JPWO2021039712A1 - - Google Patents

Info

Publication number
JPWO2021039712A1
JPWO2021039712A1 JP2021542884A JP2021542884A JPWO2021039712A1 JP WO2021039712 A1 JPWO2021039712 A1 JP WO2021039712A1 JP 2021542884 A JP2021542884 A JP 2021542884A JP 2021542884 A JP2021542884 A JP 2021542884A JP WO2021039712 A1 JPWO2021039712 A1 JP WO2021039712A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021542884A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021039712A1 publication Critical patent/JPWO2021039712A1/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C30/00—Alloys containing less than 50% by weight of each constituent
    • C22C30/02—Alloys containing less than 50% by weight of each constituent containing copper
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/20—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
    • H01F1/22—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
JP2021542884A 2019-08-26 2020-08-24 Pending JPWO2021039712A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019153617 2019-08-26
PCT/JP2020/031824 WO2021039712A1 (en) 2019-08-26 2020-08-24 Fe-si-b-nb-based target

Publications (1)

Publication Number Publication Date
JPWO2021039712A1 true JPWO2021039712A1 (en) 2021-03-04

Family

ID=74684182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021542884A Pending JPWO2021039712A1 (en) 2019-08-26 2020-08-24

Country Status (3)

Country Link
JP (1) JPWO2021039712A1 (en)
TW (1) TWI798580B (en)
WO (1) WO2021039712A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02163911A (en) * 1988-12-16 1990-06-25 Matsushita Electric Ind Co Ltd Soft magnetic alloy film and manufacture thereof
DE69101726T2 (en) * 1990-02-16 1994-08-11 Matsushita Electric Ind Co Ltd Soft magnetic thin layers made of alloy and magnetic heads made of them.
US20070188920A1 (en) * 2006-02-16 2007-08-16 Samsung Electronics Co., Ltd. Microinductor and fabrication method thereof
JP4919162B2 (en) * 2007-04-10 2012-04-18 日立金属株式会社 Fe-Co alloy sputtering target material and method for producing Fe-Co alloy sputtering target material
JP5490556B2 (en) * 2009-03-18 2014-05-14 アルプス電気株式会社 Fe-based soft magnetic alloy powder, method for producing the same, and magnetic sheet using the Fe-based soft magnetic alloy powder
JP5698023B2 (en) * 2011-02-16 2015-04-08 山陽特殊製鋼株式会社 Soft magnetic alloy for magnetic recording, sputtering target material, and magnetic recording medium
JP2018188726A (en) * 2017-04-28 2018-11-29 日立金属株式会社 Sputtering target and production method thereof

Also Published As

Publication number Publication date
WO2021039712A1 (en) 2021-03-04
TW202108797A (en) 2021-03-01
TWI798580B (en) 2023-04-11

Similar Documents

Publication Publication Date Title
BR112021017339A2 (en)
BR112021018450A2 (en)
BR112021017939A2 (en)
BR112021017892A2 (en)
BR112021017738A2 (en)
BR112021017782A2 (en)
BR112021017728A2 (en)
BR112021020258A2 (en)
BR112021017355A2 (en)
BR112021018102A2 (en)
BR112021017637A2 (en)
BR112021008711A2 (en)
BR112021018452A2 (en)
BR112021012348A2 (en)
BR112021018250A2 (en)
BR112021020273A2 (en)
BR112021018084A2 (en)
BR112021018093A2 (en)
BR112021013128A2 (en)
BR112021018484A2 (en)
BR112021017732A2 (en)
BR112021017949A2 (en)
BR112021017983A2 (en)
BR112021017703A2 (en)
JPWO2021039711A1 (en)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230612