JPWO2021112081A1 - - Google Patents

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Publication number
JPWO2021112081A1
JPWO2021112081A1 JP2021562656A JP2021562656A JPWO2021112081A1 JP WO2021112081 A1 JPWO2021112081 A1 JP WO2021112081A1 JP 2021562656 A JP2021562656 A JP 2021562656A JP 2021562656 A JP2021562656 A JP 2021562656A JP WO2021112081 A1 JPWO2021112081 A1 JP WO2021112081A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021562656A
Other versions
JP7255920B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of JPWO2021112081A1 publication Critical patent/JPWO2021112081A1/ja
Application granted granted Critical
Publication of JP7255920B2 publication Critical patent/JP7255920B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/34Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
    • H01J25/42Tubes in which an electron stream interacts with a wave travelling along a delay line or equivalent sequence of impedance elements, and with a magnet system producing an H-field crossing the E-field
    • H01J25/44Tubes in which an electron stream interacts with a wave travelling along a delay line or equivalent sequence of impedance elements, and with a magnet system producing an H-field crossing the E-field the forward travelling wave being utilised
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02Electrodes; Magnetic control means; Screens
    • H01J23/08Focusing arrangements, e.g. for concentrating stream of electrons, for preventing spreading of stream
    • H01J23/087Magnetic focusing arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02Electrodes; Magnetic control means; Screens
    • H01J23/027Collectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02Electrodes; Magnetic control means; Screens
    • H01J23/06Electron or ion guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J23/00Details of transit-time tubes of the types covered by group H01J25/00
    • H01J23/02Electrodes; Magnetic control means; Screens
    • H01J23/06Electron or ion guns
    • H01J23/065Electron or ion guns producing a solid cylindrical beam
JP2021562656A 2019-12-03 2020-12-01 マイクロ波管及びその制御方法 Active JP7255920B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019218548 2019-12-03
JP2019218548 2019-12-03
PCT/JP2020/044669 WO2021112081A1 (ja) 2019-12-03 2020-12-01 マイクロ波管及びその制御方法

Publications (2)

Publication Number Publication Date
JPWO2021112081A1 true JPWO2021112081A1 (ja) 2021-06-10
JP7255920B2 JP7255920B2 (ja) 2023-04-11

Family

ID=76221604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021562656A Active JP7255920B2 (ja) 2019-12-03 2020-12-01 マイクロ波管及びその制御方法

Country Status (6)

Country Link
US (1) US11798770B2 (ja)
EP (1) EP4071782A4 (ja)
JP (1) JP7255920B2 (ja)
CN (1) CN114846573A (ja)
CA (1) CA3163500A1 (ja)
WO (1) WO2021112081A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5694005A (en) * 1995-09-14 1997-12-02 Hughes Aircraft Company Plasma-and-magnetic field-assisted, high-power microwave source and method
JP2000243305A (ja) * 1999-02-24 2000-09-08 Nec Corp 電界放射冷陰極電子銃及びこれを用いたマイクロ波管
JP2007273158A (ja) * 2006-03-30 2007-10-18 Mitsubishi Electric Corp 電子管及び進行波管
JP2019186104A (ja) * 2018-04-12 2019-10-24 日新イオン機器株式会社 イオン源、イオンビーム照射装置及びイオン源の運転方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1090777B (de) * 1959-06-11 1960-10-13 Telefunken Gmbh Magnetische Korrekturvorrichtung fuer Elektronenstrahlroehren, insbesondere Wanderfeldroehren
JPH09180641A (ja) 1995-12-27 1997-07-11 Toshiba Corp 多空胴クライストロン
JPH09237582A (ja) 1996-02-29 1997-09-09 Mitsubishi Electric Corp ジャイロトロン装置
JP2007234344A (ja) 2006-02-28 2007-09-13 Toshiba Corp マイクロ波管
JP2007267083A (ja) 2006-03-29 2007-10-11 Noritsu Koki Co Ltd サーキュレータ、プラズマ発生装置、及びワーク処理装置
TWI726859B (zh) 2015-01-05 2021-05-11 美商恩特葛瑞斯股份有限公司 後化學機械拋光配方及使用之方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5694005A (en) * 1995-09-14 1997-12-02 Hughes Aircraft Company Plasma-and-magnetic field-assisted, high-power microwave source and method
JP2000243305A (ja) * 1999-02-24 2000-09-08 Nec Corp 電界放射冷陰極電子銃及びこれを用いたマイクロ波管
JP2007273158A (ja) * 2006-03-30 2007-10-18 Mitsubishi Electric Corp 電子管及び進行波管
JP2019186104A (ja) * 2018-04-12 2019-10-24 日新イオン機器株式会社 イオン源、イオンビーム照射装置及びイオン源の運転方法

Also Published As

Publication number Publication date
US20220399178A1 (en) 2022-12-15
CN114846573A (zh) 2022-08-02
CA3163500A1 (en) 2021-06-10
US11798770B2 (en) 2023-10-24
WO2021112081A1 (ja) 2021-06-10
EP4071782A4 (en) 2023-12-13
EP4071782A1 (en) 2022-10-12
JP7255920B2 (ja) 2023-04-11

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