819B2 publication Critical patent/JP7428819B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0008—Industrial image inspection checking presence/absence
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774—Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00—Scenes; Scene-specific elements
    • G06V20/70—Labelling scene content, e.g. deriving syntactic or semantic representations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8883—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges involving the calculation of gauges, generating models
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Multimedia (AREA)
  • Pathology (AREA)
  • Signal Processing (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Quality & Reliability (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Artificial Intelligence (AREA)
  • Computational Linguistics (AREA)
  • Computing Systems (AREA)
  • Databases & Information Systems (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)
JP2022551976A 2020-09-25 2021-09-21 外観検査のためのモデル作成装置及び外観検査装置 Active JP7428819B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020160596 2020-09-25
JP2020160596 2020-09-25
PCT/JP2021/034499 WO2022065273A1 (ja) 2020-09-25 2021-09-21 外観検査のためのモデル作成装置及び外観検査装置

Publications (2)

Publication Number Publication Date
JPWO2022065273A1 true JPWO2022065273A1 (ja) 2022-03-31
JP7428819B2 JP7428819B2 (ja) 2024-02-06

Family

ID=80846493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022551976A Active JP7428819B2 (ja) 2020-09-25 2021-09-21 外観検査のためのモデル作成装置及び外観検査装置

Country Status (5)

Country Link
US (1) US20230386014A1 (ja)
JP (1) JP7428819B2 (ja)
CN (1) CN116194954A (ja)
DE (1) DE112021005018T5 (ja)
WO (1) WO2022065273A1 (ja)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014190821A (ja) 2013-03-27 2014-10-06 Dainippon Screen Mfg Co Ltd 欠陥検出装置および欠陥検出方法
JP6792842B2 (ja) * 2017-06-06 2020-12-02 株式会社デンソー 外観検査装置、変換データ生成装置、及びプログラム
US10789703B2 (en) * 2018-03-19 2020-09-29 Kla-Tencor Corporation Semi-supervised anomaly detection in scanning electron microscope images
KR102638267B1 (ko) * 2018-12-03 2024-02-21 삼성전자주식회사 반도체 웨이퍼 불량 분석 시스템 및 그것의 동작 방법
JP7287791B2 (ja) * 2019-02-01 2023-06-06 株式会社キーエンス 画像検査装置
JP7176965B2 (ja) * 2019-02-01 2022-11-22 株式会社キーエンス 画像検査装置
WO2020184069A1 (ja) 2019-03-08 2020-09-17 日本電気株式会社 画像処理方法、画像処理装置、プログラム
JP7356292B2 (ja) 2019-03-15 2023-10-04 日鉄テックスエンジ株式会社 画像処理装置、画像処理方法及び画像処理プログラム

Also Published As

Publication number Publication date
US20230386014A1 (en) 2023-11-30
JP7428819B2 (ja) 2024-02-06
CN116194954A (zh) 2023-05-30
WO2022065273A1 (ja) 2022-03-31
DE112021005018T5 (de) 2023-07-27

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