JPWO2019220640A1 - Wavefront measuring device, wavefront measuring method, moving body observation device, moving body observation method - Google Patents

Abstract

From the positions of the respective focused spot images detected by the first photodetector (16), the second photodetector (26) and the third photodetector (36), the wavefront estimation unit (41) , Calculating an approximate value of the wavefront of the light flux in the whole aperture, and using the approximate value, the first photodetector (16), the second photodetector (26) and the third photodetector (36) The wavefront measuring device (3) is configured so as to calculate the point image intensity distribution of each detected focused spot image and estimate the wavefront of the light flux at the entire aperture from the point image intensity distribution and the focused spot image. ..

Description

  The present invention relates to a wavefront measuring device and a wavefront measuring method for estimating a wavefront of a light flux in an entire aperture including all apertures of a plurality of imaging optical systems, and a moving body observing device for estimating a luminance distribution of a moving body. is there.

A mobile body observing device for observing a mobile body such as a celestial body or a flying body observes the mobile body by receiving the luminous flux transmitted from the mobile body on the ground.
The light flux transmitted from the moving body may spread because the phase of the light is disturbed due to fluctuations in the refractive index distribution of the atmosphere.
Therefore, in order to improve the accuracy of observing the moving body, the moving body observing device needs to acquire the wavefront that is a surface having the same phase of light.
The following Patent Document 1 discloses a wavefront sensor that measures a wavefront.

BACKGROUND ART A wavefront sensor disclosed in Patent Document 1 below uses a telescope to control a tilt and a focus of a wavefront when observing an object moving at high speed, thereby chasing a light beam transmitted from the object. However, I try to take an image of the atmospheric fault.
The wavefront sensor includes a control mechanism that realizes high-speed movement of the high-speed steering mirror, the imaging lens, and the lenslet array, as a mechanism for controlling the tilt and the focus of the wavefront.

JP, 2016-118547, A

The wavefront measurement accuracy of the conventional wavefront sensor depends on the control accuracy of the control mechanism that realizes high-speed movement of the high-speed steering mirror, the imaging lens, and the lenslet array.
Therefore, the conventional wavefront sensor has a problem that the measurement accuracy of the wavefront may deteriorate depending on the control accuracy of the mounted control mechanism.

  The present invention has been made to solve the above problems, and a wavefront measuring device and a wavefront measuring method capable of measuring a wavefront without mounting a control mechanism such as a lenslet array for realizing high-speed movement. And to obtain a moving body observation device.

  The wavefront measuring apparatus according to the present invention is arranged at mutually different positions, and has a plurality of image forming optical systems for condensing a light beam reflected by a moving body or a light beam transmitted from the moving body, and a plurality of image forming optical systems. From each of the light fluxes collected by the system, a plurality of photodetectors that detect a focused spot image as an image of the moving body, and from the positions of the focused spot images detected by the multiple photodetectors, Calculate the approximate value of the wavefront of the light flux in the entire aperture including all of the apertures of the imaging optical system, and use the estimated value to calculate the point image intensity distribution of the focused spot images detected by multiple photodetectors. A wavefront estimation unit that estimates the wavefront of the light flux at the entire aperture from the point image intensity distribution and the focused spot image is provided.

  According to this aspect of the invention, the wavefront estimation unit calculates the approximate value of the wavefront of the light flux in the entire aperture including all the apertures of the plurality of imaging optical systems from the positions of the focused spot images detected by the plurality of photodetectors. Calculate and use the estimated value to calculate the point image intensity distribution of the focused spot image detected by multiple photodetectors, and from the point image intensity distribution and the focused spot image, calculate the wavefront of the light flux at the entire aperture. A wavefront measuring device was constructed to estimate. Therefore, the wavefront measuring apparatus according to the present invention can measure the wavefront without mounting a control mechanism such as a lenslet array that realizes high-speed movement.

1 is a configuration diagram showing a moving body observation device including a wavefront measurement device 3 according to a first embodiment. 1 is a perspective view showing an appearance of a moving body observation device including a wavefront measurement device 3 according to a first embodiment. 3 is a flowchart showing a processing procedure of the moving body observation apparatus shown in FIG. 1. It is explanatory drawing which shows the image of the mobile body 1 detected by a some photodetector. It is explanatory drawing which shows the image of the mobile body 1 detected by a some photodetector when a wavefront changes with propagation paths. It is explanatory drawing which shows the relationship between the image of the mobile body 1 detected by a some photodetector, and a wavefront. It is explanatory drawing which shows the relationship between the image of the mobile body 1 detected by a some photodetector, and a wavefront. 6 is a flowchart showing a processing procedure of a wavefront estimation unit 41 and a mobile body restoration unit 42. FIG. 7 is an explanatory diagram showing a relationship between the overall aperture, the apertures in each of the plurality of imaging optical systems, and the image 105 of the moving body 1 when the moving body 1 is moving relative to the wavefront measuring apparatus 3. . It is explanatory drawing which shows an example of the light-shielding part whose transmission area of the light beam 2 is smaller than the aperture of an imaging optical system. It is explanatory drawing which shows an example of the light-shielding part in which the light-shielding area|region which shields the light beam 2 is contained in a part of opening. It is explanatory drawing which shows the example in which the light-shielding part from which the shape or size of the transmission area of a light beam differs is mixed as a some light-shielding part. It is explanatory drawing which shows the example in which the light-shielding part from which the shape or size of the transmission area of a light beam differs is mixed as a some light-shielding part. It is explanatory drawing which shows the example in which the light-shielding part from which the shape or size of the transmission area of a light beam differs is mixed as a some light-shielding part. FIG. 9 is a configuration diagram showing a moving body observation device including a wavefront measurement device 3 according to a third embodiment. FIG. 9 is a configuration diagram showing a moving body observation device including a wavefront measurement device 3 according to a fourth embodiment. FIG. 13 is a configuration diagram showing a moving body observation device including a wavefront measurement device 3 according to a fifth embodiment. FIG. 8 is an explanatory diagram showing a luminance distribution estimation process of the moving body 1 by the moving body restoration unit 80.

  Hereinafter, in order to explain the present invention in more detail, modes for carrying out the present invention will be described with reference to the accompanying drawings.

Embodiment 1.
FIG. 1 is a configuration diagram showing a moving body observation apparatus including a wavefront measurement apparatus 3 according to the first embodiment.
In FIG. 1, a moving body 1 is an object existing outside the atmosphere or in the atmosphere.
The light beam reflected by the moving body 1 or the light beam transmitted from the moving body 1 is a light beam 2 that has spread due to fluctuations in the refractive index distribution of the atmosphere, and the light beam 2 is incident on the wavefront measuring device 3. It
The wavefront measuring device 3 is a device that measures the wavefront from the incident light flux 2.
The wavefront measuring device 3 includes a wavefront sensor 10-1, a wavefront sensor 10-2, and a wavefront sensor 10-3.
In FIG. 1, the wavefront measuring device 3 includes three wavefront sensors, but it suffices to include at least two or more wavefront sensors.

The wavefront sensor 10-1 includes a first light shielding unit 11, a first imaging optical system 12, a first focus adjustment lens 14, a first shutter 15, and a first photodetector 16.
The wavefront sensor 10-2 includes a second light shield unit 21, a second imaging optical system 22, a second focus adjustment lens 24, a second shutter 25, and a second photodetector 26.
The wavefront sensor 10-3 includes a third light shielding unit 31, a third imaging optical system 32, a third focus adjustment lens 34, a third shutter 35, and a third photodetector 36.
The wavefront sensor 10-1, the wavefront sensor 10-2, and the wavefront sensor 10-3 are arranged at different positions.

The first light shielding unit 11 spatially limits the transmission area of the light flux 2 by shielding a part of the incident light flux 2.
In the wavefront measuring apparatus 3 shown in FIG. 1, the first light shielding unit 11 is arranged on the input side of the first imaging optical system 12. However, this is merely an example, and the first light shielding unit 11 may be arranged on the output side of the first imaging optical system 12. That is, the first light shielding unit 11 may be arranged at an optically conjugate pupil position in the first image forming optical system 12, so that the first image forming optical system 12 and the first photodetector 16 are arranged. It may be arranged between and.
The second light shielding unit 21 and the third light shielding unit 31 spatially limit the transmissive region of the light flux 2 similarly to the first light shielding unit 11.

The first imaging optical system 12 is an optical system that collects the light flux 2 that has passed through the first light shielding unit 11.
The second image forming optical system 22 and the third image forming optical system 32 are optical systems that condense the light flux 2 similarly to the first image forming optical system 12.

The first focus adjustment lens 14 adjusts the optical path length of the light flux 2 that has passed through the first imaging optical system 12, and outputs the light flux 2 after the optical path length adjustment to the first shutter 15.
The second focus adjustment lens 24 adjusts the optical path length of the light flux 2 that has passed through the second imaging optical system 22, and outputs the light flux 2 after the optical path length adjustment to the second shutter 25.
The third focus adjustment lens 34 adjusts the optical path length of the light flux 2 that has passed through the third imaging optical system 32, and outputs the light flux 2 after the optical path length adjustment to the third shutter 35.

The first shutter 15 temporally limits passage of the light flux 2 output from the first focus adjustment lens 14 in order to adjust the light amount of the light flux 2 received by the first photodetector 16.
The second shutter 25 temporally limits passage of the light flux 2 output from the second focus adjustment lens 24 in order to adjust the light amount of the light flux 2 received by the second photodetector 26.
The third shutter 35 temporally limits passage of the light flux 2 output from the third focus adjustment lens 34 in order to adjust the light amount of the light flux 2 received by the third photodetector 36.

The first photodetector 16, the second photodetector 26, and the third photodetector 36 are realized by, for example, an image sensor.
The first photodetector 16 detects a focused spot image as an image of the moving body 1 from the light flux 2 that has passed through the first shutter 15, and an intensity image indicating the focused spot image is obtained as a wavefront estimation unit 41. Output to.
The second photodetector 26 detects a focused spot image as an image of the moving body 1 from the light flux 2 that has passed through the second shutter 25, and outputs an intensity image indicating the focused spot image to the wavefront estimation unit 41. Output to.
The third photodetector 36 detects a focused spot image as an image of the moving body 1 from the light flux 2 that has passed through the third shutter 35, and obtains an intensity image indicating the focused spot image as a wavefront estimation unit 41. Output to.

The wavefront estimation unit 41 is realized by a computer such as a personal computer or a wavefront estimation circuit.
The wavefront estimation unit 41 determines the wavefront sensor 10-1, the wavefront from the position of the focused spot image detected by each of the first photodetector 16, the second photodetector 26, and the third photodetector 36. An approximate value of the wavefront of the light flux at the entire aperture including all the apertures of the sensor 10-2 and the wavefront sensor 10-3 is calculated.
Further, the wavefront estimation unit 41 uses the estimated value to obtain point images of the focused spot images detected by the first photodetector 16, the second photodetector 26, and the third photodetector 36, respectively. The intensity distribution is calculated, and the wavefront of the light flux at the entire aperture is estimated from the point image intensity distribution and the focused spot image.

The mobile body restoration unit 42 is realized by a computer such as a personal computer, or a mobile body restoration circuit.
The moving body restoration unit 42 estimates the focused spot images detected by the first photodetector 16, the second photodetector 26, and the third photodetector 36 and the wavefront estimation unit 41. A process of estimating the luminance distribution of the moving body 1 is performed from the point image intensity distribution.
The storage device 43 is realized by, for example, a storage processing circuit.
The storage device 43 is a device that records the wavefront of the entire aperture estimated by the wavefront estimation unit 41, the brightness distribution of the moving body 1 estimated by the moving body restoration unit 42, and the like.

Here, each of the wavefront estimation circuit and the moving body restoration circuit is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), or an FPGA (Field-Programmable Gate Array). ), or a combination thereof.
In addition, the storage processing circuit is, for example, a RAM (Random Access Memory), a ROM (Read Only Memory), a flash memory, an EPROM (Erasable Programmable Read Only Memory), an EEPROM (Electrically Programmable Memory), or an EEPROM (Electrically Programmable Memory). Compliant semiconductor memory, magnetic disk, flexible disk, optical disk, compact disk, mini disk, or DVD (Digital Versatile Disc).

The time calibrating unit 51 has a built-in clock and calibrates the time of the clock using a GPS signal transmitted from a GPS (Global Positioning System) satellite or an NTP (Network Time Protocol).
The counter 52 measures the elapsed time from a certain time when the time of the clock calibrated by the time calibrating unit 51 reaches a certain time.

The control device 53 is realized by a computer such as a personal computer.
The control device 53 controls each of the first focus adjustment lens 14, the second focus adjustment lens 24, and the third focus adjustment lens 34 based on the elapsed time measured by the counter 52.
In addition, the control device 53 controls each of the first shutter 15, the second shutter 25, and the third shutter 35 based on the elapsed time measured by the counter 52.
Further, the control device 53 controls each of the first photodetector 16, the second photodetector 26, and the third photodetector 36 based on the elapsed time measured by the counter 52.
The drive device 54 is a device that changes the respective pointing directions in the first imaging optical system 12, the second imaging optical system 22, and the third imaging optical system 32 according to the control signal output from the control device 53. Is.

FIG. 2 is a perspective view showing the appearance of a moving body observation apparatus including the wavefront measurement apparatus 3 according to the first embodiment.
In FIG. 2, the housing 61 mounts the wavefront sensor 10-1, the wavefront sensor 10-2, and the wavefront sensor 10-3.
The housing 62 mounts the wavefront estimation unit 41, the moving body restoration unit 42, the storage device 43, the time calibration unit 51, the counter 52, and the control device 53.
In FIG. 1, the wavefront measuring device 3 includes three wavefront sensors, but in FIG. 2, the wavefront measuring device 3 includes seven wavefront sensors.
The transmission region of the light flux 2 in the first light shielding unit 11, the transmission region of the light flux 2 in the second light shielding unit 21, and the transmission region of the light beam 2 in the third light shielding unit 31 have the same shape and size. .. The transmission area of the light flux 2 is an area through which the light flux 2 is transmitted.
The light blocking area of the light flux 2 in the first light blocking portion 11, the light blocking area of the light flux 2 in the second light blocking portion 21, and the light blocking area of the light flux 2 in the third light blocking portion 31 are the first imaging optical system 12, It is slightly smaller than the respective apertures in the second imaging optical system 22 and the third imaging optical system 32. The light shielding area is an area where the light flux 2 is shielded.

Light is transmitted through optical parts such as lenses and the human pupil. Further, an optical component such as a mirror reflects light. When light passes through an optical component or the like, the phase distribution of light changes, and when the light is reflected by the optical component, the phase distribution of light changes.
The atmosphere of the earth is made up of a medium such as oxygen, nitrogen and water vapor, and light is transmitted like the optical parts such as lenses.
Since the refractive index of a medium such as oxygen changes with changes in temperature and atmospheric pressure, the phase distribution of light that passes through the atmosphere of the earth changes with changes in temperature and atmospheric pressure. Since light is an electromagnetic wave, the phase distribution of light can be regarded as a wavefront.

The wavefront measuring apparatus 3 shown in FIG. 1 estimates the wavefront by receiving the light flux 2 reflected by the moving body 1 existing in the atmosphere or in the atmosphere or the light flux 2 transmitted from the moving body. The wavefront estimated by the wavefront measuring device 3 changes as the refractive index of a medium such as oxygen changes.
Although the change in the refractive index of the medium itself is small, when the optical path through which light propagates becomes long, the change in the refractive index becomes large compared to the wavelength of the light and cannot be ignored. Strongly affected by fluctuations.
Further, the atmosphere on the ground is affected by radiation from the sun and heat transport, and is also affected by the rotation of the earth, so that an atmospheric layer is formed between the ground and the sky. The wave front of the light transmitted through the atmospheric layer is complicatedly disturbed.

Next, the moving body observation apparatus shown in FIG. 1 will be described.
FIG. 3 is a flowchart showing a processing procedure of the mobile observation device shown in FIG.
The driving device 54 enables the first imaging optical system 12 to focus the light flux 2 even when the moving body 1 is moving relative to the wavefront measuring device 3. The direction of the imaging optical system 12 is changed.
The driving device 54 changes the directivity direction of the second imaging optical system 22 and the directivity direction of the third imaging optical system 32, similarly to the first imaging optical system 12.
For example, when the moving body 1 is a star, the moving body 1 moves about 15 arcseconds (=15/3600 degrees) per second due to diurnal movement. Therefore, in order to enable tracking of the moving body 1, the driving device 54 causes the driving device 54 to direct the respective directions in the first imaging optical system 12, the second imaging optical system 22, and the third imaging optical system 32. Must be controllable with arc-second accuracy.

The time calibration unit 51 calibrates the time of a built-in clock using a GPS signal or NTP transmitted from a GPS satellite so that the driving device 54 can control the pointing direction with arc-second accuracy.
The counter 52 measures the elapsed time from a certain time when the time of the clock calibrated by the time calibrating unit 51 reaches a certain time.
The control device 53 controls each of the first focus adjustment lens 14, the second focus adjustment lens 24, and the third focus adjustment lens 34 based on the elapsed time measured by the counter 52.
In addition, the control device 53 controls each of the first shutter 15, the second shutter 25, and the third shutter 35 based on the elapsed time measured by the counter 52.
Further, the control device 53 controls each of the first photodetector 16, the second photodetector 26, and the third photodetector 36 based on the elapsed time measured by the counter 52.
The driving device 54 changes the respective directing directions in the first imaging optical system 12, the second imaging optical system 22, and the third imaging optical system 32 according to the control signal output from the control device 53.

When the light beam 2 reflected by the moving body 1 or the light beam 2 transmitted from the moving body 1 is incident on the first light blocking unit 11, the first light blocking unit 11 blocks a part of the light beam 2 so that the transmission region of the light beam 2 is blocked. Limit spatially.
The first imaging optical system 12 condenses the light flux 2 that has passed through the first light shielding unit 11 (step ST1 in FIG. 3).

Similarly to the first light blocking unit 11, the second light blocking unit 21 and the third light blocking unit 31 block a part of the light beam 2 when the light beam 2 is incident, thereby transmitting the light beam 2. Is spatially restricted.
Similarly to the first image forming optical system 12, the second image forming optical system 22 and the third image forming optical system 32 also pass through the second light shielding unit 21 and the third light shielding unit 31, respectively. The condensed light beam 2 is condensed (step ST1 in FIG. 3).

The first focus adjustment lens 14 adjusts the optical path length of the light flux 2 that has passed through the first imaging optical system 12, and outputs the light flux 2 after the optical path length adjustment to the first shutter 15.
The second focus adjustment lens 24 adjusts the optical path length of the light flux 2 that has passed through the second imaging optical system 22, and outputs the light flux 2 after the optical path length adjustment to the second shutter 25.
The third focus adjustment lens 34 adjusts the optical path length of the light flux 2 that has passed through the third imaging optical system 32, and outputs the light flux 2 after the optical path length adjustment to the third shutter 35.
The adjustment amounts of the optical path lengths of the first focus adjustment lens 14, the second focus adjustment lens 24, and the third focus adjustment lens 34 are controlled by the control device 53.
The adjustment amount of the optical path length is controlled by the control device 53, so that the light receiving surfaces 16a, 26a, 36a of the first photodetector 16, the second photodetector 26, and the third photodetector 36 respectively. , The light flux 2 is in focus.

The first shutter 15 adjusts the light amount of the light flux 2 received by the first photodetector 16, and according to the control signal output from the control device 53, the first focus adjustment lens 14 outputs the light flux. Limit the passage of 2 in time.
When the exposure time of the light flux 2 in the first photodetector 16 becomes longer than the coherence time, the atmospheric state changes, and the spread of the image of the moving body 1 detected by the first photodetector 16 increases. .. The coherence time is generally about 1 to 10 ms.
When the moving body 1 is moving at high speed, the control device 53 controls the light flux 2 of the first shutter 15 so that the exposure time of the light flux 2 at the first photodetector 16 is shorter than the coherence time. Control transit time.
As with the first shutter 15, the second shutter 25 and the third shutter 35 also pass the respective light fluxes 2 output from the second focus adjustment lens 24 and the third focus adjustment lens 34 for a time. Limit it.
Like the first shutter 15, the control device 53 controls the passage time of each light flux 2 through the second shutter 25 and the third shutter 35.

When the control device 53 controls the transit time of the light flux 2 as described above, the respective light fluxes received by the first photodetector 16, the second photodetector 26, and the third photodetector 36. The light intensity of 2 may decrease.
When the light amount of the light flux 2 becomes small, the control device 53 controls the first shutter 15, the second shutter 25, and the third shutter 35 so that the light flux 2 is repeatedly passed and blocked a plurality of times. .. By repeating passing and blocking of the light flux 2 multiple times, each of the first photodetector 16, the second photodetector 26, and the third photodetector 36 images the image of the moving body 1 multiple times. You will be able to detect.

The first photodetector 16 detects a focused spot image as an image of the moving body 1 from the light flux 2 that has passed through the first shutter 15, and an intensity image indicating the focused spot image is obtained as a wavefront estimation unit 41. Is output (step ST2 in FIG. 3).
The second photodetector 26 detects a focused spot image as an image of the moving body 1 from the light flux 2 that has passed through the second shutter 25, and outputs an intensity image indicating the focused spot image to the wavefront estimation unit 41. Is output (step ST2 in FIG. 3).
The third photodetector 36 detects a focused spot image as an image of the moving body 1 from the light flux 2 that has passed through the third shutter 35, and obtains an intensity image indicating the focused spot image as a wavefront estimation unit 41. Is output (step ST2 in FIG. 3).

Here, FIG. 4 is an explanatory view showing an image of the moving body 1 detected by the plurality of photodetectors.
In FIG. 4, not only the first image forming optical system 12, the second image forming optical system 22 and the third image forming optical system 32 but also a total of ten image forming optical systems are mounted on the wavefront measuring apparatus 3. An example is shown.
Therefore, not only the first photodetector 16, the second photodetector 26, and the third photodetector 36, but a total of 10 photodetectors are mounted on the wavefront measuring apparatus 3.
FIG. 4 shows an example in which there are three atmospheric layers between the ground and the sky, 101 is a first atmospheric layer, 102 is a second atmospheric layer, and 103 is a third atmospheric layer.

  In FIG. 4, each of the first image forming optical system 12, the second image forming optical system 22, and the third image forming optical system 32 is schematically represented as one lens. Generally, in order to reduce aberrations in the image forming optical system, each of the first image forming optical system 12, the second image forming optical system 22, and the third image forming optical system 32 includes a plurality of sheets. Often composed of a lens. Further, in order to reduce the chromatic aberration in the image forming optical system, each of the first image forming optical system 12, the second image forming optical system 22, and the third image forming optical system 32 is formed by a plurality of reflecting mirrors. It may be composed.

The first image forming optical system 12, the second image forming optical system 22, and the third image forming optical system 32 respectively transmit the light flux 2 to the first photodetector 16, the second photodetector 26, and the second photodetector 26. An image 104 of the moving body 1 is formed on the light receiving surfaces 16a, 26a, and 36a by collecting the light on the light receiving surfaces 16a, 26a, and 36a of the third photodetector 36.
Since the wavefront is disturbed when the light flux 2 passes through the first atmosphere layer 101, the second atmosphere layer 102, and the third atmosphere layer 103, the image 104 of the moving body 1 shows that the moving body 1 is a point. Even an object that can be regarded spreads.
Therefore, excluding the spread of the image 104 caused by the aberration of the imaging optical system and the spread of the image 104 caused by the resolution of the photodetector, the cause of the spread of the image 104 is atmospheric fluctuation.
When the moving body 1 is an object having a spread, the spread of the image 104 is the same as the spread of the object itself, excluding the spread caused by the aberration of the imaging optical system and the resolution of the photodetector. It is represented by the spread due to fluctuations. Mathematically, when the spread of the object itself satisfies the angular range and the isoplanatic angle at which the wavefronts can be considered equal, the spread of the image 104 is expressed by the convolution of the spread of the object itself and the spread due to atmospheric fluctuation.

If the moving body 1 is moving relative to the wavefront measuring device 3 and the direction in which the moving body 1 is viewed from the ground is different, the propagation paths of the light flux 2 are not equal, and the wavefronts are different depending on the propagation paths.
FIG. 5: is explanatory drawing which shows the image of the mobile body 1 detected by a some photodetector when a wavefront changes with propagation paths. 5, the same reference numerals as those in FIG. 4 indicate the same or corresponding portions.
Each of the light flux 4, the light flux 5, and the light flux 6 is the light flux 2 reflected by the moving body 1 or the light flux 2 transmitted from the moving body 1. The light flux 4, the light flux 5, and the light flux 6 are different from each other in the contribution of fluctuations in the atmosphere layer, and the propagation path of the light flux 4, the propagation path of the light flux 5, and the propagation path of the light flux 6 are different from each other.
When the light flux 2 focused on the light receiving surface of each photodetector by each imaging optical system is considered to be each of the light flux 4, the light flux 5, and the light flux 6, the light flux 4 is applied to each light receiving surface. , The light beam 5 and the light beam 6 form an image 105 of the moving body 1.
The plurality of images 105 formed on the light receiving surfaces of the respective photodetectors have a spread due to atmospheric fluctuations and can be used for estimating the wavefront.

6 and 7 are explanatory diagrams showing the relationship between the image of the moving body 1 and the wavefront detected by the plurality of photodetectors.
FIG. 6 shows an example in which the light flux 2 propagates without spreading in the traveling direction, and FIG. 7 shows an example in which the light flux 2 propagates while spreading in the traveling direction.
In FIG. 6 and FIG. 7, not only the first imaging optical system 12, the second imaging optical system 22 and the third imaging optical system 32 but also a total of 64 (=8×8) images are formed. An example in which an optical system is mounted on the wavefront measuring apparatus 3 is shown.
In addition, in FIG. 6 and FIG. 7, not only the first photodetector 16, the second photodetector 26 and the third photodetector 36 but also a total of 64 photodetectors are provided in the wavefront measuring device 3. Shows an example implemented.

6 and 7, 105a is an image of the moving body 1 when the light flux 2 is propagated without spreading in the traveling direction, and 105b is propagated while the light flux 2 is spreading in the traveling direction. It is an image of the moving body 1 when it is.
When the light beam 2 propagates without spreading in the traveling direction, as shown in FIG. 6, the positions of the images 105a of the respective moving bodies 1 condensed by the 64 imaging optical systems are 64 positions. Of the image forming optical system.
When the light flux 2 is propagated while spreading in the traveling direction, as shown in FIG. 7, the positions of the images 105b of the respective moving bodies 1 focused by the 64 imaging optical systems are 64. It is displaced from each position of the imaging optical system.
The wavefront 106a is obtained from the positions of the 64 images 105a of the moving body 1, and the wavefront 106b is obtained from the positions of the 64 images 105b of the moving body 1.

6 and 7 show an example in which 64 image forming optical systems are arranged in a grid pattern. However, the arrangement is not limited to this, and for example, the arrangement of 64 imaging optical systems may be a honeycomb arrangement.
In FIG. 6 and FIG. 7, in the 64 light-shielding portions including the first light-shielding portion 11, the second light-shielding portion 21, and the third light-shielding portion 31, the light-shielding regions where the light flux 2 is shielded are painted black. The following shows an example. However, in the light-shielding portion, the light-shielding region does not have to transmit unnecessary light and may be coated with a color other than black.
Further, in the light shielding portion, the light shielding region may be colored or processed so as to absorb unnecessary light, or may be colored or processed so as to scatter unnecessary light.

The wavefront estimation unit 41 acquires the intensity images showing the focused spot images from each of the first photodetector 16, the second photodetector 26, and the third photodetector 36.
The wavefront estimation unit 41 determines the wavefront of the light flux 2 in the entire aperture including all the apertures of the wavefront sensor 10-1, the wavefront sensor 10-2, and the wavefront sensor 10-3 from the position of the focused spot image indicated by each intensity image. Is estimated (step ST3 in FIG. 3).
FIG. 8 is a flowchart showing a processing procedure of the wavefront estimation unit 41 and the moving body restoration unit 42.
Hereinafter, the processing content of the wavefront estimation unit 41 will be specifically described with reference to FIG. 8.

First, when the wavefront estimation unit 41 receives the intensity images from each of the first photodetector 16, the second photodetector 26, and the third photodetector 36, the focused spot images indicated by the plurality of intensity images. An approximate value of the wavefront of the light beam 2 at the entire aperture is calculated from the position (1) (step ST11 in FIG. 8).
Since the process itself for calculating the approximate value of the wavefront from the positions of the plurality of focused spot images is a known technique, detailed description thereof will be omitted.
A method of estimating the wavefront from the positions of a plurality of focused spot images is disclosed in Non-Patent Document 1 below, for example.
[Non-patent document 1] National Astronomical Observatory of Japan vol.2 No.2

Here, the control device 53 controls the first shutter 15, the second shutter 25, and the third shutter 35 so that the passage and the light blocking of the light flux 2 are repeated a plurality of times.
Under control of the control device 53, N intensity images are output to the wavefront estimation unit 41 from each of the first photodetector 16, the second photodetector 26, and the third photodetector 36. To do.
Then, the wavefront estimation unit 41 determines the wavefront from the position of the focused spot image indicated by each n (n=1, 2,..., N)-th intensity image among the N intensity images. It is assumed that the approximate value of is calculated.
When the moving body 1 is a point image, or when the moving body 1 can be approximated to a point image, a mode in which the position of the center of gravity of the point image is obtained as the position of the focused spot image can be considered.
When the moving body 1 is an object with a spread, the wavefront can be obtained from the intervals between the plurality of focused spot images or the relative positions of the focused spot images. Therefore, as the position of the focused spot image, a mode in which the cross-correlation between the focused spot images or the interval between the characteristic positions of the focused spot images can be considered.

以下、高精度な波面の推定処理を説明する前に、高精度な波面の推定処理の原理及び移動体１の輝度分布推定処理の原理を説明する。The wavefront estimation unit 41 sets the phase of the wavefront, which is an approximate value calculated from the position of the focused spot image indicated by each n-th intensity image, to Φ _0,n .
The wavefront estimation unit 41 uses the phase Φ _0,n as an initial value of the phase Φ _n (u,v) of the wavefront of the light flux 2 at the entire aperture, as shown in the following expression (1), and thereby the estimated value is obtained. Estimate more accurate wavefront than. (U,v) are the coordinates of the pupil space.

Before describing the highly accurate wavefront estimation process, the principle of the highly accurate wavefront estimation process and the principle of the luminance distribution estimation process of the moving body 1 will be described below.

開口Ｍ_ｍ（ｕ，ｖ）は、既知であり、位相Φ_ｎ（ｕ，ｖ）の初期値は、概算値である波面の位相Φ_０，ｎであるため、瞳関数Ｇ_ｍ，ｎ（ｕ，ｖ）は、位相Φ_ｎ（ｕ，ｖ）と開口Ｍ_ｍ（ｕ，ｖ）から算出される。FIG. 9 shows the relationship between the overall aperture, each aperture in the plurality of imaging optical systems, and the image 105 of the moving body 1 when the moving body 1 is moving relative to the wavefront measuring apparatus 3. FIG.
FIG. 9 shows an example in which M imaging optical systems are mounted on the wavefront measuring apparatus 3.
M ₀ (u,v) is the total aperture.
Each of M ₁ (u,v), M ₂ (u,v),..., M _M (u,v) is an aperture in each of the M imaging optical systems. The subscript M in M _M (u,v) is an integer of 2 or more, for example, m=1, 2,..., M.
The pupil function G _m,n (u,v) represented by the wavefront aberration and the amplitude distribution on the pupil is represented by the following expression (2), and the entire aperture corresponding to each n-th intensity image is obtained. It is represented by the phase Φ _n (u,v) of the wavefront of the light flux 2 at and the aperture M _m (u,v).

Since the aperture M _m (u,v) is known and the initial value of the phase Φ _n (u,v) is the approximate phase of the wavefront Φ _0,n , the pupil function G _m,n (u , V) is calculated from the phase Φ _n (u, v) and the aperture M _m (u, v).

式（３）において、λは、波長である。Further, the relationship between the phase Φ _n (u,v) and the wavefront W _n (u,v) is expressed by the following equation (3).

In Expression (3), λ is a wavelength.

式（４）において、Ｆ^−１は、逆フーリエ変換を表す記号である。
点像強度分布を示す点広がり関数ｋ_ｍ，ｎ（ｘ，ｙ）は、以下の式（５）に示すように、振幅広がり関数ａ_ｍ，ｎ（ｕ，ｖ）と、振幅広がり関数ａ_ｍ，ｎ（ｕ，ｖ）の複素共役との積で表される。（ｘ，ｙ）は、実空間の座標である。

The amplitude spread function a _m,n (u,v) is obtained by performing an inverse Fourier transform on the pupil function G _m,n (u,v) as shown in the following expression (4).

In Expression (4), F ⁻¹ is a symbol representing the inverse Fourier transform.
Point spread function _{k m} point spread shows a, n (x, y), as shown in the following equation (5), the amplitude spread function _{a m,} and n (u, v), the amplitude spread function _{a m , N} (u, v) with the complex conjugate. (X, y) are coordinates in the real space.

式（６）における畳み込み積分を“＊”の記号で表記すると、式（６）は、以下の式（７）で表される。

一般的には、移動体１の像ｉ_ｍ，ｎ（ｘ，ｙ）は、点広がり関数ｋ_ｍ，ｎ（ｘ，ｙ）と、移動体１の輝度分布ｏ（ｐ，ｑ）との畳み込み積分で得られるが、式（６）及び式（７）には、それぞれの光検出器で生じるノイズｅ_ｍ，ｎ（ｘ，ｙ）が付加されている。Assuming that the luminance distribution of the moving body 1 is o(p,q) and the noise generated in each photodetector is represented by em _,n (x,y), the m-th opening _Mm (u,v). The image im _,n (x,y) of the moving body 1 corresponding to is expressed by the following equation (6). (P, q) are coordinates in the real space indicating the position where the moving body 1 exists.
The brightness distribution o(p,q) of the moving body 1 is the intensity of the light beam 2 reflected by the moving body 1 or the intensity of the light beam 2 transmitted from the moving body 1.

When the convolution integral in Expression (6) is represented by the symbol “*”, Expression (6) is expressed by Expression (7) below.

In general, the image _{i m} of the moving body 1, n (x, y) is the point spread function _{k m,} and n (x, y), the convolution of the intensity distribution of the moving body 1 o (p, q) Although obtained by integration, the noises em _,n (x,y) generated in the respective photodetectors are added to the equations (6) and (7).

式（８）において、点広がり関数ｋ_ｍ，ｎ（ｘ，ｙ）は、式（２）、式（４）及び式（５）から得られる。したがって、式（８）において、未知の値は、移動体１の輝度分布ｏ（ｐ，ｑ）のみである。
移動体１の輝度分布ｏ（ｐ，ｑ）は、差分の二乗和ｅが最小になるｏ（ｐ，ｑ）を探索することで求まる。The following expression (8) is an image of the moving body 1 obtained from the luminance distribution o(p,q) of the moving body 1 and the point spread function km _,n (x,y) indicating the point image intensity distribution. The sum of squares e of the difference between o(p,q)*km _,n (x,y) and the measured image of the moving body 1, i _,n (x,y), is shown.

In Expression (8), the point spread function km _,n (x,y) is obtained from Expression (2), Expression (4), and Expression (5). Therefore, in Expression (8), the only unknown value is the luminance distribution o(p,q) of the moving body 1.
The brightness distribution o(p,q) of the moving body 1 can be obtained by searching o(p,q) that minimizes the sum of squared differences e.

The moving body 1 is moving relative to the wavefront measuring device 3. Even if the driving device 54 changes the respective directing directions in the first image forming optical system 12, the second image forming optical system 22, and the third image forming optical system 32, the moving body 1 and the wavefront measuring device 3 are Relative movements cannot be completely canceled.
Therefore, when the time t changes, the relative position of the moving body 1 changes.
The number of times the time t changes and the number of frames, which is the number of intensity images obtained by the wavefront estimation unit 41, do not need to be the same, but if the number of frames is 10, intensity images at 10 points of time are obtained. Therefore, the frame number corresponds to the time number.
Here, it is assumed that the luminance distribution o(p,q) of the moving body 1 does not depend on the frame and does not change. However, the wavefront is assumed to change from frame to frame.

式（９）において、Ｉ_ｍ，ｎ（ｕ，ｖ）は、ｉ_ｍ，ｎ（ｘ，ｙ）のスペクトルであり、以下の式（１０）のように表される。

When searching the luminance distribution o(p,q) of the moving body 1, the sum of squares of the difference can be considered in the phase space.
The following equation (9) is obtained by subjecting the equation (8) to the Fourier transform, and the sum of squares e of the differences shown in the equation (8) is the sum of squares E of the differences in the phase space.

In Expression (9), I _m,n (u,v) is a spectrum of im _,n (x,y), and is represented by the following Expression (10).

それぞれの光検出器で生じるノイズｅ_ｍ，ｎ（ｘ，ｙ）があるために、Ｏ（ｕ，ｖ）＝ｉ_ｍ，ｎ（ｕ，ｖ）／Ｋ_ｍ，ｎ（ｕ，ｖ）のように表現することができないので、式（１１）のように、表されている。
式（１１）において、γは、解の安定化のために導入している係数である。
Ｋ_ｍ，ｎ（ｕ，ｖ）は、瞳関数Ｇ_ｍ，ｎ（ｕ，ｖ）の自己相関であり、以下の式（１２）で表される。Ｋ_ｍ，ｎ（ｕ，ｖ）は、規格化されていないが、光学伝達関数である。

In Expression (10), F is a symbol representing the Fourier transform.
In the equation (9), O(u,v) is a spectrum of o(p,q), and is represented by the following equation (11).

Since there is noise e _m,n (x,y) generated in each photodetector, O(u,v)=i _m,n (u,v)/K _m,n (u,v) Since it cannot be expressed in Equation (11), it is expressed as in Equation (11).
In the equation (11), γ is a coefficient introduced for stabilizing the solution.
K _m,n (u,v) is the autocorrelation of the pupil function G _m,n (u,v) and is represented by the following equation (12). K _m,n (u,v) is an optical transfer function although it is not standardized.

式（１３）に示す差分の二乗和Ｅは、開口Ｍ_ｍ（ｐ，ｑ）と、位相Φ_ｎ（ｐ，ｑ）と、移動体１の像ｉ_ｍ，ｎ（ｘ，ｙ）のスペクトルＩ_ｍ，ｎ（ｕ，ｖ）とで表されており、未知である移動体１の輝度分布ｏ（ｐ，ｑ）のスペクトルＯ（ｕ，ｖ）に依存していない。
波面Ｗ_ｎ（ｕ，ｖ）は、以下の式（１４）に示す差分の二乗和Ｅｒｒが最小になる位相Φ_ｎ（ｕ，ｖ）を求めれば、式（２）よって推定することができる。

By substituting the equation (11) into the equation (9), the following equation (13) is obtained.

The sum of squares E of the difference shown in Expression (13) is the aperture M _m (p, q), the phase Φ _n (p, q), and the spectrum I of the image i _{m, n} (x, y) of the moving body 1. _{m, n} (u, v) and does not depend on the unknown spectrum O(u, v) of the luminance distribution o(p, q) of the moving body 1.
The wavefront W _n (u,v) can be estimated by the equation (2) if the phase Φ _n (u,v) that minimizes the sum of squared differences Err shown in the following equation (14) is obtained.

Even when the wavefront W _n (u,v) is estimated by obtaining the phase Φ _n (u,v) at which the sum of squared differences Err is minimized, the luminance distribution o(p,q) of the moving body 1 is obtained. However, the equation (14) does not depend on the luminance distribution o(p,q) of the moving body 1. Therefore, a strong calculation constraint that the luminance distribution o(p,q) of the moving body 1 is a real number larger than 0 in the real space cannot be given.
In order to give a constraint that the luminance distribution o(p, q) of the moving body 1 is a real number larger than 0 in the real space, the constraint is further added to the equation (8) indicating the sum of squares of the difference in the real space. Should be given.
The following Expression (15) shows the difference r _m,n (x, y) in the real space.

ノイズに対する実空間における差分ｒ_ｍ，ｎ（ｘ，ｙ）の比が、１よりも大きければ、ずれが大きく、１であれば、ずれがなく、１よりも小さければ、ずれが小さいことを意味する。When each of the first photodetector 16, the second photodetector 26, and the third photodetector 36 is an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), Such noise is shot noise and read noise.
The read noise has a median value of 0 and a standard deviation of σ according to a normal distribution. Shot noise is proportional to the brightness distribution of the acquired frame.
Therefore, when the equation (15) is normalized by noise, the equation (16) is obtained.

If the ratio of the difference r _m,n (x, y) in the real space to the noise is greater than 1, the deviation is large, and if 1, the deviation does not exist, and if it is smaller than 1, the deviation is small. To do.

式（１７）において、ｄ_ｍ（ｘ，ｙ）は、差分ｒ_ｍ，ｎ（ｘ，ｙ）に与える重みであり、例えば、ずれが大きいフレームは、信頼度が低いので、小さい重みが与えられる。
また、実空間上において、計算する領域の重みを１、計算を省略する領域の重みを０として、計算量を減らすことが可能である。
以上が、波面の推定処理の原理及び移動体１の輝度分布推定処理の原理である。Instead of the equation (8), the likelihood function shown in the following equation (17) is introduced.

In Expression (17), d _m (x, y) is a weight given to the difference r _{m, n} (x, y). For example, a frame with a large deviation has low reliability, and thus a small weight is given. ..
Further, in the real space, it is possible to reduce the calculation amount by setting the weight of the area to be calculated to 1 and the weight of the area to omit the calculation to be 0.
The above is the principle of the wavefront estimation processing and the principle of the luminance distribution estimation processing of the moving body 1.

Wavefront estimation unit 41, when the wavefront phase approximations and [Phi _{0, n,} the [Phi _{0, n,} is set to an initial value of the formula [Phi _n (u, v) shown in (2).
The wavefront estimation unit 41 calculates the point spread function km _,n (x, y) indicating the point image intensity distribution by calculating the equations (2), (4), and (5) (FIG. 8). Step ST12).
Wavefront estimation unit 41, the point spread function _{k m, n (x, y} ) and the image _{i m} of the moving body 1, n (x, y) respectively by Fourier transform, the optical transfer function _{K m,} n ( u,v) and the spectrum I _m,n (u,v) of the image i _m,n (x,y) of the moving body 1 are obtained (step ST13 in FIG. 8).

The wavefront estimation unit 41 substitutes the optical transfer function K _m,n (u,v) and the spectrum I _m,n (u,v) into the equation (14) to calculate the sum of squared differences Err (FIG. 8). Step ST14).
After calculating the sum of squared differences Err, the wavefront estimation unit 41 determines whether the phase search processing has converged (step ST15 in FIG. 8 ).
As the convergence determination of the phase search process, for example, there is a method of determining that the calculated sum of squared differences Err is equal to or smaller than a preset first allowable error. The calculated sum of squares Err of the differences when it is determined that they are converged is the minimum sum of squares Err. The first tolerance is assumed to be stored in the internal memory of the wavefront estimation unit 41 or the storage device 43, for example.
Further, as the convergence determination of the phase search process, for example, while changing the phase Φ _n (u,v), the sum of squared differences Err is calculated a preset number of times, and the sum of squared Err is calculated. , If the minimum sum of squares Err is specified, there is a method of determining that it has converged.

If the phase search processing has not converged (step ST15 in FIG. 8: NO), the wavefront estimation unit 41 changes the phase Φ _n (u,v) shown in Expression (2) (step in FIG. 8). ST16), the changed phase Φ _n (u,v) is set in the equation (2).
The wavefront estimation unit 26 re-executes the processing of steps ST12 to ST15.
The changed phase Φ _n (u,v) may be any phase as long as it is not set in the equation (2), but the phase should be such that the sum of squared differences Err becomes small. Is desirable.
If the phase search process has converged (step ST15: YES in FIG. 8), the wavefront estimation unit 41 ends the phase search process.

When the phase search process is completed, the wavefront estimation unit 41 substitutes the phase Φ _n (u,v) for which the minimum sum of squares Err has been calculated into the equation (3), so that the wavefront W of the light flux 2 at the entire aperture is obtained. Estimate _n (u,v) (step ST17 in FIG. 8).
The estimated wavefront W _n (u,v) is a wavefront with higher accuracy than the wavefront as the approximate value calculated in step ST11.
The wavefront estimation unit 41 outputs the wavefront W _n (u,v) to the storage device 43.
Further, the wavefront estimation unit 41 outputs the minimum square sum Err is calculated phase Φ _n (u, v) point spread corresponding to the function _{k m, n (x, y} ) of the mobile recovery unit 42.

The moving body restoration unit 42 includes the point spread function km _,n (x,y) output from the wavefront estimation unit 41, the first photodetector 16, the second photodetector 26, and the third photodetector. The luminance distribution o(p,q) of the moving body 1 is estimated from the image im _,n (x,y) of the moving body 1 shown by each intensity image output from the device 36 (step ST4 in FIG. 3). ..
Hereinafter, the brightness distribution estimation processing of the moving body 1 by the moving body restoring unit 42 will be specifically described.

First, the moving body restoration unit 42 and the point spread functions km _,n (x,y) output from the wavefront estimation unit 41 and the images i _m,n (x,y) of the moving body 1 indicated by the respective intensity images. ) And are substituted into the equation (16) to calculate the difference r _m,n (x, y).
Further, the moving body restoration unit 42 substitutes the difference r _m,n (x, y) into the equation (17) to calculate the sum of squares of the difference e (step ST18 in FIG. 8).
Here, it is assumed that the weight d _m (x, y) shown in Expression (17) is fixed to a preset value, but it is changed by the moving body restoration unit 42. Good.

After calculating the square sum e of the differences, the moving body restoring unit 42 determines whether or not the brightness distribution estimation processing of the moving body 1 has converged (step ST19 in FIG. 8).
As the convergence determination of the brightness distribution estimation process of the moving body 1, for example, there is a method of determining that the sum is squared if the calculated sum of squares e of the differences is equal to or less than a preset second allowable error. The sum of squares e of the calculated differences when it is determined that they have converged is the minimum sum of squares e. The second allowable error is assumed to be stored in the internal memory of the mobile body restoring unit 42 or the storage device 43, for example.
Further, as the convergence determination of the brightness distribution estimation process of the moving body 1, for example, while changing the brightness distribution o(p, q) of the moving body 1, the sum of squared differences e is calculated a preset number of times, There is a method of determining that the minimum sum of squares e among the calculated sums of squares e has converged.

If the luminance distribution estimation processing of the moving body 1 has not converged (step ST19: NO in FIG. 8), the moving body restoration unit 42 determines the luminance distribution o(p,q) of the moving body 1 shown in Expression (16). ) Is changed (step ST20 of FIG. 8), and the processes of steps ST18 to ST19 are performed again.
The changed luminance distribution o(p, q) may be any luminance distribution as long as it is not set in the equation (16), but the luminance distribution such that the sum of squared differences e becomes small. Is desirable.
If the luminance distribution estimation processing of the moving body 1 has converged (in the case of step ST19: YES in FIG. 8), the moving body restoration unit 42 determines that the minimum sum of squares e is the result of the luminance distribution estimation processing of the moving body 1. The calculated luminance distribution o(p,q) of the moving body 1 is output to the storage device 43 (step ST21 in FIG. 8).

  In the first embodiment described above, the wavefront estimation unit 41 determines from the positions of the respective focused spot images detected by the first photodetector 16, the second photodetector 26, and the third photodetector 36. , The approximate value of the wavefront of the light flux in the entire aperture is calculated, and the approximate values are used to collect the light detected by the first photodetector 16, the second photodetector 26, and the third photodetector 36, respectively. The wavefront measuring device 3 is configured to calculate the point image intensity distribution of the spot image and estimate the wavefront of the light flux at the entire aperture from the point image intensity distribution and the focused spot image. Therefore, the wavefront measuring device 3 can measure the wavefront without mounting a control mechanism such as a lenslet array that realizes high-speed movement.

  In the above-described first embodiment, the moving body restoration unit 42 detects the focused spot images respectively detected by the first photodetector 16, the second photodetector 26, and the third photodetector 36, and the wavefront. The moving body observing device is configured to estimate the luminance distribution of the moving body 1 from the point image intensity distribution calculated by the estimating unit 41. Therefore, the moving body observation apparatus can estimate the luminance distribution of the moving body 1.

Embodiment 2.
In the wavefront measuring apparatus 3 according to the first embodiment, the respective transmission regions of the first light shielding unit 11, the second light shielding unit 21, and the third light shielding unit 31 have the first imaging optical system 12 and the second imaging region. It is slightly smaller than the respective openings in the imaging optical system 22 and the third imaging optical system 32.
However, this is merely an example, and the transmissive region may be narrower than the transmissive region shown in FIG. 2 as shown in FIG. 10, for example. That is, a part of the opening (partial opening) may be the transmissive region.
FIG. 10 is an explanatory diagram showing an example of a light-shielding portion in which the light-transmitting region of the light flux 2 is smaller than the aperture of the imaging optical system.

Further, as shown in FIG. 11, a part of the opening may include a light blocking region that blocks the light flux 2.
FIG. 11 is an explanatory diagram showing an example of a light-shielding portion in which a light-shielding region that shields the light flux 2 is included in a part of the opening.
In addition, as shown in FIGS. 12, 13, and 14, light-shielding portions having different shapes or sizes of the transmissive regions may be mixed.
12, FIG. 13 and FIG. 14 are explanatory diagrams showing an example in which, as the plurality of light-shielding portions, light-shielding portions having different shapes or sizes of light-beam transmissive regions are mixed.

When the size of the transmissive region is small, the light amount of the light beam 2 that is transmitted is smaller than that when the size is large, but the light beam 2 that is transmitted becomes thin, so that a light spot image that is detected by the photodetector is formed. Correlation of wavefront becomes large.
Therefore, the wavefront estimation process performed by the wavefront estimation unit 41 ends earlier when the size of the transmission region is smaller than when the size of the transmission region is large.

The processing contents in the case where priority is given to shortening the processing time of the wavefront estimation processing will be described below.
Here, it is assumed that light-shielding portions having different shapes or sizes of the transmissive regions are mixed.
In the first stage of the estimation process, the wavefront estimation unit 41 determines that the detected photodetection spot image of the plurality of photodetectors is connected to the light shielding unit having a small transmission region size. Increase the weight.
The spectrum I _m,n (u,v) used when the wavefront estimation unit 41 calculates the sum of squared differences Err also increases as the weight of the corresponding focused spot image increases.
When the wavefront estimation process progresses toward the convergence as the wavefront estimation process proceeds, for example, the weights of the focused spot images detected by all the photodetectors are made uniform.
For example, if the sum of squared differences Err shown in Expression (14) is smaller than the threshold value, the wavefront estimation unit 41 can determine that the convergence is approaching. The threshold is assumed to be stored in the internal memory of the wavefront estimation unit 41 or the storage device 43, for example. Threshold>first tolerance.

Here, in the first stage of the estimation process, the wavefront estimation unit 41 detects the collected light in the plurality of photodetectors that are connected to the light shield unit having the smaller transmission region size. The weight of the spot image is increased. Then, when the wavefront estimation process progresses and approaches the convergence, the wavefront estimation unit 41 makes the weights of the focused spot images detected by all the photodetectors uniform.
But this is just one example.
In the odd-numbered frame of the plurality of frames, the wavefront estimation unit 41 increases the weight of the detected focused spot image for the photodetector connected to the light-shielding unit having a small transmission region size. Further, the wavefront estimation unit 41 may make the weights of the focused spot images detected by all the photodetectors uniform in even frames.

Embodiment 3.
In the third embodiment, a moving object observing device including a first light flux selecting unit 13, a second light flux selecting unit 23, and a third light flux selecting unit 33 will be described.
FIG. 15 is a configuration diagram showing a moving body observation apparatus including the wavefront measurement apparatus 3 according to the third embodiment. In FIG. 15, the same reference numerals as those in FIG.
The first light flux selecting unit 13 extracts a light flux 2 a having a first wavelength from the light flux 2 condensed by the first imaging optical system 12, and outputs the light flux 2 a to the first focus adjustment lens 14. ..
The second light flux selecting unit 23 extracts the light flux 2b having the second wavelength from the light flux 2 condensed by the second imaging optical system 22, and outputs the light flux 2b to the second focus adjustment lens 24. ..
The third light flux selection unit 33 extracts the light flux 2c having the third wavelength from the light flux 2 condensed by the third imaging optical system 32, and outputs the light flux 2c to the third focus adjustment lens 34. ..
The first wavelength, the second wavelength, and the third wavelength are different wavelengths.

Next, the moving body observation apparatus shown in FIG. 15 will be described. However, here, only the part different from the moving body observation apparatus shown in FIG. 1 will be described.
Upon receiving the light flux 2 transmitted through the first imaging optical system 12, the first light flux selecting unit 13 extracts the light flux 2a having the first wavelength from the light flux 2 and adjusts the light flux 2a to the first focus adjustment. Output to the lens 14.
Since the wavefront measuring device 3 includes the first light flux selecting unit 13, the light flux 2a having the first wavelength is condensed on the light receiving surface 16a of the first photodetector 16.

Upon receiving the light flux 2 transmitted through the second imaging optical system 22, the second light flux selecting unit 23 extracts the light flux 2b having the second wavelength from the light flux 2 and adjusts the light flux 2b to the second focus adjustment. Output to the lens 24.
Since the wavefront measuring device 3 includes the second light flux selecting unit 23, the light flux 2b of the second wavelength is condensed on the light receiving surface 26a of the second photodetector 26.
Upon receiving the light flux 2 that has passed through the third imaging optical system 32, the third light flux selection unit 33 extracts the light flux 2c having the third wavelength from the light flux 2 and adjusts the light flux 2c to the third focus adjustment. Output to the lens 34.
Since the wavefront measuring device 3 includes the third light flux selecting unit 33, the light flux 2c of the third wavelength is condensed on the light receiving surface 36a of the third photodetector 36.

The wavefront measuring device 3 estimates the wavefront based on the light flux 2 from the moving body 1, and the light flux 2 spreads due to fluctuations in the refractive index distribution of the atmosphere.
The scattering of the light flux 2 by the atmosphere depends on the wavelength. For example, blue light is easily scattered, and red light having a longer wavelength than blue light is less likely to be scattered. The resolution of the image is higher in blue light than in red light.
Therefore, of the light flux 2 from the moving body 1, the blue light flux 2 has a larger spread than the red light flux 2.

式（１８）において、λ_ｊの添え字ｊは、波長を識別する記号である。ｊ＝１の場合のλ_１は、第１の波長であり、ｊ＝２の場合のλ_２は、第２の波長、ｊ＝３の場合のλ_３は、第３の波長である。
式（１８）は、式（３）と同様に、位相Φ_ｎ（ｕ，ｖ）と、波面Ｗ_ｎ（ｕ，ｖ）との関係を示している。The first photodetector 16 detects a focused spot image from the light flux 2a of the first wavelength, the second photodetector 26 detects a focused spot image from the light flux 2b of the second wavelength, When the third photodetector 36 detects the focused spot image from the light flux 2c of the third wavelength, the equation (3) is expressed by the following equation (18).

In Expression (18), the subscript _j of λ j is a symbol for identifying the wavelength. λ ₁ when j=1 is the first wavelength, λ ₂ when j= ₂ is the second wavelength, and λ ₃ when j= ₃ is the third wavelength.
The formula (18) shows the relationship between the phase Φ _n (u,v) and the wavefront W _n (u,v), like the formula (3).

The wavefront estimation unit 41 is detected from the focused spot image detected from the light flux 2a of the first wavelength, the focused spot image detected from the light flux 2b of the second wavelength, and the light flux 2c of the third wavelength. A point spread function km _,n (x,y) indicating a point image intensity distribution with the focused spot image is calculated.
The point spread function km _,n (x,y) calculated by the wavefront estimation unit 41 takes into consideration not only the correlation of the positions of the plurality of focused spot images but also the correlation of the wavelengths of the light beams 2a, 2b, 2c. It has been calculated.
Hereinafter, the wavefront estimation unit 41 estimates the wavefront W _n (u,v) of the light flux 2 at the entire aperture using the point spread function km _,n (x,y), as in the first embodiment.

  In the third embodiment described above, the wavefront measuring apparatus 3 is configured so as to include the first light flux selecting unit 13, the second light flux selecting unit 23, and the third light flux selecting unit 33. Therefore, the wavefront measuring apparatus 3 of the third embodiment also uses the wavelength information as the information used for estimating the wavefront, which improves the accuracy of estimating the wavefront in the wavefront measuring apparatus 3 of the first embodiment.

Fourth Embodiment
In the wavefront measuring device 3 of the first embodiment, the control device 53 controls the adjustment amounts of the respective optical path lengths of the first focus adjusting lens 14, the second focus adjusting lens 24, and the third focus adjusting lens 34. ing.
Specifically, the control device 53 causes the light beam 2 to be focused on the light-receiving surfaces 16a, 26a, 36a of the first photodetector 16, the second photodetector 26, and the third photodetector 36, respectively. The adjustment amount of the optical path length is controlled so as to match.

In the fourth embodiment, the wavefront measuring apparatus is provided with a control device 70 for controlling the first focus adjusting lens 14, the second focus adjusting lens 24, and the third focus adjusting lens 34, which is different from the control device 53 shown in FIG. 3 will be described.
FIG. 16 is a configuration diagram showing a mobile body observation device including the wavefront measurement device 3 according to the fourth embodiment. In FIG. 16, the same symbols as those in FIGS. 1 and 15 indicate the same or corresponding portions, and thus the description thereof is omitted.

The control device 70 is realized by a computer such as a personal computer.
The control device 70 controls each of the first focus adjustment lens 14, the second focus adjustment lens 24, and the third focus adjustment lens 34 based on the elapsed time measured by the counter 52.
At this time, the control device 70 controls the first focus adjustment lens 14 so that the light beam 2a is focused on the light receiving surface 16a of the first photodetector 16. Hereinafter, the focused light beam 2a is referred to as "focused light beam 2a".
Further, the control device 70 controls the second focus adjustment lens 24 so that the light beam 2b on the light receiving surface 26a of the second photodetector 26 is out of focus. Hereinafter, the light beam 2b that is out of focus will be referred to as a "defocused light beam 2b".
Further, the control device 70 controls the third focus adjustment lens 34 so that the light beam 2c is defocused on the light receiving surface 36a of the third photodetector 36. Hereinafter, the light beam 2c that is out of focus will be referred to as a "defocused light beam 2c". The defocus of the light beam 2c is larger than the defocus of the light beam 2b.
Like the control device 53 shown in FIG. 1, the control device 70 controls each of the first shutter 15, the second shutter 25, and the third shutter 35 based on the elapsed time measured by the counter 52. ..
Further, the control device 70, like the control device 53 shown in FIG. 1, based on the elapsed time measured by the counter 52, the first photodetector 16, the second photodetector 26, and the third photodetector 26. Control each of the detectors 36.
16 is applied to the moving body observation apparatus shown in FIG. 15 by the control device 70, but may be applied to the moving body observation apparatus shown in FIG.

Next, the moving body observation apparatus shown in FIG. 16 will be described. However, here, only parts different from the moving object observation apparatus shown in FIGS. 1 and 15 will be described.
The control device 70 controls the first focus adjustment lens 14 so that the light beam 2a is focused on the light receiving surface 16a of the first photodetector 16.
The controller 70 also performs the second focus adjustment so that the light beams 2b and 2c are out of focus on the light receiving surface 26a of the second photodetector 26 and the light receiving surface 36a of the third photodetector 36, respectively. Each of the lens 24 and the third focus adjustment lens 34 is controlled.

Under the control of the control device 70, the first photodetector 16 detects the focused spot image from the focused light beam 2a, and the second photodetector 26 detects the focused spot image from the defocused light beam 2b. To detect.
Further, the third photodetector 36 detects a focused spot image from the light beam 2c in the defocused state.
The wavefront estimating unit 41 is a point spread function indicating a point spread intensity distribution of a focused spot image detected from the focused light beam 2a and respective focused spot images detected from the defocused light beams 2b and 2c. Calculate km _,n (x,y).
The point spread function km _,n (x,y) calculated by the wavefront estimation unit 41 is calculated in consideration of not only the correlation of the positions of the plurality of focused spot images but also the aberration corresponding to the focus shift. There is.
Hereinafter, the wavefront estimation unit 41 estimates the wavefront W _n (u,v) of the light flux 2 at the entire aperture using the point spread function km _,n (x,y), as in the first embodiment.

  Since the wavefront measuring apparatus 3 of the fourth embodiment also uses the information of the aberration as the information used for estimating the wavefront, the accuracy of the wavefront estimation in the wavefront measuring apparatus 3 of the first embodiment is improved.

Embodiment 5.
In the fifth embodiment, a moving body observing device in which the moving body restoration unit 80 estimates the luminance distribution of the moving body 1 from the focused spot image and the point image intensity distribution in the region where the moving body 1 exists explain.
FIG. 17 is a configuration diagram showing a moving body observation apparatus including the wavefront measurement apparatus 3 according to the fifth embodiment. In FIG. 17, the same reference numerals as those in FIGS. 1, 15 and 16 indicate the same or corresponding portions, and thus the description thereof will be omitted.
The moving body restoration unit 80 is realized by a computer such as a personal computer or a wavefront estimation circuit.
The moving body restoration unit 80 is connected to a light beam selection unit that extracts a light beam having a wavelength longer than the reference wavelength from the first photodetector 16, the second photodetector 26, and the third photodetector 36. The area where the moving body is present is detected from the plurality of focused spot images detected by the existing photodetector.
The moving body restoration unit 80 performs a process of estimating the luminance distribution of the moving body 1 from the focused spot image and the point image intensity distribution in the area where the moving body 1 is present.
The reference wavelength is, for example, an orange wavelength, and information on the reference wavelength is stored inside the mobile body restoration unit 80 or in the storage device 43.
17 is applied to the moving body observation apparatus shown in FIG. 16 by the moving body restoration unit 80, but it may be applied to the moving body observation apparatus shown in FIG.

Next, the moving body observation apparatus shown in FIG. 17 will be described. However, here, only the part different from the moving body observation apparatus shown in FIGS. 15 and 16 will be described.
The first photodetector 16 detects the focused spot image from the light beam 2a of the first wavelength, and the second photodetector 26 detects the focused spot image from the light beam 2b of the second wavelength. is doing. Further, the third photodetector 36 detects a focused spot image from the light flux 2c having the third wavelength.
The light flux 2a having the first wavelength is a light flux having a smaller spread than the light flux 2b having the second wavelength, and is, for example, a red light flux.
The light flux 2b having the second wavelength is a light flux having a smaller spread than the light flux 2c having the third wavelength, and is, for example, a yellow light flux.
The light flux 2c of the third wavelength is, for example, a blue light flux. First wavelength>second wavelength>third wavelength.
A red light flux is less susceptible to scattering than a yellow or blue light flux, but the resolution of the intensity image is low.
The moving body observation apparatus shown in FIG. 17 includes three wavefront sensors. In the fifth embodiment, the moving body observation apparatus will be described as including not only the wavefront sensor 10-1, the wavefront sensor 10-2, and the wavefront sensor 10-3, but also several hundreds of wavefront sensors, for example.

The moving body restoration unit 80 includes a focused spot image and a point image in a region where the moving body 1 exists among the focused spot images detected by the photodetectors included in several hundreds of wavefront sensors. The luminance distribution of the moving body 1 is estimated from the intensity distribution.
Hereinafter, the brightness distribution estimation process of the moving body 1 by the moving body restoration unit 80 will be specifically described.
FIG. 18 is an explanatory diagram showing a luminance distribution estimation process of the moving body 1 by the moving body restoring unit 80.
In FIG. 18, an intensity image 111 is an intensity image showing a plurality of focused spot images detected by a photodetector to which a light flux selecting unit for extracting a light flux having a wavelength longer than the reference wavelength is connected.
The intensity image 112 is an intensity image showing a plurality of focused spot images detected by a photodetector to which a light flux selecting unit for extracting a light flux having a wavelength equal to or shorter than the reference wavelength is connected.
Since the intensity image 112 is easily affected by scattering, the image of the moving body 1 shown in the intensity image 112 is wider than the image of the moving body 1 shown in the intensity image 111. However, the intensity image 112 is an image having a higher resolution than the intensity image 111.

First, the moving body restoration unit 80 is connected to a light beam selection unit that extracts a light beam having a wavelength longer than the reference wavelength from the focused spot images detected by the photodetectors included in hundreds of wavefront sensors. A plurality of focused spot images detected by the photodetector being selected are selected.
The moving body restoration unit 80 performs a contour extraction process for extracting the contour of the moving body 1 from the intensity image 111 indicated by the selected plurality of focused spot images. The contour extraction process itself is a known technique, and thus detailed description thereof will be omitted.
The moving body restoration unit 80 sets the area inside the extracted contour as the area where the moving body 1 exists, and sets the area outside the contour as the area where the moving body 1 does not exist.

Next, as shown in FIG. 18, the moving body restoring unit 80 confirms that only the area including the area in which the moving body 1 is present is the processing target area used for the brightness distribution estimation processing of the moving body 1. The mask image 113 shown is generated.
The processing target area is an area including the area in which the moving body 1 exists, and the processing target area may be an area that matches the area in which the moving body 1 exists, or The existing area may be a large area. As an area in which the moving body 1 is present is also large, it is conceivable that only the margin corresponding to the shadow of the moving body 1 is larger than the extracted contour of the moving body 1. As the margin, for example, the size of about 10% of the area where the moving body 1 is present can be considered.

The moving body restoration unit 80 extracts an image im _,n (x,y) of the moving body 1 in the processing target region in the mask image 113 from the intensity image 112. The intensity image 114 shown in FIG. 18 is an intensity image showing the image i _m,n (x, y) of the moving body 1 in the processing target region extracted from the intensity image 112.
Mobile restoration unit 80, an image _{i m} of one or more mobile 1 contained in the processing target area, n (x, y) from the one image _{i m} of the moving body _1, n (x , Y).
Mobile restoration unit 80, an image _{i m} of the moving body 1 selected, n (x, y) and the image _{i m} of the moving body 1 selected, n (x, y) point spread corresponding to the function _{k m,} Substituting _n (x, y) into equation (16), the difference r _m,n (x, y) is calculated.
The moving body restoration unit 80 selects all the images i _m,n (x, y) of the one or more moving bodies 1 included in the processing target area, and calculates the difference r _m,n (x, y). The above-mentioned processing is repeatedly performed until the end.
The moving body restoration unit 80 substitutes all the calculated differences r _m,n (x, y) into the equation (17) to calculate the square sum e of the differences (step ST18 in FIG. 8).
In the formula (17), the difference _{r m} of the processing target area, n (x, y) weighted _d m (x, y) corresponding to the set to 1, the difference _{r m} outside the processing target area, n (x, y ), the weight d _m (x, y) is set to 0.

When the moving body restoration unit 80 calculates the sum of squared differences e, the moving body restoration unit 80 repeatedly performs the luminance distribution estimation process until the luminance distribution estimation process of the moving body 1 converges, similarly to the moving body restoration unit 42 illustrated in FIG. 1. ..
When the luminance distribution estimation process of the moving body 1 converges, the moving body restoration unit 80 outputs the luminance distribution o(p,q) of the moving body 1 for which the minimum sum of squares e has been calculated to the storage device 30.

  In the above-described fifth embodiment, the moving body restoration unit 80 detects the area in which the moving body exists from the focused spot images detected by the plurality of photodetectors. Then, the moving body restoration unit 80 determines the moving body from the focused spot images and the point image intensity distribution in the region where the moving body 1 is present among the focused spot images detected by the plurality of photodetectors. The moving body observation apparatus was configured so as to estimate the luminance distribution of 1. Therefore, when estimating the luminance distribution of the moving body 1, the moving body observing apparatus can exclude the focused spot image of the region where the moving body does not exist from the processing target, and therefore, FIG. It is possible to reduce the load of the luminance distribution estimation processing of the moving body 1 as compared with the moving body observation apparatus shown.

  It should be noted that, within the scope of the invention, the invention of the present application is capable of freely combining the embodiments, modifying any constituent element of each embodiment, or omitting any constituent element in each embodiment. ..

The present invention is suitable for a wavefront measuring device and a wavefront measuring method for estimating the wavefront of a light beam at an entire aperture including all apertures of a plurality of imaging optical systems.
Further, the present invention is suitable for a moving body observation device that estimates the luminance distribution of a moving body.

  1 moving body, 2, 2a, 2b, 2c light flux, 3 wavefront measuring device, 4, 5, 6 light flux, 10-1 wavefront sensor, 10-2 wavefront sensor, 10-3 wavefront sensor, 11 first light-shielding section, 12 1st imaging optical system, 13 1st light flux selection part, 14 1st focus adjustment lens, 15 1st shutter, 16 1st photodetector, 16a Light-receiving surface of 1st photodetector, 21 second light shielding unit, 22 second image forming optical system, 23 second light flux selecting unit, 24 second focus adjusting lens, 25 second shutter, 26 second photodetector, 26a second Light-receiving surface of photodetector, 31 Third light-shielding portion, 32 Third image-forming optical system, 33 Third light-beam selecting portion, 34 Third focus adjusting lens, 35 Third shutter, 36 Third light Detector, 36a Light receiving surface of third photodetector, 41 Wavefront estimation unit, 42 Moving body restoration unit, 43 Storage device, 51 Time calibration unit, 52 Counter, 53 Control device, 54 Driving device, 61, 62 Housing , 70 control device, 80 moving body restoration unit, 101 first atmospheric layer, 102 second atmospheric layer, 103 third atmospheric layer, 104, 105, 105a, 105b image of moving body 1, 106a, 106b wavefront, 111, 112, 114 intensity image, 113 mask image.

The moving object observation apparatus according to the present invention is arranged at mutually different positions, and has a plurality of image forming optical systems for condensing a light beam reflected by the moving object or a light beam transmitted from the moving object, and a plurality of image forming devices. From each of the light beams condensed by the optical system, a plurality of photodetectors that detect a condensed spot image as an image of the moving body, and from the positions of the condensed spot images detected by the plural photodetectors, The approximate value of the wavefront of the light flux at the entire aperture including all of the apertures of the imaging optical system is calculated, and the point image intensity distribution of the focused spot images detected by multiple photodetectors is calculated using the approximate value. Then, from the point image intensity distribution and the focused spot image, a wavefront estimation unit that estimates the wavefront of the light flux at the entire aperture, a focused spot image detected by a plurality of photodetectors, and a wavefront estimation unit From the point image intensity distribution, the moving body restoration unit that estimates the luminance distribution of the moving body, and the light fluxes of different wavelengths are extracted from the respective light fluxes collected by the plurality of imaging optical systems. A plurality of light flux selection units that output the respective light fluxes to the respective photodetectors, and the moving body restoration unit is a region where the moving body exists from the focused spot images detected by the plurality of photodetectors. Of the focused spot image detected by a plurality of photodetectors, from the focused spot image in the region where the moving body is present, and the point image intensity distribution calculated by the wavefront estimation unit, The luminance distribution of the moving body is estimated .

The moving object observation apparatus according to the present invention is arranged at mutually different positions, and has a plurality of image forming optical systems for condensing a light beam reflected by the moving object or a light beam transmitted from the moving object, and a plurality of image forming devices. From each of the light beams condensed by the optical system, a plurality of photodetectors that detect a condensed spot image as an image of the moving body, and from the positions of the condensed spot images detected by the plural photodetectors, The approximated value of the wavefront of the light flux at the whole aperture, which is one aperture including all the apertures of the imaging optical system , is calculated, and the converged spot image detected by the plurality of photodetectors is used by using the approximated value. Of the point image intensity distribution, and from the point image intensity distribution and the focused spot image, a wavefront estimation unit that estimates the wavefront of the light flux at the entire aperture, and a focused spot image detected by a plurality of photodetectors, From the point image intensity distribution calculated by the wavefront estimation unit, the moving body restoration unit that estimates the luminance distribution of the moving body, and the respective light fluxes condensed by the plurality of imaging optical systems are used to generate light fluxes of different wavelengths. A plurality of light flux selectors for outputting the extracted light fluxes to one photodetector different from each other among the plurality of photodetectors, and the moving body restoration unit is detected by the plurality of photodetectors. The area where the moving body is present is detected from the focused spot image and the focused spot image in the area where the moving body is present among the focused spot images detected by the multiple photodetectors is detected. The luminance distribution of the moving body is estimated from the point image intensity distribution calculated by the wavefront estimation unit.

Claims (9)

A plurality of imaging optical systems, which are arranged at mutually different positions, and which collect the light beam reflected by the moving body or the light beam transmitted from the moving body,
From each of the light fluxes condensed by the plurality of imaging optical systems, a plurality of photodetectors for detecting a focused spot image as an image of the moving body,
From the positions of the focused spot images detected by the plurality of photodetectors, an approximate value of the wavefront of the light flux in the overall aperture including all of the apertures of the plurality of imaging optical systems is calculated, and the approximate value is used. , A wavefront estimation for estimating a point image intensity distribution of a focused spot image detected by the plurality of photodetectors, and estimating a wavefront of a light flux at the entire aperture from the point image intensity distribution and the focused spot image And a wavefront measuring device. A plurality of light blocking portions for blocking a part of the light flux reflected by the moving body or the light flux transmitted from the moving body,
The wavefront measuring apparatus according to claim 1, wherein each of the plurality of light shielding units is arranged on an input side or an output side of each imaging optical system.   The wavefront measuring apparatus according to claim 2, wherein the light-transmitting regions of the plurality of light-shielding portions have the same shape and the same size.   The wavefront measuring apparatus according to claim 2, wherein, as the plurality of light-shielding portions, light-shielding portions having different shapes or sizes of light-transmitting regions are mixed.   A plurality of light flux selectors for extracting light fluxes having different wavelengths from the respective light fluxes condensed by the plurality of imaging optical systems and outputting the respective light fluxes having different wavelengths to respective photodetectors are provided. The wavefront measuring apparatus according to claim 1, wherein   A plurality of focus adjustment lenses that adjust the optical path lengths of the light fluxes condensed by the plurality of imaging optical systems to mutually different optical path lengths and output the respective light fluxes after the optical path length adjustment to the respective photodetectors. The wavefront measuring device according to claim 1, further comprising: A plurality of image forming optical systems arranged at mutually different positions collect the light flux reflected by the moving body or the light flux transmitted from the moving body,
A plurality of photodetectors detect a focused spot image as an image of the moving body from each of the light beams focused by the plurality of imaging optical systems,
The wavefront estimation unit calculates, from the positions of the focused spot images detected by the plurality of photodetectors, an approximate value of the wavefront of the light flux in the entire aperture including all the apertures of the plurality of imaging optical systems, An approximate value is used to calculate the point image intensity distribution of the focused spot image detected by the plurality of photodetectors, and from the point image intensity distribution and the focused spot image, the wavefront of the light flux at the entire aperture is calculated. A wavefront measurement method for estimating. A plurality of imaging optical systems, which are arranged at mutually different positions, and which collect the light flux reflected by the moving body or the light flux transmitted from the moving body,
From each of the light fluxes condensed by the plurality of imaging optical systems, a plurality of photodetectors that detect a focused spot image as an image of the moving body,
From the positions of the focused spot images detected by the plurality of photodetectors, an approximate value of the wavefront of the light flux in the entire aperture including all of the apertures of the plurality of imaging optical systems is calculated, and the approximate value is used. , Wavefront estimation for calculating a point image intensity distribution of a focused spot image detected by the plurality of photodetectors, and estimating a wavefront of a light flux at the entire aperture from the point image intensity distribution and the focused spot image Department,
A moving body restoration section that estimates the luminance distribution of the moving body from the focused spot images detected by the plurality of photodetectors and the point image intensity distribution estimated by the wavefront estimation section. Observation device. From each of the light fluxes condensed by the plurality of imaging optical systems, a plurality of light flux selectors for extracting light fluxes of different wavelengths and outputting respective light fluxes of different wavelengths to respective photodetectors are provided.
The moving body restoration unit,
From the focused spot images detected by the plurality of photodetectors, the region where the moving body is present is detected, and among the focused spot images detected by the plurality of photodetectors, the moving body is 9. The moving body observation according to claim 8, wherein the luminance distribution of the moving body is estimated from the focused spot image in the existing region and the point image intensity distribution calculated by the wavefront estimation unit. apparatus.

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