JPWO2021200569A1 - - Google Patents
Info
- Publication number
- JPWO2021200569A1 JPWO2021200569A1 JP2022512078A JP2022512078A JPWO2021200569A1 JP WO2021200569 A1 JPWO2021200569 A1 JP WO2021200569A1 JP 2022512078 A JP2022512078 A JP 2022512078A JP 2022512078 A JP2022512078 A JP 2022512078A JP WO2021200569 A1 JPWO2021200569 A1 JP WO2021200569A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
Landscapes
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020063788 | 2020-03-31 | ||
| PCT/JP2021/012619 WO2021200569A1 (ja) | 2020-03-31 | 2021-03-25 | センサデバイスおよびその製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2021200569A1 true JPWO2021200569A1 (zh) | 2021-10-07 |
Family
ID=77928833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022512078A Pending JPWO2021200569A1 (zh) | 2020-03-31 | 2021-03-25 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2021200569A1 (zh) |
| WO (1) | WO2021200569A1 (zh) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010065517A1 (en) * | 2008-12-01 | 2010-06-10 | The Trustees Of Columbia University In The City Of New York | Electromechanical devices and methods for fabrication of the same |
| KR20130134538A (ko) * | 2012-05-31 | 2013-12-10 | 연세대학교 산학협력단 | 성능조절이 가능한 초 고감도 그라핀 센서 및 그 제조방법 |
| CN102862949B (zh) * | 2012-09-07 | 2014-11-26 | 清华大学 | 基于倒置工艺的双臂梁mems器件及其形成方法 |
| JP2015019142A (ja) * | 2013-07-09 | 2015-01-29 | 日本電波工業株式会社 | 圧電デバイス及び圧電デバイスの製造方法 |
| JP6564156B2 (ja) * | 2017-03-28 | 2019-08-21 | 富士フイルム株式会社 | ガス検知素子及びその製造方法 |
-
2021
- 2021-03-25 JP JP2022512078A patent/JPWO2021200569A1/ja active Pending
- 2021-03-25 WO PCT/JP2021/012619 patent/WO2021200569A1/ja active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021200569A1 (ja) | 2021-10-07 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20220707 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20240304 |