JPWO2022049979A1 - - Google Patents
Info
- Publication number
- JPWO2022049979A1 JPWO2022049979A1 JP2022546180A JP2022546180A JPWO2022049979A1 JP WO2022049979 A1 JPWO2022049979 A1 JP WO2022049979A1 JP 2022546180 A JP2022546180 A JP 2022546180A JP 2022546180 A JP2022546180 A JP 2022546180A JP WO2022049979 A1 JPWO2022049979 A1 JP WO2022049979A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020148206 | 2020-09-03 | ||
| PCT/JP2021/028987 WO2022049979A1 (en) | 2020-09-03 | 2021-08-04 | Inspection device and inspection method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022049979A1 true JPWO2022049979A1 (en) | 2022-03-10 |
Family
ID=80492042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022546180A Pending JPWO2022049979A1 (en) | 2020-09-03 | 2021-08-04 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2022049979A1 (en) |
| WO (1) | WO2022049979A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023199549A1 (en) * | 2022-04-13 | 2023-10-19 | 日本製鉄株式会社 | Surface inspection device and surface inspection method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016121628A1 (en) * | 2015-01-28 | 2016-08-04 | 東レエンジニアリング株式会社 | Defect inspection method and defect inspection device for wide-gap semiconductor substrates |
| JP6688184B2 (en) * | 2016-07-20 | 2020-04-28 | 東レエンジニアリング株式会社 | Wide gap semiconductor substrate defect inspection system |
-
2021
- 2021-08-04 WO PCT/JP2021/028987 patent/WO2022049979A1/en active Application Filing
- 2021-08-04 JP JP2022546180A patent/JPWO2022049979A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022049979A1 (en) | 2022-03-10 |