JPWO2021059469A1 - - Google Patents

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Publication number
JPWO2021059469A1
JPWO2021059469A1 JP2021548108A JP2021548108A JPWO2021059469A1 JP WO2021059469 A1 JPWO2021059469 A1 JP WO2021059469A1 JP 2021548108 A JP2021548108 A JP 2021548108A JP 2021548108 A JP2021548108 A JP 2021548108A JP WO2021059469 A1 JPWO2021059469 A1 JP WO2021059469A1
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JP
Japan
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Application number
JP2021548108A
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JP7461961B2 (ja
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/341—Arrangements for providing coaxial protecting fluids

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
JP2021548108A 2019-09-27 2019-09-27 プラズマ発生装置、およびプラズマ処理方法 Active JP7461961B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/038099 WO2021059469A1 (ja) 2019-09-27 2019-09-27 プラズマ発生装置、およびプラズマ処理方法

Publications (2)

Publication Number Publication Date
JPWO2021059469A1 true JPWO2021059469A1 (ja) 2021-04-01
JP7461961B2 JP7461961B2 (ja) 2024-04-04

Family

ID=75165628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021548108A Active JP7461961B2 (ja) 2019-09-27 2019-09-27 プラズマ発生装置、およびプラズマ処理方法

Country Status (4)

Country Link
EP (1) EP4037440A4 (ja)
JP (1) JP7461961B2 (ja)
CN (1) CN114430935A (ja)
WO (1) WO2021059469A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126981U (ja) * 1980-02-22 1981-09-26
JPS57165370U (ja) * 1981-04-09 1982-10-18
JPH05174994A (ja) * 1991-12-24 1993-07-13 Origin Electric Co Ltd プラズマア−ク装置およびパイロットア−ク発生方法
WO2019180839A1 (ja) * 2018-03-20 2019-09-26 株式会社Ｆｕｊｉ プラズマ装置、プラズマ生成方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE795891A (fr) * 1972-02-23 1973-06-18 Electricity Council Perfectionnements aux chalumeaux a plasma
US5220150A (en) * 1991-05-03 1993-06-15 Regents Of The University Of Minnesota Plasma spray torch with hot anode and gas shroud
JPH08294779A (ja) * 1995-04-21 1996-11-12 Koike Sanso Kogyo Co Ltd プラズマトーチのノズル
US7737383B2 (en) * 2006-08-25 2010-06-15 Thermal Dynamics Corporation Contoured shield orifice for a plasma arc torch
JP2008153147A (ja) * 2006-12-20 2008-07-03 Seiko Epson Corp プラズマ処理装置
JP5275092B2 (ja) * 2009-03-12 2013-08-28 長野日本無線株式会社 プラズマ処理装置
US10131013B2 (en) 2014-03-19 2018-11-20 Taiyo Nippon Sanso Corporation Non-transferred plasma arc system, conversion adapter kit, and non-transferred plasma arc torch
WO2018029845A1 (ja) * 2016-08-11 2018-02-15 富士機械製造株式会社 プラズマ発生装置、およびプラズマ照射方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126981U (ja) * 1980-02-22 1981-09-26
JPS57165370U (ja) * 1981-04-09 1982-10-18
JPH05174994A (ja) * 1991-12-24 1993-07-13 Origin Electric Co Ltd プラズマア−ク装置およびパイロットア−ク発生方法
WO2019180839A1 (ja) * 2018-03-20 2019-09-26 株式会社Ｆｕｊｉ プラズマ装置、プラズマ生成方法

Also Published As

Publication number Publication date
JP7461961B2 (ja) 2024-04-04
WO2021059469A1 (ja) 2021-04-01
EP4037440A1 (en) 2022-08-03
EP4037440A4 (en) 2022-11-16
CN114430935A (zh) 2022-05-03

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