JPWO2022024888A1 - - Google Patents

Info

Publication number
JPWO2022024888A1
JPWO2022024888A1 JP2022540228A JP2022540228A JPWO2022024888A1 JP WO2022024888 A1 JPWO2022024888 A1 JP WO2022024888A1 JP 2022540228 A JP2022540228 A JP 2022540228A JP 2022540228 A JP2022540228 A JP 2022540228A JP WO2022024888 A1 JPWO2022024888 A1 JP WO2022024888A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022540228A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022024888A1 publication Critical patent/JPWO2022024888A1/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
JP2022540228A 2020-07-27 2021-07-20 Pending JPWO2022024888A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020126831 2020-07-27
PCT/JP2021/027215 WO2022024888A1 (ja) 2020-07-27 2021-07-20 プローブガイド

Publications (1)

Publication Number Publication Date
JPWO2022024888A1 true JPWO2022024888A1 (zh) 2022-02-03

Family

ID=80036854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022540228A Pending JPWO2022024888A1 (zh) 2020-07-27 2021-07-20

Country Status (3)

Country Link
JP (1) JPWO2022024888A1 (zh)
TW (1) TWI814040B (zh)
WO (1) WO2022024888A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI831307B (zh) * 2022-07-26 2024-02-01 思達科技股份有限公司 導板結構及探針陣列

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000121673A (ja) * 1998-08-12 2000-04-28 Tokyo Electron Ltd コンタクタ
JP2003179133A (ja) * 2001-12-11 2003-06-27 Ulvac Japan Ltd バリアメタル膜形成方法及び配線形成方法
JP2014174145A (ja) * 2013-03-13 2014-09-22 Shinko Electric Ind Co Ltd プローブガイド板及びその製造方法
JP2014232030A (ja) * 2013-05-28 2014-12-11 新光電気工業株式会社 プローブガイド板及びその製造方法、半導体検査装置
JP2017096796A (ja) * 2015-11-25 2017-06-01 新光電気工業株式会社 プローブガイド板及びその製造方法とプローブ装置
JP2017150864A (ja) * 2016-02-23 2017-08-31 日本電子材料株式会社 プローブガイド、プローブカード及びプローブガイドの製造方法
JP2017201321A (ja) * 2017-06-29 2017-11-09 日本電子材料株式会社 プローブカード用ガイド板およびプローブカード用ガイド板の製造方法
JP2019005752A (ja) * 2018-10-02 2019-01-17 株式会社ノリタケカンパニーリミテド 分離膜用片端封止型筒状セラミックス基材およびその製造方法
WO2019093370A1 (ja) * 2017-11-10 2019-05-16 株式会社フェローテックセラミックス セラミックス、プローブ案内部品、プローブカードおよびパッケージ検査用ソケット

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000121673A (ja) * 1998-08-12 2000-04-28 Tokyo Electron Ltd コンタクタ
JP2003179133A (ja) * 2001-12-11 2003-06-27 Ulvac Japan Ltd バリアメタル膜形成方法及び配線形成方法
JP2014174145A (ja) * 2013-03-13 2014-09-22 Shinko Electric Ind Co Ltd プローブガイド板及びその製造方法
JP2014232030A (ja) * 2013-05-28 2014-12-11 新光電気工業株式会社 プローブガイド板及びその製造方法、半導体検査装置
JP2017096796A (ja) * 2015-11-25 2017-06-01 新光電気工業株式会社 プローブガイド板及びその製造方法とプローブ装置
JP2017150864A (ja) * 2016-02-23 2017-08-31 日本電子材料株式会社 プローブガイド、プローブカード及びプローブガイドの製造方法
JP2017201321A (ja) * 2017-06-29 2017-11-09 日本電子材料株式会社 プローブカード用ガイド板およびプローブカード用ガイド板の製造方法
WO2019093370A1 (ja) * 2017-11-10 2019-05-16 株式会社フェローテックセラミックス セラミックス、プローブ案内部品、プローブカードおよびパッケージ検査用ソケット
JP2019005752A (ja) * 2018-10-02 2019-01-17 株式会社ノリタケカンパニーリミテド 分離膜用片端封止型筒状セラミックス基材およびその製造方法

Also Published As

Publication number Publication date
TWI814040B (zh) 2023-09-01
TW202219520A (zh) 2022-05-16
WO2022024888A1 (ja) 2022-02-03

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