JPWO2021131966A1 - - Google Patents
Info
- Publication number
- JPWO2021131966A1 JPWO2021131966A1 JP2021567341A JP2021567341A JPWO2021131966A1 JP WO2021131966 A1 JPWO2021131966 A1 JP WO2021131966A1 JP 2021567341 A JP2021567341 A JP 2021567341A JP 2021567341 A JP2021567341 A JP 2021567341A JP WO2021131966 A1 JPWO2021131966 A1 JP WO2021131966A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Led Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019231909 | 2019-12-23 | ||
| JP2019231909 | 2019-12-23 | ||
| PCT/JP2020/046971 WO2021131966A1 (ja) | 2019-12-23 | 2020-12-16 | ＡｌＮ積層板 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021131966A1 true JPWO2021131966A1 (https=) | 2021-07-01 |
| JPWO2021131966A5 JPWO2021131966A5 (https=) | 2022-08-19 |
| JP7620571B2 JP7620571B2 (ja) | 2025-01-23 |
Family
ID=76575910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021567341A Active JP7620571B2 (ja) | 2019-12-23 | 2020-12-16 | ＡｌＮ積層板 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7620571B2 (https=) |
| WO (1) | WO2021131966A1 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007506635A (ja) * | 2003-09-26 | 2007-03-22 | サントル ナショナル ドゥ ラ ルシェルシュ シアンティフィック（セーエヌエールエス） | 犠牲層上のヘテロエピタキシによるｉｉｉ族窒化物の自立基板の実現方法 |
| JP2009018975A (ja) * | 2007-07-13 | 2009-01-29 | Ngk Insulators Ltd | 非極性面ｉｉｉ族窒化物単結晶の製造方法 |
| JP2011020900A (ja) * | 2009-07-16 | 2011-02-03 | Tokuyama Corp | 窒化アルミニウム単結晶層を有する積層体の製造方法、該製法で製造される積層体、該積層体を用いた窒化アルミニウム単結晶基板の製造方法、および、窒化アルミニウム単結晶基板 |
| JP2015040136A (ja) * | 2013-08-20 | 2015-03-02 | 住友電気工業株式会社 | Ｉｉｉ族窒化物膜の製造方法およびｉｉｉ族窒化物半導体デバイスの製造方法 |
-
2020
- 2020-12-16 JP JP2021567341A patent/JP7620571B2/ja active Active
- 2020-12-16 WO PCT/JP2020/046971 patent/WO2021131966A1/ja not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007506635A (ja) * | 2003-09-26 | 2007-03-22 | サントル ナショナル ドゥ ラ ルシェルシュ シアンティフィック（セーエヌエールエス） | 犠牲層上のヘテロエピタキシによるｉｉｉ族窒化物の自立基板の実現方法 |
| JP2009018975A (ja) * | 2007-07-13 | 2009-01-29 | Ngk Insulators Ltd | 非極性面ｉｉｉ族窒化物単結晶の製造方法 |
| JP2011020900A (ja) * | 2009-07-16 | 2011-02-03 | Tokuyama Corp | 窒化アルミニウム単結晶層を有する積層体の製造方法、該製法で製造される積層体、該積層体を用いた窒化アルミニウム単結晶基板の製造方法、および、窒化アルミニウム単結晶基板 |
| JP2015040136A (ja) * | 2013-08-20 | 2015-03-02 | 住友電気工業株式会社 | Ｉｉｉ族窒化物膜の製造方法およびｉｉｉ族窒化物半導体デバイスの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021131966A1 (ja) | 2021-07-01 |
| JP7620571B2 (ja) | 2025-01-23 |
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