JPWO2022003765A1 - - Google Patents

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Publication number
JPWO2022003765A1
JPWO2022003765A1 JP2022533267A JP2022533267A JPWO2022003765A1 JP WO2022003765 A1 JPWO2022003765 A1 JP WO2022003765A1 JP 2022533267 A JP2022533267 A JP 2022533267A JP 2022533267 A JP2022533267 A JP 2022533267A JP WO2022003765 A1 JPWO2022003765 A1 JP WO2022003765A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022533267A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of JPWO2022003765A1 publication Critical patent/JPWO2022003765A1/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
JP2022533267A 2020-06-29 2020-06-29 Pending JPWO2022003765A1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/025491 WO2022003765A1 (ja) 2020-06-29 2020-06-29 光導波路およびその作製方法

Publications (1)

Publication Number Publication Date
JPWO2022003765A1 true JPWO2022003765A1 (ja) 2022-01-06

Family

ID=79315768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022533267A Pending JPWO2022003765A1 (ja) 2020-06-29 2020-06-29

Country Status (2)

Country Link
JP (1) JPWO2022003765A1 (ja)
WO (1) WO2022003765A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080253728A1 (en) * 2006-09-07 2008-10-16 Massachusetts Institute Of Technology Microphotonic waveguide including core/cladding interface layer
JP2019203915A (ja) * 2018-05-21 2019-11-28 日本電信電話株式会社 光集積デバイスおよびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080253728A1 (en) * 2006-09-07 2008-10-16 Massachusetts Institute Of Technology Microphotonic waveguide including core/cladding interface layer
JP2019203915A (ja) * 2018-05-21 2019-11-28 日本電信電話株式会社 光集積デバイスおよびその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DORIS K. T. NG ET AL.: "Exploring High Refractive Index Silicon-Rich Nitride Films by Low-Temperature Inductively Coupled Pl", ACS APPLIED MATERIALS & INTERFACES, vol. 7, no. 39, JPN6020034848, 16 September 2015 (2015-09-16), pages 21884 - 21889, XP055897635, ISSN: 0005083213, DOI: 10.1021/acsami.5b06329 *

Also Published As

Publication number Publication date
WO2022003765A1 (ja) 2022-01-06

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