JPWO2018150759A1 - Glass substrate having mark and method for manufacturing the same - Google Patents

Abstract

A glass substrate having a mark on its surface, wherein the mark is an identifier, an alignment mark, or a part thereof, wherein the mark is formed by a plurality of dots, and each dot is formed by a plurality of laser irradiation marks. The glass substrate, wherein each laser irradiation mark has a diameter of the opening on the surface in a range of 5 μm to 15 μm and a depth of 1 μm to 10 μm.

Description

  The present invention relates to a glass substrate having marks and a method for manufacturing the same.

  In recent years, in manufacturing technology of semiconductor devices and the like, in order to facilitate identification and management of a semiconductor wafer, a mark such as an identifier is formed on the surface of the semiconductor wafer. As a method for forming this mark, a technique of irradiating a laser is known.

  Recently, SiC has attracted attention as a next-generation semiconductor element that replaces Si, and for this reason, it has been proposed to form a mark on a surface of a SiC wafer by irradiating a laser (for example, a patent). Reference 1).

JP 2012-183549 A

  In recent years, in a semiconductor manufacturing process, it has been studied to use a glass substrate for a member such as a wafer and a support substrate for supporting a semiconductor wafer, a glass substrate, or the like. The glass substrate has rigidity and is relatively easy to process into a smooth surface. Therefore, when a glass substrate is used for such a member, it is possible to increase the rigidity of the laminate and increase the positional accuracy.

  However, when a glass substrate is used in a semiconductor manufacturing process, it is necessary to give a mark such as an identifier to the glass substrate as well as the Si wafer and the SiC wafer.

  However, glass is usually transparent, and therefore the visibility of the mark tends to be relatively inferior to opaque and translucent materials such as Si and SiC. In addition, when a mark is formed on the surface of a glass substrate by a method such as laser marking on a conventional SiC wafer, sufficient recesses cannot be formed by the conventional method due to the difference in absorption characteristics inherent to the material, and the visibility of the mark May get worse. On the other hand, if it is attempted to increase the output of the laser in order to increase the visibility of the mark, the possibility of cracks occurring in the glass substrate is increased.

  The present invention has been made in view of such a background, and an object of the present invention is to provide a glass substrate having a mark with high visibility and having cracks significantly suppressed. Moreover, it aims at providing the manufacturing method of such a glass substrate in this invention.

In the present invention, a glass substrate having a mark on the surface,
The mark is an identifier, an alignment mark, or a part thereof;
The mark is composed of a plurality of dots,
Each dot is composed of a plurality of laser irradiation marks,
Each laser irradiation trace is provided with a glass substrate in which the diameter of the opening on the surface is in the range of 5 μm to 15 μm and the depth is in the range of 1 μm to 10 μm.

Further, in the present invention, a method for producing a glass substrate having a mark on the surface,
Irradiating the surface of the glass plate with a laser to form a plurality of laser irradiation traces on the surface;
The laser has a wavelength in the range of 500 nm to 570 nm;
The plurality of laser irradiation marks constitute dots, and the set of dots forms a mark,
The mark is an identifier, an alignment mark, or a part thereof;
Each laser irradiation trace has a manufacturing method in which the diameter of the opening on the surface is in the range of 5 μm to 15 μm and the depth is in the range of 1 μm to 10 μm.

  In the present invention, it is possible to provide a glass substrate having a mark with good visibility and having significantly suppressed cracks. Moreover, in this invention, the manufacturing method of such a glass substrate can be provided.

It is the figure which showed typically the perspective view of the glass substrate by one Embodiment of this invention. It is the figure which showed typically an example of the mark formed in the glass substrate by one Embodiment of this invention. It is the schematic diagram which expanded and showed one of the mark elements (number "3") which comprises a mark. It is a typical enlarged view of one dot which constitutes a mark element. It is the enlarged view which showed typically the other aspect of the dot which comprises a mark element. It is the enlarged view which showed typically another aspect of the dot which comprises a mark element. It is the enlarged view which showed typically another aspect of the dot which comprises a mark element. It is the enlarged view which showed typically another aspect of the dot which comprises a mark element. It is the enlarged view which showed typically another aspect of the dot which comprises a mark element. It is the figure which showed typically the cross section of two adjacent laser irradiation traces. It is the figure which showed typically an example of the flow of the manufacturing method of the glass substrate by one Embodiment of this invention. In Example 1, it is the photograph which showed one dot obtained by the arrangement | sequence of several laser irradiation traces.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 schematically shows a perspective view of a glass substrate (hereinafter referred to as “first glass substrate”) according to an embodiment of the present invention.

  As shown in FIG. 1, the first glass substrate 110 has a first surface 112 and a second surface 114 that face each other. The first glass substrate 110 has a substantially circular shape. However, this is merely an example, and the shape of the first glass substrate 110 is not particularly limited. For example, the shape of the first glass substrate 110 may be a substantially circular shape or a substantially rectangular shape (including a substantially square shape). The first glass substrate 110 may have a notch, an orientation flat, a corner cut, and the like. Although the size of the 1st glass substrate 110 is not specifically limited, In the case of a substantially circular shape, diameters (phi) 100mm-450mm are mentioned. The size of the first substrate 110 is 100 mm × 100 mm to 2 m × 2 m in the case of a substantially rectangular shape.

  In the first glass substrate 110, a mark 130 is formed on the first surface 112.

  Here, in this application, in order to clarify the distinction of the glass substrate having the mark 130 (for example, the first glass substrate 110), the glass before the mark 130 is formed on the first surface 112 is particularly referred to as “glass plate”. ". According to this notation, the first glass substrate having the mark 130 on the first surface is obtained by forming the mark on the first surface of the glass plate.

  The mark 130 may be, for example, an identifier composed of at least one of numbers, characters, and figures. Each of the numbers, characters, and figures may be one or plural. Such an identifier can be used for identification and / or management of the first glass substrate 110, for example.

  Alternatively, the mark 130 may be an alignment mark, for example. Such an alignment mark can be used for position and orientation adjustment in processing such as handling, cutting, chamfering, and bonding of the first glass substrate 110.

  Hereinafter, one numeral, character, and figure constituting the mark 130 will be particularly referred to as a “mark element”.

  FIG. 2 schematically shows an example of the mark 130.

  As shown in FIG. 2, in this example, the mark 130 is shown as an identifier configured by arranging 12 mark elements 132 in a straight line.

  However, the mark 130 is not limited to such an aspect. For example, the mark 130 may be configured by arranging the mark elements 132 in a non-linear manner. In addition, the mark 130 may be configured by arranging two or more rows of the mark elements 132 in a linear or non-linear manner.

The overall dimensions of the mark 130 is not particularly limited, for example, in the case of the linear array of the mark element 132 as shown in FIG. 2, the lateral length _{L 1} is in the range of 16.43 ± 0.025 mm , the vertical length _{L 2} may be 1.624 ± 0.025 mm. Incidentally, when the mark 130 is composed of a non-linear arrangement of the mark element 132, the lateral length L ₁ and the vertical length L ₂ of the marks 130, respectively, when assuming a minimum rectangle including the mark 130 , Defined as the length of the first side and the length of the second side of the minimum rectangle.

  Each mark element 132 constituting the mark 130 is composed of a plurality of dots. In other words, one mark element 132 is formed by a plurality of dots. Hereinafter, this dot will be described with reference to FIG.

  FIG. 3 is an enlarged schematic view showing one of the mark elements 132 constituting the mark 130. In this example, the mark element 132 is visually recognized as the number “3”.

  As is clear from FIG. 3, the mark element 132 is formed by a combination of a total of 17 dots 140. Note that mark elements 132 other than the numeral “3” can also be formed by arranging a plurality of dots 140 vertically and horizontally.

  Such dots 140 can be formed by irradiating the surface of the glass plate with a laser. The laser may be a pulsed laser or a continuous wave laser. When a continuous wave laser is used, it is preferable to oscillate intermittently (pulse oscillation).

  FIG. 4 shows a schematic enlarged view of one dot 140 constituting the mark element 132.

  As shown in FIG. 4, the dot 140 is formed by combining a plurality of laser irradiation marks 150.

  Here, the “laser irradiation trace (150)” means a recess formed on the surface of the glass plate when the glass plate is irradiated with laser.

  In the example of FIG. 4, the dot 140 is configured as a substantially double ring having an inner ring 152 and an outer ring 154. The inner ring 152 and the outer ring 154 are each configured by arranging a plurality of laser irradiation marks 150 in a circular shape.

  In the illustrated example, in each of the inner ring 152 and the outer ring 154, adjacent laser irradiation marks 150 are arranged so as to contact each other.

  However, the arrangement of the laser irradiation marks 150 constituting the dots 140 is not limited to this. For example, in the “double ring” arrangement shown in FIG. 4, the adjacent laser irradiation marks 150 in the inner ring 152 or the outer ring 154 may be non-contact with each other or may be partially overlapped. good. Alternatively, some adjacent laser irradiation marks 150 are not in contact with each other, and some other adjacent laser irradiation marks 150 overlap with each other, and yet another adjacent laser irradiation mark 150. They may be in contact with each other. When there are a plurality of non-contact laser irradiation marks 150 adjacent to the dots 140, the non-contact intervals may be the same or different. There can be various other aspects.

  The dots 140 may be configured in an array other than the substantially double ring-shaped array of laser irradiation marks 150.

  5 to 9 schematically show other modes of dots.

  In the example of FIG. 5, the dots 140 are formed by arranging a plurality of laser irradiation marks 150 in a circular spiral shape (spiral shape). Also in this example, the adjacent laser irradiation marks 150 may be in contact with each other, partially overlapped, or non-contacted.

  In the example of FIG. 6, the dot 140 is configured by arranging a plurality of laser irradiation marks 150 in a square spiral shape. In the example of FIG. 7, the dot 140 is configured by arranging a plurality of laser irradiation marks 150 in a more symbolic manner. In the example of FIG. 8, the dot 140 is configured by arranging a plurality of laser irradiation marks 150 in a square frame shape. In the example of FIG. 9, the dot 140 is configured by arranging a plurality of laser irradiation marks 150 in a double square shape. The mode of the dot is not particularly limited, and may be a polygonal shape other than a circle or a square. Further, the dot may be in a form in which the inside is filled with laser irradiation marks.

  The size of one dot 140 may be, for example, a range of 50 μm × 50 μm, a range of 100 μm × 100 μm, or a range of 200 μm × 200 μm. The dimension of one dot 140 may be different from the dimension in the X-axis direction and the dimension in the Y-axis direction.

  Further, the dimensions of the plurality of dots 140 constituting the mark element 132 may be different from each other, or may be the same value.

  FIG. 10 schematically shows a cross section of a set of laser irradiation traces adjacent to each other in the dots 140 shown in FIG. 4 or FIG. FIG. 10 shows a first laser irradiation mark 150A and a second laser irradiation mark 150B adjacent to each other.

As shown in FIG. 10, the first laser irradiation mark 150 </ b> A has a first opening 160 </ b> A and a depth d ₁ formed in the first surface 112. The first opening 160A is substantially a circular when viewed from above the first surface 112 has a diameter phi _1. The second laser irradiation signatures 150B has a second opening 160B and the depth _{d 2} formed in the first surface 112. The second opening 160B is substantially a circular when viewed from above the first surface 112 has a diameter phi _2.

The diameter φ ₁ and the diameter φ ₂ may be different from each other or may be the same value. Similarly, the depth d ₁ and the depth d ₂ may be different from each other or may be the same value.

  The distance between the center of the first opening 160A of the first laser irradiation mark 150A and the center of the second opening 160B of the second laser irradiation mark 150B, that is, the pitch P of the laser irradiation marks 150 is, for example, It may be in the range of 3 μm to 20 μm, and may be in the range of 5 μm to 15 μm. However, in one dot 140, the pitch P is not necessarily constant, and may vary depending on the location.

Here, in the first laser irradiation mark 150A, the diameter φ1 of the _first opening 160A is in the range of 5 μm to 15 μm, and the depth d1 is in the range of ₁ μm to 10 μm. Similarly, in the second laser irradiation mark 150B, the diameter φ ₂ of the second opening 160B is in the range of 5 μm to 15 μm, and the depth d ₂ is in the range of 1 μm to 10 μm.

  Although not shown in the drawings, the other laser irradiation marks 150 shown in FIGS. 4 and 5 also have substantially the same cross-sectional shape as the first and second laser irradiation marks 150A and 150B.

  Therefore, more generally, in the first glass substrate 110, for example, in the dots 140 as shown in FIG. 4 or FIG. 5, the diameter φ of the opening 160 in the first surface 112 of each laser irradiation mark 150 is 5 μm. The depth d is in the range of 15 μm, and the depth d is in the range of 1 μm to 10 μm.

  The diameter φ of the opening 160 of the laser irradiation mark 150 is preferably in the range of 6 μm to 12 μm, and more preferably in the range of 9 μm to 11 μm.

  Further, the depth d of the laser irradiation mark 150 is preferably in the range of 2 μm to 10 μm, more preferably 5 μm to 11 μm.

  When the laser irradiation mark 150 is formed on the first surface 112 so that the size of the laser irradiation mark 150 is included in such a range, the risk of cracks in the vicinity of the laser irradiation mark 150 is significantly suppressed. be able to.

  In addition, when the laser irradiation mark 150 is formed with such dimensions, the visibility of the dots 140 is increased, and as a result, the mark 130 having good visibility can be obtained.

  Due to such an effect, in one embodiment of the present invention, it is possible to provide a glass substrate in which marks having good visibility are arranged on the first surface in a state where occurrence of cracks is significantly suppressed.

  The first glass substrate 110 having such characteristics can be applied to, for example, a semiconductor device manufacturing member (for example, a support substrate), an image sensor cover glass, and the like.

  The first glass substrate 110 is, for example, a wearable device such as glasses for use with a projector, glasses used in glasses, goggle displays, virtual reality augmented reality display devices, virtual image display devices, and the like (also referred to as light guide glass for wearable devices). Can be applied to. In addition, the first glass substrate 110 can be applied to an imaging glass lens (also referred to as lens glass) that is small and has a wide imaging angle of view for applications such as an in-vehicle camera and a robot vision sensor.

(Method of manufacturing a glass substrate according to an embodiment of the present invention)
Next, with reference to FIG. 11, an example of the manufacturing method of the glass substrate by one Embodiment of this invention is demonstrated.

  In FIG. 11, the flow of the manufacturing method (henceforth "the 1st manufacturing method") of the glass substrate by one Embodiment of this invention is shown typically.

As shown in FIG. 11, the first manufacturing method is:
(I) a step of preparing a glass plate (step S110);
(Ii) irradiating the surface of the glass plate with a laser to form a plurality of laser irradiation traces on the surface (step S120);
Have

  Hereinafter, each step will be described.

(Process S110)
First, a glass plate is prepared. The glass plate has a first surface.

  The kind of glass plate is not particularly limited. The glass plate may be, for example, quartz glass or tempered glass (including chemically tempered glass). Moreover, the glass plate (glass substrate) in this specification is not restricted to what takes a glass structure, The thing generally called glass may be used. For example, sapphire glass may be used.

(Process S120)
Next, a laser is irradiated to the 1st surface of a glass plate.

  Note that an absorption layer may be provided on the first surface of the glass plate before the laser irradiation step.

  The absorption layer is preferably installed when the first surface of the glass plate is relatively smooth, for example, when the arithmetic average roughness Ra of the first surface is less than about 0.5 μm.

  This is because the glass plate having such a “smooth” first surface tends to not sufficiently absorb energy from the pulse laser irradiated in the next step S120. By installing the absorption layer on the first surface of the glass plate, the energy of the pulse laser can be efficiently absorbed.

  The material of the absorption layer is not particularly limited. The absorption layer may be formed of, for example, an inorganic material or an organic material. For example, examples of the organic material include pigments including synthetic resin ink and carbon black. Examples of the inorganic material include metal materials such as aluminum.

  The absorption layer is placed on the first surface of the glass substrate by, for example, a spray coating method or an inkjet method.

  However, the installation of the absorption layer is optional. The absorption layer may be removed as appropriate after the laser irradiation step. The absorption layer can be removed by, for example, scrub cleaning (physical cleaning using a sponge and a brush), heat treatment (annealing), and dissolution using polishing or chemicals.

  Next, a laser is irradiated to the 1st surface of a glass plate (when there is an absorption layer, an absorption layer).

The laser irradiation conditions are as follows:
The diameter φ of the opening in the first surface is in the range of 5 μm to 15 μm,
• The depth d is selected to be in the range of 1 μm to 10 μm.

  As described above, the diameter φ of the opening of the laser irradiation mark on the first surface is preferably in the range of 6 μm to 12 μm. The depth d of the laser irradiation trace is preferably in the range of 2 μm to 10 μm.

  In order to efficiently form such a laser irradiation mark, the laser preferably has a wavelength of 600 nm or less, and more preferably has a wavelength range of 500 nm to 570 nm. For example, a YAG laser (second harmonic) having a wavelength of 532 nm (green) may be used.

  Note that the laser irradiation trace is not necessarily formed by one irradiation of the pulse laser. That is, one laser irradiation mark may be formed by irradiating the same position with a pulse laser a plurality of times. When using a continuous wave laser, it is not limited to formation by one irradiation among intermittent oscillations. A single laser irradiation trace may be formed by irradiating a continuous wave laser a plurality of times.

  By using such a method, dots are formed by forming a plurality of laser irradiation marks on the first surface in a predetermined arrangement. In addition, a mark element can be configured by combining a plurality of dots, and a mark such as an identifier or an alignment mark can be obtained by combining a plurality of mark elements.

  In such a first manufacturing method, it is possible to significantly suppress the risk of cracks occurring in the laser irradiation mark and the vicinity thereof when the pulse laser is irradiated. Further, in the first manufacturing method, the visibility of the dots formed by the laser irradiation marks is increased, and as a result, a mark having good visibility can be obtained.

  In addition, the timing which forms a mark in a glass substrate is not specifically limited. For example, (1) the glass plate prepared in step S110 is cut from a glass base plate into a desired shape, and has undergone steps such as chamfering, grinding, polishing, and washing, and a desired quality is obtained. You may form a mark like process S120 with respect to a glass plate. (2) The glass plate prepared in step S110 is cut into a desired shape, and various processes such as chamfering may be performed after the mark is formed in step S120. (3) Step S120 may be performed in the middle of steps such as chamfering, grinding, polishing, and cleaning. Moreover, there is no process cut | disconnected to a desired shape, and you may prepare the glass plate which has a desired shape from the beginning. As in the example of (1), when a mark is formed after processes such as chamfering, grinding, polishing and cleaning, the quality of the mark does not deteriorate (the main surface on which the mark is formed is visually recognized by grinding or polishing). This is preferable because the property deteriorates. Furthermore, in the case of the example of (1), the quality (surface state, etc.) of the glass substrate is maintained when the process before the process S120 is performed in a normal atmosphere and the mark formation in the process S120 is performed in a clean room. preferable.

  Next, examples will be described. In the following description, Examples 1 to 4 are examples, and Examples 5 to 6 are comparative examples.

(Example 1)
A glass substrate having a mark was produced by the following method.

  First, a substantially circular non-alkali glass plate (EN-A1: manufactured by Asahi Glass Co., Ltd.) having a diameter of 300 mm and a thickness of 0.7 mm was prepared.

  The surface roughness (Ra) of the laser irradiated surface (first surface) was about 0.45 nm.

  Next, the absorption layer was installed in the position where the mark of the 1st surface of a glass plate is formed. The absorbent layer was an oily acrylic lacquer (H62-888065), and was placed on a glass plate by spray coating.

  Next, the absorption layer on the first surface of the glass plate was irradiated with a pulse laser to form laser irradiation traces. Moreover, the dot was comprised by the combination of several laser irradiation traces.

  For the irradiation of the pulse laser, a marking device (ML9500A: manufactured by Amada Miyachi Co., Ltd.) was used, and the laser was a YGA laser (second harmonic) having a wavelength of 532 nm. The current value of the laser output was 13.0A. The laser irradiation trace was formed by irradiating the same portion of the first surface with the pulse laser four times. Hereinafter, the number of times of laser irradiation at the same location is referred to as “the number of repetitions”. The target pitch P of the laser irradiation marks was 11 μm.

  FIG. 12 shows an example of dots obtained by combining laser irradiation marks. This dot is composed of a double ring array of laser irradiation marks.

  The dimension of the inner ring (the dimension from the approximate center position of one laser irradiation trace to the approximate center position of the laser irradiation trace at the position facing through the center point of the inner ring) is about 42.8 μm, and the outer ring The dimension from the approximate center position of one laser irradiation trace to the approximate center position of the laser irradiation trace at a position passing through the center point of the outer ring was about 97.9 μm.

  The dimension of the inner ring is an average value of three points in the directions of 0 o'clock, 2 o'clock and 4 o'clock. Similarly, the dimension of the outer ring is the average value of three points in the 0 o'clock, 2 o'clock and 4 o'clock directions.

  The vertical and horizontal dimensions of one dot were about 100 μm × about 100 μm.

  Laser irradiation was repeated by such a method to form a mark (see FIG. 2) composed of 12 mark elements.

In the resulting marks, lateral length _{L 1} is about 16.4 mm, a vertical length _{L 2} was about 1.62 mm.

  The glass substrate which has a mark was manufactured by the above method.

(Evaluation)
The following evaluation was implemented with respect to the obtained glass substrate.

(Measurement of laser irradiation marks)
In the obtained glass substrate, the diameter φ and the depth d of the opening of each laser irradiation mark were measured.

  The diameter of the opening of the laser irradiation mark was measured as follows.

  The laser irradiation trace was observed with a microscope or a laser microscope, and the diameter of the laser irradiation trace was measured on the image. When the laser irradiation marks closest to each other overlap each other, the diameter was measured at a non-overlapping portion.

As a result of the measurement, the minimum value φ _min of the diameter of the opening was 8 μm, and the maximum value φ _max was 12 μm.

  On the other hand, a laser microscope apparatus (VK9510: manufactured by Keyence) was used for the measurement of the depth of laser irradiation marks. In this apparatus, the depth of laser irradiation traces can be measured nondestructively from the surface side of the glass substrate.

The depth d of all the laser irradiation marks constituting the mark was measured, and the maximum depth d _max was obtained from the obtained result.

(Measurement of cracks)
In the obtained glass substrate, the number (total number) of cracks generated in the vicinity of each mark element on the first surface was evaluated. Evaluation was performed by visual observation using a 10 × lens microscope.

(Evaluation of mark visibility)
The mark formed on the first surface of the glass substrate was visually observed. As a result, the case where all the mark elements were visible was determined as “good”, and the case where even some of the mark elements were not visible was determined as “poor”.

(Examples 2 to 6)
A glass substrate having a mark was produced in the same manner as in Example 1.

  However, in these Examples 2 to 6, the pulse laser irradiation conditions (current value and number of repetitions) were changed from those in Example 1.

  Evaluation similar to the case of Example 1 was implemented using the obtained glass substrate.

  The laser irradiation conditions and the evaluation results in each example are collectively shown in Table 1 below.

As shown in Table 1, it was found that all of the glass substrates of Examples 1 to 6 had good mark visibility. However, in Examples 5 to 6, it was observed that a crack occurred in the mark portion. On the other hand, in Examples 1 to 4, it was found that no cracks occurred.

  This application claims the priority based on the Japan patent application 2017-026464 for which it applied on February 15, 2017, and uses all the content of the Japan application for this application by reference.

DESCRIPTION OF SYMBOLS 110 Glass substrate 112 1st surface 114 2nd surface 130 Mark 132 Mark element 140 Dot 150, 150A, 150B Laser irradiation trace 152 Inner ring 154 Outer ring 160A, 160B Opening

Claims (12)

A glass substrate having a mark on its surface,
The mark is an identifier, an alignment mark, or a part thereof;
The mark is composed of a plurality of dots,
Each dot is composed of a plurality of laser irradiation marks,
Each laser irradiation mark is a glass substrate in which the diameter of the opening on the surface is in the range of 5 μm to 15 μm and the depth is in the range of 1 μm to 10 μm.   2. The glass substrate according to claim 1, wherein in at least one of the dots, at least one of a pair of adjacent laser irradiation marks has a center-to-center distance in a range of 5 μm to 15 μm.   3. The glass substrate according to claim 1, wherein in at least one of the dots, at least one of a set of adjacent laser irradiation traces is in contact with or overlapping each other.   4. The glass substrate according to claim 1, wherein at least one of the dots is configured by arranging the plurality of laser irradiation traces in a double ring shape or a spiral shape. 5.   The glass substrate according to claim 1, wherein the surface roughness Ra of the surface is less than 0.5 μm.   The glass substrate according to claim 1, wherein the surface roughness Ra of the surface is 0.5 μm or more. A method for producing a glass substrate having a mark on a surface,
Irradiating the surface of the glass plate with a laser to form a plurality of laser irradiation traces on the surface;
The laser has a wavelength in the range of 500 nm to 570 nm;
The plurality of laser irradiation marks constitute dots, and the set of dots forms a mark,
The mark is an identifier, an alignment mark, or a part thereof;
Each laser irradiation mark is a manufacturing method in which the diameter of the opening on the surface is in the range of 5 μm to 15 μm and the depth is in the range of 1 μm to 10 μm.   The manufacturing method according to claim 7, wherein the laser is a YAG laser having a wavelength of 532 nm. further,
Before the step of forming a plurality of laser irradiation traces on the surface,
The manufacturing method of Claim 7 or 8 which has the process of installing an absorption layer in the said surface of the said glass plate.   The at least one of the dots is configured to have a center-to-center distance in a range of 5 μm to 15 μm in at least one of a pair of adjacent laser irradiation traces. Manufacturing method.   The at least one of the dots is configured such that in at least one of a set of adjacent laser irradiation marks, the adjacent laser irradiation marks are in contact with each other or overlap each other. The manufacturing method as described in.   The manufacturing method according to claim 7, wherein in at least one of the dots, the plurality of laser irradiation marks are formed so as to be arranged in a double ring shape or a spiral shape.