JPWO2020012723A1 - MEMS element and shutter device using it - Google Patents

Abstract

The displacement expansion mechanism 510, which is a MEMS element, includes a substrate 200, a fixing portion 1 provided on the substrate 200, an opening 2 provided in the fixing portion 1, and an actuator 3 having both ends connected to the fixing portion 1. The beam 5 whose end side is connected to the actuator 3 and extends parallel to the upper surface of the substrate 200, the driven member 7 connected to the tip end side of the beam 5, and the opening 2 are divided in a plan view, while both ends are fixed. It has a support portion 9 connected to the portion 1 and arranged in parallel with the actuator 3. The actuator 3, the beam 5, the driven member 7, and the support portion 9 are arranged in the opening 2 in a plan view.

Description

The present invention relates to a MEMS element and a shutter device using the MEMS element.

Conventionally, a shutter device that blocks and opens a predetermined optical path has been known. For example, the displacement expanding mechanism that is the driving unit of the shutter device described in Patent Document 1 is a so-called MEMS (Micro Electro Mechanical Systems) element that includes a shutter and an actuator that drives the shutter. The displacement expansion mechanism includes a fixing portion provided on an SOI (Silicon On Insulator) substrate, first and second actuators which are thermal actuators connected to the fixing portion, and a first actuator whose base end side is connected to the first actuator. It includes one beam, a second beam whose base end side is connected to a second actuator, and a driven member which is connected to the tip side of the first and second beams and functions as a shutter. The first and second beams have parallel arrangement portions arranged in parallel with each other on the tip side, the first actuator pushes the moving portion via the first beam, while the second actuator passes through the second beam. A force is applied to the driven member in the direction opposite to that of the first actuator. In the shutter device configured in this way, the driven members are driven by adding the driving forces of the first and second beams driven by the first and second actuators, respectively. The optical path is blocked or opened by the displacement of the driven member.

Japanese Patent No. 6216485

By the way, in many cases, the displacement expanding mechanism as described above is fixed to a submount which is a support member via an adhesive in order to secure mechanical strength or the like. Inorganic materials such as ceramics are often used for submounts in consideration of heat dissipation and strength. Further, in this case, a thermosetting resin is used as an adhesive material, and the two members are joined at a temperature not exceeding 200 ° C.

However, since the coefficient of thermal expansion is different between the submount and silicon, which is the main constituent material of the displacement expansion mechanism, stress is applied to the displacement expansion mechanism due to the difference in the coefficient of thermal expansion after joining the two. Of this stress, the stress applied in the extending direction of the actuator acts to extend or contract the entire length of the actuator. When the first and second actuators expand or contract in this way, the driven member that functions as a shutter may be displaced from a predetermined position via the first and second beams connected to these actuators, respectively. be.

Further, as described above, not only when stress is constantly applied, but also when an impact is applied from the outside, when a force is applied to the fixed portion along the extending direction of the actuator, the driven member becomes a predetermined value. It may be displaced from the position.

Normally, the shutter device is designed by allowing such displacement of the driven member. However, in recent years, further miniaturization and performance improvement of the shutter device are required, and it is required to reduce the above displacement. It has been done.

The present invention has been made in view of this point, and an object of the present invention is to provide a MEMS element having increased rigidity of a fixed portion, particularly rigidity in a extending direction of an actuator, and a shutter device using the same.

In order to achieve the above object, the MEMS element according to the present invention includes a substrate, a fixing portion provided on the substrate, an opening provided in the fixing portion, and an actuator having both ends connected to the fixing portion. A beam whose base end side is connected to the actuator and extends parallel to the upper surface of the substrate and a driven member connected to the tip end side of the beam divide the opening in a plan view, while both ends are fixed. It has a support portion connected to a portion and arranged in parallel with the actuator, and the actuator, the beam, the driven member, and the support portion are arranged in the opening in a plan view.

According to this configuration, the rigidity of the fixed portion in the extending direction of the actuator can be increased by dividing the opening provided in the fixed portion and providing the support portion arranged in parallel with the actuator. Further, by increasing the rigidity of the fixed portion, it is possible to prevent the driven member from being displaced to an unintended position and stably hold the driven member at a predetermined position.

Further, another MEMS element according to the present invention has a substrate, a fixing portion provided on the substrate, an opening provided in the fixing portion, and both ends are connected to the fixing portion, and the opening is opened as a first opening. An actuator having a first support portion divided into a second opening and a second opening, both ends of which are connected to the fixed portion in the first opening in a plan view, and a proximal end side connected to the actuator. A first beam extending parallel to the upper surface of the substrate and a driven member connected to the tip end side of the first beam are arranged, and both ends are in the fixed portion in the second opening in a plan view. The connected second actuator, the second beam whose base end side is connected to the second actuator and extends parallel to the upper surface of the substrate, and the second driven member connected to the tip end side of the second beam. And are arranged, and the first support portion extends in a direction intersecting the first and second beams in a plan view.

According to this configuration, the rigidity of the fixed portion can be increased by providing the first support portion that divides the opening provided in the fixed portion into the first opening and the second opening, and the first and second coverings can be increased. It is possible to prevent each drive member from being displaced to an unintended position and stably hold the drive member in a predetermined position.

The shutter device according to the present invention is disposed on the above-mentioned MEMS element, the first electrode electrically connected to at least one end of the actuator, and the upper surface of the fixing portion. A second electrode electrically connected to at least the other end of the actuator is provided, and the driven member blocks and opens an optical path.

According to this configuration, when a voltage is applied between the first electrode and the second electrode, the actuator is driven and the driven member is displaced via the beam connected to the actuator, so that a predetermined optical path is obtained. Can be opened and closed. Further, since the driven member can be stably held at a predetermined position, the opening and blocking performance of the optical path can be maintained high.

As described above, according to the MEMS element according to the present invention, the driven member can be stably held. Further, according to the shutter device according to the present invention, since the driven member can be stably held at a predetermined position, it is possible to maintain high opening and blocking performance of an optical path that functions as a shutter.

It is a top view of the shutter device which concerns on Embodiment 1 of this invention. FIG. 5 is a schematic cross-sectional view taken along the line II-II of FIG. It is explanatory drawing of one manufacturing process of a shutter device. It is explanatory drawing which shows the continuation of the process shown in FIG. 3A. It is explanatory drawing which shows the continuation of the process shown in FIG. 3B. It is explanatory drawing which shows the continuation of the process shown in FIG. 3C. It is explanatory drawing which shows the continuation of the process shown in FIG. 3D. It is a top view of the shutter device which concerns on modification 1. FIG. It is a top view of the shutter device which concerns on Embodiment 2 of this invention. It is a perspective view which shows the main part of the shutter device. It is an enlarged view of the part surrounded by the broken line of FIG. It is a top view of the shutter device which concerns on modification 2. FIG. It is a top view of the shutter device which concerns on modification 3. FIG. It is a plan view of the actuator which concerns on Embodiment 3 of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The following description of preferred embodiments is merely exemplary and is not intended to limit the present invention, its applications or its uses.

(Embodiment 1)
[Structure of shutter device]
FIG. 1 shows a plan view of the shutter device according to the first embodiment of the present invention, and FIG. 2 shows a cross-sectional view taken along the line II-II of FIG. The dimensions, thickness, detailed shape of details, etc. of each member drawn in the drawing are different from the actual ones.

As shown in FIG. 1, for example, the shutter device 500 has a rectangular overall shape in a plan view, and includes an SOI substrate 200 (hereinafter, may be simply referred to as a substrate 200), a submount 400, and the like. It has an adhesive material 300 provided between the lower surface of the fixing portion 1 provided on the substrate 200 and the upper surface of the submount 400. In the substrate 200, a first silicon layer 210 made of _{single crystal silicon, an insulating layer 220 made of SiO 2} , and a second silicon layer 230 made of single crystal silicon are laminated in this order. It is configured.

The substrate 200 has a fixing portion 1 and an opening 2 formed inside the fixing portion 1, and the fixing portion 1 forms a part of the shutter device 500 and the displacement expanding mechanism 510 described later, and is a rectangular shutter in a plan view. It defines the overall shape of the device 500 and the displacement expansion mechanism 510.

The submount 400 is a support member that mechanically supports the substrate 200, and is made of, for example, ceramic or the like. Further, the submount 400 is provided with a light passage port 401 for passing light incident in the thickness direction thereof. The adhesive 300 is a joining member for joining the substrate 200 and the submount 400, and is made of, for example, an epoxy-based thermosetting resin. The adhesive 300 is arranged so as to overlap the fixing portion 1 in a plan view so as not to cover the light passing port 401 and to surely join the substrate 200 and the submount 400. As the adhesive material 300, another material, for example, a silicone-based resin may be used.

Further, the shutter device 500 is a so-called MEMS shutter, and the displacement expanding mechanism 510, which is a driving unit of the shutter, is a MEMS element obtained by processing the substrate 200 by using a micromachining technique to which a semiconductor microfabrication technique is applied. Yes (see FIGS. 3A-3E). As the displacement expanding mechanism 510, the shutter device 500 further includes an actuator 3 whose both ends are connected to the fixed portion 1 and a beam 5 whose base end side is connected to the actuator 3 and extends parallel to the upper surface of the substrate 200. Have. Further, the shutter device 500 is connected to the actuator 4 provided apart from the actuator 3 (hereinafter, may be referred to as another actuator 4) and the proximal end side to the actuator 4, and is parallel to the upper surface of the substrate 200. It has an extending beam 6 (hereinafter, may be referred to as another beam 6), and a driven member 7 connected to the beam 5 and the tip end side of the beam 6. In the present embodiment, the actuator 4 is provided on the side opposite to the actuator 3 with the beam 5 interposed therebetween. Further, the shutter device 500 includes a connecting member 8 that connects the beam 5 and the beam 6, and a support portion that is connected to the fixing portion 1 at both ends and is arranged in parallel with the actuators 3 and 4, and divides the opening 2 in a plan view. 9 and a first electrode 101 and a second electrode 102 arranged on the upper surface of the fixing portion 1. The actuators 3 and 4, the beams 5 and 6, the driven member 7, the connecting member 8 and the support portion 9 are arranged in the opening 2 in a plan view. Further, in the following description, the displacement expanding mechanism 510 may be referred to by further including the submount 400 and the adhesive material 300 with respect to the above-mentioned structure provided on the substrate 200 and the substrate 200.

Hereinafter, for convenience of explanation, the longitudinal direction of the beam 5 is the X direction, the longitudinal direction of the actuators 3 and 4 is the Y direction, and the thickness direction of the shutter device 500, that is, the thickness direction of the substrate 200 and the submount 400 is the Z direction. Refer to. In the X direction, the left side in FIG. 1 may be simply referred to as the left side, and the right side in FIG. 1 may be simply referred to as the right side. In the Y direction, the upper side in FIG. 1 may be simply referred to as the upper side, and the lower side in FIG. 1 may be simply referred to as the lower side. In the Z direction, the upper side in FIG. 2 may be referred to as an upper surface, and the lower side in FIG. 2 may be referred to as a lower surface.

In the shutter device 500, the fixing portion 1, the actuators 3 and 4, the beams 5 and 6, the driven member 7, the connecting member 8 and the supporting portion 9 are integrally molded with a silicon material. The first base member 1a and the second base member 1b constituting the fixing portion 1 have a laminated structure of the first silicon layer 210, the insulating layer 220, and the second silicon layer 230, except for the peripheral portion, and have an opening 2 Inside, the actuators 3 and 4, the beams 5, 6 and the driven member 7 and the insulating layer 220 and the second silicon layer 230 on the lower surface of the connecting member 8 which are movable members are removed in a manufacturing process described later. Therefore, in the actuators 3, 4, the beams 5, 6, the driven member 7, and the connecting member 8, only the first silicon layer 210 is left. Further, in the support portion 9, only the second silicon layer 230 is left, and the insulating layer 220 and the first silicon layer 210 on the upper surface thereof are removed in the same manufacturing process.

The fixing portion 1 is a member having a rectangular shape in a plan view and having a first base member 1a and a second base member 1b arranged so as to face each other in the Y direction. The first base member 1a and the second base member 1b are separated in the Y direction in the first silicon layer 210, but are connected to one in the insulating layer 220 and the second silicon layer 230 as described above. The relative positions of the first base member 1a and the second base member 1b are fixed. Therefore, the first base member 1a and the second base member 1b can support movable members such as the actuators 3, 4, the beams 5, 6, and the driven member 7.

As described above, the fixing portion 1 is shaped so as to occupy as wide an area as possible while securing the range of motion of the movable member, and thus functions as a frame for supporting the movable member.

The actuator 3 is a rod-shaped drive beam extending in the Y direction, the upper end portion 3a is the first silicon layer 210 of the first base member 1a, and the lower end portion 3c is the first silicon layer 210 of the second base member 1b. Are each connected to. Further, the intermediate portion 3b of the actuator 3 is connected to the beam 5. Further, when no current is flowing through the actuator 3, in other words, the initial shape of the actuator 3 is slightly bent so that the intermediate portion 3b protrudes to the left in the X direction, which is the driving direction thereof, or is entirely in the X direction. It is slightly curved to bulge to the left.

The actuator 4 is a rod-shaped drive beam extending in the Y direction, the upper end portion 4a is the first silicon layer 210 of the first base member 1a, and the lower end portion 4c is the first silicon layer 210 of the second base member 1b. Are each connected to. Further, the intermediate portion 4b of the actuator 4 is connected to the beam 6. Further, when no current is flowing through the actuator 4, in other words, the initial shape of the actuator 4 is slightly bent so that the intermediate portion 4b protrudes to the right in the X direction, which is the driving direction thereof, or is entirely in the X direction. It is slightly curved so that it bulges to the right.

The actuator 3 and the actuator 4 are thermal actuators that generate heat when an electric current flows and thermally expand in the Y direction, which is the extending direction of each. Further, as described above, since the actuators 3 and 4 are bent or curved along the X direction which is the driving direction thereof, the actuators 3 and 4 are bent or curved in the direction opposite to the driving direction at the time of thermal expansion due to heating. Does not bend. Therefore, the actuators 3 and 4 can be reliably bent or curved in the desired driving direction.

Further, as shown in FIG. 1, the actuator 3 is arranged on the left side in the X direction in the shutter device 500, the actuator 4 is arranged on the right side in the X direction, and the actuator 3 and the actuator 4 face each other in a plan view.

The beam 5 is a rod-shaped member extending in the X direction. The first end portion 5a of the beam 5 is connected to the intermediate portion 3b of the actuator 3. Further, the second end portion 5b of the beam 5 is connected to the driven member 7. In the following description, the first end portion 5a of the beam 5 may be referred to as the base end of the beam 5, and the second end portion 5b of the beam 5 may be referred to as the tip end of the beam 5.

The beam 6 is a member having a folded structure, and the first member 6a extending from the intermediate portion 4b of the actuator 4 to the vicinity of the intermediate portion 3a of the actuator 3 and the third end portion 6e of the first member 6a toward the actuator 4. It is provided with a second member 6b folded back to. The first end portion 6c of the first member 6a is connected to the intermediate portion 4b of the actuator 4. Further, the fourth end portion 6f of the second member 6b is connected to the driven member 7. In the following description, the first end portion 6c of the first member 6a may be referred to as the base end of the beam 6, and the fourth end portion 6f of the second member 6b may be referred to as the tip end of the beam 6.

The second member 6b is a rod-shaped member having a width substantially the same as that of the beam 5 extending to the right in the X direction from the third end portion 6e of the first member 6a. The second member 6b is arranged in parallel with the beam 5 in the Y direction, which is the direction intersecting with the beam 5. Including the following description, "the beam 5 and the second member 6b of the beam 6 are arranged in parallel" means that the beam 5 and the second member 6b of the beam maintain a substantially parallel relationship. It means that it is arranged. Further, a portion in which the beam 5 and the second member 6b of the beam 6 are arranged in parallel with each other may be referred to as a parallel arrangement portion 600. That is, the beam 5 and the second member 6b of the beam 6 are connected to the driven member 7 from the same direction in parallel. In other words, by folding back the tip end side of the beam 5, the beam 5 and the second member 6b of the beam 6 are arranged in parallel at the connecting portion between the beam 5 and the beam 6 and the driven member 7. In other words, by folding back the tip end side of the second member 6b of the beam 6, the beam 5 and the second member 6b of the beam 6 are parallel to each other at the connecting portion between the beam 5 and the beam 6 and the driven member 7. Is placed in. The beam 5 pulls the driven member 7 from the second end 5b in the extending direction of the beam 5, while the beam 6 is driven by pushing the driven member 7 from the fourth end 6f in the extending direction of the beam 6. Drive the member 7. As will be described later, the beam 5 and the second member 6b of the beam 6 are driven by the actuator 3 and the actuator 4, respectively, and elastically deformed to move the driven member 7 to another position on the XY plane. Contrary to the above, the beam 5 may push the driven member 7, while the beam 6 may pull the driven member 7.

The first member 6a is a member having, for example, a semi-arc shape that bypasses the driven member 7. The first member 6a extends from the first end portion 6c to the left in the X direction, is folded back in the Y direction at the second end portion 6d, and is connected to the second member 6b. Further, the first member 6a has at least a part of a high rigidity region so as to have higher rigidity than the second member 6b, and is formed to be wide, for example. As will be described later, even if the beam 6 is driven by the actuator 4, the first member 6a retains its shape with almost no elastic deformation and transmits the driving force of the actuator 4 to the second member 6b. In providing the high rigidity region, a part of the first member 6a may be made thicker than the second member 6b, or a metal film may be formed on a part of the first member 6a. Further, the first member 6a is formed with a lightening structure 6g. By forming the lightening structure 6 g, the effect that the mass of the beam 6 is reduced and the resonance frequency is increased can be obtained. Further, by providing the first member 6a with a lightening structure 6 g, the surface area of the beam 6 is increased. As a result, heat dissipation from the beam 6 is promoted, and heat transferred from the actuator 4 which is a thermal actuator 4 to the driven member 7 can be relaxed.

The driven member 7 is a substantially circular member connected to the second end portion 5b of the beam 5 and the fourth end portion 6f of the beam 6, in other words, the tip end side of the parallel arrangement portion 600, and the actuators 3 and 4 When the beams 5 and 6 are driven by the beams, the beams 5 and 6 move in a direction parallel to the upper surface (XY plane) of the substrate 200. Further, a metal film 7a, for example, an Au / Ti film is formed on the entire surface of the driven member 7. In the shutter device 500, the driven member 7 functions as a shutter that blocks and opens an optical path of incident light (not shown). Therefore, the driven member 7 is formed in a planar shape that is one size larger than the cross section of the optical path. When the driven member 7 is driven by the actuators 3 and 4, the driven member 7 is displaced so as to cover all or a part of the light passing port 401 provided in the submount 400 in a plan view. When the shutter device 500 is designed to completely block the optical path of incident light, the planar shape of the driven member 7 is preferably the same size as or larger than the planar shape of the light passing port 401. ..

The connecting member 8 is a hairpin-shaped member that connects the beam 5 and the beam 6 to each other, extends upward from one end of the connecting portion with the beam 5 in the Y direction and is folded back, and the other end is the second beam 6. It is connected to one member 6a, specifically, the second end portion 6d of the first member 6a. By providing such a connecting member 8, when the first end portion 6c of the beam 6 is driven by the actuator 4, the first member 6a of the beam 6 rotates counterclockwise on the XY plane with the first end portion 6c as an axis. It is possible to prevent the driven member 7 from rotating slightly and to increase the displacement amount of the driven member 7. Further, as shown in the present embodiment, when the actuators 3 and 4 are thermal actuators, the heat transferred from the actuators 3 and 4 to the beams 5 and 6 is also dissipated by the connecting member 8, so that the heat to the driven member 7 is dissipated. Transmission can be prevented. Further, the driving amount of the first end portion 6c of the beam 6 by the actuator 4 is not significantly reduced. The extending direction of the connecting member 8 does not have to be substantially perpendicular to the beam 5 and the beam 6, and may be a direction intersecting the beam 5 and the beam 6, but when the actuators 3 and 4 are driven. In addition, it is necessary to arrange the actuator 3 at an appropriate distance so as not to come into contact with the actuator 3.

The support portion 9 is a member made of a second silicon layer 230, and the upper end portion in the Y direction is the second silicon layer 230 of the first base member 1a and the lower end portion is the second silicon layer 230 of the second base member 1b. Each is connected. Further, the support portion 9 is arranged in parallel with the actuators 3 and 4, and is arranged so as to divide the opening 2 in the X direction in a plan view. Further, the support portions 9 are arranged below the beams 5 and 6 composed of the first silicon layer 210 in the Z direction at predetermined intervals, in this case, at intervals corresponding to the thickness of the insulating layer 220. ing.

The first electrode 101 is a metal film formed on the upper surface of the first base member 1a, and the second electrode 102 is a metal film formed on the upper surface of the second base member 1b. As the metal film, for example, an Au / Ti film is used.

[Operation of shutter device]
Subsequently, the operation of the shutter device 500 configured in this way will be described.

The shutter device 500 is driven by applying a voltage between the first electrode 101 and the second electrode 102. When a voltage is applied between the first electrode 101 and the second electrode 102, a current flows through the actuator 3 and the actuator 4 through the first base member 1a and the second base member 1b. At this time, Joule heat is generated in the actuator 3 and the actuator 4 made of the silicon material, and the actuator 3 and the actuator 4 are instantly heated to 400 to 500 ° C.

The actuator 3 thermally expands so as to extend its entire length by being heated. Since the positions of the upper end portion 3a and the lower end portion 3c of the actuator 3 are fixed by the fixing portion 1, the intermediate portion 3b is pushed out to the left in the X direction, which is the direction in which the actuator 3 protrudes in advance.

The actuator 4 also thermally expands so as to extend its entire length by being heated. Since the positions of the upper end portion 4a and the lower end portion 4c of the actuator 4 are fixed by the fixing portion 1, the intermediate portion 4b is pushed out to the right in the X direction, which is the direction in which the actuator 4 protrudes in advance.

When the intermediate portion 3b of the actuator 3 is pushed to the left in the X direction, the beam 5 connected to the intermediate portion 3b is pulled to the left in the X direction as a whole. Further, when the intermediate portion 4b of the actuator 4 is pushed out to the right in the X direction, the beam 6 connected to the intermediate portion 4b is pulled to the right in the X direction as a whole. That is, the relative positions of the first end portion 5a of the beam 5 and the first end portion 6c of the beam 6 change in the direction away from each other.

Even if the beam 6 is pulled to the right in the X direction as a whole, the first member 6a of the beam 6 is hardly elastically deformed, so that most of the pulling force of the beam 6 is concentrated on the third end portion 6e and the second member 6b. Changes to a force that pushes to the right in the X direction. As a result, in the beam 5 and the second member 6b of the beam 6 arranged in parallel, the beam 5 is pulled to the left in the X direction, and the second member 6b of the beam 6 is pushed out to the right in the X direction. The second end 5b and the fourth end 6f of the beam 6 are driven diagonally downward to the left on the XY plane, and the second member 6b of the beam 5 and the beam 6 are greatly curved or bent with different curvatures, and the beam 6 is the first member. The 4 end portion 6f pushes the driven member 7, while the second end portion 5b of the beam 5 pulls the driven member 7, so that the driven member 7 passes light provided on the submount 400 in a plan view. It is pushed out to a position where it overlaps with the mouth 401.

On the other hand, when a voltage is no longer applied between the first electrode 101 and the second electrode 102, no current flows through the actuator 3 and the actuator 4, and the actuator 3 and the actuator 4 are rapidly naturally cooled and stretched until then. The total length returns to the original. At this time, the intermediate portion 3b of the actuator 3 extruded to the left in the X direction is pulled back to the right in the X direction, and the intermediate portion 4b of the actuator 4 extruded to the right in the X direction is pulled back to the left in the X direction.

When the intermediate portion 3b of the actuator 3 is pulled back to the right in the X direction, the beam 5 connected to the intermediate portion 3b is pulled back to the right in the X direction as a whole. Further, when the intermediate portion 4b of the actuator 4 is pulled back to the left side in the X direction, the beam 6 connected to the intermediate portion 4b is pulled back to the left side in the X direction as a whole. That is, the relative positions of the first end portion 5a of the beam 5 and the first end portion 6c of the beam 6 change in the direction of approaching each other.

Even if the beam 6 is pulled back to the left in the X direction as a whole, the first member 6a of the beam 6 is hardly elastically deformed, so that most of the pulling force of the beam 6 is concentrated on the third end portion 6e and the second member 6b. Changes to a force that pulls to the left in the X direction. As a result, in the beam 5 and the second member 6b of the beam 6 arranged in parallel, the beam 5 is pushed to the right in the X direction, and the second member 6b of the beam 6 is pulled to the left in the X direction, so that the beam 5 is the second member. The second end 5b and the fourth end 6f of the beam 6 are pushed back diagonally upward to the right on the XY plane, and the curved or bent second member 6b of the beam 5 and the beam 6 returns to the original substantially linear shape. The driven member 7 returns to the position on the XY plane shown in FIG.

By reversing the bending or bending directions of the actuator 3 and the actuator 4, the beam 5 may push the driven member 7, while the beam 6 may pull the driven member 7.

As described above, by switching the voltage application (driving state of the shutter device 500) and the release (driven state of the shutter device 500) to the first electrode 101 and the second electrode 102, the driven member 7 on the XY plane The position of is switched. As a result, the driven member 7 functions as a shutter that blocks and opens the optical path (not shown). In the present embodiment, the driven member 7 opens the optical path (not shown) in a state where it is not driven by the actuator 3 and the actuator 4, and blocks the optical path at the driven position. May block the optical path shown in the drawing at a position where the actuator 3 and the actuator 4 are not driven, and open the optical path at the driven position. In that case, it goes without saying that the position of the light passage port 401 provided in the sub mount 400 is changed. Further, the shutter is a concept including an optical attenuator that blocks and opens a part of the optical path in addition to blocking and opening the optical path.

[Manufacturing method of shutter device]
Subsequently, a method of manufacturing the shutter device 500 will be described. 3A to 3E show the manufacturing process of the shutter device according to the present embodiment. The drawings of each manufacturing process drawn in FIGS. 3A to 3E correspond to the cross-sectional views shown in FIG.

First, as shown in FIG. 3A, an SOI substrate 200 composed of a first silicon layer 210, an insulating layer 220, and a second silicon layer 230 is prepared. For example, the thickness of the first silicon layer 210 is 30 μm, the thickness of the insulating layer 220 is 1 μm, and the thickness of the second silicon layer 230 is 250 μm.

Next, as shown in FIG. 3B, the first silicon layer 210 is etched, and the first silicon layer 210 is subjected to the original shape of the fixing portion 1, the actuators 3, 4, the beams 5, 6, the driven member 7, and the connecting member. 8 is integrally formed. In FIG. 3B, only a part of these members is drawn for convenience. Further, the lightening structure 6g provided on the first member 6a of the beam 6 is formed at the same time when the first silicon layer 210 is etched. Further, in the present embodiment, the laser scribe method is used when the plurality of displacement expansion mechanisms 510 formed on the SOI substrate 200 are separated into chips. In this method, the energy of the irradiated laser beam needs to be absorbed by the single crystal silicon. In order for the second silicon layer 230 to absorb the laser beam, the first silicon layer 210 in the divided region of the chip is also removed at this stage. The method of individualization is not particularly limited to this, and for example, dicing may be used, or individualization may be performed by etching in the steps shown in FIGS. 3A to 3D.

Further, the first electrode 101 is formed on the surface of the first base member 1a, the second electrode 102 is formed on the surface of the second base member 1b, and the metal film 7a is formed on the surface of the driven member 7. The first and second electrodes 101 and 102 and the metal film 7a are, for example, an Au / Ti film composed of Ti having a thickness of 20 nm and Au having a thickness of 300 nm.

When the original shape of the shutter device 500 and the displacement expansion mechanism 510 is formed on the first silicon layer 210, then, as shown in FIG. 3C, the dummy wafer 800 is attached to the first silicon layer 210 with wax 700 to attach the dummy wafer 800 to the shutter device 500. The layer on the back surface of the above, that is, the insulating layer 220 and the second silicon layer 230 is etched. In this case, a mask (not shown) is formed at a predetermined position on the back surface of the second silicon layer 230 in order to leave a portion corresponding to the support portion 9. By this etching process, the SOI substrate 200 is left in the fixed portion 1, and the first silicon layer is left in the other movable members such as the actuator 3, the actuator 4, the beam 5, the beam 6, the driven member portion 7, and the connecting member 8. Only 210 is left. Further, only the second silicon layer 230 is left in the support portion 9. In the step shown in FIG. 3B, the insulating layer 220 of the portion corresponding to the support portion 9 may be removed by using a mask (not shown).

Next, as shown in FIG. 3D, the wax 700 and the dummy wafer 800 are removed. In addition, the chip on which the displacement expansion mechanism 510 is formed is also individualized.

Finally, as shown in FIG. 3E, a chip on which the displacement expanding mechanism 510 is formed is placed on the sub-mount 400 in which the adhesive 300 is arranged at a predetermined position, and the sub-mount 400 is placed via the adhesive 300. And the tip. As shown in FIGS. 1 and 2, the adhesive 300 is arranged on the submount 400 so as to be located below the fixing portion 1 in the Z direction. Further, a predetermined load is applied to bring the adhesive material 300 into contact with the back surface of the chip, and if the adhesive material 300 is an epoxy-based thermosetting resin, the adhesive material 300 is applied at a predetermined temperature, for example, 120 ° C. to 180 ° C. By thermosetting, the submount 400 and the chip are joined. In this way, the shutter device 500 is completed.

[Effects, etc.]
As described above, the displacement expanding mechanism 510, which is the MEMS element according to the present embodiment, has the substrate 200, the fixing portion 1 provided on the substrate 200, the opening 2 provided in the fixing portion 1, and both ends fixed. It has an actuator 3 connected to the portion 1 and another actuator 4 having both ends connected to the fixed portion 1 and provided apart from the actuator 3. Further, in the displacement expansion mechanism 510, the base end side is connected to the actuator 3 and extends parallel to the upper surface of the substrate 200, and the base end side is connected to another actuator 4 and extends parallel to the upper surface of the substrate. It has another beam 6 and a driven member 7 connected to the tip side of the beam 5 and another beam 6.

Further, while the displacement expanding mechanism 510 divides the opening 2 in a plan view, it has support portions 9 having both ends connected to the fixed portions 1 and arranged in parallel with the actuators 3 and 4. The beams 5 and 6, the driven member 7, and the support portion 9 are arranged in the opening 2 in a plan view.

By configuring the displacement expanding mechanism 510 in this way, it is possible to increase the rigidity of the fixed portion 1 in which the opening 2 is formed, particularly the rigidity in the Y direction, which is the extending direction of the actuators 3 and 4. Further, by increasing the rigidity of the fixing portion 1, it is possible to prevent the driven member 7 from being displaced to an unintended position, and it is possible to prevent the performance of the shutter device 500 from deteriorating with respect to the opening and blocking of the optical path of the incident light. can. This will be further described.

As described above, when a stress equal to or greater than a predetermined value is applied to the fixed portion 1 of the displacement expanding mechanism 510 in the extending direction of the actuators 3 and 4, in this case, the Y direction, the actuators 3 and 4 have their respective overall lengths. Deforms to stretch or contract. In particular, as shown in the present embodiment, when the fixing portion 1 is provided with the opening 2 and both ends of the actuators 3 and 4 are connected to the inner peripheral edge of the opening 2, both ends which are the connecting portions with the fixing portion 1. Since there is no structure that mechanically supports the actuators 3 and 4 except for the portions, the actuators 3 and 4 can be easily extended or contracted when a stress of a predetermined value or more in the Y direction is applied to the fixed portion 1.

The phenomenon that stress in the Y direction is applied to the fixed portion 1 can occur, for example, when the substrate 200 and the submount 400 having different coefficients of thermal expansion are joined by heat treatment. Further, even if the thermal expansion coefficients of the single crystal silicon and the submount 400, which are the main constituent materials of the substrate 200, are about the same, if the thermal expansion coefficients of the single crystal silicon and the adhesive material 300 are significantly different, they are fixed. A stress of a predetermined value or more may be applied to the portion 1 in the Y direction. Further, not limited to these, as described above, a stress of a predetermined value or more may be applied to the fixed portion 1 in the Y direction even temporarily due to an external impact. In particular, since the actuators 3 and 4 are thermal actuators that generate heat due to the flow of an electric current and thermally expand in the Y direction, which is the extending direction, the actuators 3 and 4 drive each of the actuators 3 and 4 by a predetermined amount to change the total length. Has the same meaning as what was done. That is, the amount of displacement of the actuators 3 and 4 is expanded by the movement of the beams 5 and 6, and the driven member 7 connected to the tip side of the beams 5 and 6 is displaced from a predetermined position. In particular, in the displacement expanding mechanism 510 shown in the present embodiment, the beams 5 and 6 connected to the actuators 3 and 4 each have a parallel arrangement portion 600, and the beams 5 and 6 are oriented in opposite directions from the same side in the X direction. The driven member 7 connected to the tip end side of the parallel arrangement portion 600 is displaced by receiving the force. In such a displacement expanding mechanism 510, the displacement amount of the driven member 7 is expanded even if the fixed portion 1 to which the actuators 3 and 4 are connected is slightly deformed in the extending direction of the actuators 3 and 4 due to stress or the like. Will be done.

On the other hand, according to the present embodiment, the opening 2 is divided in a plan view, and the support portions 9 having both ends connected to the fixing portions 1 are arranged in parallel with the actuators 3 and 4, so that the fixing portion 1 is caused by stress. It is possible to suppress the attempt to deform in the Y direction. As a result, the overall length of the actuators 3 and 4 can be prevented from being unintentionally changed, and the driven member 7 can be stably held at a predetermined position.

The support portion 9 is arranged so as to divide the opening 2 at substantially the center in the X direction. Of the first base member 1a and the second base member 1b of the fixed portion 1, when the portion extending in the X direction is viewed as a kind of beam, the beam fixed at both ends is most deformed in the central portion. Therefore, by arranging the support portion 9 at a position corresponding to this portion, that is, a position passing through the substantially center of the opening 2 in the X direction, it is possible to effectively suppress the fixing portion 1 from being deformed by stress. be able to. However, the arrangement of the support portion 9 in the opening 2 is not particularly limited to this, and may be arranged on the side closer to the actuator 3 or on the side closer to the actuator 4. The support portion 9 may be arranged at a position where the rigidity of the fixed portion 1 in the Y direction can be increased.

The support portion 9 is provided below the beams 5 and 6 in the Z direction at a predetermined interval from the beams 5 and 6. As a result, even when the beams 5 and 6 are driven by the actuators 3 and 4, the movements of the beams 5 and 6 are not hindered. Therefore, the driven member 7 can be displaced by a desired amount.

Further, in the substrate 200 constituting the displacement expansion mechanism 510, the first silicon layer 210, the insulating layer 220, and the second silicon layer 230 are laminated in this order, and the beams 5 and 6 and the actuators 3 and 4 are the first. While the support portion 9 is composed of the silicon layer 210, the support portion 9 is composed of the second silicon layer 230. As a result, the support portions 9 can be easily arranged below the beams 5 and 6 in the Z direction at predetermined intervals.

Further, the displacement expanding mechanism 510 of the present embodiment is provided between the submount 400, which is a support member for supporting the substrate 200, and the lower surface of the fixing portion 1 and the upper surface of the submount 400, and is provided between the substrate 200 and the submount. The adhesive material 300, which is a joining member for joining the 400, may be further included.

If there is a difference in the coefficient of thermal expansion between the submount 400 and the substrate 200, stress is applied to the fixing portion 1 provided on the substrate 200 and the substrate 200 is easily deformed. By increasing the rigidity of 1, it is possible to prevent the total length of the actuators 3 and 4 from being unintentionally changed, and to stably hold the driven member 7 at a predetermined position.

Further, the shutter device 500 according to the present embodiment is disposed on the upper surface of the displacement expanding mechanism (MEMS element) 510 and the first base member 1a of the fixing portion 1, and the upper end portions 3a, 4a of the actuators 3 and 4 are arranged. The first electrode 101 electrically connected to each of the above, and the first electrode 101 arranged on the upper surface of the second base member 1b of the fixing portion 1, and electrically connected to the lower end portions 3c and 4c of the actuators 3 and 4, respectively. A second electrode 102 is provided, and a driven member 7 blocks and opens an optical path.

By configuring the shutter device 500 in this way, when a voltage is applied between the first electrode 101 and the second electrode 102, the actuators 3 and 4 are driven, respectively, and the beams connected to the actuators 3 and 4 are driven. By displacing the driven member 7 via the 5 and 6, the amount of displacement of the driven member 7 can be increased, and a predetermined optical path can be reliably opened and blocked. Further, since the driven member 7 can be stably held at a predetermined position, the opening and blocking performance of the optical path of the incident light can be maintained high. Further, when such a shutter device 500 is used in a variable optical attenuator (VOA) incorporated in an optical wavelength division multiplexing transmission device or the like, all or a part of the light passing through the VOA is used according to a predetermined required specification. It is possible to realize a high-performance optical wavelength division multiplexing transmission device or the like because it is possible to open and block the light.

<Modification example 1>
FIG. 4 shows a plan view of the shutter device according to the present modification. In this modification, the same parts as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

In the configuration according to the present modification shown in FIG. 4 and the configuration shown in the first embodiment, the number of actuators arranged in the opening 2 and the base end of the beam 5 are connected to the first base member 1a. different.

In this way, the actuator 3 may be omitted in the shutter device 500. Also in this case, the beam 6 driven by the actuator 4 pushes the driven member 7, and the beam 5 receiving the driving force from the actuator 4 via the connecting member 8 pulls the driven member 7, so that the driven member 7 is driven. The member 7 is pushed out to a position where it overlaps with the light passage port 401 provided in the submount 400 in a plan view. Further, the support portion 9 increases the rigidity of the fixed portion 1 in the Y direction, prevents the total length of the actuator 4 from unintentionally changing, and stably holds the driven member 7 at a predetermined position. be able to.

The first end portion 5a of the beam 5 may be connected to the second base member 1b instead of the first base member 1a. Further, although not shown, the actuator 4 may be omitted instead of the actuator 3. Also in this case, the driven member 7 can be stably held at a predetermined position by preventing the total length of the actuator 3 from being unintentionally changed. When the actuator 4 is omitted, the first end portion 6c of the beam 6 is connected to the first base member 1a or the second base member 1b. Further, in this case, since the beam 6 is not directly connected to the member that generates heat and heat dissipation does not need to be considered so much, the lightening structure 6g in the first member 6a may not be formed.

In this modified example, the adhesive material 300 is not provided between the lower surface of the second base member 1b and the submount 400, but as shown in FIG. 1, the adhesive material 300 may be provided at the relevant portion.

(Embodiment 2)
5A and 5B show a plan view of the shutter device according to the present embodiment, FIG. 6 shows a perspective view of a main part of the shutter device, and FIG. 7 shows an enlarged view of a portion surrounded by a broken line in FIG. .. In the present embodiment, the same parts as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

In the configuration shown in the present embodiment and the configuration shown in the first embodiment, first, the opening 20 provided in the fixing portion 10 is divided into a first opening 21 and a second opening 22 by the first support portion 161. Is different. The first to fourth actuators 30, 90, 40, 110, the first to fourth beams 50, 120, 60, 130, and the first and second driven members 70, 140 are the first ones shown in FIG. 2, respectively. It is composed of a silicon layer 210. Although not shown, a metal film corresponding to the metal film 7a shown in FIG. 2 is formed on the entire upper surface of the first driven member 70 and the entire upper surface of the second driven member 140. In the following description, the first driven member 70 may be referred to as a driven member 70.

The fixing portion 10 has a first base member 11 and a second base member 12, and a third base member 13 arranged so as to face each other in the Y direction. The first to third base members 11 to 13 are the same as the first base member 1a and the second base member 1b shown in the first embodiment, except for the peripheral portion, the second silicon layer 230, the insulating layer 220, and the first silicon. The layers 210 are laminated in this order. The first base member 11 and the second base member 12 are separated in the X direction in the first silicon layer 210, but are connected to one in the insulating layer 220 and the second silicon layer 230. Further, the first base member 11, the third base member 13, the second base member 12, and the third base member 230 are separated in the Y direction in the first silicon layer 210, respectively, but the insulating layer 220 and the second silicon layer are separated. In 230, they are connected to one. Therefore, the relative positions of the first to third base members 11 to 13 are fixed, and the movable members in the displacement expanding mechanism 520 can be supported by the first to third base members 11 to 13. Further, the fixing portion 10 functions as a frame for supporting the movable member by being shaped so as to occupy as large an area as possible while securing the range of motion of the movable member.

Further, as described above, the first silicon layer 210 of the first base member 11 is in the X direction with the first silicon layer 210 of the second base member 12, and is in the Y direction with the first silicon layer 210 of the third base member 230. They are physically separated from each other. Therefore, the first electrode 171 arranged on the upper surface of the first base member 11, the second electrode 172 arranged on the upper surface of the second base member 12, and the upper surface of the third base member 13 are arranged. The third electrode 173 is electrically insulated and separated from each other.

One end of the first support portion 161 is connected to the boundary portion between the first base member 11 and the second base member 12, and the other end is connected to the third base member 13, and the opening 20 is connected to the first opening 21 and the second opening. It is divided into 22. The first support portion 161 is a member extending in the Y direction, and most of the members have the same structure as the substrate 200, that is, a laminated structure of the second silicon layer 230, the insulating layer 220, and the first silicon layer 210. However, as shown in FIGS. 6 and 7, the first silicon layer 210 is removed from the upper end portion in the Y direction connected to the boundary portion between the first base member 11 and the second base member 12, and the insulating layer 220 is removed. It has a two-layer structure consisting of a second silicon layer 230 and a second silicon layer 230. Therefore, the first support portion 161 is physically separated from the first silicon layer 210 of the first base member 11 and the first silicon layer 210 of the second base member 12. As a result, the first support portion 161 is electrically insulated from the first electrode 171 arranged on the upper surface of the first base member 11. Similarly, the first support portion 161 is electrically insulated from the second electrode 172 disposed on the upper surface of the second base member 12.

When the first actuator 30 and the second actuator 90, which will be described later, are driven, the first support portion 161 and the first actuator 30 (hereinafter, referred to as the actuator 30) may be referred to so as not to interfere with the displacement of the intermediate portions thereof. It is necessary to appropriately set the distance between the first support portion 161 and the second actuator 90 in the X direction and the distance between the first support portion 161 and the second actuator 90 in the X direction. In the present embodiment, the distance between the first support portion 161 and the first actuator 30 in the X direction and the distance between the first support portion 161 and the second actuator 90 in the X direction are the same, but these distances are the same. May be different from each other.

The next difference is that a set of actuators, a set of beams, and a driven member are arranged as a set in each of the first opening 21 and the second opening 22. For example, in the first opening 21, the first actuator 30 whose both ends are connected to the fixed portion 10 and the proximal end side are connected to the intermediate portion of the first actuator 30, extend to the left in the X direction and downward in the Y direction. A first beam 50 having a folded first member 51 and a second member 52 extending from the left end portion of the first member 51 in the X direction to the right side in the X direction is arranged. Further, in the first opening 21, both ends are connected to the fixing portion 10, and the third actuator 40 provided so as to face the side opposite to the first actuator with the first beam 50 interposed therebetween and the proximal end side are It is connected to the intermediate portion of the third actuator 40, is separated from the second member 52 of the first beam 50 in the Y direction, and is arranged in parallel with the second member 52, while extending parallel to the upper surface of the substrate 200. The third beam 60 and the like are arranged. Further, in the first opening 21, the first driven member 70 connected to the tip side of the first beam 50 and the third beam 60, and the first connection connecting the first beam 50 and the third beam 60 are connected. The member 80 is arranged. Further, the sub mount 400 is provided with a first light passing port 401 communicating with the first opening 21.

The various members arranged in the first opening 21 correspond to the members arranged in the opening 2 of the shutter device 500 shown in FIG. 1, respectively. For example, the first actuator 30 corresponds to the actuator 4, and the third actuator 40 corresponds to the actuator 3. Further, the first beam 50 corresponds to the beam 6, the third beam 60 corresponds to the beam 5, the first driven member 70 corresponds to the driven member 7, and the first connecting member 80 corresponds to the connecting member 8. Further, the functions of the respective members are the same among the corresponding members. Therefore, when a voltage is applied between the first electrode 171 and the third electrode 173, currents flow through the first and third actuators 30 and 40, respectively, and the intermediate portion of the first actuator 30 is pushed out to the right in the X direction. Then, the intermediate portion of the third actuator 40 is pushed out to the left in the X direction. As a result, the first beam 50 pushes the first driven member 70 to the right in the X direction, and the third beam 60 drives the first driven member 70 to pull to the left in the X direction. As a result, the first driven member 70 is displaced diagonally to the lower left and is pushed out to a position overlapping the first light passing port 401 provided in the submount 400 in a plan view.

On the other hand, in the second opening 22, various members arranged in the first opening 21 and corresponding members are arranged line-symmetrically with respect to the first support portion 161. For example, in the second opening 22, the second actuator 90 is arranged line-symmetrically with respect to the first support portion 161 with respect to the first actuator 30. Similarly, in the second opening 22, the fourth actuator 110 is line-symmetric with the third actuator 40, the second beam 120 is line-symmetric with the first beam 50, and the fourth beam is line-symmetric with respect to the first support portion 161. 130s are arranged line-symmetrically with the third beam 60, respectively. Further, the second driven member 140 is arranged line-symmetrically with the first driven member 70 and the second connecting member 150 is arranged line-symmetrically with the first connecting member 80 with respect to the first support portion 161. Further, the submount 400 is provided with a second light passage port 402 relative to the first support portion 161 in line symmetry with the first light passage port 401. Further, as is clear from FIGS. 5 and 6, the first driven member 70 and the second driven member 140 are respectively arranged with the first support portion 161 in the X direction at a predetermined same interval. From another point of view, the first driven member 70 and the second driven member 140 are arranged so as to sandwich the first support portion 161 and close to the first support portion 161. In the present embodiment, the distance between the first support portion 161 and the first driven member 70 in the X direction and the distance between the first support portion 161 and the second driven member 140 in the X direction are the same. , These intervals may be different from each other. Further, the distance between the center of the first light passing port 401 and the center of the second light passing port 402 in the X direction is set to about several hundred μm to 1 mm, and the first light passing port 401 and the second light passing port 401 are set. The diameter of each of the 402s is set to about several hundred μm, for example, about 250 μm.

Further, the functions of the respective members are the same among the members having an arrangement relationship that is line-symmetrical with respect to the first support portion 161. However, the driving and displacement directions of each member are reversed with respect to the first support portion 161. Therefore, when a voltage is applied between the second electrode 172 and the third electrode 173, currents flow through the second and fourth actuators 90 and 110, respectively, and the intermediate portion of the second actuator 90 is pushed out to the left in the X direction. Then, the intermediate portion of the fourth actuator 110 is pushed out to the right in the X direction. As a result, the second beam 120 pushes the second driven member 140 to the left in the X direction, and the fourth beam 130 drives the second driven member 140 to pull to the right in the X direction. As a result, the second driven member 140 is displaced diagonally to the lower right and is pushed out to a position overlapping the second light passing port 402 provided in the submount 400 in a plan view.

As described above, the displacement expansion mechanism 520, which is the MEMS element according to the present embodiment, has the substrate 200, the fixing portion 10 provided on the substrate 200, and both ends connected to the fixing portion 10, and the opening 20 is first. It has a first support portion 161 that is divided into an opening 21 and a second opening. A first actuator 30 (actuator 30) having both ends connected to the fixed portion 10 and a second actuator 30 having both ends connected to the fixed portion 10 and separated from the first actuator 30 in the first opening 21 in a plan view. 3 Actuators 40 and are arranged. Further, in the first opening 21 in a plan view, the proximal end side is connected to the first actuator 30, the first beam 50 extending parallel to the upper surface of the substrate 200, and the proximal end side is connected to the third actuator 40. A third beam 60 extending parallel to the upper surface of the substrate 200 and a first driven member 70 (driven member 70) connected to the tip side of the first beam 50 and the third beam 60 are arranged. There is.

Further, in the second opening 22 in a plan view, a second actuator 90 having both ends connected to the fixed portion 10 and a fourth actuator having both ends connected to the fixed portion 10 and provided apart from the second actuator 90. 110 and are arranged. Further, in the second opening 22 in a plan view, the proximal end side is connected to the second actuator 90, the second beam 120 extending parallel to the upper surface of the substrate 200, and the proximal end side are connected to the fourth actuator 110. A fourth beam 130 extending parallel to the upper surface of the substrate 200 and a second driven member 140 connected to the tip side of the second beam 120 and the fourth beam 130 are arranged. Further, the second and fourth actuators 90 and 110, the second and fourth beams 120 and 130, and the second driven member 140 are arranged in the second opening 22 in a plan view. The first support portion 161 extends in the Y direction intersecting the first beam 50 and the second beam 120 in a plan view.

According to the displacement expanding mechanism 520 of the present embodiment, the rigidity of the fixing portion 10, particularly the first, is provided by providing the first support portion 161 that divides the opening 20 into the first opening 21 and the second opening 22 in a plan view. The rigidity in the Y direction, which is the extending direction of the first to fourth actuators 30, 90, 40, 110, can be increased. Further, by increasing the rigidity of the fixing portion 10, it is possible to prevent the first and second driven members 70 and 140 from being displaced to unintended positions, respectively, as shown in the first embodiment, and it is possible to prevent the incident light from being displaced. It is possible to suppress the deterioration of the performance of the shutter device 500 with respect to the opening and blocking of the optical path.

Further, the substrate 200 has a laminated structure in which the first silicon layer 210, the insulating layer 220, and the second silicon layer 230 are laminated in this order, as shown in the first embodiment, and the first to fourth beams The 50, 120, 60, 130 and the first to fourth actuators 30, 90, 40, 110 are each composed of a first silicon layer 210. On the other hand, the first support portion 161 except for one end portion connected to the fixed portion 10, specifically, the upper end portion in the Y direction connected to the boundary portion between the first base member 11 and the second base member 12. It has the same laminated structure as the substrate 200. Further, the first silicon layer 210 is removed from the upper end portion of the first support portion 161 in the Y direction, and the second silicon layer 230 and the insulating layer 220 are laminated.

According to the present embodiment, since most of the first support portion 161 has the same laminated structure as the substrate 200, for example, the structure is stronger than the support portion 9 shown in the first embodiment, and the fixed portion 10 is in the Y direction. Rigidity can be increased. Further, as described above, the first support portion 161 is electrically connected to the first to third electrodes 171 to 173 by removing the first silicon layer 210 at the upper end portion of the first support portion 161 in the Y direction. Insulated and separated. Therefore, there is no possibility that an unintended short circuit will occur between the first to third electrodes 171 to 173 via the first support portion 161.

Further, the first to fourth actuators 30, 90, 40, and 110 are thermal actuators that generate heat when a current flows and thermally expand in the Y direction, which is the extending direction, respectively. The first actuator 30 and the second actuator 90 are arranged at a predetermined distance from the first support portion 161 in the X direction. Further, the first actuator 30 is arranged closer to the first support portion 161 than the first driven member 70, and the second actuator 90 is arranged closer to the first support portion 161 than the second driven member 140. ing.

According to the present embodiment, by providing the first and second actuators 30 and 90 close to the first support portion 161 respectively, thermal crosstalk generated between the first actuator 30 and the second actuator 90 is generated. Can be suppressed.

When the optical paths of the two incident lights are opened and blocked independently, one of the first actuator 30 and the second actuator 90 is in the driven state, while the other is in the non-driven state. Further, when one actuator, for example, the first actuator 30, is driven, the intermediate portion thereof bends or bends so as to approach the second actuator 90, which is the other actuator.

On the other hand, as described above, when the first actuator 30 and the second actuator 90 are driven, the respective temperatures reach several hundred degrees Celsius. For example, when the first actuator 30 heated to such a high temperature approaches the second actuator 90 more than a predetermined interval, the heat generated propagates to the second actuator 90, and the second actuator 90 is deformed so that the total length is extended. Resulting in. This corresponds to the above-mentioned thermal crosstalk. Due to this thermal crosstalk, the second driven member 140 is displaced to an unintended position, and unintended light leaks from the second light passing port 402, or a part of the light to be passed is blocked. There is a risk of crosstalk.

According to the present embodiment, by arranging the first actuator 30 and the second actuator 90 in close proximity to the first support portion 161 to suppress the thermal crosstalk described above, the first and second driven devices are driven. It is possible to prevent the members 70 and 140 from being displaced to unintended positions, and it is possible to prevent the performance of the shutter device 500 from deteriorating with respect to the opening and blocking of the optical path of the incident light.

In particular, by making the first support portion 161 have the same laminated structure as the substrate 200 except for the upper end portion in the Y direction, the first silicon layer 210 of the first support portion 161 and the first silicon layer 210 are formed. And the second actuators 30 and 90 can be brought into close contact with each other, and the heat generated by the first actuator 30 or the second actuator 90 is transferred to the third base via the first silicon layer 210 of the first support portion 161. It can be dissipated from the member 13.

Further, the displacement expanding mechanism 520 of the present embodiment is provided in the fixed portion 10, and is provided with two actuators in each of the first opening 21 and the second opening 22 divided by the first support portion 161, and these actuators. Two beams connected to each other and a driven member connected to each other are arranged on the tip side of the two beams, and these driven members, that is, the first and second driven members 70 and 140 are arranged. The first support portion 161 and the first support portion 161 are arranged at predetermined intervals in the X direction. As a result, the light of different optical paths can be brought close to each other and incident on the displacement expanding mechanism 520, and the shutter device 500 for opening and blocking the incident light can be realized with a simple configuration.

When a shutter array that opens and blocks light in different optical paths is used in VOA or the like, in order to reduce the size of the device, the interval between the incident lights, that is, the first light passing port 401 and the second light passing port 402 It is necessary to bring the intervals closer. However, when the shutter devices 500 shown in the first embodiment are arranged side by side to form a shutter array, it is necessary to make the distance between the two incident lights larger than the lengths of the beams 5 and 6 in the X direction. Since the lengths of the beams 5 and 6 are about several mm, there is a problem that the distance between the two incident lights cannot be made closer than this.

On the other hand, according to the present embodiment, two openings 21 and 22 are provided in the same substrate 200, and the above set is arranged in each of the openings 21 and 22, whereby the first driven member 70 and the second driven member 140 are arranged. The distance between the first light passage port 401 and the second light passage port 402 in the X direction can be made closer to 1 mm or less, and the displacement expansion mechanism 520 in which light from different optical paths is incident is incident. And the shutter device 500 can be miniaturized.

Further, when the shutter devices 500 shown in the first embodiment are arranged side by side to form the shutter array, the placement accuracy of each member in the displacement expanding mechanism 520, particularly the first driven member 70 and the second covered member 70, is taken into consideration in consideration of the assembly tolerance. There is a limit to improving the position accuracy between the drive member 140 and the arrangement accuracy of the first and second driven members 70 and 140 with respect to the first and second light passage ports 401 and 402. On the other hand, according to the present embodiment, by forming the displacement expanding mechanism 520 having the first and second driven members 70 and 140 on one substrate 200, the arrangement accuracy of each member can be improved. As a result, the opening and blocking performance of the incident light in the shutter device 500 can be maintained high.

Further, the first driven member 70 and the second driven member 140 are arranged so as to be line-symmetrical with respect to the first support portion 161 in a plan view, and the first actuator 30 and the second actuator 90 are , It is arranged so as to be line-symmetrical with respect to the first support portion 161 in a plan view. Further, the third actuator 40 and the fourth actuator 110 are arranged so as to be line-symmetric with respect to the first support portion 161 in a plan view, and the third actuator 40 is a first support portion rather than the first actuator 30. The fourth actuator 110 is arranged on the side farther from 161 and on the side farther from the first support portion 161 than the second actuator 90.

By doing so, the design of the displacement expanding mechanism 520 and the shutter device 500 can be simplified, and the intervals between the incident lights can be easily approached. Further, the first driven member 70 and the second driven member 140, and by extension, the first light passing port 401 and the second light passing port 402 arranged at the positions after these displacements are provided with respect to the first support portion 161. By arranging them line-symmetrically, for example, when the displacement expansion mechanism 520 or the shutter device 500 is mounted on the VOA or the like, the first support portion 161 can be used as an alignment mark, and the position is accurate with respect to the VOA or the like. It can be easily implemented.

<Modification 2>
FIG. 8 shows a plan view of the shutter device according to this modification. In this modification, the same parts as those in the second embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

In the configuration shown in this modification and the configuration shown in the second embodiment, the second support portion 162 is provided in the first opening 21 and the third support portion 163 is provided in the second opening 22 in a plan view. It differs in that. Further, both ends of the second support portion 162 are connected to the fixed portion 10 and arranged in parallel with the first actuator 30, and both ends of the third support portion 163 are connected to the fixed portion 10 and parallel to the second actuator 90. Is located in.

Depending on the size of the displacement expanding mechanism 520 or the sizes of the first opening 21 and the second opening 22, the rigidity of the fixing portion 10 may not be maintained higher than a predetermined value only by the first support portion 161. On the other hand, according to this modification, by providing the second support portion 162 and the third support portion 163 as described above, the rigidity of the fixing portion 10, particularly the rigidity in the Y direction around the first opening 21 and The rigidity in the Y direction around the second opening 22 can be increased. By increasing the rigidity of the fixing portion 10 in this way, it is possible to prevent the first and second driven members 70 and 140 from being displaced to unintended positions, respectively, as shown in the second embodiment, and the incident can be prevented. The performance of the shutter device 500 can be maintained high with respect to the opening and blocking of the optical path of light.

Further, the second and third support portions 162 and 163 are composed of the second silicon layer 230, similarly to the support portions 9 shown in FIGS. 1 and 2. Therefore, the second support portion 162 is provided below the first and third beams 50, 60 at a predetermined interval from the first and third beams 50, 60 in the Z direction, and the third support portion 163 is the third support portion 163. The second and fourth beams 120 and 130 are provided below the second and fourth beams 120 and 130 at predetermined intervals in the Z direction.

Further, by arranging the second support portion 162 below the first and third beams 50 and 60 in the Z direction, the first and third beams 50 and 60 are driven by the first and third actuators 30 and 40, respectively. Even in this case, the movements of the first and third beams 50 and 60 are not hindered. Therefore, the first driven member 70 can be displaced by a desired amount. Similarly, by arranging the second support portion 163 below the second and fourth beams 120 and 130 in the Z direction, the second and fourth beams 120 and 130 are driven by the second and fourth actuators 90 and 110, respectively. Even if this is done, the movements of the second and fourth beams 120 and 130 are not hindered. Therefore, the second driven member 140 can be displaced by a desired amount.

By arranging the second and third support portions 162 and 163 at positions passing through substantially the center of the first and second openings 21 and 22 in the X direction, the fixing portion 10 tries to be deformed. The fact that it can be effectively suppressed is the same as that shown in the first embodiment. The arrangement of the second support portion 162 in the first opening 21 is not particularly limited to this, and may be arranged on the side closer to the first actuator 30 or on the side closer to the third actuator 40. It may be arranged. Similarly, the arrangement of the third support portion 163 in the second opening 22 is not particularly limited to this, and may be arranged on the side closer to the second actuator 90 or the side closer to the fourth actuator 110. It may be arranged in. The second and third support portions 162 and 163 may be arranged at positions where the rigidity of the fixed portion 10 in the Y direction can be increased, respectively.

<Modification example 3>
FIG. 9 shows a plan view of the shutter device according to the present modification. In this modification, the same parts as those in the second embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

The configuration according to this modification and the configuration shown in the second embodiment are different in that the number of actuators arranged in the first opening 21 and the base end of the third beam 60 are connected to the first base member 11. .. Further, the number of actuators arranged in the second opening 22 and the base end of the fourth beam 120 are different in that they are connected to the second base member 12.

In this way, in the shutter device 500, the third actuator 40 and the fourth actuator 110 may be omitted. Also in this case, the first beam 50 driven by the first actuator 30 pushes the first driven member 70 to the right in the X direction in the first opening 21, and the first actuator 30 is pushed through the first connecting member 80. The third beam 60, which receives the driving force from the above, pulls the first driven member 70 to the left in the X direction, so that the driven member 70 overlaps the light passage port 401 provided in the submount 400 in a plan view. Pushed to position. Further, in the second opening 22, the second beam 120 driven by the second actuator 90 pushes the second driven member 140 to the left in the X direction, and is driven from the second actuator 90 via the second connecting member 150. The fourth beam 130 that receives the force pulls the first driven member 70 to the right in the X direction, so that the second driven member 140 overlaps with the light passage port 402 provided in the submount 400 in a plan view. Is pushed out to.

The base end of the third beam 60 may be connected to the third base member 13 instead of the first base member 11. Similarly, the base end of the fourth beam 130 may be connected to the third base member 13 instead of the second base member 12. Also in this case, the first and second driven members 70 and 140 are stably held in predetermined positions by preventing the total lengths of the first and second actuators 30 and 90 from being unintentionally changed. be able to.

Although not particularly described, it goes without saying that the displacement expanding mechanism 520 and the shutter device 500 shown in FIGS. 5 to 9 are obtained through the same manufacturing steps as those shown in FIGS. 3A to 3E. Further, the second and third support portions 162 and 163 may be omitted depending on the required rigidity of the fixing portion 10.

(Embodiment 3)
10A and 10B show a schematic plan view of the actuator, FIG. 10A shows a planar shape of the actuator according to the present embodiment, and FIG. 10B shows a planar shape of the actuator for comparison. The actuator 180 shown in FIG. 10 corresponds to the actuator 3 shown in FIG. Further, in the present embodiment, the same parts as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

As described above, all of the actuators 3, 4, 30, 90, 40, and 110 shown in the first and second embodiments including the first and third modifications 1 to 3 generate heat due to the flow of an electric current, and generate heat in the Y direction, which is the extending direction. It is a thermal actuator that thermally expands to. Further, since these actuators are composed of the first silicon layer 210 which is single crystal silicon, plastic deformation usually does not occur at a temperature of about 500 ° C.

However, even in a member made of single crystal silicon, plastic deformation can occur when a predetermined stress is applied. Further, the higher the temperature of the member, the lower the stress that causes plastic deformation due to the movement of internal defects and the like. Therefore, even in the actuators 3, 4, 30, 90, 40, 110 shown in the first and second embodiments, there is a possibility that plastic deformation may occur due to heat generation during driving depending on the stress applied from the fixed portions 1 and 10 and its own shape. There is. Further, even if the actuator is not deformed by one drive, the actuator may be driven a plurality of times for a long period of time to cause plastic deformation. When such plastic deformation occurs, not only the displacement amount of the actuator does not reach a predetermined amount, but also in an extreme case, the actuator may be damaged. In other words, there was a risk of reducing the reliability of the actuator.

Therefore, the inventors of the present application have found that the above-mentioned defects and reliability deterioration can be reduced by mainly focusing on the shape of the actuator and defining the width of the actuator as described later. First, it will be described that a large temperature distribution can occur in the actuator 181 for comparison.

As shown in FIG. 10B, when the width of the actuator 181 in the X direction (hereinafter, simply referred to as the width) is a constant value W3, the current density is constant, so that the upper end 181a and the lower end of the actuator 181 are constant. Both the portion 181b and the intermediate portion 181b generate heat in the same manner. On the other hand, the upper end portion 181a is connected to the first base member 1a, and the lower end portion 181b is connected to the second base member 1b. Since the second base members 1a and 1b have a sufficiently large surface area and volume with respect to the actuator 181 and therefore, they also function as a heat sink for dissipating the heat generated by the actuator 181.

On the other hand, the base end of the beam 5 is connected to the intermediate portion 181b of the actuator 181. However, the beam 5 itself has a smaller surface area and volume than the first and second base members 1a and 1b, and is sufficient as a heat sink. Does not function. Therefore, the temperature of the intermediate portion 181b of the actuator 181 rises significantly as compared with the upper end portion 181a and the lower end portion 181c. Therefore, in the intermediate portion 181b, the stress that can cause plastic deformation is smaller than that in the other portions. In addition, when the actuator 181 is driven, the largest amount of deformation is in the vicinity of the intermediate portion 181b. Therefore, it can be said that the stress increases in the intermediate portion 181b and the possibility of causing plastic deformation is highest.

Therefore, the actuator 180 of the present embodiment is configured so that the width changes continuously as shown in FIG. 10A. Specifically, the width is continuously reduced from the intermediate portion 180b of the actuator 180 to the upper end portion 180a which is a connecting portion with the first base member 1a. Further, the width is continuously reduced from the intermediate portion 180b of the actuator 180 to the lower end portion 180c which is a connecting portion with the second base member 1b.

By configuring the actuator 180 in this way, it is possible to suppress plastic deformation of the actuator 180 and improve its reliability. This will be described further.

As described above, the temperature of the intermediate portion 180b may become the highest when the actuator 180 is driven. On the other hand, according to the present embodiment, the width W1 of the intermediate portion 180b is made thicker than the width W2 in the vicinity of the connection portion with another portion, for example, the first base member 1a, so that the width W1 of the intermediate portion 180b is thicker. The amount of heat generated can be suppressed by lowering the current density. As a result, it is possible to suppress the temperature rise in the intermediate portion 180b and make it difficult for plastic deformation to occur even when a constant stress is applied to the actuator 180. Further, by making the width W1 of the intermediate portion 180b thicker than the other portions, the rigidity in the portion can be increased and the influence of stress can be reduced. Further, since it is possible to suppress the intermediate portion 180b from trying to rotate around the XY plane, the driven member 7 can be displaced by a desired amount without impairing the driving force of the beam 5 in the X direction. In particular, when the driven member 7 connected to the beam 5 intersecting the actuator 3 moves in the direction intersecting the beam 5, the reduction in the driving amount of the driven member 7 due to the rotation of the intermediate portion 180b is prevented. can do. In the actuator 180, if the cross-sectional area of the intermediate portion 180b is made larger than the cross-sectional area of the other portion, the current density is lowered and the surface area is increased, so that the effect of suppressing the temperature rise is enhanced. However, if not only the width W1 of the intermediate portion 180b but also the thickness is changed, an actuator processing step is added in the manufacturing steps shown in FIGS. 3A to 3E.

In this embodiment, the actuator 180 corresponding to the actuator 3 shown in FIG. 1 has been described as an example, but the feature of the actuator 180, that is, the connection portion from the intermediate portion 180b to the fixed portion 1 having a width in the X direction. The shape that continuously decreases toward the upper end portion 180a and the lower end portion 180b is applicable to all of the actuators shown in the first and second embodiments including the first to third modifications. However, in the first and second embodiments, the actuator 180 may be applied to only one of the two actuators, and further, when the beam 6 is connected to the fixed portion 1 instead of the actuator, the actuator Actuator 180 may be applied to 3.

(Other embodiments)
All of the support portions 9 shown in the first embodiment and the first modification extend along the Y direction, but may be inclined from the Y direction. Further, a plurality of them may be arranged in the opening 2. When a plurality of support portions 9 are arranged in the opening 2, they may be arranged parallel to each other or arranged at a predetermined angle. It may be integrated so as to intersect. Similarly, although the second and third support portions 162 and 163 shown in the modified examples 2 and 3 all extend along the Y direction, they may be inclined from the Y direction. Further, a plurality of second support portions 162 may be arranged in the first opening 21, a plurality of third support portions 163 may be arranged in the second opening 22, or both of them may be satisfied. May be good. When a plurality of second support portions 162 are arranged in the first opening 21, they may be arranged parallel to each other or arranged at a predetermined angle. It may be integrated so as to intersect. The same applies when a plurality of third support portions 163 are arranged in the second opening 22.

Further, the support portion 9, the second and third support portions 162, 163 are composed of the second silicon layer 230, and the width in the X direction of these is the required rigidity or deformation of the fixing portion 1 or 10. It can be changed as appropriate according to the allowable amount and the like. Further, the support portion 9 and the second and third support portions 162 and 163 may be processed so that the thickness in the Z direction is thinner than that of the second silicon layer 230. For example, since the distance between the beams 5 and 6 and the support portion 9 in the Z direction is about 1 μm, which is the thickness of the insulating layer 220, an external force such as an external impact or the beams 5 and 6 and the support portion 9 The beams 5, 6 and the like may collide with the support portion 9 and the like due to the electrostatic attraction generated between the beams and the like. If this impact is strong, the beams 5 and 6 will be damaged, and even if the impact is weak, the beams 5, 6 and the like may be stuck to the support portion 9 and the like. When such sticking occurs, the displacement expansion mechanism 510 and eventually the shutter device 500 do not operate normally. In order to avoid such a problem, for example, in the step shown in FIG. 3B, the insulating layer 220 of the portion corresponding to the support portion 9 is removed by using a mask (not shown), and the portion of the portion corresponding to the support portion 9 is removed. The second silicon layer 230 may be removed by a predetermined thickness from the upper side in the Z direction.

In the displacement expanding mechanisms 510 and 520, which are MEMS elements shown in each embodiment including each modification, the number of beams connected to the driven member 7 or 70 is set to two, but one beam is covered. It may be connected to the drive member 7 or 70. In that case, for example, the beam is driven by one actuator to displace the driven member 7. Further, the first silicon layer 210 constituting the driven member 7 and the first and second driven members 70 and 140 is removed by a predetermined thickness so that these members are thinner than the first silicon layer 210. It may be. By doing so, the mass of the driven member 7 and the first and second driven members 70 and 140 can be reduced, and the resonance frequency can be improved.

Further, if a desired bonding strength is secured between the substrate 200 and the submount 400, in the configuration shown in FIG. 1, between the lower surface of the second base member 1b and the submount 400 as shown in FIG. It is not necessary to provide the adhesive material 300 on the surface. Similarly, in the configurations shown in FIGS. 5, 8 and 9, the adhesive 300 may not be provided between the lower surface of the third base member 13 and the submount 400. Alternatively, in the configuration shown in FIGS. 1 and 4, an adhesive 300 is provided between the lower surface of the second base member 1b and the submount 400, and the adhesive 300 is provided between the lower surface of the first base member 1b and the submount 400. May not be provided. Similarly, in the configurations shown in FIGS. 5, 8 and 9, an adhesive 300 is provided between the lower surface of the third base member 13 and the submount 400, and the lower surfaces of the first and second base members 11 and 12 and the submount 400 are provided. The adhesive 300 may not be provided between the two.

Further, the feature of the actuator 180 shown in the third embodiment can be applied even when the support portion 9 is not provided in the configurations shown in FIGS. 1 and 4. Further, in the configurations shown in FIGS. 8 and 9, it can be applied even when the second support portion 162 and the third support portion 163 are not provided. Further, it is also possible to combine the respective components described in the above-described modification and the embodiment to form a new embodiment.

The MEMS element of the present invention is useful for application to a shutter device because the driven member can be stably held at a predetermined position by increasing the rigidity of the fixed portion.

1 Fixing part 1a 1st base member 1b 2nd base member 2 Opening 3 Actuator 4 Actuator (another actuator)
5 beam 6 beam (another beam)
6a 1st member 6b 2nd member 7 Driven member 8 Connecting member 9 Supporting part 10 Fixing part 11 1st base member 12 2nd base member 13 3rd base member 20 Opening 21 1st opening 22 2nd opening 30 1st actuator (Actuator)
40 3rd actuator 50 1st beam 60 3rd beam 70 1st driven member (driven member)
80 1st connecting member 90 2nd actuator 101 1st electrode 102 2nd electrode 110 4th actuator 120 2nd beam 130 4th beam 140 2nd driven member 150 2nd connecting member 161 to 163 1st to 3rd support parts 171 to 173 First to third electrodes 180 Actuator 180a Upper end of actuator 180 180b Intermediate part of actuator 180 180c Lower end of actuator 180 200 SOI substrate (board)
210 First silicon layer 220 Insulation layer 230 Second silicon layer 300 Adhesive (bonding member)
400 sub mount (support member)
401 Light passage port (1st light passage port)
402 Second light passage port 500 Shutter device 510,520 Displacement expansion mechanism (MEMS element)

Claims (12)

With the board
The fixing portion provided on the substrate and
With the opening provided in the fixing part,
An actuator whose both ends are connected to the fixed portion,
A beam whose base end side is connected to the actuator and extends parallel to the upper surface of the substrate.
The driven member connected to the tip side of the beam and
While dividing the opening in a plan view, it has a support portion whose both ends are connected to the fixing portion and arranged in parallel with the actuator.
The actuator, the beam, the driven member, and the support portion are MEMS elements arranged in the opening in a plan view. With another actuator, both ends of which are connected to the fixed portion and are provided apart from the actuator,
The proximal side is further connected to the other actuator and further has another beam extending parallel to the top surface of the substrate.
The other actuator and the other beam are arranged in the aperture in a plan view.
The MEMS element according to claim 1, wherein the driven member is connected to the tip end side of the beam and another beam. The MEMS element according to claim 1 or 2, wherein the support portion is provided below the beam at a predetermined distance from the beam. The substrate is formed by laminating a first silicon layer, an insulating layer, and a second silicon layer in this order.
The MEMS device according to claim 1, wherein the beam and the actuator are composed of the first silicon layer, while the support portion is composed of the second silicon layer. With the board
The fixing portion provided on the substrate and
With the opening provided in the fixing part,
Both ends are connected to the fixing portion, and the opening has a first support portion that divides the opening into a first opening and a second opening.
In the first opening in a plan view,
An actuator whose both ends are connected to the fixed portion,
A first beam whose base end side is connected to the actuator and extends parallel to the upper surface of the substrate.
A driven member connected to the tip end side of the first beam is arranged.
In the second opening in a plan view,
A second actuator whose both ends are connected to the fixed portion,
A second beam whose base end side is connected to the second actuator and extends parallel to the upper surface of the substrate.
A second driven member connected to the tip end side of the second beam is arranged.
The first support portion is a MEMS element extending in a direction intersecting the first and second beams in a plan view. A second support portion whose both ends are connected to the fixed portion and arranged in parallel with the actuator,
It further has a third support portion, both ends of which are connected to the fixed portion and arranged in parallel with the second actuator.
The second support portion is provided in the first opening below the first beam at a predetermined distance from the first beam.
The MEMS element according to claim 5, wherein the third support portion is provided below the second beam at a predetermined distance from the second beam in the second opening. A third actuator, both ends of which are connected to the fixed portion and provided apart from the actuator,
A third beam whose base end side is connected to the third actuator and extends parallel to the upper surface of the substrate.
A fourth actuator, both ends of which are connected to the fixing portion and provided apart from the second actuator,
The base end side is further connected to the fourth actuator and further has a fourth beam extending parallel to the upper surface of the substrate.
The third actuator and the third beam are arranged in the first opening in a plan view, and the driven member is connected to the tip side of the first and third beams.
The fourth actuator and the fourth beam are arranged in the second opening in a plan view, and the second driven member is connected to the tip side of the second and fourth beams. 6. The MEMS element according to 6. The substrate has a laminated structure in which a first silicon layer, an insulating layer, and a second silicon layer are laminated in this order.
The actuator and the second actuator are composed of the first silicon layer.
According to claim 5, the first support portion has the same laminated structure as the substrate except for one end portion connected to the fixed portion, and the one end portion is formed by laminating the second silicon layer and the insulating layer. The MEMS element described. The MEMS element according to claim 1 or 5, wherein the actuator is a thermal actuator that generates heat when a current flows and thermally expands in the extending direction. The MEMS element according to claim 9, wherein the width of the actuator continuously decreases from the connection portion with the beam or the connection portion with the first beam to the connection portion with the fixed portion. A support member that supports the substrate and
The MEMS element according to any one of claims 1 to 10, further comprising a joining member provided between the lower surface of the fixing portion and the surface of the supporting member and joining the substrate and the supporting member. The MEMS device according to any one of claims 1 to 11.
A first electrode disposed on the upper surface of the fixing portion and electrically connected to at least one end of the actuator.
A second electrode disposed on the upper surface of the fixing portion and electrically connected to at least the other end of the actuator is provided.
A shutter device that blocks and opens an optical path with the driven member.

Images