JPWO2022024999A1 - - Google Patents
Info
- Publication number
- JPWO2022024999A1 JPWO2022024999A1 JP2022540297A JP2022540297A JPWO2022024999A1 JP WO2022024999 A1 JPWO2022024999 A1 JP WO2022024999A1 JP 2022540297 A JP2022540297 A JP 2022540297A JP 2022540297 A JP2022540297 A JP 2022540297A JP WO2022024999 A1 JPWO2022024999 A1 JP WO2022024999A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/58—SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020130552 | 2020-07-31 | ||
PCT/JP2021/027558 WO2022024999A1 (en) | 2020-07-31 | 2021-07-26 | Atomic force microscope and distance control method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2022024999A1 true JPWO2022024999A1 (en) | 2022-02-03 |
Family
ID=80036450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022540297A Pending JPWO2022024999A1 (en) | 2020-07-31 | 2021-07-26 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2022024999A1 (en) |
WO (1) | WO2022024999A1 (en) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0887328A (en) * | 1994-09-14 | 1996-04-02 | Res Dev Corp Of Japan | Optical operation method |
JP2003114185A (en) * | 2001-10-04 | 2003-04-18 | Communication Research Laboratory | Apparatus and method for probe position fixation-type measurement of very small force |
JP4876216B2 (en) * | 2005-01-06 | 2012-02-15 | 国立大学法人北海道大学 | Surface position measuring method and surface position measuring apparatus |
US8904560B2 (en) * | 2007-05-07 | 2014-12-02 | Bruker Nano, Inc. | Closed loop controller and method for fast scanning probe microscopy |
US8239968B2 (en) * | 2009-07-06 | 2012-08-07 | Georgia Tech Research Corporation | Athermal atomic force microscope probes |
JP5958642B2 (en) * | 2013-02-26 | 2016-08-02 | 株式会社島津製作所 | Surface charge density measuring device using atomic force microscope |
-
2021
- 2021-07-26 JP JP2022540297A patent/JPWO2022024999A1/ja active Pending
- 2021-07-26 WO PCT/JP2021/027558 patent/WO2022024999A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2022024999A1 (en) | 2022-02-03 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20220726 |