JPWO2021100171A1 - - Google Patents

Info

Publication number
JPWO2021100171A1
JPWO2021100171A1 JP2021558117A JP2021558117A JPWO2021100171A1 JP WO2021100171 A1 JPWO2021100171 A1 JP WO2021100171A1 JP 2021558117 A JP2021558117 A JP 2021558117A JP 2021558117 A JP2021558117 A JP 2021558117A JP WO2021100171 A1 JPWO2021100171 A1 JP WO2021100171A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021558117A
Other versions
JPWO2021100171A5 (ja
JP7290747B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021100171A1 publication Critical patent/JPWO2021100171A1/ja
Publication of JPWO2021100171A5 publication Critical patent/JPWO2021100171A5/ja
Application granted granted Critical
Publication of JP7290747B2 publication Critical patent/JP7290747B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/248—Components associated with the control of the tube
    • H01J2237/2485—Electric or electronic means
    • H01J2237/2487—Electric or electronic means using digital signal processors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2021558117A 2019-11-21 2019-11-21 走査電子顕微鏡 Active JP7290747B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/045622 WO2021100171A1 (ja) 2019-11-21 2019-11-21 走査電子顕微鏡

Publications (3)

Publication Number Publication Date
JPWO2021100171A1 true JPWO2021100171A1 (ja) 2021-05-27
JPWO2021100171A5 JPWO2021100171A5 (ja) 2022-08-10
JP7290747B2 JP7290747B2 (ja) 2023-06-13

Family

ID=75980475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021558117A Active JP7290747B2 (ja) 2019-11-21 2019-11-21 走査電子顕微鏡

Country Status (3)

Country Link
US (1) US20220415609A1 (ja)
JP (1) JP7290747B2 (ja)
WO (1) WO2021100171A1 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012028279A (ja) * 2010-07-28 2012-02-09 Hitachi High-Technologies Corp 荷電粒子線装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012028279A (ja) * 2010-07-28 2012-02-09 Hitachi High-Technologies Corp 荷電粒子線装置

Also Published As

Publication number Publication date
JP7290747B2 (ja) 2023-06-13
US20220415609A1 (en) 2022-12-29
WO2021100171A1 (ja) 2021-05-27

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