JPWO2021235082A1 - - Google Patents

Info

Publication number
JPWO2021235082A1
JPWO2021235082A1 JP2022524292A JP2022524292A JPWO2021235082A1 JP WO2021235082 A1 JPWO2021235082 A1 JP WO2021235082A1 JP 2022524292 A JP2022524292 A JP 2022524292A JP 2022524292 A JP2022524292 A JP 2022524292A JP WO2021235082 A1 JPWO2021235082 A1 JP WO2021235082A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022524292A
Other languages
Japanese (ja)
Other versions
JP7327663B2 (en
JPWO2021235082A5 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021235082A1 publication Critical patent/JPWO2021235082A1/ja
Publication of JPWO2021235082A5 publication Critical patent/JPWO2021235082A5/ja
Application granted granted Critical
Publication of JP7327663B2 publication Critical patent/JP7327663B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
JP2022524292A 2020-05-21 2021-03-24 probe Active JP7327663B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020088953 2020-05-21
JP2020088953 2020-05-21
PCT/JP2021/012314 WO2021235082A1 (en) 2020-05-21 2021-03-24 Probe

Publications (3)

Publication Number Publication Date
JPWO2021235082A1 true JPWO2021235082A1 (en) 2021-11-25
JPWO2021235082A5 JPWO2021235082A5 (en) 2022-10-19
JP7327663B2 JP7327663B2 (en) 2023-08-16

Family

ID=78708416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022524292A Active JP7327663B2 (en) 2020-05-21 2021-03-24 probe

Country Status (3)

Country Link
JP (1) JP7327663B2 (en)
CN (1) CN218788053U (en)
WO (1) WO2021235082A1 (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH118003A (en) * 1997-06-13 1999-01-12 Sony Corp Contact type connection device
US6700397B2 (en) * 2000-07-13 2004-03-02 The Micromanipulator Company, Inc. Triaxial probe assembly
JP2008151551A (en) * 2006-12-15 2008-07-03 Matsushita Electric Ind Co Ltd Contact jig and fixture for inspecting semiconductor device and method for inspecting semiconductor device
JP2009103655A (en) * 2007-10-25 2009-05-14 Jst Mfg Co Ltd Coaxial spring contact probe
JP5370323B2 (en) * 2010-09-22 2013-12-18 富士電機株式会社 Probe unit
JP2013101043A (en) * 2011-11-08 2013-05-23 Renesas Electronics Corp Method for manufacturing semiconductor device
KR101897996B1 (en) 2014-11-07 2018-09-12 가부시키가이샤 무라타 세이사쿠쇼 Probe
JP2019138768A (en) * 2018-02-09 2019-08-22 株式会社村田製作所 probe

Also Published As

Publication number Publication date
JP7327663B2 (en) 2023-08-16
CN218788053U (en) 2023-04-04
WO2021235082A1 (en) 2021-11-25

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