JPWO2020194541A1 - - Google Patents

Info

Publication number
JPWO2020194541A1
JPWO2020194541A1 JP2021508497A JP2021508497A JPWO2020194541A1 JP WO2020194541 A1 JPWO2020194541 A1 JP WO2020194541A1 JP 2021508497 A JP2021508497 A JP 2021508497A JP 2021508497 A JP2021508497 A JP 2021508497A JP WO2020194541 A1 JPWO2020194541 A1 JP WO2020194541A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021508497A
Other versions
JP7151873B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020194541A1 publication Critical patent/JPWO2020194541A1/ja
Application granted granted Critical
Publication of JP7151873B2 publication Critical patent/JP7151873B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/64—Computer-aided capture of images, e.g. transfer from script file into camera, check of taken image quality, advice or proposal for image composition or decision on when to take image
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/667—Camera operation mode switching, e.g. between still and video, sport and normal or high- and low-resolution modes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/90—Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws

Landscapes

  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
JP2021508497A 2019-03-26 2019-03-26 検査装置 Active JP7151873B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/012994 WO2020194541A1 (ja) 2019-03-26 2019-03-26 検査装置

Publications (2)

Publication Number Publication Date
JPWO2020194541A1 true JPWO2020194541A1 (ja) 2020-10-01
JP7151873B2 JP7151873B2 (ja) 2022-10-12

Family

ID=72609412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021508497A Active JP7151873B2 (ja) 2019-03-26 2019-03-26 検査装置

Country Status (3)

Country Link
US (1) US11933739B2 (ja)
JP (1) JP7151873B2 (ja)
WO (1) WO2020194541A1 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002162368A (ja) * 2000-09-13 2002-06-07 Nikon Corp 表面検査装置および方法
JP2006322731A (ja) * 2005-05-17 2006-11-30 Olympus Corp 外観検査装置
JP2008298693A (ja) * 2007-06-01 2008-12-11 Panasonic Corp 検査条件決定方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001071323A1 (en) * 2000-03-24 2001-09-27 Olympus Optical Co., Ltd. Apparatus for detecting defect
JP2003270163A (ja) * 2002-03-15 2003-09-25 Dainippon Printing Co Ltd 検査方法および装置
JP2005091049A (ja) * 2003-09-12 2005-04-07 Ccs Inc 画像処理用光照射装置及び画像処理用光照射方法
JP2006300775A (ja) 2005-04-21 2006-11-02 Olympus Corp 外観検査装置
JP4673733B2 (ja) 2005-12-02 2011-04-20 新日本製鐵株式会社 表面検査装置および表面検査方法
JP2007298381A (ja) * 2006-04-28 2007-11-15 Toshiba Corp 画像検出装置および画像検出方法
KR20070106428A (ko) 2006-04-28 2007-11-01 가부시끼가이샤 도시바 기록 매체의 검증 장치 및 검증 방법
JP5843241B2 (ja) * 2013-11-26 2016-01-13 レーザーテック株式会社 検査装置、及び検査方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002162368A (ja) * 2000-09-13 2002-06-07 Nikon Corp 表面検査装置および方法
JP2006322731A (ja) * 2005-05-17 2006-11-30 Olympus Corp 外観検査装置
JP2008298693A (ja) * 2007-06-01 2008-12-11 Panasonic Corp 検査条件決定方法

Also Published As

Publication number Publication date
WO2020194541A1 (ja) 2020-10-01
US11933739B2 (en) 2024-03-19
US20220155238A1 (en) 2022-05-19
JP7151873B2 (ja) 2022-10-12

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