JPWO2019163740A1 - Bio-vibration signal detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a biological vibration signal detecting device provided with a more reliable connection portion.
A sensor material layer containing a material having a piezoelectric effect, a first electrode layer formed on the upper surface of the sensor material layer, and a second electrode layer formed on the lower surface of the sensor material layer are included. The sheet-shaped vibration sensor main body, the exterior protective layer that covers the entire vibration sensor main body, the first take-out electrode arranged at the connection portion of the vibration sensor main body and connected to the first electrode layer, and the vibration sensor main body. It is provided with a second take-out electrode arranged at the connection portion and connected to the second electrode layer, and one end of the first take-out electrode is a surface of the first electrode layer without penetrating the first electrode layer. The other end of the first extraction electrode is arranged outside the exterior protective layer, and one end of the second extraction electrode is connected to the surface of the second electrode layer without penetrating the second electrode layer. The other end of the first extraction electrode is arranged outside the exterior protective layer.
[Selection diagram] Fig. 3

Description

The present invention relates to a biological vibration signal detecting device for detecting a biological vibration signal such as a living body's heart rate, respiration, and body movement, and more particularly to a biological vibration signal detecting device provided with a sheet-shaped vibration sensor.

Conventionally, in a bed or a bed laid on the floor, a human health condition detection device that can detect a person's health condition for 24 hours by detecting the respiratory activity of a person's lungs and vibration due to the beating of the heart with a vibration sensor has been used. It is known (Patent Document 1). For example, in nursing care work, it was necessary to grasp the condition of a patient sleeping in bed, but in order to reduce the burden on the caregiver, the condition of the patient is automatically monitored and when there is an abnormality. , A system that notifies the outside is desired. Conventionally, a method closely attached to the patient's body, such as attaching a sphygmomanometer to the fingertip or wrapping a vibrometer around the waist, has been used without restricting the movement of the patient during sleep. These methods are also highly reliable in that a signal can always be obtained because the sensor is brought into close contact with the body, but there are problems such as dislike of the patient and the inability to grasp the state when the sensor is removed. Therefore, a non-binding type system has been proposed (Patent Document 1).

Patent Document 1 discloses a person presence / absence detection device that detects the presence / absence of a person using a non-restraint type vibration sensor. In the method of Patent Document 1, a sheet-shaped vibration sensor means for detecting vibration generated from the human body is installed on the upper or lower part of the bed pad or mattress, and the presence or absence of the body vibration signal detected by the vibration sensor is used to determine the person's vibration. Judgment of presence and absence. Further, the detected body vibration signal is filtered to obtain a biological vibration signal such as a respiratory vibration, a heartbeat vibration, a snoring, and a body movement signal.

In the vibration sensor means 202 of Patent Document 1, as shown in FIG. 8A, a vibration collecting plate 221 is arranged on the vibration sensor main body 210, and a bottom plate 223 is placed under the vibration sensor main body 210 via a cushion member 222. The vibration sensor main body 210 is connected to a wiring 224 for connecting to an external signal processing device (not shown). As shown in FIG. 8B, the vibration sensor main body 210 has a film-shaped positive electrode layer 212 and a negative electrode layer 213 (also serving as a lower shielding layer) formed above and below the film-shaped vibration sensor material 211, and is positive. A film-like insulating layer 214 is formed over the electrode layer 212, and an upper shielding layer (electromagnetic shielding film) 215 is formed on the insulating layer 214. The vibration sensor material 211 is a piezoelectric material that generates electric charges by vibration, and the generated electric charges are taken out by the positive electrode layers 212 and the negative electrode layers 213 formed on the upper and lower sides to detect the vibration. Further, the upper shielding layer 215 is a conductor for preventing noise from the outside and is held at a constant potential, and the insulating layer 214 insulates the positive electrode layer 212 and the upper shielding layer 215. ..

The positive electrode layer 212, the negative electrode layer 213, and the upper shielding layer 215 of the vibration sensor main body 210 need to be electrically connected to the outside. Conventionally, in the sheet-shaped vibration sensor main body 210, each layer is connected in the thickness direction. Penetrating electrode terminals, such as eyelet terminals 216 and 217, were used as part of the take-out electrode. As shown in FIGS. 8B and 8C, openings are formed in the negative electrode layer 213, the insulating layer 214, and the upper shielding layer 215 at the connection portion of the positive electrode layer 212, and the eyelet terminal 216 is formed. It penetrates the vibration sensor material 211 and the positive electrode layer 212 together with the positive extraction electrode 218, crimps the positive extraction electrode 218 to the vibration sensor main body, and connects the positive electrode layer 212 to the outside via the eyelet terminal 216 and the positive extraction electrode 218. It is connected. Further, an opening is formed in the positive electrode layer 212 at the connection portion of the negative electrode layer 213, and the eyelet terminal 217, together with the negative take-out electrode 219, has a negative electrode layer 213, a vibration sensor material 211, an insulating layer 214, and an upper portion. It penetrates the shielding layer 215, crimps the negative extraction electrode 219 to the vibration sensor main body 210, and connects the negative electrode layer 213 and the upper shielding layer 215 to the outside via the eyelet terminal 217 and the negative extraction electrode 219.

International Publication No. 2014/185397

According to Patent Document 1, the eyelet terminals 216, 217, etc. penetrate the plurality of layers, so that even if an external force is applied to the crimped portion, the plurality of layers are stressed as a whole, so that the electrode layer is cut. Was said to have sufficient strength. However, when an attempt was made to actually detect the biological vibration signal by arranging the vibration sensor means 220 on the upper part or the lower part of the bed pad or the mattress, connection failure occurred frequently at the connection portion of the vibration sensor main body. This is because holes are formed in each layer by penetrating eyelet terminals and the like, and these holes are widened by vibration applied to the vibration sensor means 220 and mechanical stress applied via the lead-out wiring 224, resulting in eyelets. It is considered that the connection failure between the terminal and each layer occurs, or the caulking by the eyelet terminal is loosened and the contact failure occurs.

Further, although not described in Patent Document 1, when the vibration sensor main body 210 is actually used, damage due to contact with the outside, friction, and wear is prevented, and external such as moisture, dust, and light are prevented. The entire surface is preferably covered with an insulating exterior protective layer to protect it from the environment. As a method for manufacturing a sheet-shaped vibration sensor main body, generally, after a series of long films are continuously conveyed in the longitudinal direction and each layer constituting the vibration sensor main body is continuously laminated and formed, the product is made into a predetermined size. It is cut and then the take-out electrode is connected at the connection. This is because the sheet-shaped vibration sensor body is difficult to handle, and if the layers constituting the vibration sensor body are cut before being laminated or the take-out electrodes are connected, the manufacturing efficiency is significantly reduced, and it is also a cause of defects. Therefore, all the layers were laminated and then cut, and the take-out electrode was connected. In this respect, even when the entire vibration sensor main body 210 is covered with the exterior protective layer, it is efficient to continuously manufacture the vibration sensor body 210 until it is wrapped at least in the width direction with respect to the transport direction. When connecting the take-out electrode while being covered with the exterior protective layer, the penetration type connection structure is convenient because the exterior protective layer can also be connected through the outer protective layer, but it is arranged outside the exterior protective layer. The take-out electrode and the positive electrode layer, the negative electrode layer, and the upper shielding layer arranged inside the exterior protective layer are connected by the penetrating eyelet terminals 216, 217, etc., and the eyelet terminals 216, 217, etc. Will come into contact with the outer peripheral surfaces of the eyelet terminals 216 and 217 in the portion penetrating the positive electrode layer 212, the negative electrode layer 213 and the upper shielding layer 215, and the contact area is very narrow and a connection failure is likely to occur. .. In such a through-type connection structure, poor contact with each layer frequently occurs due to the holes in each layer expanding due to mechanical stress or the like. In view of the above-mentioned problems, it is an object of the present invention to provide a biological vibration signal detection device provided with a more reliable connection portion.

Further, as shown in FIG. 8B, an upper shielding layer 215 is provided, a negative electrode layer 213 and an upper shielding layer 215 are provided, and a positive electrode layer 212 for detecting a signal is surrounded by a shield having a constant potential. As for the structure, when it was actually used, various noises overlapped with the acquired signal. Another object of the present invention is to provide a biological vibration signal detection device capable of reducing noise and detecting a more accurate signal.

In order to solve the above problems, the biological vibration signal detection device of the present invention includes a sensor material layer containing a material having a piezoelectric effect, a first electrode layer formed on the upper surface of the sensor material layer, and the sensor material layer. A sheet-shaped vibration sensor main body including a second electrode layer formed on the lower surface of the vibration sensor body, an exterior protective layer covering the vibration sensor main body, and the first electrode arranged at a connection portion of the vibration sensor main body. A first take-out electrode connected to the layer and a second take-out electrode arranged at the connection portion of the vibration sensor main body and connected to the second electrode layer are provided, and the first take-out electrode of the first take-out electrode is provided. One end is connected to the surface of the first electrode layer without penetrating the first electrode layer, and the other end of the first extraction electrode is arranged outside the exterior protective layer, and the second One end of the take-out electrode is connected to the surface of the second electrode layer without penetrating the second electrode layer, and the other end of the first take-out electrode is arranged outside the exterior protective layer. It is characterized by that.

Further, in the biological vibration signal detection device, the vibration sensor main body further includes an insulating layer formed on the upper surface of the first electrode layer and a conductive shielding layer formed on the upper surface of the insulating layer. Including, the insulating layer and the shielding layer preferably have an opening in the connecting portion that exposes the surface of the first electrode layer, and further covers the connecting portion in the biovibration signal detection device. It is preferable that a conductive shielding member different from the shielding layer is provided.

Further, in the biological vibration signal detection device, it is preferable that the exterior protective layer has an opening in the connection portion that exposes at least one surface of the first electrode layer or the second electrode layer.

Further, in the biological vibration signal detection device, a vibration collecting member having one surface of the exterior protective layer including the vibration sensor main body attached to the lower surface and a lower surface of the vibration collecting member covering the connecting portion. It is preferable to provide a protective member arranged apart from the vibration sensor main body. Further, the protective member is coupled to the lower surface of the vibration collecting member via an elastic member, and the height of the elastic member from the lower surface of the vibration collecting member to the protective member is larger than the thickness of the vibration sensor main body. It is preferable that the elastic member is not in contact with the exterior protective layer including the vibration sensor main body. In these biological vibration signal detection devices, the height of the step from the lower surface of the protective member to the lower surface of the exterior protective layer is preferably 10 mm or less.

Further, in the biological vibration signal detection device, even if a semiconductor element electrically connected to the vibration sensor main body is arranged in a space surrounded by the lower surface of the vibration collecting member, the protective member, and the elastic member. It is preferable to further include a conductive shielding member that covers at least a part of the semiconductor element.

Further, in the biological vibration signal detection device, the first take-out electrode and the second take-out electrode are conductive tapes, which are conductive to the first electrode layer and the second electrode layer, respectively. It may be adhered with an adhesive.

In the present invention, the entire vibration sensor main body is covered with an exterior protective layer, and the vibration sensor main body prevents damage due to contact with the outside, friction, and wear, and also externals such as moisture, oxygen, dust, and light. The inside can be protected from the environment, and one end of the first extraction electrode is connected to the surface of the first electrode layer without penetrating the first electrode layer of the sheet-shaped vibration sensor body, and the second One end of the extraction electrode is connected to the surface of the second electrode layer without penetrating the second electrode layer of the vibration sensor body, and the surface of the electrode layer of the vibration sensor body and the surface of the extraction electrode are surface-bonded. Therefore, poor contact can be reduced and reliability can be improved. Further, the other ends of the first and second extraction electrodes are arranged outside the exterior protective layer, and electricity between the vibration sensor main body and the outside is provided. Enables connection.

Further, the vibration sensor main body includes an insulating layer formed on the upper surface of the first electrode layer and a conductive shielding layer formed on the upper surface of the insulating layer, and the insulating layer and the shielding layer are the first electrodes. When the shielding layer has an opening that exposes the surface of the layer, the shielding layer becomes an electromagnetic shield from the outside and noise can be reduced, and the first electrode layer and the first extraction are taken out through the opening of the insulating layer and the shielding layer. It can be connected to one end of the electrode. Further, by covering the connecting portion with a conductive shielding member, the electromagnetic field from the outside can be shielded even at the connecting portion, and noise can be reduced. Other effects will be described in the following embodiments.

The schematic block diagram of the biological vibration signal detection apparatus of this invention. The exploded schematic block diagram of the biological vibration signal detecting means of this invention. A bottom view (A), a cross-sectional view (B), and a partially transmitted bottom view (C) of the biological vibration signal detecting means of the present invention. The figure which shows the manufacturing process of the biological vibration signal detecting means of this invention. A modified example of the biological vibration signal detecting means of the present invention. Another embodiment of the biological vibration signal detecting means of the present invention. The figure which shows the manufacturing process of the biological vibration signal detecting means of this invention. Conventional example of vibration sensor means.

The "biological vibration signal detection device" of the present invention includes at least a vibration sensor main body and a biological vibration signal detection means including an extraction electrode for connecting each electrode layer of the vibration sensor main body to the outside. The biological vibration signal detection device may include one or more information processing means, power supply means, storage means, communication means, display output means, operation means, and the like, if necessary, and these and an extraction electrode. For example, they are connected by wiring. Further, the biological vibration signal detecting means includes a biological body including a vibration sensor main body such as an exterior protective layer that wraps the entire vibration sensor main body, a vibration collecting member to which the vibration sensor main body is adhered, and a protective member that protects the connection portion of the vibration sensor main body. Other configurations of the vibration signal detecting means may be included.

The "vibration sensor main body" of the present invention includes at least a sensor material layer, a first electrode layer, and a second electrode layer, and charges generated in the sensor material layer in response to vibration are first. It can be taken out by the electrode layer and the second electrode layer. The vibration sensor main body may further include a shielding layer for reducing noise due to an external electromagnetic field, static electricity, etc., and an insulating layer that insulates the shielding layer from the first or second electrode layer. Further, the vibration sensor main body may be provided with a protective layer on the outermost layer. The vibration sensor main body is in the form of a sheet in which each layer is integrally laminated on a film (which may be one of each layer or another) as a base material, and the plane dimension is wider than the thickness. It is a thing. It is preferable that the shielding layer has a constant potential (for example, grounding) and surrounds the entire sensor material layer, the first electrode layer, and the second electrode layer. The vibration sensor main body is preferably configured such that one of the first or second electrode layers has a constant potential (for example, grounding) and a signal is extracted at the potential of the other electrode layer. In this case, one of the constant potential electrodes The layer can be used as a shielding layer, and it is sufficient to cover only the other electrode layer with the shielding layer. In this specification, the top and bottom indicate relative positions in the thickness direction, and are not absolute. For example, they do not prevent the top and bottom from being turned upside down when actually manufactured or used. Absent. As the biological vibration signal detection device of the present invention and the vibration sensor main body used therein, it is possible to adopt a highly sensitive one that can detect even a very small signal (for example, a voltage of μV) in order to detect the biological vibration signal. preferable. As described above, since the sensor of the biological vibration signal detection device can detect the signal with high sensitivity, it is very vulnerable to noise, and even a slight noise has a great influence on the signal in μV unit. Therefore, in order to ensure the accuracy of the signal in the biological vibration signal detection device, various solutions capable of reducing noise are disclosed in the present specification. Further, the biological vibration signal detection device and the vibration sensor main body used therein are arranged in the vicinity of the biological body, and it is assumed that various physical impacts are applied. Therefore, various solutions for increasing the mechanical strength of the biological vibration signal detecting device and providing the device which is hard to break are disclosed in the present specification. The solutions disclosed in the present specification can be appropriately selected and adopted according to the characteristics required for the device. For example, when accuracy is required rather than strength, a noise reduction solution may be preferentially adopted instead of a solution for increasing mechanical strength. On the contrary, when strength is required, the machine The solution for increasing the strength may be preferentially adopted, and the solution for noise reduction may be adopted as necessary.

The "take-out electrode" of the present invention is a conductive member connected to the first or second electrode layer of the vibration sensor main body, and serves as a terminal for taking out the signal of the first or second electrode layer to the outside. The take-out electrode is a member different from the first or second electrode layer, and the surface of the take-out electrode is the surface of the first or second electrode layer without penetrating the first or second electrode layer. Face to face and connect. The take-out electrode may be a conductive adhesive tape coated with a conductive adhesive, a thin metal material having conductivity such as copper foil, aluminum foil, silver foil, or gold foil, or a metal thin film formed by a printing method or the like. However, a transparent conductive material such as ITO may be used. The extraction electrode is preferably a thin film having a thickness of several tens of nm to several hundreds of μm. The take-out electrode is preferably a conductive tape or a thin piece because it has a large connecting area, but it may be a conducting wire. Alternatively, the wiring having conductivity may be formed together by a printing method, a sputtering method, a vapor deposition method or the like. Further, for connection, it is preferable to adhere to the surface of the first or second electrode layer with a conductive adhesive because it is easy and has little influence, but the surface of the take-out electrode and the first or second electrode layer are connected. The surface of the surface may be bonded by ultrasonic waves, heat, pressure, or the like. However, ultrasonic waves, heat, pressure, etc. not only deteriorate and damage the electrode layer and the extraction electrode itself, but also affect the surrounding layer and exterior protection layer, so the conditions should be within the range where there is no problem in use. There is a need. On the other hand, the connection with a conductive adhesive is preferable because it has little influence on the surroundings. _{Further, a barrier metal layer such as Mo, Ti, TiO 2} is formed between the surface of the first or second electrode layer and the first or second extraction electrode, and the surface of the first or second electrode layer is formed. You may improve the connectivity with. Further, by using solder for the connecting portion, the connection can be further strengthened. The take-out electrode may be extended for a long time and used as wiring for connecting to another member (information processing means, etc.), or the take-out electrode may include other wiring or an electric circuit portion in the vicinity of the vibration sensor main body. It may be connected to a semiconductor element or the like. The electric circuit portion of the semiconductor element is, for example, an amplifier, a signal processing circuit, a communication circuit, a power supply circuit, a display circuit, or the like, and is preferably mounted around the extraction electrode.

FIG. 1 is a schematic block diagram of the biological vibration signal detection device 1 of the present invention. The biological vibration signal detection device 1 includes a biological vibration signal detecting means 2 (including a vibration sensor main body) capable of detecting the biological vibration signal of the living body 10, and the biological vibration signal acquired by the biological vibration signal detecting means 2 is wired 3 It is input to the information processing device 4 via. The information processing device 4 acquires various biological information based on the acquired biological vibration signal. For example, the presence / absence of a living body may be detected as biological information, or biological information such as the pulse rate, respiratory rate, snoring, and body movement of the living body may be calculated by signal processing. The biological vibration signal detection device 1 may include one or a plurality of power supply means 5, storage means 6, communication means 7, display output means 8, operation means 9, and the like, if necessary. Although a human example is shown as the living body 10, the living body 10 is not limited to humans and can be used for other animals. Further, as a vibration signal detecting device other than the living body, it can also be used as a means for detecting the rotational state of a driving body such as a motor by the vibration sensor main body and for detecting aged deterioration of durable consumer goods such as buildings.

FIG. 2 is an exploded schematic configuration diagram of the biological vibration signal detecting means 2 of the present invention, FIG. 3 is a configuration diagram of the biological vibration signal detecting means 2 excluding the protective cover, and FIG. 3 (A) is a biological vibration. It is a bottom view of the signal detecting means 2 (excluding the protective cover 20), FIG. 3 (B) is a cross section taken along the line BB of FIG. 2 (A), and FIG. 3 (C) is transparent to a part of the configuration. It is a bottom view. The dimensions in the drawings are exaggerated to explain the configuration of each layer, and do not indicate the actual dimensions.

As shown in FIG. 2, the biological vibration signal detecting means 2 of the present embodiment includes an exterior protective layer 22 containing a vibration collecting member 21 and a vibration sensor main body 10 (see FIG. 3B) in a protective cover 20. A wiring 3 provided with a protective member 23 and an elastic member 24 and connected to the vibration sensor main body 10 in the exterior protective layer 22 via a take-out electrode extends. However, when the information processing means 4 as shown in FIG. 1 is formed in the vicinity of the vibration sensor main body 10, for example, when it is formed on the vibration collecting member 21 or the protective member 23, wiring is performed. 3 is not always necessary, and the biometric information or the like processed by the information processing means 4 may be transmitted by using the wireless communication means.

The protective cover 20 is a flexible film-like member provided on the outside of the biological vibration signal detecting means 2 so as to prevent damage due to contact with the outside, friction, and abrasion, and also to prevent moisture, dust, and the like. Protect the inside from the external environment such as light. The material of the protective cover 20 is not particularly limited, but a polymer plastic material (for example, polyvinyl chloride (PVC), polyethylene (PE), polypropylene (PP), polystyrene (PS), ABS, AS, polyethylene terephthalate (PET), etc. Polymethyl methacrylate (PMMA), polyester, polycarbonate (PC), polyurethane (PUR), polyethylene terephthalate (PEN)) may be used, or a laminated material obtained by laminating a metal layer on these may be used. When the metal layers are laminated, by setting the metal layer to a constant potential (for example, grounding), it is possible to provide a function of reducing the noise of the vibration sensor main body 10 as the outermost shielding layer (shield layer). In one embodiment, the protective cover 20 is a plastic material having a three-layer structure, specifically, a total of three layers in which the front surface is a vinyl chloride layer, the intermediate layer is a polyester rayon layer, and the back surface is an acrylic resin. An insulating material having a thickness of 1 mm or less was used. In addition to this, a single-layer film or a multilayer film such as polyester, polycarbonate, or polyurethane may be used.

The vibration collecting member 21 is a member that transmits vibration generated in a living body to the vibration sensor main body, and is a member having a higher hardness than the vibration sensor main body. The vibration collecting member 21 preferably has a high Young's modulus and easily transmits vibration, and is a plastic plate (for example, PET plate, foamed styrol plate, PP plate, acrylic plate, hardened vinyl chloride plate, foamed vinyl chloride plate, etc.). Alternatively, a metal plate (for example, an aluminum plate, a duralmin plate, a copper plate, an iron plate, etc.) or a multilayer film plate in which some of these is combined can be used. An exterior protective layer 22 and an elastic member 24 including the vibration sensor main body 10 or the vibration sensor main body 10 are fixed to the lower surface of the vibration collecting member 21, but further, an information processing device 4, a power supply means 5, and a storage means 6 are fixed. , Communication means 7, display / output means 8, operating means 9, and one or more semiconductor elements including other electric circuit units may be mounted. Further, at least a part of the lower surface of the vibration collecting member 21 may be used as a printed circuit board. For example, wiring may be printed on the lower surface or inside of the vibration collecting member 21, or the printed circuit board on which the wiring is printed may be used as the vibration collecting member. It may be attached to the lower surface of 21. In a large-area sensor such as a bed sensor, it is preferable to provide a vibration collecting member 21 in order to acquire a biological signal from each area, but in the case of a small sensor built in a chair, vibration is not always required. The collecting member 21 is not required. When the vibration collecting member 21 is not provided, at least one surface of the exterior protective layer 22 may be thickened so that the thick surface of the exterior protective layer 22 functions as the vibration collecting member 21 and vibration can be easily transmitted.

The exterior protective layer 22 contains the vibration sensor main body 10 inside, and is a flexible film-like member that prevents damage due to contact with the outside, friction, and abrasion, and also contains moisture, oxygen, dust, and the like. It is preferable to protect the inside from the external environment such as light. The material of the exterior protective layer 22 is not particularly limited, but a material having a waterproof function and hardly allowing moisture and oxygen to permeate is preferable. As the exterior protective layer 22, a polymer plastic material (for example, PVC, PE, PP, PS, ABS, AS, PET, PMMA polyester, PC, PUR, PEN) may be used, or a metal layer, a barrier layer, or the like is laminated thereto. It may be a laminated material. When the metal layers are laminated, by setting the metal layer to a constant potential (for example, grounding), it is possible to provide a function of reducing the noise of the vibration sensor main body 10 as a shielding layer (shield layer). The exterior protective layer 22 is adhesively fixed to the lower surface of the vibration collecting member 21 in the adhesive region 22a of FIG. 2C. For example, double-sided tape may be attached to the adhesive region 22a, or an adhesive may be applied to the adhesive region 22a. A part (connection portion) of the exterior protective layer 22 is covered with a protective member 23. The thickness of the exterior protective layer 22 is preferably several μm to several hundred μm.

The protective member 23 is connected to the lower surface of the vibration collecting member 21 by the elastic member 24, and is arranged so as to be separated from the lower surface of the vibration collecting member 21 by the height of the elastic member 24. The protective member 23 is for protecting the connection portion of the vibration sensor main body 10, and is a member having a higher hardness than the vibration sensor main body. The connection portion of the vibration sensor main body 10 is often formed on the peripheral edge portion of the vibration sensor main body, and the peripheral edge portion often comes into contact with a hard portion such as a bed or a chair frame, and is connected without a protective member 23. The part was damaged and caused a failure. In FIGS. 2 and 3, the protective member 23 is provided so as to cover the connection portion and is not provided in the sensor portion, but may be provided in the sensor portion. The protective member 23 includes a plastic plate (for example, PET plate, foamed styrol plate, PP plate, acrylic plate, hardened vinyl chloride plate, foamed vinyl chloride plate, etc.) and a metal plate (for example, aluminum plate, duralmin plate, copper plate, iron plate). Etc.) or a multilayer plate in which some of these are combined can be used. The thickness of the protective member 23 is preferably several μm to several mm.

The elastic member 24 is formed of an elastic body having a certain degree of insulating property, and the protective member 23 is floated by the height of the elastic member 24. As the elastic member 24, for example, a rubber-based material, a urethane-based material, or a laminated film thereof is preferable. The thickness of the elastic member 24 is preferably several mm to several tens of mm. The elastic member 24 is provided along the peripheral edge of the protective member 23, but the parts of the vibration sensor main body 10 and the exterior protective layer 22 are removed so that no load is applied to the vibration sensor main body 10. Has been done. Further, the elastic member 24 is also removed from the portion through which the wiring 3 is passed. When an external force is applied to the protective member 23, the elastic member 24 is slightly deformed, but the protective member 23 is supported by the elastic member 24 so that the protective member 23 does not come into contact with the connection portion of the vibration sensor main body 10. Further, the elastic member 24 can also be integrally molded with the protective member 23. For example, the protective member 23 provided with the elastic member 24 can be formed by laminating a rubber-based material on a cured vinyl chloride plate or a carbon material.

At least the connection portion of the vibration sensor main body 10 is arranged in the space surrounded by the elastic member 24 and the protective member 23 on the lower surface of the vibration collecting member 21, and the information processing device 4 and the power supply means are provided in such a space. 5. A semiconductor element including a storage means 6, a communication means 7, a display output means 8, an operation means 9, and other electric circuit units may be mounted. Further, in order to increase the physical strength of the connecting portion, the space surrounded by the elastic member 24 and the protective member 23 is filled with resin on the lower surface of the vibration collecting member 21, and each configuration in the connecting portion cannot be moved. You may do so.

An exterior protective layer 22, a protective member 23, and an elastic member 24 including a vibration sensor main body 10 are attached to the lower surface of the vibration collecting member 21, but a connecting portion in which the protective member 23 and the elastic member 24 are arranged and a connecting portion are provided. There is a step between the protective member 23 and the sensor portion on which the elastic member 24 is not arranged. It was found that when the protective cover 20 is covered in this state, play (floating portion) is generated in the protective cover 20 due to the step, and this play is slightly vibrated by an external force. This micro-vibration causes mechanical noise to be generated in the vibration sensor main body. Therefore, it is preferable to reduce the step, reduce play, and reduce micro-vibration and noise. The height (that is, the step) from the lower surface of the protective member 23 to the lower surface of the exterior protective layer 22 is preferably 10 mm or less, more preferably 8 mm or less, and further preferably 5 mm or less. The degree of agreement between BBI and RRI in a continuous measurement time of 3 minutes between BBI (time between two peaks of cardiovascular arterial waves obtained by this sensor) and RRI (time between two R wave peaks obtained from an electrocardiogram) When the step is 20 mm or more, it is 50% or less, when it is 20 to 10 mm, it is divided by 80%, when it is 10 to 8 mm, it is 80% or more, when it is 8 to 5 mm, it is 90% or more, and it is 5 to 0 mm. In the case, the average was 95%. Further, instead of the protective member 23 and the elastic member 24 that cover the connecting portion, a configuration may be adopted in which the connecting portion is covered and an insulating tape is adhered to physically and electrically protect the connecting portion. In this case, since there is almost no step between the connection portion and the sensor portion, there is no play in the protective cover 20, and noise can be suppressed.

Here, the degree of agreement between BBI and RRI will be briefly described. As is well known, electrocardiogram (ECG) is a technique in which electrodes are attached to the body and the change in electric potential between the electrodes is directly measured, which is a technically established technique. At that time, RRI is an index showing the fluctuation between heartbeats, and shows the time of R wave and R wave of the electrocardiogram. By Fourier-expanding RRI, it is classified by frequency and the autonomic nerve activity index (LF, LF / It is used as HF). HF represents parasympathetic nerve activity and LF represents sympathetic nerve activity. On the other hand, the cardiac motion chart (BCG) is a vibration caused by the tremor of the heart that occurs when the blood of the heart is pushed out from the heart, and this sensor should be used without contacting or restraining the body. Can be measured by. Then, BBI (Beat by Beat Interval) was defined as an index corresponding to RRI. Theoretically, the time difference between BBI and RRI is about 0.2 seconds, but the time between heartbeats is the same. However, in reality, BBI is extremely difficult to measure, and due to the inclusion of any minute noise, it does not match 100%. For the degree of agreement between BBI and RRI, BBI and RRI are obtained from the electrocardiogram (ECG) and the electrocardiogram (BCG) measured at the same time, respectively, and the correlation coefficient is obtained from the correlation diagram with BBI as the vertical axis and RRI as the horizontal axis. Can be obtained and the match rate can be calculated. The measurement time of the electrocardiogram (ECG) and the electrocardiogram (BCG) is preferably 100 seconds or longer, and more preferably 180 seconds or longer. Increasing this matching rate is the most important issue in sensor development. In this patent, we found the relationship between the step and the degree of matching, and by making the step 10 mm or less, the matching rate can be made practical. We succeeded in achieving a high concordance rate of 80% or more.

In the vibration sensor main body 10, as shown in FIG. 3B, a film-shaped first electrode layer 12 and a second electrode layer 13 are formed above and below the film-shaped vibration sensor material layer 11, and the first A film-shaped insulating layer 14 is formed over the electrode layer 12, and a shielding layer 15 is formed on the insulating layer 14. Further, an opening 15a is formed in a part of the shielding layer 15, and an opening 14a is also formed in the insulating layer 14 in the opening 15a of the shielding layer 15 to expose the first electrode layer 12. ing. The first extraction electrode 16 is bonded to the surface of the exposed first electrode layer 12. Further, the second extraction electrode 17 is bonded to the lower surface of the second electrode layer 13, and the third extraction electrode 18 is bonded to the surface of the shielding layer 15. Since these connecting portions are extremely sensitive to noise and cause noise induction, the connecting portions are further covered with a shielding member 19.

The vibration sensor material layer 11 is a piezoelectric material that generates electric charges by vibration, and a piezo element (piezoelectric element) is preferably used, but a microphone that converts vibration into an electric signal may also be used. The piezo element material may be a ceramic material or an organic polymer material, and as the ceramic material, it is preferable to use a ferroelectric material which is a high ε material such as PZT or BST. Further, as the organic polymer system, for example, a polyolefin-based material may be used, and specifically, for example, a porous polypropylene electlet film (Electro Mechanical Film (EMFI)), PVDF (polyvinylidene fluoride film), vinylidene fluoride and the like. An ethylene trifluoride copolymer (P (VDF-TrFE)) or a vinylidene fluoride and a tetrafluoroethylene copolymer (P (VDF-TFE)) may be used. The vibration sensor material layer 11 is preferably in the form of a film (for example, 1 mm or less in thickness, preferably 10 to 200 μm in thickness), and more preferably flexible. Further, it is preferable to use the piezoelectric sensor as the vibration sensor material layer 11 because it is possible to acquire the biological vibration signal without restraining the living body and the measurement can be performed more stress-free. However, the piezoelectric sensor can also be attached to a wristband, belt, wristwatch, ring, headband, or the like and attached to an animal to be used as a wearable sensor. Further, as a vibration signal detecting device other than the living body, it can also be used as a means for detecting the rotational state of a driving body such as a motor by the vibration sensor main body and for detecting aged deterioration of durable consumer goods such as buildings. Further, as the microphone, for example, it is preferable to use a small microphone having a diameter of about 10 mmφ or less and a size of about several mm.

The first electrode layer 12 and the second electrode layer 13 are formed adjacent to the vibration sensor material layer 11, and are formed of a metal (copper, aluminum, silver, gold, etc.), a conductive carbon film, and a transparent conductive material (transparent conductive material). Conductive materials such as ITO, IZO, etc.) are used. The first electrode layer 12 and the second electrode layer 13 are preferably in the form of a film, and more preferably flexible. In particular, it is preferable to use a soft material such as a thin conductive carbon film or a silver electrode instead of the conventional aluminum because the vibration sensor body 10 itself can be softened. In the present embodiment, since the second electrode layer 13 formed on the lower surface of the vibration sensor main body 10 is grounded so as to take out a signal from the first electrode layer 12, the second electrode layer 13 is It also functions as a lower shielding layer. These electrode layers can be formed by various methods such as a printing technique, a thin film bonding method using an adhesive, a thin film deposition method, and a sputtering method. The thickness of the electrode layer is preferably several nm to several hundred nm.

The insulating layer 14 insulates the first electrode layer 12 and the shielding layer 15, and an organic or inorganic insulating coating is used. For example, as the material of the insulating layer 14, PET, PEN, polycarbonate, vinyl chloride, silicon dioxide, silicon nitride or the like, or a laminated structure in which a plurality of types of insulating layers are combined may be used. The insulating layer 14 is preferably in the form of a film, and more preferably in the form of a film. The thickness of the insulating layer 14 is preferably several μm to several hundred μm. The insulating layer can be formed by various methods such as a printing technique, a thin film bonding method using an adhesive, a thin film deposition method, and a sputtering method. The insulating layer 14 is sandwiched between the first electrode layer 12 and the shielding layer 15 and has a capacitance. The capacitance is used when detecting vibrations having a frequency of around 100 to 500 Hz, such as a signal of a finger or a sleeper. Is preferably 1/10 or less of the capacitance of the vibration sensor material layer 11, the first electrode layer 12, and the second electrode layer 13. Further, although the insulating layer 14 has an opening 14a formed, the insulating layer 14 having the opening 14a formed may be formed on the first electrode layer 12 or the first electrode layer. After forming the insulating layer 14 on the 12, the opening 14a may be formed.

The shielding layer 15 is formed on the insulating layer 14, and a conductive material such as a metal (aluminum, silver, gold) or a conductive carbon film, or a laminated film of a conductive material and an insulating material is used. .. The shielding layer 15 is preferably in the form of a film, and more preferably in the form of a film. In particular, it is preferable to use a soft material such as a thin conductive carbon film or a silver electrode instead of the conventional aluminum because the vibration sensor body 10 itself can be softened. By setting the shielding layer 15 to a constant potential (for example, grounding), it is possible to shield the influence of an external electromagnetic field or the like on the first electrode layer from which a signal is taken out. Although the opening 15a is formed in the shielding layer 15, the shielding layer 15 in which the opening 15a is formed may be formed on the insulating layer 14, or the shielding layer 15 may be formed on the insulating layer 14. After forming, the opening 15a may be formed. When the opening 15a is provided later, it is preferable to continuously form the opening 14a of the insulating layer 14. As the shielding layer 15, for example, aluminum having a thickness of 10 μm formed on a PET having a thickness of 25 μm may be used, the PET layer may be used as the insulating layer 14 or a part thereof, and the aluminum layer may be used as the shielding layer 15.

The first take-out electrode 16, the second take-out electrode 17, and the third take-out electrode 18 are conductive materials. As the take-out electrodes 16, 17, and 18, a conductive tape is adhered to the surface of each layer with a conductive adhesive and bonded. The take-out electrode may be a conductive adhesive tape coated with a conductive adhesive, a thin metal material having conductivity such as copper foil, aluminum foil, silver foil, or gold foil, or a metal thin film formed by a printing method or the like. However, a transparent conductive material such as ITO may be used. The thickness of the take-out electrode can be widely selected from several tens of nm to several hundreds of μm. The extraction electrodes 16, 17, and 18 are joined in a surface with the electrode layer and the shielding layer. The first take-out electrode 16 is joined to the first electrode layer 12 at the openings 15a and 14a of the shielding layer 15 and the insulating layer 14. The second extraction electrode 17 is joined to the lower surface of the second electrode layer 13. The third take-out electrode 18 is joined to the upper surface of the shielding layer 15. As shown in FIG. 3C, the third take-out electrode 18 is connected to the second take-out electrode 17 by wiring and has the same potential (ground).

The shielding member 19 is a conductive film or a conductive adhesive film, and covers the connecting portion. As the shielding member 19, for example, a conductive tape such as a copper foil or an Al foil can be used. Since the first take-out electrode 16 is arranged in the opening 15a of the shielding layer 15, it is not shielded from the external electromagnetic field as it is, and noise is generated in the connecting portion for extracting the important signal. It occurs on the take-out electrode 16. Therefore, at least the opening 15a of the shielding layer 15 is covered with the shielding member 19 different from the shielding layer 15. In FIG. 3, the shielding member 19 is provided on the upper surface and the lower surface, and covers not only the first extraction electrode 16 but also the second extraction electrode 17 and the third extraction electrode 18. The shielding member 19 is configured so as not to be short-circuited with the first extraction electrode 16. Since the shielding member 19 is conductive, it may be used to connect the second take-out electrode 17 and the third take-out electrode 18. Further, by providing the shielding member 19, for example, the information processing means, the storage means, the communication means, etc. of the biological vibration signal detection device are mounted in the vicinity of the vibration sensor main body (for example, on the vibration collecting member 21 or on the protective member 23). At that time, the electromagnetic field generated from these circuits can be shielded, which has the effect of reducing noise. As the shielding member 19, for example, an Al thin film having a thickness of 10 μm formed on a PET having a thickness of 25 μm may be used, or a copper foil sheet may be used. Since these are composed of a thin sheet film, they are highly flexible and can stably cover and protect the soldered connection area. Further, when the information processing means is formed in the same plane in the vicinity of the vibration sensor body as well as the connecting portion, the semiconductor chip and the passive element used for the information processing means and their connecting portions are also covered with a shielding member to form an electromagnetic field. Etc. are preferably shielded to reduce noise. As described above, since the biological vibration signal detection device handles signals in μV units, noise is generated not only in the vibration sensor main body and its connection portion but also in the information processing means to which the vibration signal from the vibration sensor main body is input. It is preferable to prevent it.

The wiring 3 is fixed to the vibration collecting member 21 or the protective member 23 by the fixing pin 32 so that even if a force is applied to the wiring 3, the wiring 3 is not transmitted to the vibration sensor main body 10. One end of the wiring 3 is connected to the extraction electrodes 16 and 17, and the other end is connected to the plug 31. The wiring 3 and the take-out electrode may be connected using, for example, a substrate for connection, may be bonded with a conductive adhesive, or may be connected with solder or the like. It is preferable that the portion where the wiring 3 and the extraction electrode are connected is also shielded by the shielding member 19 to shield the electromagnetic field and the like to reduce noise. For example, an Al thin film having a thickness of 10 μm formed on a PET having a thickness of 25 μm may be placed over a portion connecting the wiring 3 and the extraction electrode. The fixing pin 32 may be a separate component such as a U-shaped insulating staple, or may be integrally molded with the vibration collecting member 21 or the protective member 23.

An example of the manufacturing process of the vibration sensor main body 10 and the biological vibration signal detecting means 2 is as follows. First, a thin sheet film-shaped piezo element material 11 (for example, PVDF having a thickness of about 40 μm or about 110 μm) is prepared, and electrode layers (for example, a conductive carbon film having a thickness of about 10 μm) are provided on both the front and back surfaces of the piezo element material 11. The first and second electrode layers 12 and 13 were formed on both the front and back surfaces of the piezo element material. For forming the electrode layer, a conductive carbon film may be adhered using an adhesive, or an electrode layer may be formed by using a printing technique using an inkjet printing method or a letterpress inversion method.

After forming the electrode layer, an insulating layer (for example, a PET (polyethylene terephthalate) film having a thickness of about 20 μm) 14 having an opening 14a patterned on the first electrode layer 12 is laminated, and the insulating layer 14 is formed. Was formed on the first electrode layer 12. Further, a conductive shielding layer 15 in which an opening 15a is patterned on the insulating layer 14 (for example, a conductive carbon film having a thickness of about 10 μm or a conductive carbon film having a thickness of about 10 μm and PET having a thickness of about 25 μm). A thick laminated sheet film) was attached to form an electromagnetic shield layer on the surface, and the vibration sensor main body 10 was completed. Further, one exterior protective layer 22 was folded back, a vibration sensor main body 10 was arranged between them, and the exterior protective layer 22 was adhered to both the upper and lower surfaces of the vibration sensor main body 10. The exterior protective layer 22 may be a bag-shaped cylinder, and after the vibration sensor main body 10 is inserted into the bag-shaped exterior protective layer 22, the vibration sensor main body 10 and the exterior protective layer 22 may be bonded with heat, an adhesive or the like. Good. Further, the two exterior protective layers 22 may be separately attached to the upper and lower surfaces of the vibration sensor body by using an adhesive, or may be adhered to both sides of the vibration sensor body by laminating. Since the vibration sensor main body 10 having the above configuration uses a soft conductive carbon film as a material constituting the electrode layer and the electromagnetic shield layer, the sensor itself can be softened, and the wristband, belt, wristwatch, ring, etc. It can be attached to the headband, the curved part of the exterior of the motor rotating body, the outer wall of the building, etc. without any discomfort. In addition to the carbon material, a silver electrode having a thickness of several 10 to 200 nm or an electrode made of an Al-based material may be adhered using printing technology or the like, and the material and forming method of each layer are limited to the above examples. It's not something. When forming the information processing means, by using the printing technique, it is possible to simultaneously form the electrical wiring for wiring the semiconductor chip or the like constituting the information processing means on the exterior protective layer at the same time as forming the electrodes.

FIG. 4 is a diagram for explaining a step in the middle of the manufacturing process of the biological vibration signal detecting means 2, and the same components as those in FIG. 3 are designated by the same reference numerals. As shown in FIG. 4A, the adhesive region 22a of the exterior protective layer 22 including the vibration sensor main body 10 is adhered to the vibration collecting member 21, and the entrance of the bag of the exterior protective layer 22 is opened to open the vibration sensor main body 10. Expose the end of the. An opening 14a of the insulating layer 14 and an opening 15a of the shielding layer 15 are arranged at the end portion, and the first electrode layer 12 is exposed through the openings 14a and 15a. Then, as shown in FIG. 4B, the first take-out electrode 16, the second take-out electrode 17, and the third take-out electrode 18 to which the wiring 3 is connected are connected to the first electrode layer 12 and the second take-out electrode 18, respectively. It is adhered to the electrode layer 13 and the shielding layer 15 with a conductive adhesive. The wiring 3 is fixed with a pin 32 as needed. If the connection between the wiring 3 and the take-out electrode does not affect or has little effect on the vibration sensor main body 10, connect each layer of the vibration sensor main body 10 and the take-out electrode first, and then connect the take-out electrode and the wiring 3. However, when the connection between the wiring 3 and the take-out electrode affects the vibration sensor main body 10, it is preferable to connect the take-out electrode to which the wiring 3 is connected in advance to each layer of the vibration sensor main body 10. The end of the vibration sensor main body 10 is flexible, and the first electrode layer 12 and the shielding layer 15 on the upper surface side may be adhered by turning over the end and adhering the take-out electrode. After that, as shown in FIG. 4C, the connection portion is electromagnetically shielded by the shielding member 19. When the information processing means 4 is formed in the vicinity of the connection portion, the information processing means 4 may also be electromagnetically shielded by the shielding member 19.

Then, the entrance of the exterior protective layer 22 is closed, the elastic member 24 is adhered to the lower surface of the vibration collecting member 21 with double-sided tape in a substantially U shape along the periphery of the protective member 23, and the lower surface of the elastic member 24 is further attached to both sides. It is fixed to the protective member 23 with tape. Finally, the biological vibration signal detecting means 2 was completed by wrapping the entire body including the vibration collecting member 21, the vibration sensor main body 10 and the protective member 23 with a protective cover.

FIG. 5 is a modified example of the vibration sensor main body 10. FIG. 5A is a cross-sectional view of the vibration sensor main body 10 and the exterior protective layer 22, and FIG. 5B is a bottom view of the exterior protective layer 22. In the vibration sensor main body 10 of FIG. 5, three openings 22b, 22c, and 22d are formed in the exterior protective layer 22, and the electrodes taken out from the outside of the exterior protective layer 22 are the respective layers of the vibration sensor main body 10 and the openings 22b. It is joined via 22c and 22d. The first take-out electrode 16 is the first electrode via the first opening 22b formed on the upper surface of the exterior protective layer 22, and further through the opening 15a of the shielding layer 15 and the opening 14a of the insulating layer 14. It is joined to the layer 12. The second take-out electrode 17 is joined to the second electrode layer 13 via the second opening 22c formed on the lower surface of the exterior protective layer 22. The third take-out electrode 18 is joined to the shielding layer 14 via the third opening 22d formed on the upper surface of the exterior protective layer 22. Further, in the connecting portion, the shielding member 19 covers the upper surface and the lower surface of the exterior protective layer 22.

FIG. 6 is another embodiment of the biological vibration signal detecting means 2 of the present invention. FIG. 6A is an exploded schematic configuration diagram of the biological vibration signal detecting means 2, and FIG. 6B is a cross-sectional view. As shown in FIG. 6, the biological vibration signal detecting means 2 of the present embodiment includes a vibration collecting member 41, an exterior protective layer 42 containing a vibration sensor main body 50, a protective member 43, and an elastic member 44 in the protective cover 40. Further, a shielding member 45 is provided so as to wrap the vibration collecting member 41 to the protective member 43, and a cushion material 46 is arranged on the lower surface side thereof. Further, the wiring 3 connected to the vibration sensor main body 50 in the exterior protective layer 42 via the take-out electrode extends.

In the vibration sensor main body 50 of the present embodiment, as shown in FIG. 6B, a film-shaped first electrode layer 52 and a second electrode layer 53 are formed above and below the film-shaped vibration sensor material layer 51. ing. A first opening 42a and a second opening 42b are formed in the exterior protective layer 42 covering the vibration sensor main body 50, and the first take-out electrode 54 is formed through the first opening 42a. Is bonded to the first electrode layer 52, and the second extraction electrode 55 is bonded to the second electrode layer 53 via the second opening 42b. The exterior protective layer 42 containing the vibration sensor main body 50 is adhered to the lower surface of the vibration collecting member 41, and the protective member 43 is formed by the elastic member 44 so as to cover at least the connection portion of the vibration sensor main body 50. It is fixed to the bottom surface.

The shielding member 45 is a conductive and flexible film-like member, which is held at a constant potential and can shield the influence of an electromagnetic field or the like from the outside. In the present embodiment, the vibration sensor main body 50 is not formed with a shielding layer, and the first electrode layer 52 and the second electrode layer 53 are affected by an electromagnetic field from the outside by a separately provided shielding member 45. It is shielding. Further, since the shielding member 45 also covers the connecting portion, the influence of the electromagnetic field from the outside is shielded from the first extraction electrode 54 and the second extraction electrode 55 as well. Although not shown, the shielding member 45 is directly or indirectly connected to the constant potential line (for example, grounding) of the wiring 3 by, for example, a conductive tape or a conductive adhesive. Indirectly connected means that the wiring is connected via another conductive member (such as a second electrode layer) connected to the constant potential line of the wiring 3.

The cushion member 46 is a highly elastic sponge or the like arranged on the lower surface side of the vibration sensor main body 50, and detects the vibration detected by the vibration sensor main body 50 from above where the vibration collecting member 41 is arranged. It is preferable to provide it for absorbing and removing vibration from below, but it is not essential. The cushion member 46 may be arranged outside the protective cover 40.

FIG. 7 is a bottom view for explaining a step in the middle of the manufacturing process of the biological vibration signal detecting means 2 of FIG. 6, and the same configurations as those of FIG. 6 are designated by the same reference numerals. FIG. 7A shows a state in which the exterior protective layer 42 including the vibration sensor main body 50 is adhered to the lower surface of the vibration collecting member 41. The first opening 42a (indicated by the dotted line) formed on the upper surface side of the exterior protective layer 42 is formed at a position different from that of the opening 42b formed on the lower surface side in a plan view. Therefore, even if the first take-out electrode 54 on the upper surface side and the second take-out electrode 55 on the lower surface side extend in the same direction to the outside of the exterior protective layer 42, they can be taken out without short-circuiting. The first electrode layer 52 of the vibration sensor main body 50 is exposed in the first opening 42a, and the second electrode layer 53 of the vibration sensor main body 50 is exposed in the second opening 42b.

Here, as shown in FIG. 7B, the first take-out electrode is exposed on the upper surface side of the conductive tape 54 in which the wiring 3 is solder-connected to the signal conducting wire 34 via the wiring substrate 33. Was adhered to the electrode layer 52 of the above with a conductive adhesive. Further, the wiring 3 is bonded to the second electrode layer 53 exposed on the lower surface side by using the conductive tape 55 to which the grounding conductor 35 is solder-connected via the wiring substrate 33 as the second extraction electrode with a conductive adhesive. did. In this way, since the take-out electrodes are joined by adhering with a conductive adhesive using a conductive tape that has been solder-connected in advance, the vibration sensor main body 50, the exterior protective layer 42, and the vibration collecting member 41 are bonded. I was able to prevent heat damage. Further, a grounding lead wire 36 for a shielding member extends from the wiring board 33.

Next, the elastic member 44 (not shown in FIG. 7) is arranged along the peripheral edge of the protective member 43 and adhered to the lower surface of the vibration collecting member 41, and the protective member 43 is adhered to the lower surface of the elastic member 44. A conductive tape 37 to which a grounding conductor 36 for a shielding member is solder-connected is adhered to the lower surface of the protective member 43, and a conductive double-sided tape 38 is adhered to the vicinity of the center of the conductive tape 37. The conductive double-sided tape 38 adheres and fixes the shielding member 45 and the protective member 43, and further securely grounds the shielding member 45 via the conductive tape 37 and the grounding lead wire 36.

Then, while adhering the conductive shielding member 45 to the conductive double-sided tape 38, the outside of the vibration collecting member 41, the exterior protective layer 42 containing the vibration sensor main body 50, the protective member 43, and the elastic member 44 is covered with the shielding member 45. After covering, a cushion member was arranged on the lower surface side and the whole was wrapped with a protective cover 40 to complete the biological vibration signal detecting means 2 of FIG.

In the present embodiment, the outer protective layer 42, the protective member 43, and the elastic member 44 including the vibration sensor main body 50 are attached to the lower surface of the vibration collecting member 41, but the protective member 43 and the elastic member 44 are attached. There is a step between the arranged connecting portion and the sensor portion where the protective member 43 and the elastic member 44 are not arranged. Since it is covered by the shielding member 45 in this state, play (floating portion) is generated in the shielding member 45 due to the step, and this play causes slight vibration due to an external force, which causes noise. Therefore, also in the present embodiment, it is preferable to reduce the step, play less, and reduce micro-vibration and noise, and the height from the lower surface of the protective member 43 to the lower surface of the exterior protective layer 42 (that is, the step). Is preferably 10 mm or less, more preferably 8 mm or less, and even more preferably 5 mm or less. Further, instead of the protective member 43 and the elastic member 44 that cover the connecting portion, a configuration may be adopted in which the connecting portion is covered and an insulating tape is adhered to physically and electrically protect the connecting portion. In this case, since there is almost no step between the connection portion and the sensor portion, there is no play in the shielding member 45, and noise can be suppressed. Further, by providing the cushion member 46 as shown in FIG. 6, it is expected that the connecting portion is protected from mechanical impact even if the insulating tape is covered instead of the protective member 43 and the elastic member 44.

In the present embodiment, on the lower surface of the vibration collecting member 41, the information processing device 4, the power supply means 5, the storage means 6, the communication means 7, and the display are provided in the space surrounded by the elastic member 44 and the protective member 43. When a semiconductor element including an output means 8, an operating means 9, and other electric circuit parts is mounted, in a space surrounded by the elastic member 44 and the protective member 43 in order to shield the electromagnetic field from the semiconductor element. , It is preferable that the connection portion is covered with another shielding member (for example, the shielding member 19 in FIG. 4C) for electromagnetic shielding, and the semiconductor element mounted in the periphery is also covered with another shielding member for electromagnetic shielding. Is preferable.

1 Bio-vibration signal detection device 2 Bio-vibration signal detection means 3 Wiring 10 Vibration sensor body 11 Sensor material layer 12 First electrode layer 13 Second electrode layer 14 Insulation layer 15 Shielding layer 16 First extraction electrode 17 Second Extraction electrode 18 Third extraction electrode 19 Shielding member 21 Vibration collecting member 22 Exterior protective layer 23 Protective member 24 Elastic member

Claims (10)

A sheet containing a sensor material layer containing a material having a piezoelectric effect, a first electrode layer formed on the upper surface of the sensor material layer, and a second electrode layer formed on the lower surface of the sensor material layer. Vibration sensor body and
The exterior protective layer that covers the vibration sensor body and
A first extraction electrode arranged at the connection portion of the vibration sensor main body and connected to the first electrode layer, and a first extraction electrode.
A second extraction electrode arranged at the connection portion of the vibration sensor main body and connected to the second electrode layer is provided.
One end of the first take-out electrode is connected to the surface of the first electrode layer without penetrating the first electrode layer, and the other end of the first take-out electrode is outside the exterior protective layer. Placed,
One end of the second take-out electrode is connected to the surface of the second electrode layer without penetrating the second electrode layer, and the other end of the first take-out electrode is outside the exterior protective layer. A biological vibration signal detection device characterized by being arranged. The vibration sensor main body further includes an insulating layer formed on the upper surface of the first electrode layer and a conductive shielding layer formed on the upper surface of the insulating layer.
The biological vibration signal detection device according to claim 1, wherein the insulating layer and the shielding layer have an opening in the connecting portion that exposes the surface of the first electrode layer. The biological vibration signal detection device according to claim 2, wherein a conductive shielding member different from the shielding layer is provided so as to cover the connecting portion. Any one of claims 1 to 3, wherein the exterior protective layer has an opening in the connection portion that exposes at least one surface of the first electrode layer or the second electrode layer. The biological vibration signal detection device according to the section. A vibration collecting member having one surface of the exterior protective layer including the vibration sensor main body attached to the lower surface, and a vibration collecting member.
The invention according to any one of claims 1 to 4, wherein the lower surface of the vibration collecting member is provided with a protective member arranged apart from the vibration sensor main body so as to cover the connection portion. Bio-vibration signal detector. The protective member is coupled to the lower surface of the vibration collecting member via an elastic member.
The height of the elastic member from the lower surface of the vibration collecting member to the protective member is larger than the thickness of the vibration sensor main body.
The biological vibration signal detection device according to claim 5, wherein the elastic member is not in contact with the exterior protective layer including the vibration sensor main body. The biological vibration signal detection device according to claim 5 or 6, wherein the height of the step from the lower surface of the protective member to the lower surface of the exterior protective layer is 10 mm or less. A fifth to seventh aspect of the present invention, wherein the semiconductor element electrically connected to the vibration sensor main body is arranged in the space surrounded by the lower surface of the vibration collecting member, the protective member, and the elastic member. The biological vibration signal detection device according to any one item. The biological vibration signal detection device according to claim 8, further comprising a conductive shielding member that covers at least a part of the semiconductor element. The first take-out electrode and the second take-out electrode are conductive tapes, and are characterized in that they are adhered to the first electrode layer and the second electrode layer, respectively, with a conductive adhesive. The biological vibration signal detection device according to any one of claims 1 to 9.