JPWO2020217601A1 - - Google Patents

Info

Publication number
JPWO2020217601A1
JPWO2020217601A1 JP2021515787A JP2021515787A JPWO2020217601A1 JP WO2020217601 A1 JPWO2020217601 A1 JP WO2020217601A1 JP 2021515787 A JP2021515787 A JP 2021515787A JP 2021515787 A JP2021515787 A JP 2021515787A JP WO2020217601 A1 JPWO2020217601 A1 JP WO2020217601A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021515787A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020217601A1 publication Critical patent/JPWO2020217601A1/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Flow Control (AREA)
JP2021515787A 2019-04-26 2020-01-15 Pending JPWO2020217601A1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019085102 2019-04-26
PCT/JP2020/000936 WO2020217601A1 (ja) 2019-04-26 2020-01-15 流路形成装置

Publications (1)

Publication Number Publication Date
JPWO2020217601A1 true JPWO2020217601A1 (ko) 2020-10-29

Family

ID=72942070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021515787A Pending JPWO2020217601A1 (ko) 2019-04-26 2020-01-15

Country Status (3)

Country Link
JP (1) JPWO2020217601A1 (ko)
TW (1) TW202040052A (ko)
WO (1) WO2020217601A1 (ko)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5605179A (en) * 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3665708B2 (ja) * 1998-12-10 2005-06-29 シーケーディ株式会社 集積弁
US8196609B2 (en) * 2006-08-23 2012-06-12 Horiba Stec, Co., Ltd. Integrated gas panel apparatus
JP5377513B2 (ja) * 2007-12-27 2013-12-25 ラム リサーチ コーポレーション ショートエッチングレシピのためのガス輸送遅延の解消のための装置、方法、及びプログラム格納デバイス
JP5433660B2 (ja) * 2011-10-12 2014-03-05 Ｃｋｄ株式会社 ガス流量監視システム
JP6404101B2 (ja) * 2013-12-05 2018-10-10 Ckd株式会社 配管継手、流体供給制御装置、及び配管接続構造
JP6193284B2 (ja) * 2015-03-18 2017-09-06 株式会社東芝 流路構造、吸排気部材、及び処理装置

Also Published As

Publication number Publication date
TW202040052A (zh) 2020-11-01
WO2020217601A1 (ja) 2020-10-29

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