JPWO2017170473A1 - Photopolymerization initiator composition and photosensitive composition - Google Patents
Photopolymerization initiator composition and photosensitive composition Download PDFInfo
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- JPWO2017170473A1 JPWO2017170473A1 JP2018508029A JP2018508029A JPWO2017170473A1 JP WO2017170473 A1 JPWO2017170473 A1 JP WO2017170473A1 JP 2018508029 A JP2018508029 A JP 2018508029A JP 2018508029 A JP2018508029 A JP 2018508029A JP WO2017170473 A1 JPWO2017170473 A1 JP WO2017170473A1
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- alkyl
- compound
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- 239000000203 mixture Substances 0.000 title claims abstract description 105
- 239000003999 initiator Substances 0.000 title claims abstract description 53
- -1 oxime ester compounds Chemical class 0.000 claims abstract description 126
- 125000000753 cycloalkyl group Chemical group 0.000 claims abstract description 7
- 125000001033 ether group Chemical group 0.000 claims abstract description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 124
- 125000000217 alkyl group Chemical group 0.000 claims description 95
- 150000001875 compounds Chemical class 0.000 claims description 85
- 239000011342 resin composition Substances 0.000 claims description 33
- 125000003118 aryl group Chemical group 0.000 claims description 32
- 125000000623 heterocyclic group Chemical group 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 29
- 125000005843 halogen group Chemical group 0.000 claims description 28
- 125000001424 substituent group Chemical group 0.000 claims description 25
- 125000003545 alkoxy group Chemical group 0.000 claims description 24
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 24
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 24
- 125000004104 aryloxy group Chemical group 0.000 claims description 19
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 18
- 229910010272 inorganic material Inorganic materials 0.000 claims description 16
- 150000002484 inorganic compounds Chemical class 0.000 claims description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 125000004429 atom Chemical group 0.000 claims description 13
- 239000003513 alkali Substances 0.000 claims description 11
- 125000002947 alkylene group Chemical group 0.000 claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 238000004040 coloring Methods 0.000 claims description 10
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 10
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 8
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 claims description 3
- 239000003505 polymerization initiator Substances 0.000 claims description 3
- 150000003568 thioethers Chemical class 0.000 claims description 3
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 claims description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 2
- 239000003610 charcoal Substances 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 abstract description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 48
- 230000035945 sensitivity Effects 0.000 description 36
- 239000004593 Epoxy Substances 0.000 description 31
- 239000002253 acid Substances 0.000 description 18
- 239000013500 performance material Substances 0.000 description 18
- 239000006087 Silane Coupling Agent Substances 0.000 description 17
- 239000002904 solvent Substances 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 13
- 239000000975 dye Substances 0.000 description 13
- 239000000049 pigment Substances 0.000 description 13
- 229920001296 polysiloxane Polymers 0.000 description 13
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 12
- 229920005989 resin Polymers 0.000 description 11
- 239000011347 resin Substances 0.000 description 11
- 229920006310 Asahi-Kasei Polymers 0.000 description 10
- 229920004482 WACKER® Polymers 0.000 description 10
- 238000011156 evaluation Methods 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 9
- 150000007519 polyprotic acids Polymers 0.000 description 9
- 150000008065 acid anhydrides Chemical class 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 229940049920 malate Drugs 0.000 description 8
- BJEPYKJPYRNKOW-UHFFFAOYSA-N malic acid Chemical compound OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 229920002554 vinyl polymer Polymers 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 7
- 229910052753 mercury Inorganic materials 0.000 description 7
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 6
- 239000006229 carbon black Substances 0.000 description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 6
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 6
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 5
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 5
- 229920000877 Melamine resin Polymers 0.000 description 5
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 5
- 125000003342 alkenyl group Chemical group 0.000 description 5
- 150000008064 anhydrides Chemical class 0.000 description 5
- 125000003700 epoxy group Chemical group 0.000 description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 5
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 4
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 4
- 150000001412 amines Chemical class 0.000 description 4
- 125000005428 anthryl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C3C(*)=C([H])C([H])=C([H])C3=C([H])C2=C1[H] 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 4
- 239000002270 dispersing agent Substances 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 125000001624 naphthyl group Chemical group 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- CWERGRDVMFNCDR-UHFFFAOYSA-N thioglycolic acid Chemical compound OC(=O)CS CWERGRDVMFNCDR-UHFFFAOYSA-N 0.000 description 4
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 3
- LVNLBBGBASVLLI-UHFFFAOYSA-N 3-triethoxysilylpropylurea Chemical compound CCO[Si](OCC)(OCC)CCCNC(N)=O LVNLBBGBASVLLI-UHFFFAOYSA-N 0.000 description 3
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- QGJOPFRUJISHPQ-UHFFFAOYSA-N Carbon disulfide Chemical compound S=C=S QGJOPFRUJISHPQ-UHFFFAOYSA-N 0.000 description 3
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 3
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 3
- SMWDFEZZVXVKRB-UHFFFAOYSA-N anhydrous quinoline Natural products N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- 238000004042 decolorization Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 239000003759 ester based solvent Substances 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 3
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 125000000524 functional group Chemical group 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 3
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229920000620 organic polymer Polymers 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000005871 repellent Substances 0.000 description 3
- 230000002940 repellent Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 125000003718 tetrahydrofuranyl group Chemical group 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XMGQYMWWDOXHJM-JTQLQIEISA-N (+)-α-limonene Chemical compound CC(=C)[C@@H]1CCC(C)=CC1 XMGQYMWWDOXHJM-JTQLQIEISA-N 0.000 description 2
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- LTQBNYCMVZQRSD-UHFFFAOYSA-N (4-ethenylphenyl)-trimethoxysilane Chemical compound CO[Si](OC)(OC)C1=CC=C(C=C)C=C1 LTQBNYCMVZQRSD-UHFFFAOYSA-N 0.000 description 2
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 2
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- UZKWTJUDCOPSNM-UHFFFAOYSA-N 1-ethenoxybutane Chemical compound CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 2
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical compound C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 2
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 2
- CWNOEVURTVLUNV-UHFFFAOYSA-N 2-(propoxymethyl)oxirane Chemical compound CCCOCC1CO1 CWNOEVURTVLUNV-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- RFMXKZGZSGFZES-UHFFFAOYSA-N 2-ethyl-2-(hydroxymethyl)propane-1,3-diol;2-sulfanylacetic acid Chemical compound OC(=O)CS.OC(=O)CS.OC(=O)CS.CCC(CO)(CO)CO RFMXKZGZSGFZES-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical group OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- PMNLUUOXGOOLSP-UHFFFAOYSA-N 2-mercaptopropanoic acid Chemical compound CC(S)C(O)=O PMNLUUOXGOOLSP-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- BNCADMBVWNPPIZ-UHFFFAOYSA-N 2-n,2-n,4-n,4-n,6-n,6-n-hexakis(methoxymethyl)-1,3,5-triazine-2,4,6-triamine Chemical compound COCN(COC)C1=NC(N(COC)COC)=NC(N(COC)COC)=N1 BNCADMBVWNPPIZ-UHFFFAOYSA-N 0.000 description 2
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- 239000001384 succinic acid Substances 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- ADXGNEYLLLSOAR-UHFFFAOYSA-N tasosartan Chemical compound C12=NC(C)=NC(C)=C2CCC(=O)N1CC(C=C1)=CC=C1C1=CC=CC=C1C=1N=NNN=1 ADXGNEYLLLSOAR-UHFFFAOYSA-N 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000001017 thiazole dye Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 150000007970 thio esters Chemical group 0.000 description 1
- 125000000101 thioether group Chemical group 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- NJRXVEJTAYWCQJ-UHFFFAOYSA-N thiomalic acid Chemical compound OC(=O)CC(S)C(O)=O NJRXVEJTAYWCQJ-UHFFFAOYSA-N 0.000 description 1
- NBOMNTLFRHMDEZ-UHFFFAOYSA-N thiosalicylic acid Chemical compound OC(=O)C1=CC=CC=C1S NBOMNTLFRHMDEZ-UHFFFAOYSA-N 0.000 description 1
- 229940103494 thiosalicylic acid Drugs 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000001003 triarylmethane dye Substances 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- ZYMHKOVQDOFPHH-UHFFFAOYSA-N trimethoxy(oct-1-enyl)silane Chemical compound CCCCCCC=C[Si](OC)(OC)OC ZYMHKOVQDOFPHH-UHFFFAOYSA-N 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- XHGIFBQQEGRTPB-UHFFFAOYSA-N tris(prop-2-enyl) phosphate Chemical compound C=CCOP(=O)(OCC=C)OCC=C XHGIFBQQEGRTPB-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
- UIYCHXAGWOYNNA-UHFFFAOYSA-N vinyl sulfide Chemical compound C=CSC=C UIYCHXAGWOYNNA-UHFFFAOYSA-N 0.000 description 1
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 1
- 239000001018 xanthene dye Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- NDKWCCLKSWNDBG-UHFFFAOYSA-N zinc;dioxido(dioxo)chromium Chemical compound [Zn+2].[O-][Cr]([O-])(=O)=O NDKWCCLKSWNDBG-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Materials For Photolithography (AREA)
- Polymerisation Methods In General (AREA)
Abstract
下記(A)成分を1〜99質量部、下記(B)成分を1〜99質量部(但し(A)成分と(B)成分の合計は100質量部)含有する光重合開始剤組成物。(一般式の詳細については明細書を参照。)(A)成分:一般式(3)で表されるエーテル構造を有することを特徴とする一般式(1−1)〜(1−3)で表されるオキシムエステル化合物の一種以上を含有する光重合開始剤。(B)成分:一般式(4)のシクロアルキル構造を有することを特徴とする一般式(2−1)又は(2−2)で表されるオキシムエステル化合物の一種以上を含有する光重合開始剤。A photopolymerization initiator composition containing 1 to 99 parts by mass of the following component (A) and 1 to 99 parts by mass of the following component (B) (however, the total of the component (A) and the component (B) is 100 parts by mass). (Refer to the specification for details of the general formula.) Component (A): General formulas (1-1) to (1-3) having an ether structure represented by general formula (3) A photopolymerization initiator containing one or more oxime ester compounds represented. Component (B): Photopolymerization start containing one or more oxime ester compounds represented by formula (2-1) or (2-2), which has a cycloalkyl structure represented by formula (4) Agent.
Description
本発明は、感光性組成物に用いられる光重合の開始剤成分として有用な光重合開始剤組成物、及び該光重合開始剤組成物にエチレン性不飽和結合を有する重合性化合物を含有させてなる感光性組成物に関する。 The present invention includes a photopolymerization initiator composition useful as a photopolymerization initiator component used in a photosensitive composition, and a polymerizable compound having an ethylenically unsaturated bond in the photopolymerization initiator composition. To a photosensitive composition.
感光性組成物は、エチレン性不飽和結合を有する重合性化合物に光重合開始剤を加えたものであり、エネルギー線(光)を照射することができるため、光硬化性インキ、感光性印刷版、各種フォトレジスト等に用いられている。 The photosensitive composition is obtained by adding a photopolymerization initiator to a polymerizable compound having an ethylenically unsaturated bond, and can irradiate energy rays (light). Therefore, a photocurable ink, a photosensitive printing plate It is used for various photoresists.
上記感光性組成物に用いられる光重合開始剤として、下記特許文献1〜7には、オキシムエステル化合物を用いることが提案されている。
しかしながら、これら従来の光重合開始剤のそれぞれは、感度が十分ではなく、また、アルカリ現像性感光性樹脂組成物等に使用した場合、解像度においても十分満足できるものではなかった。As photopolymerization initiators used in the photosensitive composition, Patent Documents 1 to 7 below propose using oxime ester compounds.
However, each of these conventional photopolymerization initiators has insufficient sensitivity, and when used in an alkali-developable photosensitive resin composition or the like, the resolution is not satisfactory.
従って、本発明の目的は、優れた感度と解像度を感光性組成物に付与することができる光重合開始剤組成物、及び該光重合開始剤組成物を用いた感光性組成物を提供することにある。 Accordingly, an object of the present invention is to provide a photopolymerization initiator composition capable of imparting excellent sensitivity and resolution to the photosensitive composition, and a photosensitive composition using the photopolymerization initiator composition. It is in.
本発明者らは、上記課題を解決すべく鋭意検討した結果、特定のエーテル構造を有するオキシムエステル化合物と、特定のシクロアルキル構造を有するオキシムエステル化合物とを併用することで、優れた感度と解像度を感光性組成物に付与することができる光重合開始剤組成物となることを見出し、本発明を完成するに至った。 As a result of intensive studies to solve the above problems, the present inventors have used an oxime ester compound having a specific ether structure in combination with an oxime ester compound having a specific cycloalkyl structure, thereby achieving excellent sensitivity and resolution. Was found to be a photopolymerization initiator composition capable of being imparted to the photosensitive composition, and the present invention was completed.
すなわち、本発明は、下記(A)成分を1〜99質量部、下記(B)成分を1〜99質量部(但し(A)成分と(B)成分の合計は100質量部)含有する光重合開始剤組成物を提供するものである。 That is, the present invention contains 1 to 99 parts by mass of the following component (A) and 1 to 99 parts by mass of the following component (B) (however, the total of the components (A) and (B) is 100 parts by mass). A polymerization initiator composition is provided.
(A)成分:下記一般式(3)で表されるエーテル構造を有することを特徴とする下記一般式(1−1)〜(1−3)で表されるオキシムエステル化合物の一種以上を含有する光重合開始剤。 Component (A): Contains one or more oxime ester compounds represented by the following general formulas (1-1) to (1-3) having an ether structure represented by the following general formula (3) Photopolymerization initiator.
R3、R4及びR5は、それぞれ独立に、炭素原子数1〜20のアルキル基、炭素原子数1〜20のアルコキシ基、炭素原子数6〜30のアリール基、炭素原子数6〜30のアリールオキシ基、炭素原子数7〜30のアラルキル基、炭素原子数2〜20の複素環基、シアノ基又はハロゲン原子を表し、アルキル基、アルコキシ基、アリール基、アリールオキシ基、アラルキル基及び複素環基の水素原子は、更にOR14、COR14、SR14、NR15R16、−NCOR15−OCOR16、CN、ハロゲン原子、−CR14=CR15R16又は−CO−CR14=CR15R16で置換されている場合があり、R14、R15及びR16は、それぞれ独立に、水素原子、炭素原子数1〜20のアルキル基、炭素原子数6〜30のアリール基、炭素原子数7〜30のアラルキル基又は炭素原子数2〜20の複素環基を表し、上記R3、R4、R5、R14、R15及びR16で表される置換基のアルキレン部分は、不飽和結合、エーテル結合、チオエーテル結合、エステル結合、チオエステル結合、アミド結合又はウレタン結合により1〜5回中断されている場合があり、上記置換基のアルキル部分は分岐側鎖がある場合があり、環状アルキルである場合があり、上記置換基のアルキル末端は不飽和結合である場合があり、a、b及びdは、それぞれ独立に、0〜3の整数である。
A1は、上記一般式(3)で表され、一般式(3)中、R7、R8及びR9は、それぞれ独立に、水素原子又は炭素原子数1〜20のアルキル基を表し、アルキル基の水素原子はハロゲン原子で置換されている場合があり、アルキル基のアルキレン部分のメチレン基は、不飽和結合、エーテル結合、チオエーテル結合、エステル結合、チオエステル結合、アミド結合又はウレタン結合により1〜5回中断されている場合があり、アルキル部分は分岐側鎖がある場合があり、環状アルキルである場合があり、アルキル末端は不飽和結合である場合があり、R7とR8は、一緒になって環を形成している場合がある。
R 3 , R 4 and R 5 are each independently an alkyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or 6 to 30 carbon atoms. An aryloxy group, an aralkyl group having 7 to 30 carbon atoms, a heterocyclic group having 2 to 20 carbon atoms, a cyano group or a halogen atom, an alkyl group, an alkoxy group, an aryl group, an aryloxy group, an aralkyl group, and hydrogen atoms of the heterocyclic group, further oR 14, COR 14, SR 14 , NR 15 R 16, -NCOR 15 -OCOR 16, CN, halogen atom, -CR 14 = CR 15 R 16 or -CO-CR 14 = CR 15 R 16 may be substituted, and R 14 , R 15 and R 16 are each independently a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, 7-30 carbon atoms The alkylene part of the substituent represented by R 3 , R 4 , R 5 , R 14 , R 15 and R 16 is an unsaturated bond, It may be interrupted 1 to 5 times by an ether bond, thioether bond, ester bond, thioester bond, amide bond or urethane bond, and the alkyl part of the above substituent may have a branched side chain and is a cyclic alkyl In some cases, the alkyl terminal of the substituent may be an unsaturated bond, and a, b and d are each independently an integer of 0 to 3.
A 1 is represented by the general formula (3), and in the general formula (3), R 7 , R 8 and R 9 each independently represent a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, The hydrogen atom of the alkyl group may be substituted with a halogen atom, and the methylene group of the alkylene part of the alkyl group is 1 by an unsaturated bond, an ether bond, a thioether bond, an ester bond, a thioester bond, an amide bond or a urethane bond. May be interrupted ˜5 times, the alkyl moiety may have branched side chains, may be cyclic alkyl, the alkyl terminus may be an unsaturated bond, R 7 and R 8 are May form a ring together.
(B)成分:下記一般式(4)のシクロアルキル構造を有することを特徴とする下記一般式(2−1)又は(2−2)で表されるオキシムエステル化合物の一種以上を含有する光重合開始剤。 Component (B): Light containing at least one oxime ester compound represented by the following general formula (2-1) or (2-2), which has a cycloalkyl structure represented by the following general formula (4) Polymerization initiator.
R23及びR24は、それぞれ独立に、炭素原子数1〜20のアルキル基、炭素原子数1〜20のアルコキシ基、炭素原子数6〜30のアリール基、炭素原子数6〜30のアリールオキシ基、炭素原子数7〜30のアラルキル基、炭素原子数2〜20の複素環基、シアノ基又はハロゲン原子を表し、アルキル基、アルコキシ基、アリール基、アリールオキシ基、アラルキル基及び複素環基の水素原子は、更にOR34、COR34、SR34、NR35R36、−NCOR35−OCOR36、CN、ハロゲン原子、−CR34=CR35R36又は−CO−CR34=CR35R36で置換されている場合があり、R34、R35及びR36は、それぞれ独立に、水素原子、炭素原子数1〜20のアルキル基、炭素原子数6〜30のアリール基、炭素原子数7〜30のアラルキル基又は炭素原子数2〜20の複素環基を表し、上記R23、R24、R34、R35及びR36で表される置換基のアルキレン部分は、不飽和結合、エーテル結合、チオエーテル結合、エステル結合、チオエステル結合、アミド結合又はウレタン結合により1〜5回中断されている場合があり、上記置換基のアルキル部分は分岐側鎖がある場合があり、環状アルキルである場合があり、上記置換基のアルキル末端は不飽和結合である場合があり、u及びvは、それぞれ独立に、0〜3の整数である。
Arは下記の構造から選ばれるアリール基又は複素環基を表し、
X1は、直接結合又はカルボニル基を表し、
G1は、一般式(4)の基を表し、一般式(4)中、nは1〜5の整数であり、mは1〜6の整数である。
R 23 and R 24 are each independently an alkyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or an aryloxy having 6 to 30 carbon atoms. Group, an aralkyl group having 7 to 30 carbon atoms, a heterocyclic group having 2 to 20 carbon atoms, a cyano group or a halogen atom, an alkyl group, an alkoxy group, an aryl group, an aryloxy group, an aralkyl group and a heterocyclic group The hydrogen atom of is further OR 34 , COR 34 , SR 34 , NR 35 R 36 , —NCOR 35 —OCOR 36 , CN, halogen atom, —CR 34 ═CR 35 R 36 or —CO—CR 34 ═CR 35 R may have been replaced by 36, R 34, R 35 and R 36 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, aryl group having 6 to 30 carbon atoms, carbon atoms 7-30 a It represents alkyl group, or a heterocyclic group having 2 to 20 carbon atoms, alkylene moiety of the substituents represented by R 23, R 24, R 34 , R 35 and R 36, unsaturated bond, an ether bond, a thioether May be interrupted 1 to 5 times by a bond, ester bond, thioester bond, amide bond or urethane bond, the alkyl part of the substituent may have a branched side chain, and may be a cyclic alkyl, The alkyl terminal of the substituent may be an unsaturated bond, and u and v are each independently an integer of 0 to 3.
Ar represents an aryl group or a heterocyclic group selected from the following structures,
X 1 represents a direct bond or a carbonyl group,
G 1 represents a group of the general formula (4) in formula (4), n is an integer of 1 to 5, m is an integer from 1 to 6.
また、本発明は、上記光重合開始剤組成物を、エチレン性不飽和結合を有する重合性化合物に含有させてなる感光性組成物を提供するものである。
また、本発明は、更に無機化合物を含有させてなる上記感光性組成物を提供するものである。The present invention also provides a photosensitive composition comprising the above photopolymerization initiator composition in a polymerizable compound having an ethylenically unsaturated bond.
Moreover, this invention provides the said photosensitive composition which further contains an inorganic compound.
また、本発明は、上記光重合開始剤組成物を、エチレン性不飽和結合を有している場合があるアルカリ現像性化合物及びエチレン性不飽和結合を有する重合性化合物に含有させてなるアルカリ現像性感光性樹組成物を提供するものである。
また、本発明は、更に無機化合物を含有させてなる上記アルカリ現像性感光性樹脂組成物を提供するものである。The present invention also provides an alkali development comprising the photopolymerization initiator composition in an alkali developable compound that may have an ethylenically unsaturated bond and a polymerizable compound that has an ethylenically unsaturated bond. A photosensitive photosensitive tree composition is provided.
Moreover, this invention provides the said alkali-developable photosensitive resin composition which contains an inorganic compound further.
また、本発明は、上記アルカリ現像性感光性樹脂組成物に、更に色材を含有させてなる着色アルカリ現像性感光性樹脂組成物を提供するものである。
また、本発明は、上記感光性組成物、上記アルカリ現像性感光性組成物又は上記着色アルカリ現像性感光性樹脂組成物にエネルギー線を照射してなる硬化物を提供するものである。The present invention also provides a colored alkali-developable photosensitive resin composition obtained by further adding a coloring material to the alkali-developable photosensitive resin composition.
Moreover, this invention provides the hardened | cured material formed by irradiating the said photosensitive composition, the said alkali developable photosensitive composition, or the said colored alkali developable photosensitive resin composition with an energy beam.
本発明の光重合開始剤組成物について説明する。 The photopolymerization initiator composition of the present invention will be described.
本発明の光重合開始剤組成物で(A)成分として用いられるオキシムエステル化合物は、上記一般式(1−1)〜(1−3)で表され、上記一般式(3)で表されるエーテル構造を有することを特徴とする。 The oxime ester compound used as the component (A) in the photopolymerization initiator composition of the present invention is represented by the general formulas (1-1) to (1-3) and represented by the general formula (3). It has an ether structure.
(A)成分として用いられるオキシムエステル化合物は、オキシムの二重結合による幾何異性体が存在するが、これらを区別するものではなく、上記一般式(1−1)〜(1−3)及び後述の例示化合物は、両方の混合物又はどちらか一方を表すものであり、異性体を示した構造に限定するものではない。 The oxime ester compound used as the component (A) has geometric isomers due to double bonds of oxime, but these are not distinguished from each other. The general formulas (1-1) to (1-3) and those described later are not distinguished. These exemplified compounds represent a mixture of both or one of them, and are not limited to structures showing isomers.
また、本発明における(A)成分は、上記一般式(1−1)〜(1−3)で表されるオキシムエステル化合物の一種以上を含有するものであり、該オキシムエステル化合物の一種以上のみからなることが好ましい。 The component (A) in the present invention contains one or more oxime ester compounds represented by the above general formulas (1-1) to (1-3), and only one or more oxime ester compounds. Preferably it consists of.
上記一般式(1−1)〜(1−3)中のR1、R2、R3、R4、R5、R6、R11、R12、R13、R14、R15及びR16で表される炭素原子数1〜20のアルキル基としては、例えば、メチル、エチル、プロピル、イソプロピル、ブチル、イソブチル、s−ブチル、t−ブチル、アミル、イソアミル、t−アミル、ヘキシル、ヘプチル、オクチル、イソオクチル、2−エチルヘキシル、t−オクチル、ノニル、イソノニル、デシル、イソデシル、ウンデシル、ドデシル、テトラデシル、ヘキサデシル、オクタデシル、イコシル等が挙げられる。R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 11 , R 12 , R 13 , R 14 , R 15 and R in the above general formulas (1-1) to (1-3) Examples of the alkyl group having 1 to 20 carbon atoms represented by 16 include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, s-butyl, t-butyl, amyl, isoamyl, t-amyl, hexyl and heptyl. Octyl, isooctyl, 2-ethylhexyl, t-octyl, nonyl, isononyl, decyl, isodecyl, undecyl, dodecyl, tetradecyl, hexadecyl, octadecyl, icosyl and the like.
上記一般式(1−1)〜(1−3)中のR1、R2、R3、R4、R5及びR6で表される炭素原子数1〜20のアルコキシ基としては、上記アルキル基に対応したものが挙げられる。Examples of the alkoxy group having 1 to 20 carbon atoms represented by R 1 , R 2 , R 3 , R 4 , R 5 and R 6 in the general formulas (1-1) to (1-3) include The thing corresponding to an alkyl group is mentioned.
上記一般式(1−1)〜(1−3)中のR1、R2、R3、R4、R5、R6、R11、R12、R13、R14、R15及びR16で表される炭素原子数6〜30のアリール基としては、フェニル、トリル、キシリル、エチルフェニル、クロロフェニル、ビフェニリル、ナフチル、アンスリル、フェナンスレニル、並びに上記アルキル基で1つ以上置換されたフェニル、ビフェニリル、ナフチル及びアンスリル等が挙げられる。R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 11 , R 12 , R 13 , R 14 , R 15 and R in the above general formulas (1-1) to (1-3) Examples of the aryl group having 6 to 30 carbon atoms represented by 16 include phenyl, tolyl, xylyl, ethylphenyl, chlorophenyl, biphenylyl, naphthyl, anthryl, phenanthrenyl, and phenyl or biphenylyl substituted with one or more of the above alkyl groups. , Naphthyl, anthryl and the like.
上記一般式(1−1)〜(1−3)中のR1、R2、R3、R4、R5及びR6で表される炭素原子数6〜30のアリールオキシ基としては、上記アリール基に対応したものが挙げられる。As the aryloxy group having 6 to 30 carbon atoms represented by R 1 , R 2 , R 3 , R 4 , R 5 and R 6 in the general formulas (1-1) to (1-3), The thing corresponding to the said aryl group is mentioned.
上記一般式(1−1)〜(1−3)中のR1、R2、R3、R4、R5、R6、R11、R12、R13、R14、R15及びR16で表される炭素原子数7〜30のアラルキル基としては、例えば、ベンジル、クロロベンジル、α−メチルベンジル、α、α−ジメチルベンジル、フェニルエチル等が挙げられる。R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 11 , R 12 , R 13 , R 14 , R 15 and R in the above general formulas (1-1) to (1-3) Examples of the aralkyl group having 7 to 30 carbon atoms represented by 16 include benzyl, chlorobenzyl, α-methylbenzyl, α, α-dimethylbenzyl, phenylethyl and the like.
上記一般式(1−1)〜(1−3)中のR1、R2、R3、R4、R5、R6、R11、R12、R13、R14、R15及びR16で表される炭素原子数2〜20の複素環基としては、例えば、ピリジル、ピリミジル、フリル、チエニル、テトラヒドロフリル、ジオキソラニル、ベンゾオキサゾール−2−イル、テトラヒドロピラニル、ピロリジル、イミダゾリジル、ピラゾリジル、チアゾリジル、イソチアゾリジル、オキサゾリジル、イソオキサゾリジル、ピペリジル、ピペラジル、モルホリニル等の5〜7員複素環等が挙げられる。R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 11 , R 12 , R 13 , R 14 , R 15 and R in the above general formulas (1-1) to (1-3) Examples of the heterocyclic group having 2 to 20 carbon atoms represented by 16 include pyridyl, pyrimidyl, furyl, thienyl, tetrahydrofuryl, dioxolanyl, benzoxazol-2-yl, tetrahydropyranyl, pyrrolidyl, imidazolidyl, pyrazolidyl, And 5- to 7-membered heterocycles such as thiazolidyl, isothiazolidyl, oxazolidyl, isoxazolidyl, piperidyl, piperazyl, morpholinyl and the like.
上記一般式(1−1)〜(1−3)中のA1を表す、上記一般式(3)中のR7、R8、R9で表される炭素原子数1〜20のアルキル基としては、上記アルキル基が挙げられる。The alkyl group having 1 to 20 carbon atoms represented by R 7 , R 8 and R 9 in the general formula (3), which represents A 1 in the general formulas (1-1) to (1-3). As for, the said alkyl group is mentioned.
(A)成分のオキシムエステル化合物の中で、上記一般式(1−1)〜(1−3)において、感度と解像度の点から、R1が炭素原子数1〜20のアルキル基であるものが好ましく、炭素原子数1〜4のアルキル基であるものがより好ましく、メチル基がより一層好ましい。Among the oxime ester compounds of component (A), in the general formulas (1-1) to (1-3), R 1 is an alkyl group having 1 to 20 carbon atoms from the viewpoint of sensitivity and resolution. Are preferred, those having 1 to 4 carbon atoms are more preferred, and methyl groups are even more preferred.
また、上記一般式(1−1)及び(1−2)において、感度と解像度の点から、R2が炭素原子数1〜20のアルキル基であるものが好ましく、炭素原子数1〜8のアルキル基であるものがより好ましく、エチル基がより一層好ましい。In the general formulas (1-1) and (1-2), from the viewpoint of sensitivity and resolution, it is preferable that R 2 is an alkyl group having 1 to 20 carbon atoms, and has 1 to 8 carbon atoms. What is an alkyl group is more preferable, and an ethyl group is still more preferable.
また、上記一般式(1−1)〜(1−3)の(R3)aにおいて、感度と解像度の点から、aは0又は1が好ましく、0がより好ましい。aが1〜3の場合、R3は、炭素原子数1〜20のアルキル基が好ましく、炭素原子数1〜4のアルキル基がより好ましい。In the general formulas (1-1) to (1-3) (R 3 ) a, a is preferably 0 or 1, and more preferably 0 from the viewpoint of sensitivity and resolution. When a is 1 to 3, R 3 is preferably an alkyl group having 1 to 20 carbon atoms, and more preferably an alkyl group having 1 to 4 carbon atoms.
また、上記一般式(1−1)〜(1−3)の(R4)bにおいて、感度と解像度の点から、bは0又は1が好ましく、0がより好ましい。bが1〜3の場合、R4は、炭素原子数1〜20のアルキル基が好ましく、炭素原子数1〜4のアルキル基がより好ましい。Further, in (R 4 ) b of the general formulas (1-1) to (1-3), b is preferably 0 or 1, and more preferably 0 from the viewpoint of sensitivity and resolution. When b is 1 to 3, R 4 is preferably an alkyl group having 1 to 20 carbon atoms, and more preferably an alkyl group having 1 to 4 carbon atoms.
また、上記一般式(1−1)〜(1−3)の(R5)dにおいて、感度と解像度の点から、dは0又は1が好ましく、1がより好ましい。dが1〜3の場合、R5は、炭素原子数1〜20のアルキル基が好ましく、炭素原子数1〜4のアルキル基がより好ましく、メチル基がより一層好ましい。In (R 5 ) d of the general formulas (1-1) to (1-3), d is preferably 0 or 1, and more preferably 1, from the viewpoint of sensitivity and resolution. When d is 1 to 3, R 5 is preferably an alkyl group having 1 to 20 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms, and even more preferably a methyl group.
また、上記一般式(1−1)及び(1−3)において、感度と解像度の点から、R6は、炭素原子数1〜20のアルキル基が好ましく、炭素原子数1〜4のアルキル基がより好ましく、メチル基がより一層好ましい。In the general formulas (1-1) and (1-3), R 6 is preferably an alkyl group having 1 to 20 carbon atoms, and an alkyl group having 1 to 4 carbon atoms from the viewpoint of sensitivity and resolution. Is more preferable, and a methyl group is even more preferable.
(A)成分のオキシムエステル化合物は、上記一般式(3)で表されるA1のエーテル構造を有することを特徴とする。これにより(B)成分と併用することで優れた感度と解像度を有する。The oxime ester compound of component (A) has an ether structure of A 1 represented by the general formula (3). Thereby, it has the outstanding sensitivity and resolution by using together with (B) component.
上記一般式(3)において、感度と解像度の点から、R9は水素原子又は炭素原子数1〜20のアルキル基が好ましく、水素原子又は炭素原子数1〜4のアルキル基がより好ましく、水素原子又はメチル基がより一層好ましい。In the general formula (3), from the viewpoint of sensitivity and resolution, R 9 is preferably a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and hydrogen. Atoms or methyl groups are even more preferred.
また、感度と解像度の点から、R8は水素原子又は炭素原子数1〜4のアルキル基が好ましい。また、感度と解像度の点から、R7は水素原子又は炭素原子数1〜4のアルキル基が好ましい。また、R7とR8は、一緒になって環を形成していることも好ましく、環中にエーテル結合を有することも好ましい。R7とR8が一緒になって形成する環の好ましい具体例としては、ジメチルジオキソラン環が挙げられる。In view of sensitivity and resolution, R 8 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. In view of sensitivity and resolution, R 7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. R 7 and R 8 are preferably combined to form a ring, and preferably have an ether bond in the ring. A preferred specific example of the ring formed by R 7 and R 8 together is a dimethyldioxolane ring.
(A)成分の上記、一般式(1−1)で表されるオキシムエステル化合物の好ましい具体例としては、以下の化合物No.1〜4が挙げられる。 As preferred specific examples of the oxime ester compound represented by the general formula (1-1) of the component (A), the following compound No. 1-4 are mentioned.
(A)成分の上記一般式(1−2)で表されるオキシムエステル化合物の好ましい具体例としては、以下の化合物No.5〜No.8が挙げられる。 As preferred specific examples of the oxime ester compound represented by the general formula (1-2) of the component (A), the following compound No. 5-No. 8 is mentioned.
(A)成分の上記一般式(1−3)で表されるオキシムエステル化合物の好ましい具体例としては、以下の化合物No.9〜No.12が挙げられる。 As preferred specific examples of the oxime ester compound represented by the general formula (1-3) of the component (A), the following compound No. 9-No. 12 is mentioned.
次に(B)成分について説明する。
本発明の光重合開始剤組成物で(B)成分として用いられるオキシムエステル化合物は、上記一般式(2−1)又は(2−2)で表され、上記一般式(4)で表されるシクロアルキル構造を有することを特徴とする。Next, the component (B) will be described.
The oxime ester compound used as the component (B) in the photopolymerization initiator composition of the present invention is represented by the general formula (2-1) or (2-2), and is represented by the general formula (4). It has a cycloalkyl structure.
(B)成分として用いられるオキシムエステル化合物は、オキシムの二重結合による幾何異性体が存在するが、これらを区別するものではなく、上記一般式(2−1)又は(2−2)及び後述の例示化合物は、両方の混合物又はどちらか一方を表すものであり、異性体を示した構造に限定するものではない。 The oxime ester compound used as the component (B) has geometric isomers due to the double bond of oxime, but these are not distinguished, and the above general formula (2-1) or (2-2) and those described later These exemplified compounds represent a mixture of both or one of them, and are not limited to structures showing isomers.
また、本発明における(B)成分は、上記一般式(2−1)又は(2−2)で表されるオキシムエステル化合物の一種以上を含有するものであり、該オキシムエステル化合物の一種以上のみからなることが好ましい。 In addition, the component (B) in the present invention contains one or more oxime ester compounds represented by the above general formula (2-1) or (2-2), and only one or more oxime ester compounds. Preferably it consists of.
上記一般式(2−1)又は(2−2)中のR21、R22、R23、R24、R31、R32、R33、R34、R35及びR36で表される炭素原子数1〜20のアルキル基としては、例えば、メチル、エチル、プロピル、イソプロピル、ブチル、イソブチル、s−ブチル、t−ブチル、アミル、イソアミル、t−アミル、ヘキシル、ヘプチル、オクチル、イソオクチル、2−エチルヘキシル、t−オクチル、ノニル、イソノニル、デシル、イソデシル、ウンデシル、ドデシル、テトラデシル、ヘキサデシル、オクタデシル、イコシル等が挙げられる。Atoms represented by R 21, R 22, R 23 , R 24, R 31, R 32, R 33, R 34, R 35 and R 36 in the general formula (2-1) or (2-2) Examples of the alkyl group having 1 to 20 atoms include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, s-butyl, t-butyl, amyl, isoamyl, t-amyl, hexyl, heptyl, octyl, isooctyl, 2 -Ethylhexyl, t-octyl, nonyl, isononyl, decyl, isodecyl, undecyl, dodecyl, tetradecyl, hexadecyl, octadecyl, icosyl and the like.
上記一般式(2−1)又は(2−2)中のR21、R22、R23、及びR24で表される炭素原子数1〜20のアルコキシ基としては、上記アルキル基に対応したものが挙げられる。The alkoxy group having 1 to 20 carbon atoms represented by R 21 , R 22 , R 23 and R 24 in the general formula (2-1) or (2-2) corresponds to the alkyl group. Things.
上記一般式(2−1)又は(2−2)中のR21、R22、R23、R24、R31、R32、R33、R34、R35及びR36で表される炭素原子数6〜30のアリール基としては、フェニル、トリル、キシリル、エチルフェニル、クロロフェニル、ビフェニリル、ナフチル、アンスリル、フェナンスレニル、並びに上記アルキル基で1つ以上置換されたフェニル、ビフェニリル、ナフチル及びアンスリル等が挙げられる。Atoms represented by R 21, R 22, R 23 , R 24, R 31, R 32, R 33, R 34, R 35 and R 36 in the general formula (2-1) or (2-2) Examples of the aryl group having 6 to 30 atoms include phenyl, tolyl, xylyl, ethylphenyl, chlorophenyl, biphenylyl, naphthyl, anthryl, phenanthrenyl, and phenyl, biphenylyl, naphthyl, and anthryl substituted with one or more of the above alkyl groups. Can be mentioned.
上記一般式(2−1)又は(2−2)中のR21、R22、R23及びR24で表される炭素原子数6〜30のアリールオキシ基としては、上記アリール基に対応したものが挙げられる。The aryloxy group having 6 to 30 carbon atoms represented by R 21 , R 22 , R 23 and R 24 in the general formula (2-1) or (2-2) corresponds to the aryl group. Things.
上記一般式(2−1)又は(2−2)中のR21、R22、R23、R24、R31、R32、R33、R34、R35及びR36で表される炭素原子数7〜30のアラルキル基としては、例えば、ベンジル、クロロベンジル、α−メチルベンジル、α、α−ジメチルベンジル、フェニルエチル等が挙げられる。Atoms represented by R 21, R 22, R 23 , R 24, R 31, R 32, R 33, R 34, R 35 and R 36 in the general formula (2-1) or (2-2) Examples of the aralkyl group having 7 to 30 atoms include benzyl, chlorobenzyl, α-methylbenzyl, α, α-dimethylbenzyl, phenylethyl and the like.
上記一般式(2−1)又は(2−2)中のR21、R22、R23、R24、R31、R32、R33、R34、R35及びR36で表される炭素原子数2〜20の複素環基としては、例えば、ピリジル、ピリミジル、フリル、チエニル、テトラヒドロフリル、ジオキソラニル、ベンゾオキサゾール−2−イル、テトラヒドロピラニル、ピロリジル、イミダゾリジル、ピラゾリジル、チアゾリジル、イソチアゾリジル、オキサゾリジル、イソオキサゾリジル、ピペリジル、ピペラジル、モルホリニル等の5〜7員複素環等が挙げられる。Atoms represented by R 21, R 22, R 23 , R 24, R 31, R 32, R 33, R 34, R 35 and R 36 in the general formula (2-1) or (2-2) Examples of the heterocyclic group having 2 to 20 atoms include pyridyl, pyrimidyl, furyl, thienyl, tetrahydrofuryl, dioxolanyl, benzoxazol-2-yl, tetrahydropyranyl, pyrrolidyl, imidazolidyl, pyrazolidyl, thiazolidyl, isothiazolidyl, oxazolidyl, Examples include 5- to 7-membered heterocycles such as isoxazolidyl, piperidyl, piperazyl, morpholinyl and the like.
(B)成分のオキシムエステル化合物の中で、上記一般式(2−1)又は(2−2)において、感度と解像度の点から、R21が炭素原子数1〜20のアルキル基又は炭素原子数6〜30のアリール基であるものが好ましく、炭素原子数1〜4のアルキル基又は炭素原子数6〜8のアリール基であるものがより好ましく、メチル基又はフェニル基がより一層好ましい。Among the oxime ester compounds of the component (B), in the general formula (2-1) or (2-2), R 21 is an alkyl group having 1 to 20 carbon atoms or a carbon atom from the viewpoint of sensitivity and resolution. What is a C6-C30 aryl group is preferable, What is a C1-C4 alkyl group or C6-C8 aryl group is more preferable, A methyl group or a phenyl group is still more preferable.
また、上記一般式(2−1)において、感度と解像度の点から、R22が炭素原子数1〜20のアルキル基であるものが好ましく、炭素原子数1〜8のアルキル基であるものがより好ましく、エチル基がより一層好ましい。In the general formula (2-1), from the viewpoint of sensitivity and resolution, it is preferable that R 22 is an alkyl group having 1 to 20 carbon atoms, and an alkyl group having 1 to 8 carbon atoms. More preferred is an ethyl group.
また、上記一般式(2−1)又は(2−2)の(R23)uにおいて、感度と解像度の点から、uは0又は1が好ましく、0がより好ましい。uが1〜3の場合、R23は、炭素原子数1〜20のアルキル基が好ましく、炭素原子数1〜4のアルキル基がより好ましい。In the (R 23 ) u in the general formula (2-1) or (2-2), u is preferably 0 or 1 and more preferably 0 from the viewpoint of sensitivity and resolution. When u is 1 to 3, R 23 is preferably an alkyl group having 1 to 20 carbon atoms, and more preferably an alkyl group having 1 to 4 carbon atoms.
また、上記一般式(2−1)又は(2−2)の(R24)vにおいて、感度と解像度の点から、vは0又は1が好ましく、0がより好ましい。vが1〜3の場合、R24は、炭素原子数1〜20のアルキル基が好ましく、炭素原子数1〜4のアルキル基がより好ましい。In the (R 24 ) v in the general formula (2-1) or (2-2), v is preferably 0 or 1, and more preferably 0 from the viewpoint of sensitivity and resolution. When v is 1 to 3, R 24 is preferably an alkyl group having 1 to 20 carbon atoms, and more preferably an alkyl group having 1 to 4 carbon atoms.
また、上記一般式(2−1)において、X1は、感度と解像度の点から、直接結合が好ましい。In the general formula (2-1), X 1 is preferably a direct bond in terms of sensitivity and resolution.
また、上記一般式(2−1)において、Arは、感度と解像度の点から、下記の構造から選ばれるアリール基又は複素環基が好ましい。 In the general formula (2-1), Ar is preferably an aryl group or a heterocyclic group selected from the following structures from the viewpoint of sensitivity and resolution.
(B)成分のオキシムエステル化合物は、上記一般式(4)で表されるG1のシクロアルキル構造を有することを特徴とする。これにより(A)成分と併用することで優れた感度と解像度を有する。The oxime ester compound as the component (B) has a cycloalkyl structure represented by G 1 represented by the general formula (4). Thereby, it has excellent sensitivity and resolution when used in combination with component (A).
上記一般式(4)において、感度と解像度の点から、nは1又は2が好ましい。 In the general formula (4), n is preferably 1 or 2 from the viewpoint of sensitivity and resolution.
上記一般式(4)において、感度と解像度の点から、mは3又は4が好ましい。この場合、それぞれシクロペンタン環、シクロヘキサン環を有することになる。 In the general formula (4), m is preferably 3 or 4 from the viewpoint of sensitivity and resolution. In this case, it has a cyclopentane ring and a cyclohexane ring, respectively.
(B)成分の上記、一般式(2−1)で表されるオキシムエステル化合物の好ましい具体例としては、以下の化合物No.13〜No.20が挙げられる。 Preferred specific examples of the oxime ester compound represented by the general formula (2-1) of the component (B) are as follows. 13-No. 20 is mentioned.
(B)成分の上記、一般式(2−2)で表されるオキシムエステル化合物の好ましい具体例としては、以下の化合物No.21〜No.26が挙げられる。 As preferred specific examples of the oxime ester compound represented by the general formula (2-2) of the component (B), the following compound No. 21-No. 26.
本発明の光重合開始剤組成物において、(A)成分と(B)成分の合計の含有量を100質量部として、(A)成分の含有量は1質量部〜99質量部であり、(B)成分の含有量は1〜99質量部である。感度と解像度の点から、(A)成分の含有量は20〜80質量部が好ましく、40〜60質量部がより好ましく、(B)成分の含有量は20〜80質量部が好ましく、40〜60質量部がより好ましい。 In the photopolymerization initiator composition of the present invention, the total content of the component (A) and the component (B) is 100 parts by mass, and the content of the component (A) is 1 part by mass to 99 parts by mass. The content of component B) is 1 to 99 parts by mass. In view of sensitivity and resolution, the content of the component (A) is preferably 20 to 80 parts by mass, more preferably 40 to 60 parts by mass, and the content of the component (B) is preferably 20 to 80 parts by mass, and 40 to 40 parts by mass. 60 parts by mass is more preferable.
本発明の光重合開始剤組成物は、(A)成分及び(B)成分のほかに、任意成分として、その他の光重合開始剤、例えば、イルガキュア369(BASF社製)、イルガキュア907(BASF社製)、イルガキュアOXE−01(BASF社製)、イルガキュアOXE−02(BASF社製)、ルシリンTPO(BASF社製)、イルガキュア819(BASF社製)、2,2−ビス(2−クロロフェニル)−4,5,4’,5’−テトラフェニル−1−2’−ビイミダゾール等を含有することができる。これらの任意成分の詳細については、後述の本発明の感光性組成物におけるこれらの成分についての説明を適宜適用することができる。 In addition to the components (A) and (B), the photopolymerization initiator composition of the present invention includes other photopolymerization initiators such as Irgacure 369 (manufactured by BASF), Irgacure 907 (BASF). Irgacure OXE-01 (manufactured by BASF), Irgacure OXE-02 (manufactured by BASF), Lucyrin TPO (manufactured by BASF), Irgacure 819 (manufactured by BASF), 2,2-bis (2-chlorophenyl)- 4,5,4 ′, 5′-tetraphenyl-1-2′-biimidazole and the like can be contained. About the detail of these arbitrary components, the description about these components in the photosensitive composition of this invention mentioned later can be applied suitably.
次に本発明の感光性組成物について説明する。
本発明の感光性組成物は、必須成分として、本発明の光重合開始剤組成物及びエチレン性不飽和結合を有する重合性化合物を含有し、無機化合物、色材、溶媒等の任意成分を含有するものである。Next, the photosensitive composition of the present invention will be described.
The photosensitive composition of the present invention contains, as essential components, the photopolymerization initiator composition of the present invention and a polymerizable compound having an ethylenically unsaturated bond, and contains optional components such as inorganic compounds, coloring materials, and solvents. To do.
上記エチレン性不飽和結合を有する重合性化合物としては、特に限定されず、従来、感光性組成物に用いられているものを用いることができるが、例えば、エチレン、プロピレン、ブチレン、イソブチレン、塩化ビニル、塩化ビニリデン、フッ化ビニリデン、テトラフルオロエチレン等の不飽和脂肪族炭化水素;(メタ)アクリル酸、α−クロルアクリル酸、イタコン酸、マレイン酸、シトラコン酸、フマル酸、ハイミック酸、クロトン酸、イソクロトン酸、ビニル酢酸、アリル酢酸、桂皮酸、ソルビン酸、メサコン酸、コハク酸モノ[2−(メタ)アクリロイロキシエチル]、フタル酸モノ[2−(メタ)アクリロイロキシエチル]、ω−カルボキシポリカプロラクトンモノ(メタ)アクリレート等の両末端にカルボキシ基と水酸基とを有するポリマーのモノ(メタ)アクリレート;ヒドロキシエチル(メタ)アクリレート・マレート、ヒドロキシプロピル(メタ)アクリレート・マレート、ジシクロペンタジエン・マレート或いは1個のカルボキシル基と2個以上の(メタ)アクリロイル基とを有する多官能(メタ)アクリレート等の不飽和多塩基酸;(メタ)アクリル酸−2−ヒドロキシエチル、(メタ)アクリル酸−2−ヒドロキシプロピル、(メタ)アクリル酸グリシジル、下記化合物No.A1〜No.A4、(メタ)アクリル酸メチル、 (メタ)アクリル酸ブチル、(メタ)アクリル酸イソブチル、(メタ)アクリル酸−t−ブチル、(メタ)アクリル酸シクロヘキシル、(メタ)アクリル酸n−オクチル、(メタ)アクリル酸イソオクチル、(メタ)アクリル酸イソノニル、(メタ)アクリル酸ステアリル、(メタ)アクリル酸ラウリル、(メタ)アクリル酸メトキシエチル、(メタ)アクリル酸ジメチルアミノメチル、(メタ)アクリル酸ジメチルアミノエチル、(メタ)アクリル酸アミノプロピル、(メタ)アクリル酸ジメチルアミノプロピル、(メタ)アクリル酸エトキシエチル、(メタ)アクリル酸ポリ(エトキシ)エチル、(メタ)アクリル酸ブトキシエトキシエチル、(メタ)アクリル酸エチルヘキシル、(メタ)アクリル酸フェノキシエチル、(メタ)アクリル酸テトラヒドロフリル、(メタ)アクリル酸ビニル、(メタ)アクリル酸アリル、(メタ)アクリル酸ベンジル、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、トリエチレングリコールジ(メタ)アクリレート、ポリエチレングリコールジ(メタ)アクリレート、プロピレングリコールジ(メタ)アクリレート、1,4−ブタンジオールジ(メタ)アクリレート、1,6−ヘキサンジオールジ(メタ)アクリレート、トリメチロールエタントリ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、トリシクロデカンジメチロールジ(メタ)アクリレート、トリ[(メタ)アクリロイルエチル]イソシアヌレート、ポリエステル(メタ)アクリレートオリゴマー等の不飽和一塩基酸及び多価アルコール又は多価フェノールのエステル;(メタ)アクリル酸亜鉛、(メタ)アクリル酸マグネシウム等の不飽和多塩基酸の金属塩;マレイン酸無水物、イタコン酸無水物、シトラコン酸無水物、メチルテトラヒドロ無水フタル酸、テトラヒドロ無水フタル酸、トリアルキルテトラヒドロ無水フタル酸、5−(2,5−ジオキソテトラヒドロフリル)−3−メチル−3−シクロヘキセン−1,2−ジカルボン酸無水物、トリアルキルテトラヒドロ無水フタル酸−無水マレイン酸付加物、ドデセニル無水コハク酸、無水メチルハイミック酸等の不飽和多塩基酸の酸無水物;(メタ)アクリルアミド、メチレンビス−(メタ)アクリルアミド、ジエチレントリアミントリス(メタ)アクリルアミド、キシリレンビス(メタ)アクリルアミド、α−クロロアクリルアミド、N−2−ヒドロキシエチル(メタ)アクリルアミド等の不飽和一塩基酸及び多価アミンのアミド;アクロレイン等の不飽和アルデヒド;(メタ)アクリロニトリル、α−クロロアクリロニトリル、シアン化ビニリデン、シアン化アリル等の不飽和ニトリル;スチレン、4−メチルスチレン、4−エチルスチレン、4−メトキシスチレン、4−ヒドロキシスチレン、4−クロロスチレン、ジビニルベンゼン、ビニルトルエン、ビニル安息香酸、ビニルフェノール、ビニルスルホン酸、4−ビニルベンゼンスルホン酸、ビニルベンジルメチルエーテル、ビニルベンジルグリシジルエーテル等の不飽和芳香族化合物;メチルビニルケトン等の不飽和ケトン;ビニルアミン、アリルアミン、N−ビニルピロリドン、ビニルピペリジン等の不飽和アミン化合物;アリルアルコール、クロチルアルコール等のビニルアルコール;ビニルメチルエーテル、ビニルエチルエーテル、n−ブチルビニルエーテル、イソブチルビニルエーテル、アリルグリシジルエーテル等のビニルエーテル;マレイミド、N−フェニルマレイミド、N−シクロヘキシルマレイミド等の不飽和イミド類;インデン、1−メチルインデン等のインデン類;1,3−ブタジエン、イソプレン、クロロプレン等の脂肪族共役ジエン類;ポリスチレン、ポリメチル(メタ)アクリレート、ポリ−n−ブチル(メタ)アクリレート、ポリシロキサン等の重合体分子鎖の末端にモノ(メタ)アクリロイル基を有するマクロモノマー類;ビニルクロリド、ビニリデンクロリド、ジビニルスクシナート、ジアリルフタラート、トリアリルホスファート、トリアリルイソシアヌラート、ビニルチオエーテル、ビニルイミダゾール、ビニルオキサゾリン、ビニルカルバゾール、ビニルピロリドン、ビニルピリジン、水酸基含有ビニルモノマー及びポリイソシアネート化合物のビニルウレタン化合物、水酸基含有ビニルモノマー及びポリエポキシ化合物のビニルエポキシ化合物が挙げられる。 The polymerizable compound having an ethylenically unsaturated bond is not particularly limited, and those conventionally used in photosensitive compositions can be used. For example, ethylene, propylene, butylene, isobutylene, vinyl chloride can be used. Unsaturated aliphatic hydrocarbons such as vinylidene chloride, vinylidene fluoride, tetrafluoroethylene; (meth) acrylic acid, α-chloroacrylic acid, itaconic acid, maleic acid, citraconic acid, fumaric acid, hymic acid, crotonic acid, Isocrotonic acid, vinyl acetate, allyl acetate, cinnamic acid, sorbic acid, mesaconic acid, succinic acid mono [2- (meth) acryloyloxyethyl], phthalic acid mono [2- (meth) acryloyloxyethyl], ω- Carboxypolycaprolactone mono (meth) acrylate has carboxy group and hydroxyl group at both ends Limer mono (meth) acrylate; hydroxyethyl (meth) acrylate malate, hydroxypropyl (meth) acrylate malate, dicyclopentadiene malate or one carboxyl group and two or more (meth) acryloyl groups Unsaturated polybasic acids such as polyfunctional (meth) acrylates; (meth) acrylic acid-2-hydroxyethyl, (meth) acrylic acid-2-hydroxypropyl, glycidyl (meth) acrylate, the following compound No. A1-No. A4, methyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, (t-butyl) (meth) acrylate, cyclohexyl (meth) acrylate, n-octyl (meth) acrylate, ( Isooctyl (meth) acrylate, isononyl (meth) acrylate, stearyl (meth) acrylate, lauryl (meth) acrylate, methoxyethyl (meth) acrylate, dimethylaminomethyl (meth) acrylate, dimethyl (meth) acrylate Aminoethyl, aminopropyl (meth) acrylate, dimethylaminopropyl (meth) acrylate, ethoxyethyl (meth) acrylate, poly (ethoxy) ethyl (meth) acrylate, butoxyethoxyethyl (meth) acrylate, (meta ) Ethylhexyl acrylate, (meth) acrylic acid Phenoxyethyl, tetrahydrofuryl (meth) acrylate, vinyl (meth) acrylate, allyl (meth) acrylate, benzyl (meth) acrylate, ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol Di (meth) acrylate, polyethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, trimethylolethanetri (Meth) acrylate, trimethylolpropane tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, pentaerythritol Unsaturated monobasic acids such as tra (meth) acrylate, pentaerythritol tri (meth) acrylate, tricyclodecane dimethylol di (meth) acrylate, tri [(meth) acryloylethyl] isocyanurate, polyester (meth) acrylate oligomers and the like Esters of polyhydric alcohols or polyphenols; metal salts of unsaturated polybasic acids such as zinc (meth) acrylate and magnesium (meth) acrylate; maleic anhydride, itaconic anhydride, citraconic anhydride, methyl Tetrahydrophthalic anhydride, tetrahydrophthalic anhydride, trialkyltetrahydrophthalic anhydride, 5- (2,5-dioxotetrahydrofuryl) -3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, trialkyltetrahydro Phthalic anhydride-anhydrous Acid anhydrides of unsaturated polybasic acids such as rain acid adducts, dodecenyl succinic anhydride, methyl hymic anhydride; (meth) acrylamide, methylene bis- (meth) acrylamide, diethylenetriamine tris (meth) acrylamide, xylylene bis (meth) Unsaturated monobasic acids such as acrylamide, α-chloroacrylamide, N-2-hydroxyethyl (meth) acrylamide and amides of polyvalent amines; unsaturated aldehydes such as acrolein; (meth) acrylonitrile, α-chloroacrylonitrile, cyanide Unsaturated nitriles such as vinylidene and allyl cyanide; styrene, 4-methylstyrene, 4-ethylstyrene, 4-methoxystyrene, 4-hydroxystyrene, 4-chlorostyrene, divinylbenzene, vinyltoluene, vinylbenzoic acid, vinyl Unsaturated aromatic compounds such as ruphenol, vinyl sulfonic acid, 4-vinylbenzene sulfonic acid, vinyl benzyl methyl ether, vinyl benzyl glycidyl ether; unsaturated ketones such as methyl vinyl ketone; vinyl amine, allyl amine, N-vinyl pyrrolidone, vinyl Unsaturated amine compounds such as piperidine; vinyl alcohols such as allyl alcohol and crotyl alcohol; vinyl ethers such as vinyl methyl ether, vinyl ethyl ether, n-butyl vinyl ether, isobutyl vinyl ether, allyl glycidyl ether; maleimide, N-phenylmaleimide, N -Unsaturated imides such as cyclohexylmaleimide; Indenes such as indene and 1-methylindene; Aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene Macromolecules having a mono (meth) acryloyl group at the end of a polymer molecular chain such as polystyrene, polymethyl (meth) acrylate, poly-n-butyl (meth) acrylate, polysiloxane, etc .; vinyl chloride, vinylidene chloride, divinyls Cuccinate, diallyl phthalate, triallyl phosphate, triallyl isocyanurate, vinyl thioether, vinyl imidazole, vinyl oxazoline, vinyl carbazole, vinyl pyrrolidone, vinyl pyridine, hydroxyl group-containing vinyl monomers and vinyl isocyanate compounds of polyisocyanate compounds, hydroxyl groups Examples thereof include vinyl monomers containing vinyl monomers and polyepoxy compounds.
これらの中でも、両末端にカルボキシ基と水酸基とを有するポリマーのモノ(メタ)アクリレート、1個のカルボキシ基と2個以上の(メタ)アクリロイル基とを有する多官能(メタ)アクリレート、不飽和一塩基酸及び多価アルコール又は多価フェノールのエステルに、本発明の光重合開始剤組成物は好適である。 Among these, a mono (meth) acrylate of a polymer having a carboxy group and a hydroxyl group at both ends, a polyfunctional (meth) acrylate having one carboxy group and two or more (meth) acryloyl groups, an unsaturated one The photopolymerization initiator composition of the present invention is suitable for esters of basic acids and polyhydric alcohols or polyhydric phenols.
これらの重合性化合物は、単独で又は2種以上を混合して使用することができ、また2種以上を混合して使用する場合には、それらを予め共重合して共重合体として使用することもできる。 These polymerizable compounds can be used alone or in admixture of two or more, and when used in admixture of two or more, they are copolymerized in advance and used as a copolymer. You can also.
また、上記エチレン性不飽和結合を有する重合性化合物として、エチレン性不飽和結合を有するアルカリ現像性化合物を用いて、本発明の感光性組成物をアルカリ現像性感光性樹脂組成物とすることもできる。該エチレン性不飽和結合を有するアルカリ現像性化合物としては、アクリル酸エステルの共重合体や、フェノール及び/又はクレゾールノボラックエポキシ樹脂、多官能エポキシ基を有するポリフェニルメタン型エポキシ樹脂、エポキシアクリレート樹脂、下記一般式(5)で表されるエポキシ化合物等のエポキシ化合物に不飽和一塩基酸を作用させ、更に多塩基酸無水物を作用させて得られた樹脂を用いることができる。これらの中でも、下記一般式(5)で表されるエポキシ化合物等のエポキシ化合物に、不飽和一塩基酸を作用させ、更に多塩基酸無水物を作用させて得られた樹脂が好ましい。 Further, as the polymerizable compound having an ethylenically unsaturated bond, an alkali developable compound having an ethylenically unsaturated bond may be used to make the photosensitive composition of the present invention an alkali developable photosensitive resin composition. it can. Examples of the alkali-developable compound having an ethylenically unsaturated bond include acrylic ester copolymers, phenol and / or cresol novolac epoxy resins, polyphenylmethane type epoxy resins having polyfunctional epoxy groups, epoxy acrylate resins, A resin obtained by allowing an unsaturated monobasic acid to act on an epoxy compound such as an epoxy compound represented by the following general formula (5) and further causing a polybasic acid anhydride to act thereon can be used. Among these, a resin obtained by allowing an unsaturated monobasic acid to act on an epoxy compound such as an epoxy compound represented by the following general formula (5) and further causing a polybasic acid anhydride to act thereon is preferable.
また、上記エチレン性不飽和結合を有するアルカリ現像性化合物は、不飽和基を0.2〜1.0当量含有していることが好ましい。 Moreover, it is preferable that the alkali developable compound which has the said ethylenically unsaturated bond contains 0.2-1.0 equivalent of unsaturated groups.
上記エポキシ化合物に作用させる上記不飽和一塩基酸としては、アクリル酸、メタクリル酸、クロトン酸、桂皮酸、ソルビン酸、ヒドロキシエチルメタクリレート・マレート、ヒドロキシエチルアクリレート・マレート、ヒドロキシプロピルメタクリレート・マレート、ヒドロキシプロピルアクリレート・マレート、ジシクロペンタジエン・マレート等が挙げられる。 Examples of the unsaturated monobasic acid that acts on the epoxy compound include acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, hydroxyethyl methacrylate / malate, hydroxyethyl acrylate / malate, hydroxypropyl methacrylate / malate, hydroxypropyl Acrylate / malate, dicyclopentadiene / malate and the like can be mentioned.
また、上記不飽和一塩基酸を作用させた後に作用させる上記多塩基酸無水物としては、ビフェニルテトラカルボン酸二無水物、テトラヒドロ無水フタル酸、無水コハク酸、ビフタル酸無水物、無水マレイン酸、トリメリット酸無水物、ピロメリット酸無水物、2,2’−3,3’−ベンゾフェノンテトラカルボン酸無水物、エチレングリコールビスアンヒドロトリメリテート、グリセロールトリスアンヒドロトリメリテート、ヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、ナジック酸無水物、メチルナジック酸無水物、トリアルキルテトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、5−(2,5−ジオキソテトラヒドロフリル)−3−メチル−3−シクロヘキセン−1,2−ジカルボン酸無水物、トリアルキルテトラヒドロ無水フタル酸−無水マレイン酸付加物、ドデセニル無水コハク酸、無水メチルハイミック酸等が挙げられる。 In addition, the polybasic acid anhydride to be acted after the unsaturated monobasic acid is allowed to act is biphenyltetracarboxylic dianhydride, tetrahydrophthalic anhydride, succinic anhydride, biphthalic anhydride, maleic anhydride, Trimellitic anhydride, pyromellitic anhydride, 2,2'-3,3'-benzophenone tetracarboxylic anhydride, ethylene glycol bisanhydro trimellitate, glycerol tris anhydro trimellitate, hexahydrophthalic anhydride , Methyltetrahydrophthalic anhydride, nadic anhydride, methylnadic anhydride, trialkyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 5- (2,5-dioxotetrahydrofuryl) -3-methyl-3-cyclohexene -1,2-dicarboxylic anhydride, trialkyl tet Anhydride - maleic acid adduct, dodecenyl succinic anhydride, and anhydride and methyl high Mick acid.
上記エポキシ化合物、上記不飽和一塩基酸及び上記多塩基酸無水物の反応モル比は、以下の通りとすることが好ましい。
即ち、上記エポキシ化合物のエポキシ基1個に対し、上記不飽和一塩基酸のカルボキシル基が0.1〜1.0個で付加させた構造を有するエポキシ付加物において、該エポキシ付加物の水酸基1個に対し、上記多塩基酸無水物の酸無水物構造が0.1〜1.0個となる比率となるようにするのが好ましい。The reaction molar ratio of the epoxy compound, the unsaturated monobasic acid and the polybasic acid anhydride is preferably as follows.
That is, in the epoxy adduct having a structure in which 0.1 to 1.0 carboxyl groups of the unsaturated monobasic acid are added to one epoxy group of the epoxy compound, the hydroxyl group of the epoxy adduct is 1 It is preferable that the acid anhydride structure of the polybasic acid anhydride has a ratio of 0.1 to 1.0.
上記エポキシ化合物、上記不飽和一塩基酸及び上記多塩基酸無水物の反応は、常法に従って行なうことができる。 Reaction of the said epoxy compound, the said unsaturated monobasic acid, and the said polybasic acid anhydride can be performed in accordance with a conventional method.
本発明の感光性組成物の実施態様の一つである、本発明のアルカリ現像性感光性樹脂組成物は、必須成分として、本発明の光重合開始剤組成物と、エチレン性不飽和結合を有する重合性化合物と、エチレン性不飽和結合を有している場合があるアルカリ現像性化合物とを含有し、任意成分として、無機化合物、色材、溶媒等の成分を組み合わせて含有するものである。尚、本発明のアルカリ現像性感光性樹脂組成物のうち、色材を含有するものを、特に、本発明の着色アルカリ現像性感光性樹脂組成物ともいう。 The alkali-developable photosensitive resin composition of the present invention, which is one of the embodiments of the photosensitive composition of the present invention, comprises the photopolymerization initiator composition of the present invention and an ethylenically unsaturated bond as essential components. It contains a polymerizable compound having, and an alkali developable compound that may have an ethylenically unsaturated bond, and optionally contains components such as an inorganic compound, a coloring material, and a solvent in combination. . Among the alkali-developable photosensitive resin compositions of the present invention, those containing a coloring material are also referred to as the colored alkali-developable photosensitive resin compositions of the present invention.
上記のエチレン性不飽和結合を有する重合性化合物と、上記のエチレン性不飽和結合を有している場合があるアルカリ現像性化合物とは同一の化合物である場合もあり、異なっている場合もあり、また、単独で使用する場合も2種以上を併用する場合もある。 The polymerizable compound having the ethylenically unsaturated bond and the alkali developable compound that may have the ethylenically unsaturated bond may be the same compound or may be different. Moreover, when using individually, 2 or more types may be used together.
酸価調整して本発明の(着色)アルカリ現像性感光性樹脂組成物の現像性を改良するため、上記エチレン性不飽和結合を有している場合があるアルカリ現像性を有する化合物と共に、更に単官能又は多官能エポキシ化合物を用いることができる。上記エチレン性不飽和結合を有している場合があるアルカリ現像性を有する化合物は、固形分の酸価が5〜120mgKOH/gの範囲であることが好ましく、単官能又は多官能エポキシ化合物の使用量は、上記酸価を満たすように選択するのが好ましい。 In order to improve the developability of the (colored) alkali-developable photosensitive resin composition of the present invention by adjusting the acid value, in addition to the above-mentioned compound having alkali developability that may have an ethylenically unsaturated bond, A monofunctional or polyfunctional epoxy compound can be used. The alkali-developable compound that may have an ethylenically unsaturated bond preferably has a solid content acid value in the range of 5 to 120 mgKOH / g, and uses a monofunctional or polyfunctional epoxy compound. The amount is preferably selected so as to satisfy the acid value.
上記単官能エポキシ化合物としては、グリシジルメタクリレート、メチルグリシジルエーテル、エチルグリシジルエーテル、プロピルグリシジルエーテル、イソプロピルグリシジルエーテル、ブチルグリシジルエーテル、イソブチルグリシジルエーテル、t−ブチルグリシジルエーテル、ペンチルグリシジルエーテル、ヘキシルグリシジルエーテル、ヘプチルグリシジルエーテル、オクチルグリシジルエーテル、ノニルグリシジルエーテル、デシルグリシジルエーテル、ウンデシルグリシジルエーテル、ドデシルグリシジルエーテル、トリデシルグリシジルエーテル、テトラデシルグリシジルエーテル、ペンタデシルグリシジルエーテル、ヘキサデシルグリシジルエーテル、2−エチルヘキシルグリシジルエーテル、アリルグリシジルエーテル、プロパルギルグリシジルエーテル、p−メトキシエチルグリシジルエーテル、フェニルグリシジルエーテル、p−メトキシグリシジルエーテル、p−ブチルフェノールグリシジルエーテル、クレジルグリシジルエーテル、2−メチルクレジルグリシジルエーテル、4−ノニルフェニルグリシジルエーテル、ベンジルグリシジルエーテル、p−クミルフェニルグリシジルエーテル、トリチルグリシジルエーテル、2,3−エポキシプロピルメタクリレート、エポキシ化大豆油、エポキシ化アマニ油、グリシジルブチレート、ビニルシクロヘキサンモノオキシド、1,2−エポキシ−4−ビニルシクロヘキサン、スチレンオキシド、ピネンオキシド、メチルスチレンオキシド、シクロヘキセンオキシド、プロピレンオキシド、下記化合物No.E1、No.E2等が挙げられる。 Examples of the monofunctional epoxy compound include glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, isobutyl glycidyl ether, t-butyl glycidyl ether, pentyl glycidyl ether, hexyl glycidyl ether, heptyl. Glycidyl ether, octyl glycidyl ether, nonyl glycidyl ether, decyl glycidyl ether, undecyl glycidyl ether, dodecyl glycidyl ether, tridecyl glycidyl ether, tetradecyl glycidyl ether, pentadecyl glycidyl ether, hexadecyl glycidyl ether, 2-ethylhexyl glycidyl ether, Allyl glycidylate , Propargyl glycidyl ether, p-methoxyethyl glycidyl ether, phenyl glycidyl ether, p-methoxy glycidyl ether, p-butylphenol glycidyl ether, cresyl glycidyl ether, 2-methyl cresyl glycidyl ether, 4-nonylphenyl glycidyl ether, benzyl glycidyl Ether, p-cumylphenyl glycidyl ether, trityl glycidyl ether, 2,3-epoxypropyl methacrylate, epoxidized soybean oil, epoxidized linseed oil, glycidyl butyrate, vinylcyclohexane monooxide, 1,2-epoxy-4-vinyl Cyclohexane, styrene oxide, pinene oxide, methylstyrene oxide, cyclohexene oxide, propylene oxide, the following compound No. E1, No. E2 etc. are mentioned.
上記多官能エポキシ化合物としては、ビスフェノール型エポキシ化合物及びグリシジルエーテル類からなる群から選択される一種以上の化合物を用いると、特性の一層良好な(着色)アルカリ現像性感光性樹脂組成物を得ることができるので好ましい。 As the polyfunctional epoxy compound, when one or more compounds selected from the group consisting of bisphenol-type epoxy compounds and glycidyl ethers are used, a (colored) alkali-developable photosensitive resin composition having better characteristics can be obtained. Is preferable.
上記ビスフェノール型エポキシ化合物としては、上記一般式(5)で表されるエポキシ化合物を用いることができる他、例えば、水添ビスフェノール型エポキシ化合物等のビスフェノール型エポキシ化合物も用いることができる。 As said bisphenol-type epoxy compound, the epoxy compound represented by the said General formula (5) can be used, For example, bisphenol-type epoxy compounds, such as a hydrogenated bisphenol-type epoxy compound, can also be used.
また、上記グリシジルエーテル類としては、エチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、1,4−ブタンジオールジグリシジルエーテル、1,6−ヘキサンジオールジグリシジルエーテル、1,8−オクタンジオールジグリシジルエーテル、1,10−デカンジオールジグリシジルエーテル、2,2−ジメチル−1,3−プロパンジオールジグリシジルエーテル、ジエチレングリコールジグリシジルエーテル、トリエチレングリコールジグリシジルエーテル、テトラエチレングリコールジグリシジルエーテル、ヘキサエチレングリコールジグリシジルエーテル、1,4−シクロヘキサンジメタノールジグリシジルエーテル、1,1,1−トリ(グリシジルオキシメチル)プロパン、1,1,1−トリ(グリシジルオキシメチル)エタン、1,1,1−トリ(グリシジルオキシメチル)メタン、1,1,1,1−テトラ(グリシジルオキシメチル)メタン等を用いることができる。 Examples of the glycidyl ethers include ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, and 1,8-octanediol diglycidyl ether. 1,10-decanediol diglycidyl ether, 2,2-dimethyl-1,3-propanediol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, tetraethylene glycol diglycidyl ether, hexaethylene glycol di Glycidyl ether, 1,4-cyclohexanedimethanol diglycidyl ether, 1,1,1-tri (glycidyloxymethyl) propane, 1,1,1- It can be used Li (glycidyloxymethyl) ethane, 1,1,1-tri (glycidyloxymethyl) methane, 1,1,1,1- tetra (glycidyloxymethyl) methane.
その他、フェノールノボラック型エポキシ化合物、ビフェニルノボラック型エポキシ化合物、クレゾールノボラック型エポキシ化合物、ビスフェノールAノボラック型エポキシ化合物、ジシクロペンタジエンノボラック型エポキシ化合物等のノボラック型エポキシ化合物;3,4−エポキシ−6−メチルシクロヘキシルメチル−3,4−エポキシ−6−メチルシクロヘキサンカルボキシレート、3,4−エポキシシクロヘキシルメチル−3,4−エポキシシクロヘキサンカルボキシレート、1−エポキシエチル−3,4−エポキシシクロヘキサン等の脂環式エポキシ化合物;フタル酸ジグリシジルエステル、テトラヒドロフタル酸ジグリシジルエステル、ダイマー酸グリシジルエステル等のグリシジルエステル類;テトラグリシジルジアミノジフェニルメタン、トリグリシジルP−アミノフェノール、N,N−ジグリシジルアニリン等のグリシジルアミン類;1,3−ジグリシジル−5,5−ジメチルヒダントイン、トリグリシジルイソシアヌレート等の複素環式エポキシ化合物;ジシクロペンタジエンジオキシド等のジオキシド化合物;ナフタレン型エポキシ化合物;トリフェニルメタン型エポキシ化合物;ジシクロペンタジエン型エポキシ化合物等を用いることもできる。 Other novolac epoxy compounds such as phenol novolac epoxy compounds, biphenyl novolac epoxy compounds, cresol novolac epoxy compounds, bisphenol A novolac epoxy compounds, dicyclopentadiene novolac epoxy compounds; 3,4-epoxy-6-methyl Cycloaliphatic epoxies such as cyclohexylmethyl-3,4-epoxy-6-methylcyclohexanecarboxylate, 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, 1-epoxyethyl-3,4-epoxycyclohexane Compound: Glycidyl esters such as diglycidyl phthalate, diglycidyl tetrahydrophthalate, glycidyl dimer, tetraglycidyl diamino Glycidylamines such as phenylmethane, triglycidyl P-aminophenol and N, N-diglycidylaniline; heterocyclic epoxy compounds such as 1,3-diglycidyl-5,5-dimethylhydantoin and triglycidyl isocyanurate; Dioxide compounds such as pentadiene dioxide; naphthalene type epoxy compounds; triphenylmethane type epoxy compounds; dicyclopentadiene type epoxy compounds can also be used.
本発明の感光性組成物において、本発明の光重合開始剤組成物は、あらかじめ(A)成分と(B)成分から光重合開始剤組成物を調製しておいて、それをエチレン性不飽和結合を有する重合性化合物や他の任意成分に配合することができ、(A)成分と(B)成分を、それぞれ別々に重合性化合物や他の任意成分に配合して、感光性組成物とすることもできる。 In the photosensitive composition of the present invention, the photopolymerization initiator composition of the present invention is prepared beforehand by preparing a photopolymerization initiator composition from the component (A) and the component (B), which is then ethylenically unsaturated. A polymerizable compound having a bond and other optional components can be blended, and the component (A) and the component (B) are separately blended with the polymerizable compound and other optional components, respectively, You can also
本発明の感光性組成物において、本発明の光重合開始剤組成物の含有量は特に限定されるものではないが、上記エチレン性不飽和結合を有する重合性化合物(又は上記エチレン性不飽和結合を有するアルカリ現像性化合物)100質量部に対して、好ましくは0.1〜70質量部、より好ましくは0.3〜50質量部、最も好ましくは0.5〜30質量部である。 In the photosensitive composition of the present invention, the content of the photopolymerization initiator composition of the present invention is not particularly limited, but the polymerizable compound having the ethylenically unsaturated bond (or the ethylenically unsaturated bond) is not limited. Is preferably 0.1 to 70 parts by mass, more preferably 0.3 to 50 parts by mass, and most preferably 0.5 to 30 parts by mass with respect to 100 parts by mass.
特に、本発明の感光性組成物を(着色)アルカリ現像性感光性樹脂組成物とする場合、本発明の光重合開始剤組成物の含有量は、本発明の(着色)アルカリ現像性感光性樹脂組成物の固形分(溶剤以外の全成分)中、0.3〜20質量%、特に0.8〜12質量%が好ましい。 In particular, when the photosensitive composition of the present invention is a (colored) alkali-developable photosensitive resin composition, the content of the photopolymerization initiator composition of the present invention is the (colored) alkali-developable photosensitive composition of the present invention. In solid content (all components other than a solvent) of a resin composition, 0.3-20 mass%, Especially 0.8-12 mass% is preferable.
本発明の感光性組成物には、更に溶媒を加えることができる。該溶媒としては、通常、必要に応じて上記の各成分(本発明の光重合開始剤組成物及びエチレン性不飽和結合を有する重合性化合物等)を溶解又は分散しえる溶媒、例えば、メチルエチルケトン、メチルアミルケトン、ジエチルケトン、アセトン、メチルイソプロピルケトン、メチルイソブチルケトン、シクロヘキサノン、2−ヘプタノン等のケトン類;エチルエーテル、ジオキサン、テトラヒドロフラン、1,2−ジメトキシエタン、1,2−ジエトキシエタン、ジプロピレングリコールジメチルエーテル等のエーテル系溶媒;酢酸メチル、酢酸エチル、酢酸−n−プロピル、酢酸イソプロピル、酢酸n−ブチル、酢酸シクロヘキシル、乳酸エチル、コハク酸ジメチル、テキサノール等のエステル系溶媒;エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル等のセロソルブ系溶媒;メタノール、エタノール、イソ−又はn−プロパノール、イソ−又はn−ブタノール、アミルアルコール等のアルコール系溶媒;エチレングリコールモノメチルアセテート、エチレングリコールモノエチルアセテート、プロピレングリコール−1−モノメチルエーテル−2−アセテート、ジプロピレングリコールモノメチルエーテルアセテート、3−メトキシブチルアセテート、エトキシエチルプロピオネート等のエーテルエステル系溶媒;ベンゼン、トルエン、キシレン等のBTX系溶媒;ヘキサン、ヘプタン、オクタン、シクロヘキサン等の脂肪族炭化水素系溶媒;テレピン油、D−リモネン、ピネン等のテルペン系炭化水素油;ミネラルスピリット、スワゾール#310(コスモ松山石油(株))、ソルベッソ#100(エクソン化学(株))等のパラフィン系溶媒;四塩化炭素、クロロホルム、トリクロロエチレン、塩化メチレン、1,2−ジクロロエタン等のハロゲン化脂肪族炭化水素系溶媒;クロロベンゼン等のハロゲン化芳香族炭化水素系溶媒;カルビトール系溶媒;アニリン;トリエチルアミン;ピリジン;酢酸;アセトニトリル;二硫化炭素;N,N−ジメチルホルムアミド;N,N−ジメチルアセトアミド;N−メチルピロリドン;ジメチルスルホキシド;水等が挙げられ、これらの溶媒は1種又は2種以上の混合溶媒として使用することができる。 A solvent can be further added to the photosensitive composition of the present invention. As the solvent, usually, a solvent capable of dissolving or dispersing each of the above components (the photopolymerization initiator composition of the present invention and a polymerizable compound having an ethylenically unsaturated bond) as necessary, for example, methyl ethyl ketone, Ketones such as methyl amyl ketone, diethyl ketone, acetone, methyl isopropyl ketone, methyl isobutyl ketone, cyclohexanone, 2-heptanone; ethyl ether, dioxane, tetrahydrofuran, 1,2-dimethoxyethane, 1,2-diethoxyethane, di Ether solvents such as propylene glycol dimethyl ether; ester solvents such as methyl acetate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, cyclohexyl acetate, ethyl lactate, dimethyl succinate, and texanol; ethylene glycol monomethyl ester Cellosolve solvents such as ter, ethylene glycol monoethyl ether; alcohol solvents such as methanol, ethanol, iso- or n-propanol, iso- or n-butanol, amyl alcohol; ethylene glycol monomethyl acetate, ethylene glycol monoethyl acetate, Ether ester solvents such as propylene glycol-1-monomethyl ether-2-acetate, dipropylene glycol monomethyl ether acetate, 3-methoxybutyl acetate, ethoxyethyl propionate; BTX solvents such as benzene, toluene, xylene; hexane, Aliphatic hydrocarbon solvents such as heptane, octane and cyclohexane; Terpene hydrocarbon oils such as turpentine oil, D-limonene and pinene; Mineral spirit, Swazol Paraffinic solvents such as 310 (Cosmo Matsuyama Oil Co., Ltd.), Solvesso # 100 (Exxon Chemical Co., Ltd.); Halogenated aliphatic hydrocarbons such as carbon tetrachloride, chloroform, trichloroethylene, methylene chloride, 1,2-dichloroethane, etc. Halogenated aromatic hydrocarbon solvents such as chlorobenzene; carbitol solvents; aniline; triethylamine; pyridine; acetic acid; acetonitrile; carbon disulfide; N, N-dimethylformamide; Examples thereof include methyl pyrrolidone; dimethyl sulfoxide; water and the like, and these solvents can be used as one or a mixture of two or more.
これらの中でも、ケトン類、エーテルエステル系溶媒等、特にプロピレングリコール−1−モノメチルエーテル−2−アセテート、シクロヘキサノン等が、感光性組成物においてレジストと光重合開始剤の相溶性がよいので好ましい。
本発明の感光性組成物において、溶剤を使用する場合、その使用量は、ハンドリング等の観点から、固形分(溶剤以外の成分)の濃度が5〜85質量%になる量が好ましい。Among these, ketones, ether ester solvents, and the like, particularly propylene glycol-1-monomethyl ether-2-acetate, cyclohexanone, and the like are preferable because the compatibility of the resist and the photopolymerization initiator is good in the photosensitive composition.
In the photosensitive composition of this invention, when using a solvent, the usage-amount is the quantity from which viewpoints of handling etc. become the density | concentration of solid content (components other than a solvent) 5-85 mass%.
また、本発明の感光性組成物(特にアルカリ現像性感光性樹脂組成物)には、更に色材を含有させて着色(アルカリ現像性)感光性組成物とすることができる。該色材としては、顔料、染料、天然色素等が挙げられる。これらの色材は、単独で又は2種以上を混合して用いることができる。 In addition, the photosensitive composition of the present invention (particularly the alkali-developable photosensitive resin composition) can further contain a coloring material to give a colored (alkali-developable) photosensitive composition. Examples of the coloring material include pigments, dyes, and natural pigments. These color materials can be used alone or in admixture of two or more.
上記顔料としては、例えば、ニトロソ化合物;ニトロ化合物;アゾ化合物;ジアゾ化合物;キサンテン化合物;キノリン化合物;アントラキノン化合物;クマリン化合物;フタロシアニン化合物;イソインドリノン化合物;イソインドリン化合物;キナクリドン化合物;アンタンスロン化合物;ペリノン化合物;ペリレン化合物;ジケトピロロピロール化合物;チオインジゴ化合物;ジオキサジン化合物;トリフェニルメタン化合物;キノフタロン化合物;ナフタレンテトラカルボン酸;アゾ染料、シアニン染料の金属錯体化合物;レーキ顔料;ファーネス法、チャンネル法又はサーマル法によって得られるカーボンブラック、或いはアセチレンブラック、ケッチェンブラック又はランプブラック等のカーボンブラック;上記カーボンブラックをエポキシ樹脂で調整又は被覆したもの、上記カーボンブラックを予め溶媒中で樹脂で分散処理し、20〜200mg/gの樹脂を吸着させたもの、上記カーボンブラックを酸性又はアルカリ性表面処理したもの、平均粒径が8nm以上でDBP吸油量が90ml/100g以下のもの、950℃における揮発分中のCO及びCO2から算出した全酸素量が、カーボンブラックの表面積100m2当たり9mg以上であるもの;黒鉛、黒鉛化カーボンブラック、活性炭、炭素繊維、カーボンナノチューブ、カーボンマイクロコイル、カーボンナノホーン、カーボンエアロゲル、フラーレン;アニリンブラック、ピグメントブラック7、チタンブラック;酸化クロム緑、ミロリブルー、コバルト緑、コバルト青、マンガン系、フェロシアン化物、リン酸塩群青、紺青、ウルトラマリン、セルリアンブルー、ピリジアン、エメラルドグリーン、硫酸鉛、黄色鉛、亜鉛黄、べんがら(赤色酸化鉄(III))、カドミウム赤、合成鉄黒、アンバー等の有機又は無機顔料を用いることができる。これらの顔料は単独で、或いは複数を混合して用いることができる。Examples of the pigment include a nitroso compound; a nitro compound; an azo compound; a diazo compound; a xanthene compound; a quinoline compound; an anthraquinone compound; a coumarin compound; a phthalocyanine compound; an isoindolinone compound; an isoindolinone compound; Compound; perylene compound; diketopyrrolopyrrole compound; thioindigo compound; dioxazine compound; triphenylmethane compound; quinophthalone compound; naphthalene tetracarboxylic acid; azo dye, metal complex compound of cyanine dye; lake pigment; furnace method, channel method or thermal Carbon black obtained by the method, or carbon black such as acetylene black, ketjen black or lamp black; Prepared by coating or coating with an epoxy resin, carbon black previously dispersed with a resin in a solvent, 20 to 200 mg / g of resin adsorbed, carbon black treated with an acidic or alkaline surface, average Graphite having a particle size of 8 nm or more and a DBP oil absorption of 90 ml / 100 g or less, and a total oxygen amount calculated from CO and CO 2 in a volatile content at 950 ° C. of 9 mg or more per 100 m 2 of the surface area of carbon black; Graphite , Graphitized carbon black, activated carbon, carbon fiber, carbon nanotube, carbon microcoil, carbon nanohorn, carbon aerogel, fullerene; aniline black, pigment black 7, titanium black; chromium oxide green, miloli blue, cobalt green, cobalt blue, manganese series , Ferrocyanide Organic or inorganic such as phosphate ultramarine, bitumen, ultramarine, cerulean blue, pyridian, emerald green, lead sulfate, yellow lead, zinc yellow, red bean (red iron (III) oxide), cadmium red, synthetic iron black, amber Pigments can be used. These pigments can be used alone or in combination.
上記顔料としては、市販の顔料を用いることもでき、例えば、ピグメントレッド1、2、3、9、10、14、17、22、23、31、38、41、48、49、88、90、97、112、119、122、123、144、149、166、168、169、170、171、177、179、180、184、185、192、200、202、209、215、216、217、220、223、224、226、227、228、240、254;ピグメントオレンジ13、31、34、36、38、43、46、48、49、51、52、55、59、60、61、62、64、65、71;ピグメントイエロー1、3、12、13、14、16、17、20、24、55、60、73、81、83、86、93、95、97、98、100、109、110、113、114、117、120、125、126、127、129、137、138、139、147、148、150、151、152、153、154、166、168、175、180、185;ピグメントグリ−ン7、10、36;ピグメントブルー15、15:1、15:2、15:3、15:4、15:5、15:6、22、24、56、60、61、62、64;ピグメントバイオレット1、19、23、27、29、30、32、37、40、50等が挙げられる。 Commercially available pigments can also be used as the pigment, for example, Pigment Red 1, 2, 3, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48, 49, 88, 90, 97, 112, 119, 122, 123, 144, 149, 166, 168, 169, 170, 171, 177, 179, 180, 184, 185, 192, 200, 202, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254; Pigment Orange 13, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 65, 71; Pigment Yellow 1, 3, 12, 13, 14, 16, 17, 20, 24, 55, 60, 73, 81, 83, 86, 93, 95, 97 98, 100, 109, 110, 113, 114, 117, 120, 125, 126, 127, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 166, 168, 175, 180, 185; Pigment Green 7, 10, 36; Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 5, 15: 6, 22, 24, 56, 60, 61, 62, 64; pigment violet 1, 19, 23, 27, 29, 30, 32, 37, 40, 50, etc.
上記染料としては、アゾ染料、アントラキノン染料、インジゴイド染料、トリアリールメタン染料、キサンテン染料、アリザリン染料、アクリジン染料スチルベン染料、チアゾール染料、ナフトール染料、キノリン染料、ニトロ染料、インダミン染料、オキサジン染料、フタロシアニン染料、シアニン染料等の染料等が挙げられ、これらは複数を混合して用いることもできる。 As the above dyes, azo dyes, anthraquinone dyes, indigoid dyes, triarylmethane dyes, xanthene dyes, alizarin dyes, acridine dyes stilbene dyes, thiazole dyes, naphthol dyes, quinoline dyes, nitro dyes, indamine dyes, oxazine dyes, phthalocyanine dyes And dyes such as cyanine dyes. These may be used in combination.
本発明の感光性組成物において、上記色材の含有量は、上記エチレン性不飽和結合を有する重合性化合物100質量部に対して、好ましくは50〜350質量部、より好ましくは100〜250質量部である。 In the photosensitive composition of the present invention, the content of the coloring material is preferably 50 to 350 parts by mass, more preferably 100 to 250 parts by mass with respect to 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond. Part.
本発明の感光性組成物には、更に無機化合物を含有させることができる。該無機化合物としては、例えば、酸化ニッケル、酸化鉄、酸化イリジウム、酸化チタン、酸化亜鉛、酸化マグネシウム、酸化カルシウム、酸化カリウム、シリカ、アルミナ等の金属酸化物;層状粘土鉱物、ミロリブルー、炭酸カルシウム、炭酸マグネシウム、コバルト系、マンガン系、ガラス粉末(特にガラスフリット)、マイカ、タルク、カオリン、フェロシアン化物、各種金属硫酸塩、硫化物、セレン化物、アルミニウムシリケート、カルシウムシリケート、水酸化アルミニウム、白金、金、銀、銅等が挙げられる。これらの中でも、ガラスフリット、酸化チタン、シリカ、層状粘土鉱物、銀等が好ましい。 The photosensitive composition of the present invention can further contain an inorganic compound. Examples of the inorganic compound include metal oxides such as nickel oxide, iron oxide, iridium oxide, titanium oxide, zinc oxide, magnesium oxide, calcium oxide, potassium oxide, silica, and alumina; lamellar clay mineral, miloli blue, calcium carbonate, Magnesium carbonate, cobalt, manganese, glass powder (especially glass frit), mica, talc, kaolin, ferrocyanide, various metal sulfates, sulfides, selenides, aluminum silicate, calcium silicate, aluminum hydroxide, platinum, Gold, silver, copper, etc. are mentioned. Among these, glass frit, titanium oxide, silica, layered clay mineral, silver and the like are preferable.
本発明の感光性組成物において、上記無機化合物の含有量は、上記エチレン性不飽和結合を有する重合性化合物100質量部に対して、好ましくは0.1〜1000質量部、より好ましくは10〜800質量部である。尚、これらの無機化合物は1種又は2種以上を使用することができる。
これら無機化合物は、例えば、充填剤、反射防止剤、導電剤、安定剤、難燃剤、機械的強度向上剤、特殊波長吸収剤、撥インク剤等として用いられる。In the photosensitive composition of the present invention, the content of the inorganic compound is preferably 0.1 to 1000 parts by mass, more preferably 10 to 10 parts by mass with respect to 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond. 800 parts by mass. These inorganic compounds can be used alone or in combination of two or more.
These inorganic compounds are used, for example, as fillers, antireflection agents, conductive agents, stabilizers, flame retardants, mechanical strength improvers, special wavelength absorbers, ink repellents, and the like.
本発明の感光性組成物には、色材及び/又は無機化合物を分散させる分散剤を加えることができる。該分散剤としては、色材又は無機化合物を分散、安定化できるものであれば制限されず、市販の分散剤、例えば、ビックケミー社製のBYKシリーズ等を用いることができる。特に、塩基性官能基を有するポリエステル、ポリエーテル、又はポリウレタンからなる高分子分散剤、塩基性官能基として窒素原子を有し、窒素原子を有する官能基がアミン及び/又はその四級塩であり、アミン価が1〜100mgKOH/gのものが好適に用いられる。 A dispersing agent for dispersing a colorant and / or an inorganic compound can be added to the photosensitive composition of the present invention. The dispersing agent is not limited as long as it can disperse and stabilize a coloring material or an inorganic compound, and a commercially available dispersing agent such as BYK series manufactured by BYK Chemie Corporation can be used. In particular, a polymer dispersant made of polyester, polyether or polyurethane having a basic functional group, having a nitrogen atom as a basic functional group, and the functional group having a nitrogen atom being an amine and / or a quaternary salt thereof. Those having an amine value of 1 to 100 mgKOH / g are preferably used.
本発明の感光性組成物では、(A)成分のオキシムエステル化合物及び(B)成分のオキシムエステル化合物と共に他の光重合開始剤を併用することができる。併用できる他の光重合開始剤としては、従来既知の化合物を用いることが可能であり、例えば、ベンゾフェノン、フェニルビフェニルケトン、1−ヒドロキシ−1−ベンゾイルシクロヘキサン、ベンゾイン、ベンジルジメチルケタール、1−ベンジル−1−ジメチルアミノ−1−(4'−モルホリノベンゾイル)プロパン、2−モルホリル−2−(4'−メチルメルカプト)ベンゾイルプロパン、チオキサントン、1−クロル−4−プロポキシチオキサントン、イソプロピルチオキサントン、ジエチルチオキサントン、エチルアントラキノン、4−ベンゾイル−4'−メチルジフェニルスルフィド、ベンゾインブチルエーテル、2−ヒドロキシ−2−ベンゾイルプロパン、2−ヒドロキシ−2−(4'−イソプロピル)ベンゾイルプロパン、4−ブチルベンゾイルトリクロロメタン、4−フェノキシベンゾイルジクロロメタン、ベンゾイル蟻酸メチル、1,7−ビス(9'−アクリジニル)ヘプタン、9−n−ブチル−3,6−ビス(2'−モルホリノイソブチロイル)カルバゾール、2−メチル−4,6−ビス(トリクロロメチル)−s−トリアジン、2−フェニル−4,6−ビス(トリクロロメチル)−s−トリアジン、2−ナフチル−4,6−ビス(トリクロロメチル)−s−トリアジン、2,2−ビス(2−クロロフェニル)−4,5,4’,5’−テトラフェニル−1−2’−ビイミダゾール、4、4−アゾビスイソブチロニトリル、トリフェニルホスフィン、カンファーキノン、N−1414、N−1717((株)ADEKA製)、IRGACURE369、IRGACURE907、IRGACURE OXE 01、IRGACURE OXE 02(BASFジャパン(株)製)、過酸化ベンゾイル、下記一般式(9)で表される化合物等が挙げられ、これらの他の光重合開始剤を使用する場合、その使用量は、好ましくは本発明の光重合開始剤組成物の(A)成分と(B)成分の合計使用量の1質量倍以下とする。尚、これらの光重合開始剤は、1種又は2種以上を組み合わせて用いることができる。 In the photosensitive composition of this invention, another photoinitiator can be used together with the oxime ester compound of (A) component and the oxime ester compound of (B) component. As other photopolymerization initiators that can be used in combination, conventionally known compounds can be used. For example, benzophenone, phenylbiphenylketone, 1-hydroxy-1-benzoylcyclohexane, benzoin, benzyldimethyl ketal, 1-benzyl- 1-dimethylamino-1- (4′-morpholinobenzoyl) propane, 2-morpholyl-2- (4′-methylmercapto) benzoylpropane, thioxanthone, 1-chloro-4-propoxythioxanthone, isopropylthioxanthone, diethylthioxanthone, ethyl Anthraquinone, 4-benzoyl-4'-methyldiphenyl sulfide, benzoin butyl ether, 2-hydroxy-2-benzoylpropane, 2-hydroxy-2- (4'-isopropyl) benzoylpropane, 4-butyl Tylbenzoyltrichloromethane, 4-phenoxybenzoyldichloromethane, methyl benzoylformate, 1,7-bis (9′-acridinyl) heptane, 9-n-butyl-3,6-bis (2′-morpholinoisobutyroyl) carbazole, 2-methyl-4,6-bis (trichloromethyl) -s-triazine, 2-phenyl-4,6-bis (trichloromethyl) -s-triazine, 2-naphthyl-4,6-bis (trichloromethyl)- s-triazine, 2,2-bis (2-chlorophenyl) -4,5,4 ', 5'-tetraphenyl-1-2'-biimidazole, 4,4-azobisisobutyronitrile, triphenylphosphine , Camphorquinone, N-1414, N-1717 (manufactured by ADEKA), IRGACURE369, IRGACUR 907, IRGACURE OXE 01, IRGACURE OXE 02 (manufactured by BASF Japan Ltd.), benzoyl peroxide, compounds represented by the following general formula (9), and the like, and when using these other photopolymerization initiators The amount used is preferably 1 mass times or less of the total amount of the components (A) and (B) of the photopolymerization initiator composition of the present invention. In addition, these photoinitiators can be used 1 type or in combination of 2 or more types.
また、本発明の感光性組成物には、必要に応じて、p−アニソール、ハイドロキノン、ピロカテコール、t−ブチルカテコール、フェノチアジン等の熱重合抑制剤;可塑剤;接着促進剤;充填剤;消泡剤;レベリング剤;表面調整剤;酸化防止剤;紫外線吸収剤;分散助剤;凝集防止剤;触媒;効果促進剤;架橋剤;増粘剤等の慣用の添加物を加えることができる。 In addition, the photosensitive composition of the present invention includes, if necessary, a thermal polymerization inhibitor such as p-anisole, hydroquinone, pyrocatechol, t-butylcatechol, phenothiazine; a plasticizer; an adhesion promoter; a filler; Conventional additives such as a foaming agent, a leveling agent, a surface conditioner, an antioxidant, an ultraviolet absorber, a dispersion aid, a coagulation inhibitor, a catalyst, an effect accelerator, a cross-linking agent, and a thickener can be added.
本発明の感光性組成物において、上記エチレン性不飽和結合を有する重合性化合物及び本発明の光重合開始剤組成物以外の任意成分(但し、上記の他の光重合開始剤、エチレン性不飽和基を有している場合があるアルカリ現像性を有する化合物、無機化合物(充填剤)、色材及び溶媒は除く)の使用量は、その使用目的に応じて適宜選択され特に制限されないが、好ましくは、上記エチレン性不飽和結合を有する重合性化合物100質量部に対して合計で50質量部以下とする。 In the photosensitive composition of the present invention, an optional component other than the polymerizable compound having the ethylenically unsaturated bond and the photopolymerization initiator composition of the present invention (however, the other photopolymerization initiator, ethylenically unsaturated). The amount of the alkali-developing compound that may have a group, an inorganic compound (filler), a coloring material and a solvent is excluded) is appropriately selected according to the purpose of use and is not particularly limited. Is 50 parts by mass or less in total with respect to 100 parts by mass of the polymerizable compound having an ethylenically unsaturated bond.
また、本発明の感光性組成物には、上記エチレン性不飽和結合を有する重合性化合物と共に、他の有機重合体を用いることによって、硬化物の特性を改善することもできる。該有機重合体としては、例えば、ポリスチレン、ポリメチルメタクリレート、メチルメタクリレート−エチルアクリレート共重合体、ポリ(メタ)アクリル酸、スチレン−(メタ)アクリル酸共重合体、(メタ)アクリル酸−メチルメタクリレート共重合体、エチレン−塩化ビニル共重合体、エチレン−ビニル共重合体、ポリ塩化ビニル樹脂、ABS樹脂、ナイロン6、ナイロン66、ナイロン12、ウレタン樹脂、ポリカーボネートポリビニルブチラール、セルロースエステル、ポリアクリルアミド、飽和ポリエステル、フェノール樹脂、フェノキシ樹脂、ポリアミドイミド樹脂、ポリアミック酸樹脂、エポキシ樹脂等が挙げられ、これらの中でも、ポリスチレン、(メタ)アクリル酸−メチルメタクリレート共重合体、エポキシ樹脂が好ましい。
他の有機重合体を使用する場合、その使用量は、上記エチレン性不飽和結合を有する重合性化合物100質量部に対して、好ましくは10〜500質量部である。Moreover, in the photosensitive composition of this invention, the characteristic of hardened | cured material can also be improved by using another organic polymer with the polymeric compound which has the said ethylenically unsaturated bond. Examples of the organic polymer include polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly (meth) acrylic acid, styrene- (meth) acrylic acid copolymer, (meth) acrylic acid-methyl methacrylate. Copolymer, ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polyvinyl chloride resin, ABS resin, nylon 6, nylon 66, nylon 12, urethane resin, polycarbonate polyvinyl butyral, cellulose ester, polyacrylamide, saturated Examples thereof include polyester, phenol resin, phenoxy resin, polyamideimide resin, polyamic acid resin, epoxy resin and the like. Among these, polystyrene, (meth) acrylic acid-methyl methacrylate copolymer, and epoxy resin are preferable. Arbitrariness.
When using another organic polymer, the usage-amount is preferably 10-500 mass parts with respect to 100 mass parts of polymeric compounds which have the said ethylenically unsaturated bond.
本発明の感光性組成物には、更に、連鎖移動剤、増感剤、界面活性剤、シランカップリング剤、メラミン化合物等を併用することができる。 Further, a chain transfer agent, a sensitizer, a surfactant, a silane coupling agent, a melamine compound, and the like can be used in combination with the photosensitive composition of the present invention.
上記連鎖移動剤又は増感剤としては、一般的に硫黄原子含有化合物が用いられる。例えばチオグリコール酸、チオリンゴ酸、チオサリチル酸、2−メルカプトプロピオン酸、3−メルカプトプロピオン酸、3−メルカプト酪酸、N−(2−メルカプトプロピオニル)グリシン、2−メルカプトニコチン酸、3−[N−(2−メルカプトエチル)カルバモイル]プロピオン酸、3−[N−(2−メルカプトエチル)アミノ]プロピオン酸、N−(3−メルカプトプロピオニル)アラニン、2−メルカプトエタンスルホン酸、3−メルカプトプロパンスルホン酸、4−メルカプトブタンスルホン酸、ドデシル(4−メチルチオ)フェニルエーテル、2−メルカプトエタノール、3−メルカプト−1,2−プロパンジオール、1−メルカプト−2−プロパノール、3−メルカプト−2−ブタノール、メルカプトフェノール、2−メルカプトエチルアミン、2−メルカプトイミダゾール、2−メルカプトベンゾイミダゾール、2−メルカプト−3−ピリジノール、2−メルカプトベンゾチアゾール、メルカプト酢酸、トリメチロールプロパントリス(3−メルカプトプロピオネート)、ペンタエリスリトールテトラキス(3−メルカプトプロピオネート)等のメルカプト化合物、該メルカプト化合物を酸化して得られるジスルフィド化合物、ヨード酢酸、ヨードプロピオン酸、2−ヨードエタノール、2−ヨードエタンスルホン酸、3−ヨードプロパンスルホン酸等のヨード化アルキル化合物、トリメチロールプロパントリス(3−メルカプトイソブチレート)、ブタンジオールビス(3−メルカプトイソブチレート)、ヘキサンジチオール、デカンジチオール、1,4−ジメチルメルカプトベンゼン、ブタンジオールビスチオプロピオネート、ブタンジオールビスチオグリコレート、エチレングリコールビスチオグリコレート、トリメチロールプロパントリスチオグリコレート、ブタンジオールビスチオプロピオネート、トリメチロールプロパントリスチオプロピオネート、トリメチロールプロパントリスチオグリコレート、ペンタエリスリトールテトラキスチオプロピオネート、ペンタエリスリトールテトラキスチオグリコレート、トリスヒドロキシエチルトリスチオプロピオネート、ジエチルチオキサントン、ジイソプロピルチオキサントン、下記化合物No.C1、トリメルカプトプロピオン酸トリス(2−ヒドロキシエチル)イソシアヌレート等の脂肪族多官能チオール化合物、昭和電工社製カレンズMT BD1、PE1、NR1等が挙げられる。 As the chain transfer agent or sensitizer, a sulfur atom-containing compound is generally used. For example, thioglycolic acid, thiomalic acid, thiosalicylic acid, 2-mercaptopropionic acid, 3-mercaptopropionic acid, 3-mercaptobutyric acid, N- (2-mercaptopropionyl) glycine, 2-mercaptonicotinic acid, 3- [N- ( 2-mercaptoethyl) carbamoyl] propionic acid, 3- [N- (2-mercaptoethyl) amino] propionic acid, N- (3-mercaptopropionyl) alanine, 2-mercaptoethanesulfonic acid, 3-mercaptopropanesulfonic acid, 4-mercaptobutanesulfonic acid, dodecyl (4-methylthio) phenyl ether, 2-mercaptoethanol, 3-mercapto-1,2-propanediol, 1-mercapto-2-propanol, 3-mercapto-2-butanol, mercaptophenol , 2-me Captoethylamine, 2-mercaptoimidazole, 2-mercaptobenzimidazole, 2-mercapto-3-pyridinol, 2-mercaptobenzothiazole, mercaptoacetic acid, trimethylolpropane tris (3-mercaptopropionate), pentaerythritol tetrakis (3- Mercapto compounds such as mercaptopropionate), disulfide compounds obtained by oxidizing the mercapto compounds, iodoacetic acid, iodopropionic acid, 2-iodoethanol, 2-iodoethanesulfonic acid, 3-iodopropanesulfonic acid, etc. Alkyl compound, trimethylolpropane tris (3-mercaptoisobutyrate), butanediol bis (3-mercaptoisobutyrate), hexanedithiol, decanedithiol, 1,4- Methyl mercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, trimethylolpropane tristhioglycolate, butanediol bisthiopropionate, trimethylolpropane tristhiopropionate , Trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate, trishydroxyethyltristhiopropionate, diethylthioxanthone, diisopropylthioxanthone, the following compound No. C1, aliphatic polyfunctional thiol compounds such as trimercaptopropionic acid tris (2-hydroxyethyl) isocyanurate, Showen Denko Karenz MT BD1, PE1, NR1, and the like.
上記界面活性剤としては、パーフルオロアルキルリン酸エステル、パーフルオロアルキルカルボン酸塩等のフッ素界面活性剤;高級脂肪酸アルカリ塩、アルキルスルホン酸塩、アルキル硫酸塩等のアニオン系界面活性剤;高級アミンハロゲン酸塩、第四級アンモニウム塩等のカチオン系界面活性剤;ポリエチレングリコールアルキルエーテル、ポリエチレングリコール脂肪酸エステル、ソルビタン脂肪酸エステル、脂肪酸モノグリセリド等の非イオン界面活性剤;両性界面活性剤;シリコーン系界面活性剤等の界面活性剤を用いることができ、これらは組み合わせて用いることもできる。 Examples of the surfactant include fluorine surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates; anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates; higher amines Cationic surfactants such as halogenates and quaternary ammonium salts; Nonionic surfactants such as polyethylene glycol alkyl ethers, polyethylene glycol fatty acid esters, sorbitan fatty acid esters, and fatty acid monoglycerides; amphoteric surfactants; silicone surfactants Surfactants such as agents can be used, and these can also be used in combination.
上記シランカップリング剤としては、例えば、アルケニル基を有するシランカップリング剤として、ビニルトリメトキシシラン、ビニルトリエトキシシラン、ビニルトリアセトキシシラン、ビニルトリス(2−メトキシエトキシ)シラン、ビニルメチルジメトキシシラン、オクテニルトリメトキシシラン、アリルトリメトキシシラン、p−スチリルトリメトキシシラン等が挙げられ、アクリル基を有するシランカップリング剤として、3−アクリロキシプロピルトリメトキシシラン、3−アクリロキシプロピルトリエトキシシラン等が挙げられ、メタクリル基を有するシランカップリング剤として、3−メタクリロキシプロピルメチルジメトキシシラン、3−メタクリロキシプロピルトリメトキシシラン、3−メタクリロキシプロピルメチルジエトキシシラン、3−メタクリロキシプロピルトリエトキシシラン、メタクリロキシオクチルトリメトキシシラン等が挙げられ、エポキシ基を有するシランカップリング剤として、2−(3,4−エポキシシクロヘキシル)エチルトリメトキシシラン、3−グリシドキシプロピルメチルジメトキシシラン、3−グリシドキシプロピルトリメトキシシラン、3−グリシドキシプロピルメチルジエトキシシラン、3−グリシドキシプロピルトリエトキシシラン、グリシドキシオクチルトリメトキシシラン等が挙げられ、アミノ基を有するシランカップリング剤として、N−2−(アミノエチル)−3−アミノプロピルメチルジメトキシシラン、N−2−(アミノエチル)−3−アミノプロピルトリメトキシシラン、3−アミノプロピルトリメトキシシラン、3−アミノプロピルトリエトキシシラン、3−トリエトキシシリル−N−(1,3−ジメチル−ブチリデン)プロピルアミン、N−フェニル−3−アミノプロピルトリメトキシシラン、N,N’−ビス[3−(トリメトキシシリル)プロピル]エチレンジアミン、N−(ビニルベンジル)−2−アミノエチル−3−アミノプロピルトリメトキシシランの塩酸塩等が挙げられ、イソシアヌレート基を有するシランカップリング剤として、トリス−(トリメトキシシリルプロピル)イソシアヌレートが挙げられ、メルカプト基を有するシランカップリング剤として、3−メルカプトプロピルメチルジメトキシシラン、3−メルカプトプロピルトリメトキシシラン、3−メルカプトプロピルトリエトキシシラン等が挙げられ、ウレイド基を有するシランカップリング剤として、3−ウレイドプロピルトリメトキシシラン、3−ウレイドプロピルトリエトキシシラン等が挙げられ、スルフィド基を有するシランカップリング剤として、ビス(トリエトキシシリルプロピル)テトラスルフィドが挙げられ、チオエステル基を有するシランカップリング剤として、3−オクタノイルチオ−1−プロピルトリエトキシシランが挙げられ、イソシアネート基を有するシランカップリング剤として、3−イソシアネートプロピルトリエトキシシラン、3−イソシアネートプロピルトリメトキシシラン等が挙げられる。 Examples of the silane coupling agent include alkenyl group-containing silane coupling agents such as vinyltrimethoxysilane, vinyltriethoxysilane, vinyltriacetoxysilane, vinyltris (2-methoxyethoxy) silane, vinylmethyldimethoxysilane, octene. Tenyltrimethoxysilane, allyltrimethoxysilane, p-styryltrimethoxysilane, and the like. Examples of the silane coupling agent having an acrylic group include 3-acryloxypropyltrimethoxysilane, 3-acryloxypropyltriethoxysilane, and the like. Examples of silane coupling agents having a methacryl group include 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, and 3-methacryloxypropylmethyl. Examples include ethoxysilane, 3-methacryloxypropyltriethoxysilane, methacryloxyoctyltrimethoxysilane, and the like. As a silane coupling agent having an epoxy group, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3- Examples include glycidoxypropylmethyldimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycidoxypropyltriethoxysilane, and glycidoxyoctyltrimethoxysilane. As a silane coupling agent having an amino group, N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, N-2- (aminoethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltrimethoxysilane Meto Sisilane, 3-aminopropyltriethoxysilane, 3-triethoxysilyl-N- (1,3-dimethyl-butylidene) propylamine, N-phenyl-3-aminopropyltrimethoxysilane, N, N′-bis [3 -(Trimethoxysilyl) propyl] ethylenediamine, N- (vinylbenzyl) -2-aminoethyl-3-aminopropyltrimethoxysilane hydrochloride, and the like. As the silane coupling agent having an isocyanurate group, tris- (Trimethoxysilylpropyl) isocyanurate is exemplified, and as a silane coupling agent having a mercapto group, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-mercaptopropyltriethoxysilane and the like are exemplified. Ureido group Examples of the silane coupling agent include 3-ureidopropyltrimethoxysilane and 3-ureidopropyltriethoxysilane, and examples of the silane coupling agent having a sulfide group include bis (triethoxysilylpropyl) tetrasulfide, Examples of the silane coupling agent having a thioester group include 3-octanoylthio-1-propyltriethoxysilane, and examples of the silane coupling agent having an isocyanate group include 3-isocyanatopropyltriethoxysilane, 3-isocyanatopropyltrimethoxysilane, and the like. Is mentioned.
上記シランカップリング剤としては、市販品が使用でき、その例を挙げると、ビニルトリメトキシシランとしては、信越化学工業(株)製のKBM−1003、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−171、東レ・ダウコーニング(株)製のZ−6300、旭化成ワッカーシリコーン(株)製のGENIOSIL XL10、日美商事株式会社製のサイラエースS210等が挙げられ、ビニルトリエトキシシランとしては、信越化学工業(株)製のKBE−1003、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−151、東レ・ダウコーニング(株)製のZ−6519、旭化成ワッカーシリコーン(株)製のGENIOSIL GF56、日美商事株式会社製のサイラエースS220等が挙げられ、ビニルトリアセトキシシランとしては、旭化成ワッカーシリコーン(株)製のGENIOSIL GF62が挙げられ、ビニルトリス(2−メトキシエトキシ)シランとしては、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−172が挙げられ、ビニルメチルジメトキシシランとしては、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−2171、旭化成ワッカーシリコーン(株)製のGENIOSIL XL12等が挙げられ、オクテニルトリメトキシシランとしては、信越化学工業(株)製のKBM−1083が挙げられ、アリルトリメトキシシランとしては、東レ・ダウコーニング(株)製のZ−6825が挙げられ、p−スチリルトリメトキシシランとしては、信越化学工業(株)製のKBM−1403が挙げられ、3−アクリロキシプロピルトリメトキシシランとしては、KBM−5103が挙げられ、3−メタクリロキシプロピルメチルジメトキシシランとしては、信越化学工業(株)製のKBM−502、東レ・ダウコーニング(株)製のZ−6033等が挙げられ、3−メタクリロキシプロピルトリメトキシシランとしては、信越化学工業(株)製のKBM−503、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−174、東レ・ダウコーニング(株)製のZ−6030、旭化成ワッカーシリコーン(株)製のGENIOSIL GF31、日美商事株式会社製のサイラエースS710等が挙げられ、3−メタクリロキシプロピルメチルジエトキシシランとしては、信越化学工業(株)製のKBE−502が挙げられ、3−メタクリロキシプロピルトリエトキシシランとしては、信越化学工業(株)製のKBE−503、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のY−9936が挙げられ、メタクリロキシオクチルトリメトキシシランとしては、信越化学工業(株)製のKBM−5803が挙げられ、2−(3,4−エポキシシクロヘキシル)エチルトリメトキシシランとしては、信越化学工業(株)製のKBM−303、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−186、東レ・ダウコーニング(株)製のZ−6043、日美商事株式会社製のサイラエースS530等が挙げられ、3−グリシドキシプロピルメチルジメトキシシランとしては、信越化学工業(株)製のKBM−402、東レ・ダウコーニング(株)製のZ−6044、日美商事株式会社製のサイラエースS520等が挙げられ、3−グリシドキシプロピルトリメトキシシランとしては、信越化学工業(株)製のKBM−403、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−187、東レ・ダウコーニング(株)製のZ−6040、旭化成ワッカーシリコーン(株)製のGENIOSIL GF80、日美商事株式会社製のサイラエースS510等が挙げられ、3−グリシドキシプロピルメチルジエトキシシランとしては、信越化学工業(株)製のKBE−402が挙げられ、3−グリシドキシプロピルトリエトキシシランとしては、信越化学工業(株)製のKBE−403、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1871、旭化成ワッカーシリコーン(株)製のGENIOSIL GF82等が挙げられ、グリシドキシオクチルトリメトキシシランとしては、信 越化学工業(株)製のKBM−4803が挙げられ、N−2−(アミノエチル)−3−アミノプロピルメチルジメトキシシランとしては、信越化学工業(株)製のKBM−602、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−2120、旭化成ワッカーシリコーン(株)製のGENIOSIL GF−95、日美商事株式会社製のサイラエースS310等が挙げられ、N−2−(アミノエチル)−3−アミノプロピルトリメトキシシランとしては、信越化学工業(株)製のKBM−603、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1120、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1122、東レ・ダウコーニング(株)製のZ−6020、東レ・ダウコーニング(株)製のZ−6094、旭化成ワッカーシリコーン(株)製のGENIOSIL GF−91、日美商事株式会社製のサイラエースS320等が挙げられ、3−アミノプロピルトリメトキシシランとしては、信越化学工業(株)製のKBM−903、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1110、東レ・ダウコーニング(株)製のZ−6610、日美商事株式会社製のサイラエースS360等が挙げられ、3−アミノプロピルトリエトキシシランとしては、KBE−903、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1100、東レ・ダウコーニング(株)製のZ−6011、日美商事株式会社製のサイラエースS330等が挙げられ、3−トリエトキシシリル−N−(1,3−ジメチル−ブチリデン)プロピルアミンとしては、KBE−9103、日美商事株式会社製のサイラエースS340等が挙げられ、N−フェニル−3−アミノプロピルトリメトキシシランとしては、信越化学工業(株)製のKBM−573、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のY−9669、東レ・ダウコーニング(株)製のZ−6883等が挙げられ、N,N’−ビス[3−(トリメトキシシリル)プロピル]エチレンジアミンとしては、日美商事株式会社製のサイラエースXS1003が挙げられ、N−(ビニルベンジル)−2−アミノエチル−3−アミノプロピルトリメトキシシランの塩酸塩としては、信越化学工業(株)製のKBM−575、東レ・ダウコーニング(株)製のZ−6032、日美商事株式会社製のサイラエースS350等が挙げられ、トリス−(トリメトキシシリルプロピル)イソシアヌレートとしては、信越化学工業(株)製のKBM−9659が挙げられ、3−メルカプトプロピルメチルジメトキシシランとしては、信越化学工業(株)製のKBM−802、東レ・ダウコーニング(株)製のZ−6852、3−メルカプトプロピルトリメトキシシランとしては、信越化学工業(株)製のKBM−803、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−189、東レ・ダウコーニング(株)製のZ−6062、日美商事株式会社製のサイラエースS810等が挙げられ、3−メルカプトプロピルトリエトキシシランとしては、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1891、東レ・ダウコーニング(株)製のZ−6911が挙げられ、3−ウレイドプロピルトリエトキシシランとしては、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1160が挙げられ、3−ウレイドプロピルトリアルコキシシランとしては、信越化学工業(株)製のKBE−585が挙げられ、ビス(トリエトキシシリルプロピル)テトラスルフィドとしては、信越化学工業(株)製のKBE−846が挙げられ、3−オクタノイルチオ−1−プロピルトリエトキシシランとしては、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−LINK599が挙げられ、3−イソシアネートプロピルトリエトキシシランとしては、信越化学工業(株)製のKBE−9007、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のA−1310等が挙げられ、3−イソシアネートプロピルトリメトキシシランとしては、モンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製のY−5187、旭化成ワッカーシリコーン(株)製のGENIOSIL GF40等が挙げられる。 Commercially available products can be used as the silane coupling agent. Examples of vinyltrimethoxysilane include KBM-1003 manufactured by Shin-Etsu Chemical Co., Ltd., Montive Performance Materials Japan GK. A-171, Z-6300 manufactured by Toray Dow Corning Co., Ltd., GENIOSIL XL10 manufactured by Asahi Kasei Wacker Silicone Co., Ltd., Silaace S210 manufactured by Nimi Shoji Co., Ltd., etc. KBE-1003 manufactured by Shin-Etsu Chemical Co., Ltd., A-151 manufactured by Montive Performance Materials Japan G.K., Z-6519 manufactured by Toray Dow Corning Co., Ltd., GENIOSIL manufactured by Asahi Kasei Wacker Silicone Co., Ltd. GF56, Sila Ace S2 manufactured by Nimi Shoji 20 and the like, and the vinyl triacetoxy silane includes GENIOSIL GF62 manufactured by Asahi Kasei Wacker Silicone Co., Ltd., and the vinyl tris (2-methoxyethoxy) silane is manufactured by Montive Performance Materials Japan GK. A-172 is exemplified, and examples of vinylmethyldimethoxysilane include A-2171 manufactured by Montive Performance Materials Japan GK, GENIOSIL XL12 manufactured by Asahi Kasei Wacker Silicone Co., Ltd., and octenyltrimethoxysilane. As such, KBE-1083 manufactured by Shin-Etsu Chemical Co., Ltd. can be mentioned. As allyltrimethoxysilane, Z-6825 manufactured by Toray Dow Corning Co., Ltd. can be mentioned. As p-styryltrimethoxysilane, Trust KBM-1403 manufactured by Koshi Chemical Industry Co., Ltd. is exemplified, KBM-5103 is exemplified as 3-acryloxypropyltrimethoxysilane, and Shin-Etsu Chemical Co., Ltd. is exemplified as 3-methacryloxypropylmethyldimethoxysilane. KBM-502 manufactured by Toray Dow Corning Co., Ltd., Z-6033 manufactured by Toray Dow Corning Co., Ltd. and the like, and 3-methacryloxypropyltrimethoxysilane include KBM-503 manufactured by Shin-Etsu Chemical Co., Ltd., Montive Performance A-174 manufactured by Materials Japan G.K., Z-6030 manufactured by Toray Dow Corning Co., Ltd., GENIOSIL GF31 manufactured by Asahi Kasei Wacker Silicone Co., Ltd., Sila Ace S710 manufactured by Himi Shoji Co., Ltd. As 3-methacryloxypropylmethyldiethoxysilane, Examples include KBE-502 manufactured by Chemical Industry Co., Ltd., and 3-methacryloxypropyltriethoxysilane includes KBE-503 manufactured by Shin-Etsu Chemical Co., Ltd., Y manufactured by Montive Performance Materials Japan LLC. -9936, KBM-5803 manufactured by Shin-Etsu Chemical Co., Ltd., as the methacryloxyoctyltrimethoxysilane, and Shin-Etsu Chemical Co., Ltd. as the 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane. KBM-303 manufactured by Co., Ltd., A-186 manufactured by Montive Performance Materials Japan G.K., Z-6043 manufactured by Toray Dow Corning Co., Ltd., and Sila Ace S530 manufactured by Nimi Shoji Co., Ltd. As 3-glycidoxypropylmethyldimethoxysilane, Shin-Etsu Chemical Examples include KBM-402 manufactured by Gaku Kogyo Co., Ltd., Z-6044 manufactured by Toray Dow Corning Co., Ltd., and Silaace S520 manufactured by Nimi Shoji Co., Ltd., and examples of 3-glycidoxypropyltrimethoxysilane include KBM-403 manufactured by Shin-Etsu Chemical Co., Ltd., A-187 manufactured by Montive Performance Materials Japan G.K., Z-6040 manufactured by Toray Dow Corning Co., Ltd., GENIOSIL manufactured by Asahi Kasei Wacker Silicone Co., Ltd. Examples include GF80, Silaace S510 manufactured by Nimi Shoji Co., Ltd., and 3-glycidoxypropylmethyldiethoxysilane includes KBE-402 manufactured by Shin-Etsu Chemical Co., Ltd., and 3-glycidoxypropyl. As triethoxysilane, KBE-403 manufactured by Shin-Etsu Chemical Co., Ltd., Montive Performance Examples include A-1871 manufactured by Month Materials Japan GK, GENIOSIL GF82 manufactured by Asahi Kasei Wacker Silicone Co., Ltd., and glycidoxyoctyltrimethoxysilane is KBM- manufactured by Shin-Etsu Chemical Co., Ltd. 4803, and as N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, KBM-602 manufactured by Shin-Etsu Chemical Co., Ltd., A- manufactured by Montive Performance Materials Japan GK 2120, GENIOSIL GF-95 manufactured by Asahi Kasei Wacker Silicone Co., Ltd., Silaace S310 manufactured by Nimi Shoji Co., Ltd., and the like. Examples of N-2- (aminoethyl) -3-aminopropyltrimethoxysilane include Shin-Etsu Chemical. KBM-603 manufactured by Kogyo Co., Ltd., Montive Performance A-1120 made by Tance Materials Japan GK, A-1122 made by Montive Performance Materials Japan GK, Z-6020 by Toray Dow Corning Co., Ltd., Toray Dow Corning Co., Ltd. Z-6094 manufactured by Asahi Kasei Wacker Silicone Co., Ltd., GENIOSIL GF-91, Silaace S320 manufactured by Nimi Shoji Co., Ltd., and the like. As 3-aminopropyltrimethoxysilane, Shin-Etsu Chemical Co., Ltd. KBM-903, Montive Performance Materials Japan GK A-1110, Toray Dow Corning Z-6610, Nimi Shoji Sila Ace S360, etc. As aminopropyltriethoxysilane, KBE-903, Montive -Performance Materials Japan GK A-1100, Toray Dow Corning Z-6011, Himi Shoji Silaace S330, etc., and 3-triethoxysilyl-N- Examples of (1,3-dimethyl-butylidene) propylamine include KBE-9103, Silaace S340 manufactured by Nimi Shoji Co., Ltd., and N-phenyl-3-aminopropyltrimethoxysilane includes Shin-Etsu Chemical ( KBM-573 manufactured by Co., Ltd., Y-9669 manufactured by Montive Performance Materials Japan GK, Z-6883 manufactured by Toray Dow Corning Co., Ltd., and the like, N, N′-bis [3- (Trimethoxysilyl) propyl] ethylenediamine includes Sila Ace XS10 manufactured by Nimi Shoji Co., Ltd. As the hydrochloride of N- (vinylbenzyl) -2-aminoethyl-3-aminopropyltrimethoxysilane, KBM-575 manufactured by Shin-Etsu Chemical Co., Ltd., manufactured by Toray Dow Corning Co., Ltd. Z-6032, Silaace S350 manufactured by Nimi Shoji Co., Ltd., and tris- (trimethoxysilylpropyl) isocyanurate include KBM-9659 manufactured by Shin-Etsu Chemical Co., Ltd., and 3-mercapto As propylmethyldimethoxysilane, KBE-802 manufactured by Shin-Etsu Chemical Co., Ltd., Z-6852 manufactured by Toray Dow Corning Co., Ltd., and 3-mercaptopropyltrimethoxysilane manufactured by Shin-Etsu Chemical Co., Ltd. KBM-803, Montive Performance Materials Japan GK A-189, Toray Da Examples include Z-6062 manufactured by Uconing Corporation, Silaace S810 manufactured by Nimi Shoji Co., Ltd., and 3-mercaptopropyltriethoxysilane is A-1891 manufactured by Montive Performance Materials Japan GK. , Z-6911 manufactured by Toray Dow Corning Co., Ltd. is exemplified, and 3-ureidopropyltriethoxysilane includes A-1160 manufactured by Montive Performance Materials Japan GK, and 3-ureidopropyl Examples of the trialkoxysilane include KBE-585 manufactured by Shin-Etsu Chemical Co., Ltd., and examples of bis (triethoxysilylpropyl) tetrasulfide include KBE-846 manufactured by Shin-Etsu Chemical Co., Ltd. Octanoylthio-1-propyltriethoxysilane Is A-LINK599 manufactured by Montive Performance Materials Japan GK, and as 3-isocyanatopropyltriethoxysilane, KBE-9007 manufactured by Shin-Etsu Chemical Co., Ltd., Montive Performance Materials Examples include A-1310 manufactured by Japan Godo Kaisha. Examples of 3-isocyanatepropyltrimethoxysilane include Y-5187 manufactured by Montive Performance Materials Japan Godo Kaisha, GENIOSIL GF40 manufactured by Asahi Kasei Wacker Silicone Co., Ltd. Is mentioned.
これらシランカップリング剤の中でも、メタクリロイル基、エポキシ基又はイソシアネート基を有するシランカップリング剤が好適に用いられ、例えば、信越化学工業(株)製の、KBM−502、KBE−403、KBE−9007等が挙げられる。 Among these silane coupling agents, silane coupling agents having a methacryloyl group, an epoxy group or an isocyanate group are preferably used. For example, KBM-502, KBE-403, KBE-9007 manufactured by Shin-Etsu Chemical Co., Ltd. Etc.
上記メラミン化合物としては、(ポリ)メチロールメラミン、(ポリ)メチロールグリコールウリル、(ポリ)メチロールベンゾグアナミン、(ポリ)メチロールウレア等の窒素化合物中の活性メチロール基(CH2OH基)の全部又は一部(少なくとも2つ)がアルキルエーテル化された化合物等を挙げることができる。
ここで、アルキルエーテルを構成するアルキル基としては、メチル基、エチル基又はブチル基が挙げられ、互いに同一である場合があり、異なる場合もある。また、アルキルエーテル化されていないメチロール基は、一分子内で自己縮合している場合があり、二分子間で縮合して、その結果オリゴマー成分が形成されている場合もある。Examples of the melamine compound include all or part of active methylol groups (CH 2 OH groups) in nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea. Examples include compounds in which (at least two) are alkyl etherified.
Here, examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, and a butyl group, and they may be the same or different. In addition, methylol groups that are not alkyl etherified may be self-condensed within one molecule, and may be condensed between two molecules, resulting in the formation of an oligomer component.
具体的には、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン、テトラメトキシメチルグリコールウリル、テトラブトキシメチルグリコールウリル等を用いることができる。
これらの中でも、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン等のアルキルエーテル化されたメラミンが好ましい。Specifically, hexamethoxymethyl melamine, hexabutoxymethyl melamine, tetramethoxymethyl glycoluril, tetrabutoxymethyl glycoluril and the like can be used.
Among these, alkyl etherified melamines such as hexamethoxymethyl melamine and hexabutoxymethyl melamine are preferable.
本発明の感光性組成物は、スピンコーター、ロールコーター、バーコーター、ダイコーター、カーテンコーター、各種の印刷、浸漬等の公知の手段で、ソーダガラス、石英ガラス、半導体基板、金属、紙、プラスチック等の支持基体上に適用することができる。また、一旦フィルム等の支持基体上に施した後、他の支持基体上に転写することもでき、その適用方法に制限はない。 The photosensitive composition of the present invention is a known method such as spin coater, roll coater, bar coater, die coater, curtain coater, various printing, dipping, soda glass, quartz glass, semiconductor substrate, metal, paper, plastic. It can be applied on a supporting substrate such as. Moreover, after once applying on support bases, such as a film, it can also transfer on another support base | substrate, There is no restriction | limiting in the application method.
また、本発明の感光性組成物を硬化させる際に用いられるエネルギー線の光源としては、超高圧水銀ランプ、高圧水銀ランプ、中圧水銀ランプ、低圧水銀ランプ、水銀蒸気アーク灯、キセノンアーク灯、カーボンアーク灯、メタルハライドランプ、蛍光灯、タングステンランプ、エキシマーランプ、殺菌灯、発光ダイオード、CRT光源等から得られる2000オングストロームから7000オングストロームの波長を有する電磁波エネルギーや電子線、X線、放射線等の高エネルギー線を利用することができるが、好ましくは、波長300〜450nmの光を発光する超高圧水銀ランプ、水銀蒸気アーク灯、カーボンアーク灯、キセノンアーク灯等が挙げられる。 Further, as an energy ray light source used for curing the photosensitive composition of the present invention, an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a medium pressure mercury lamp, a low pressure mercury lamp, a mercury vapor arc lamp, a xenon arc lamp, High electromagnetic wave energy, electron beam, X-ray, radiation, etc. having a wavelength of 2000 angstrom to 7000 angstrom obtained from carbon arc lamp, metal halide lamp, fluorescent lamp, tungsten lamp, excimer lamp, germicidal lamp, light emitting diode, CRT light source, etc. Although energy rays can be used, preferably, an ultra-high pressure mercury lamp, a mercury vapor arc lamp, a carbon arc lamp, a xenon arc lamp, or the like that emits light having a wavelength of 300 to 450 nm.
更に、露光光源にレーザー光を用いることにより、マスクを用いずに、コンピューター等のデジタル情報から直接画像を形成するレーザー直接描画法が、生産性のみならず、解像性や位置精度等の向上も図れることから有用であり、そのレーザー光としては、340〜430nmの波長の光が好適に使用されるが、エキシマーレーザー、窒素レーザー、アルゴンイオンレーザー、ヘリウムカドミウムレーザー、ヘリウムネオンレーザー、クリプトンイオンレーザー、各種半導体レーザー及びYAGレーザー等の可視から赤外領域の光を発するものも用いられる。これらのレーザーを使用する場合には、可視から赤外の当該領域を吸収する増感色素が加えられる。 Furthermore, by using laser light as the exposure light source, the laser direct drawing method that directly forms an image from digital information such as a computer without using a mask improves not only productivity but also resolution and positional accuracy. As the laser light, light having a wavelength of 340 to 430 nm is preferably used, but excimer laser, nitrogen laser, argon ion laser, helium cadmium laser, helium neon laser, krypton ion laser. In addition, lasers that emit light in the visible to infrared region, such as various semiconductor lasers and YAG lasers, are also used. When these lasers are used, a sensitizing dye that absorbs the region from visible to infrared is added.
また、本発明の感光性組成物は、ハーフトーンマスクを使用した段差や高さの異なるパターンの作成にも使用できる。 Moreover, the photosensitive composition of this invention can be used also for preparation of the pattern from which the level | step difference and height which use a halftone mask differ.
本発明の感光性組成物は、光硬化性塗料又はワニス;光硬化性接着剤;プリント基板;カラーテレビ、PCモニタ、携帯情報端末、デジタルカメラ等のカラー表示の液晶表示素子におけるカラーフィルター;CCDイメージセンサのカラーフィルター;プラズマ表示パネル用の電極材料;粉末コーティング;印刷インク;印刷版;接着剤;歯科用組成物;ゲルコート;電子工学用のフォトレジスト;電気メッキレジスト;エッチングレジスト;ドライフィルム;はんだレジスト;種々の表示用途用のカラーフィルターを製造するための或いはプラズマ表示パネル、電気発光表示装置、及びLCDの製造工程において構造を形成するためのレジスト;電気及び電子部品を封入するための組成物;ソルダーレジスト;磁気記録材料;微小機械部品;導波路;光スイッチ;めっき用マスク;エッチングマスク;カラー試験系;ガラス繊維ケーブルコーティング;スクリーン印刷用ステンシル;ステレオリトグラフィによって三次元物体を製造するための材料;ホログラフィ記録用材料;画像記録材料;微細電子回路;脱色材料;画像記録材料のための脱色材料;マイクロカプセルを使用する画像記録材料用の脱色材料;印刷配線板用フォトレジスト材料;UV及び可視レーザー直接画像系用のフォトレジスト材料;プリント回路基板の逐次積層における誘電体層形成に使用するフォトレジスト材料又は保護膜等の各種の用途に使用することができ、その用途に特に制限はない。 The photosensitive composition of the present invention comprises a photocurable paint or varnish; a photocurable adhesive; a printed circuit board; a color filter in a color display liquid crystal display element such as a color television, a PC monitor, a personal digital assistant, a digital camera; Color filter of image sensor; Electrode material for plasma display panel; Powder coating; Printing ink; Printing plate; Adhesive; Dental composition; Gel coat; Photoresist for electronics; Electroplating resist; Solder resists; resists for manufacturing color filters for various display applications or for forming structures in the manufacturing process of plasma display panels, electroluminescent display devices, and LCDs; compositions for encapsulating electrical and electronic components Materials; solder resists; magnetic recording materials; micromechanical parts Optical switch; Plating mask; Etching mask; Color test system; Glass fiber cable coating; Screen printing stencil; Material for producing three-dimensional objects by stereolithography; Holographic recording material; Image recording material; Decolorization material; Decolorization material for image recording material; Decolorization material for image recording material using microcapsules; Photoresist material for printed wiring board; Photoresist material for UV and visible laser direct image system; It can be used for various applications such as a photoresist material or a protective film used for forming a dielectric layer in the sequential lamination of printed circuit boards, and the application is not particularly limited.
また本発明の感光性組成物は、液晶表示パネル用のスペーサーを形成する目的及び垂直配向型液晶表示素子用突起を形成する目的で使用することもできる。特に垂直配向型液晶表示素子用の突起とスペーサーを同時に形成するための感光性組成物として有用である。 The photosensitive composition of the present invention can also be used for the purpose of forming spacers for liquid crystal display panels and for forming protrusions for vertical alignment type liquid crystal display elements. In particular, it is useful as a photosensitive composition for simultaneously forming protrusions and spacers for a vertical alignment type liquid crystal display element.
上記の液晶表示パネル用スペーサーは、(1)本発明の感光性組成物の塗膜を基板上に形成する工程、(2)該塗膜に所定のパターン形状を有するマスクを介して放射線を照射する工程、(3)露光後のベーク工程、(4)露光後の該被膜を現像する工程、(5)現像後の該被膜を加熱する工程により好ましく形成される。 The spacer for a liquid crystal display panel includes (1) a step of forming a coating film of the photosensitive composition of the present invention on a substrate, and (2) irradiation of the coating film with radiation through a mask having a predetermined pattern shape. (3) a baking step after exposure, (4) a step of developing the coating after exposure, and (5) a step of heating the coating after development.
撥インク剤を添加した本発明の(着色)感光性組成物は、インクジェット方式用隔壁形成樹脂組成物として有用であり、該組成物はカラーフィルター用として用いられ、特にプロファイル角が50°以上であるインクジェット方式カラーフィルター用隔壁に好ましく用いられる。該撥インク剤としては、フッ素系界面活性剤及びフッ素系界面活性剤からなる組成物が好適に用いられる。 The (colored) photosensitive composition of the present invention to which an ink repellent agent is added is useful as a partition-forming resin composition for an inkjet system, and the composition is used for a color filter, and particularly has a profile angle of 50 ° or more. It is preferably used for a partition for an inkjet color filter. As the ink repellent agent, a composition comprising a fluorosurfactant and a fluorosurfactant is preferably used.
本発明の感光性組成物から形成された隔壁が被転写体上を区画し、区画された被転写体上の凹部にインクジェット法により液滴を付与して画像領域を形成する方法により光学素子が製造される。この際、上記液滴が着色剤を含有し、上記画像領域が着色されているのが好ましく、基板上に複数の着色領域からなる画素群と上記画素群の各着色領域を離隔する隔壁を少なくとも有し、上記の光学素子の製造方法により作製された光学素子が好ましく用いられる。 An optical element is formed by a method in which a partition formed from the photosensitive composition of the present invention partitions an image to be transferred, and droplets are applied to the recessed portions on the partitioned image to be transferred by an ink jet method to form an image region. Manufactured. At this time, it is preferable that the droplet contains a colorant and the image region is colored, and a pixel group composed of a plurality of colored regions and at least a partition wall separating the colored regions of the pixel group on the substrate. And an optical element produced by the above-described optical element manufacturing method is preferably used.
本発明の感光性組成物は、保護膜又は絶縁膜用組成物としても用いられ、紫外線吸収剤、アルキル化変性メラミン及び/若しくはアクリル変性メラミン、分子中にアルコール性水酸基を含有する1若しくは2官能の(メタ)アクリレートモノマー、並びに/又はシリカゾルを含有することができる。 The photosensitive composition of the present invention is also used as a composition for a protective film or an insulating film, and is a monofunctional or bifunctional compound containing an ultraviolet absorber, an alkylated modified melamine and / or an acrylic modified melamine, and an alcoholic hydroxyl group in the molecule. (Meth) acrylate monomers and / or silica sols.
上記保護膜、絶縁膜用の感光性組成物としては、例えば、
(I)ジオ−ル化合物と多価カルボン酸類とを反応させて得られ、重量平均分子量が2,000〜40,000、酸価が50〜200mgKOH/gであるカルボキシル基含有樹脂、
(II)光重合可能なエチレン性不飽和結合を一分子中に少なくとも1つ以上含む不飽和化合物、
(III)エポキシ化合物、及び
(IV)光重合開始剤成分、を主成分とする樹脂組成物であって、
(I)成分と(II)成分の合計100重量部に対して、(III)成分が10〜40重量部、(IV)成分が0.01〜2.0重量部含有され、且つ、(IV)成分の光重合開始剤成分として本発明の光重合開始剤組成物を用いた樹脂組成物が使用される。As a photosensitive composition for the protective film and insulating film, for example,
(I) a carboxyl group-containing resin obtained by reacting a diol compound and a polyvalent carboxylic acid, having a weight average molecular weight of 2,000 to 40,000 and an acid value of 50 to 200 mgKOH / g,
(II) an unsaturated compound containing at least one photopolymerizable ethylenically unsaturated bond in one molecule,
(III) an epoxy compound, and (IV) a photopolymerization initiator component, a resin composition comprising as a main component,
The component (III) is contained in an amount of 10 to 40 parts by weight, the component (IV) is contained in an amount of 0.01 to 2.0 parts by weight, and (IV) with respect to a total of 100 parts by weight of the component (I) and the component (II). The resin composition using the photopolymerization initiator composition of the present invention is used as the photopolymerization initiator component.
上記絶縁膜は、剥離可能な支持基材上に絶縁樹脂層が設けられた積層体における該絶縁樹脂層に用いられ、該積層体は、アルカリ水溶液による現像が可能なものであり、絶縁樹脂層の膜厚が10〜100μmであることが好ましい。 The insulating film is used for the insulating resin layer in a laminate in which an insulating resin layer is provided on a peelable support substrate, and the laminate can be developed with an alkaline aqueous solution. The film thickness is preferably 10 to 100 μm.
本発明の感光性組成物は、無機材料(無機化合物)を含有させることで、感光性ペースト組成物として用いることができる。該感光性ペースト組成物は、プラズマディスプレイパネルの隔壁パターン、誘電体パターン、電極パターン及びブラックマトリックスパターン等の焼成物パターンを形成するために用いられる。 The photosensitive composition of the present invention can be used as a photosensitive paste composition by containing an inorganic material (inorganic compound). The photosensitive paste composition is used to form a fired product pattern such as a partition pattern, a dielectric pattern, an electrode pattern, and a black matrix pattern of a plasma display panel.
以下、実施例及び比較例を挙げて本発明を更に詳細に説明するが、本発明はこれらの実施例等によって限定されるものではない。なお、以下の実施例及び比較例において、%は、特に記載がない限り、質量基準である。 EXAMPLES Hereinafter, although an Example and a comparative example are given and this invention is demonstrated further in detail, this invention is not limited by these Examples etc. In the following examples and comparative examples,% is based on mass unless otherwise specified.
〔実施例1〕
表1記載の配合比で、光重合開始剤組成物No.1を調製した。(A)成分及び(B)成分は、下記に示すものを使用した。
さらに、SPC−1000(アクリル樹脂;昭和電工社製)55.46質量部、アロニックスM−450(多官能アクリレート;東亜合成社製)12.91質量部、KBE−403(シランカップリング剤;信越シリコーン社製)0.58質量部、FZ−2122(界面活性剤;日本ユニカー社製)のシクロヘキサノン1%溶液3.23質量部及びプロピレングリコール−1−モノメチルエーテル−2−アセテート27.48質量部を混合し、光重合開始剤組成物No.1の0.34質量部を配合し合計量が100質量部となるようにし、この混合液をよく撹拌し、本発明の感光性組成物であるアルカリ現像性感光性樹脂組成物No.1を得た。
得られたアルカリ現像性感光性樹脂組成物No.1について、下記感度評価方法で感度を評価し、下記解像度評価方法で解像度を評価した。それぞれの結果を表1に示す。[Example 1]
The photopolymerization initiator composition No. 1 with the compounding ratio shown in Table 1. 1 was prepared. As the component (A) and the component (B), those shown below were used.
Furthermore, SPC-1000 (acrylic resin; manufactured by Showa Denko KK) 55.46 parts by mass, Aronix M-450 (polyfunctional acrylate; manufactured by Toagosei Co., Ltd.) 12.91 parts by mass, KBE-403 (silane coupling agent: Shin-Etsu (Manufactured by Silicone) 0.58 parts by mass, 3.23 parts by mass of a 1% cyclohexanone solution of FZ-2122 (surfactant; manufactured by Nihon Unicar) and 27.48 parts by mass of propylene glycol-1-monomethyl ether-2-acetate And photopolymerization initiator composition No. 1 was mixed. 1, 0.34 parts by mass is added so that the total amount becomes 100 parts by mass, and this mixed solution is stirred well, and the alkali-developable photosensitive resin composition No. 1 which is the photosensitive composition of the present invention. 1 was obtained.
The obtained alkali-developable photosensitive resin composition No. For 1, the sensitivity was evaluated by the following sensitivity evaluation method, and the resolution was evaluated by the following resolution evaluation method. The results are shown in Table 1.
〔実施例2〜13〕
表1記載の配合比で、光重合開始剤組成物No.2〜No.13を調製した。(A)成分及び(B)成分は、下記に示すものを使用した。さらに、実施例1で使用した光重合開始剤組成物No.1の代わりに、これら光重合開始剤組成物を使用した以外は、実施例1と同様にしてアルカリ現像性感光性樹脂組成物No.2〜No.13を得た。得られたアルカリ現像性感光性樹脂組成物について、下記感度評価方法で感度を評価し、下記解像度評価方法で解像度を評価した。それぞれの結果を表1に示す。[Examples 2 to 13]
The photopolymerization initiator composition No. 1 with the compounding ratio shown in Table 1. 2-No. 13 was prepared. As the component (A) and the component (B), those shown below were used. Furthermore, the photopolymerization initiator composition No. used in Example 1 was used. 1 except that these photopolymerization initiator compositions were used in the same manner as in Example 1 except that the alkali-developable photosensitive resin composition No. 1 was used. 2-No. 13 was obtained. About the obtained alkali-developable photosensitive resin composition, the sensitivity was evaluated by the following sensitivity evaluation method, and the resolution was evaluated by the following resolution evaluation method. The results are shown in Table 1.
〔比較例1〜15〕
表2記載の配合比で、比較光重合開始剤組成物No.1〜No.15を調製した。比較光重合開始剤−1及び−2として、下記に示すものを使用した。
さらに、実施例1で使用した光重合開始剤組成物No.1の代わりに、これら比較光重合開始剤組成物を使用した以外は、実施例1と同様にして比較アルカリ現像性感光性樹脂組成物No.1〜No.15を得た。得られたアルカリ現像性感光性樹脂組成物について、下記感度評価方法で感度を評価し、下記解像度評価方法で解像度を評価した。それぞれの結果を表2に示す。[Comparative Examples 1-15]
Comparative photopolymerization initiator composition No. with the compounding ratio shown in Table 2. 1-No. 15 was prepared. As comparative photopolymerization initiators -1 and -2, those shown below were used.
Furthermore, the photopolymerization initiator composition No. used in Example 1 was used. The comparative alkali-developable photosensitive resin composition No. 1 was used in the same manner as in Example 1 except that these comparative photopolymerization initiator compositions were used in place of 1. 1-No. 15 was obtained. About the obtained alkali-developable photosensitive resin composition, the sensitivity was evaluated by the following sensitivity evaluation method, and the resolution was evaluated by the following resolution evaluation method. The results are shown in Table 2.
〔(A)成分〕
(A)成分として、下記化合物No.1、化合物No.6及び化合物No.11を使用した。[Component (A)]
As the component (A), the following compound No. 1, compound no. 6 and compound no. 11 was used.
〔(B)成分〕
(B)成分として、下記化合物No.13、化合物No.15及び化合物No.21を使用した。[(B) component]
As the component (B), the following compound No. 13, Compound No. 15 and Compound No. 21 was used.
〔比較光重合開始剤〕
下記比較光重合開始剤−1及び比較光重合開始剤−2を比較例で使用した。[Comparative photopolymerization initiator]
The following comparative photopolymerization initiator-1 and comparative photopolymerization initiator-2 were used in the comparative examples.
<感度評価方法>
得られたアルカリ現像性感光性樹脂組成物及び比較アルカリ現像性感光性樹脂組成物の感度評価を以下のようにして行った。
即ち、ガラス基板上にアルカリ現像性感光性樹脂組成物をスピンコートし、ホットプレートを用いて、90℃で90秒間プリベークを行い、光源として高圧水銀ランプを用いてマスクを介して露光した。現像液として2.5質量%炭酸ナトリウム水溶液を用い現像後、よく水洗し、オーブンを用いて、230℃で30分ポストベークを行い、パターンを定着させた。40mJの露光量に対するパターンを電子顕微鏡で観察し、マスク開口20μmの線幅を測定した。線幅が21μm以上をA、20〜21μmをB、19〜20μmをC、19μm以下をDとした。Aが最も感度に優れ、次いでB、Cとなり、Dが最も感度に劣ることになる。<Sensitivity evaluation method>
The sensitivity evaluation of the obtained alkali-developable photosensitive resin composition and comparative alkali-developable photosensitive resin composition was performed as follows.
That is, the alkali-developable photosensitive resin composition was spin coated on a glass substrate, prebaked at 90 ° C. for 90 seconds using a hot plate, and exposed through a mask using a high-pressure mercury lamp as a light source. After developing using a 2.5% by mass aqueous sodium carbonate solution as a developing solution, it was washed thoroughly with water and post-baked at 230 ° C. for 30 minutes using an oven to fix the pattern. The pattern for an exposure amount of 40 mJ was observed with an electron microscope, and the line width of the mask opening of 20 μm was measured. The line width was 21 μm or more as A, 20 to 21 μm as B, 19 to 20 μm as C, and 19 μm or less as D. A has the highest sensitivity, then B and C, and D has the lowest sensitivity.
<解像度評価方法>
得られたアルカリ現像性感光性樹脂組成物及び比較アルカリ現像性感光性樹脂組成物の解像度評価を以下のようにして行った。
即ち、ガラス基板上にアルカリ現像性感光性樹脂組成物をスピンコートし、ホットプレートを用いて、90℃で90秒間プリベークを行い、光源として高圧水銀ランプを用いてマスクを介して露光した。現像液として2.5質量%炭酸ナトリウム水溶液を用い現像後、よく水洗し、オーブンを用いて、230℃で30分ポストベークを行い、パターンを定着させた。残膜感度(残膜率75%)を合わせたときのパターンを電子顕微鏡で観察し、マスク開口20μmの線幅を測定した。マスク開口と線幅の差が0.5μm以下をA、差が0.5〜1.0μmの差をB、1.0〜2.0μmの差をC、2.0μm以上をDとした。Aが最も解像度に優れ、次いでB、Cとなり、Dが最も解像度に劣ることになる。<Resolution evaluation method>
The resolution evaluation of the obtained alkali-developable photosensitive resin composition and comparative alkali-developable photosensitive resin composition was performed as follows.
That is, the alkali-developable photosensitive resin composition was spin coated on a glass substrate, prebaked at 90 ° C. for 90 seconds using a hot plate, and exposed through a mask using a high-pressure mercury lamp as a light source. After developing using a 2.5% by mass aqueous sodium carbonate solution as a developing solution, it was washed thoroughly with water and post-baked at 230 ° C. for 30 minutes using an oven to fix the pattern. The pattern when the remaining film sensitivity (remaining film ratio 75%) was combined was observed with an electron microscope, and the line width of the mask opening 20 μm was measured. A difference between the mask opening and the line width is 0.5 μm or less, A is a difference between 0.5 and 1.0 μm, B is a difference between 1.0 and 2.0 μm, and D is 2.0 μm or more. A has the highest resolution, then B and C, and D has the lowest resolution.
本発明によれば、優れた感度と解像度を感光性組成物に付与することができる光重合開始剤組成物を提供することができる。また、本発明によれば、感度と解像度に優れた感光性組成物を提供することができる。 According to the present invention, a photopolymerization initiator composition capable of imparting excellent sensitivity and resolution to a photosensitive composition can be provided. Moreover, according to this invention, the photosensitive composition excellent in the sensitivity and the resolution can be provided.
Claims (7)
(A)成分:下記一般式(3)で表されるエーテル構造を有することを特徴とする下記一般式(1−1)〜(1−3)で表されるオキシムエステル化合物の一種以上からなる光重合開始剤。
R3、R4及びR5は、それぞれ独立に、炭素原子数1〜20のアルキル基、炭素原子数1〜20のアルコキシ基、炭素原子数6〜30のアリール基、炭素原子数6〜30のアリールオキシ基、炭素原子数7〜30のアラルキル基、炭素原子数2〜20の複素環基、シアノ基又はハロゲン原子を表し、アルキル基、アルコキシ基、アリール基、アリールオキシ基、アラルキル基及び複素環基の水素原子は、更にOR14、COR14、SR14、NR15R16、−NCOR15−OCOR16、CN、ハロゲン原子、−CR14=CR15R16又は−CO−CR14=CR15R16で置換されている場合があり、R14、R15及びR16は、それぞれ独立に、水素原子、炭素原子数1〜20のアルキル基、炭素原子数6〜30のアリール基、炭素原子数7〜30のアラルキル基又は炭素原子数2〜20の複素環基を表し、上記R3、R4、R5、R14、R15及びR16で表される置換基のアルキレン部分は、不飽和結合、エーテル結合、チオエーテル結合、エステル結合、チオエステル結合、アミド結合又はウレタン結合により1〜5回中断されている場合があり、上記置換基のアルキル部分は分岐側鎖がある場合があり、環状アルキルである場合があり、上記置換基のアルキル末端は不飽和結合である場合があり、a、b及びdは、それぞれ独立に、0〜3の整数である。
A1は、上記一般式(3)で表され、一般式(3)中、R7、R8及びR9は、それぞれ独立に、水素原子又は炭素原子数1〜20のアルキル基を表し、アルキル基の水素原子はハロゲン原子で置換されている場合があり、アルキル基のアルキレン部分のメチレン基は、不飽和結合、エーテル結合、チオエーテル結合、エステル結合、チオエステル結合、アミド結合又はウレタン結合により1〜5回中断されている場合があり、アルキル部分は分岐側鎖がある場合があり、環状アルキルである場合があり、アルキル末端は不飽和結合である場合があり、R7とR8は、一緒になって環を形成している場合がある。
(B)成分:下記一般式(4)のシクロアルキル構造を有することを特徴とする下記一般式(2−1)又は(2−2)で表されるオキシムエステル化合物の一種以上を含有する光重合開始剤。
R23及びR24は、それぞれ独立に、炭素原子数1〜20のアルキル基、炭素原子数1〜20のアルコキシ基、炭素原子数6〜30のアリール基、炭素原子数6〜30のアリールオキシ基、炭素原子数7〜30のアラルキル基、炭素原子数2〜20の複素環基、シアノ基又はハロゲン原子を表し、アルキル基、アルコキシ基、アリール基、アリールオキシ基、アラルキル基及び複素環基の水素原子は、更にOR34、COR34、SR34、NR35R36、−NCOR35−OCOR36、CN、ハロゲン原子、−CR34=CR35R36又は−CO−CR34=CR35R36で置換されている場合があり、R34、R35及びR36は、それぞれ独立に、水素原子、炭素原子数1〜20のアルキル基、炭素原子数6〜30のアリール基、炭素原子数7〜30のアラルキル基又は炭素原子数2〜20の複素環基を表し、上記R23、R24、R34、R35及びR36で表される置換基のアルキレン部分は、不飽和結合、エーテル結合、チオエーテル結合、エステル結合、チオエステル結合、アミド結合又はウレタン結合により1〜5回中断されている場合があり、上記置換基のアルキル部分は分岐側鎖がある場合があり、環状アルキルである場合があり、上記置換基のアルキル末端は不飽和結合である場合があり、u及びvは、それぞれ独立に、0〜3の整数である。
Arは下記の構造から選ばれるアリール基又は複素環基を表し、
X1は、直接結合又はカルボニル基を表し、
G1は、一般式(4)の基を表し、一般式(4)中、nは1〜5の整数であり、mは1〜6の整数である。A photopolymerization initiator composition containing 1 to 99 parts by mass of the following component (A) and 1 to 99 parts by mass of the following component (B) (however, the total of the component (A) and the component (B) is 100 parts by mass).
Component (A): It comprises one or more oxime ester compounds represented by the following general formulas (1-1) to (1-3) having an ether structure represented by the following general formula (3). Photopolymerization initiator.
R 3 , R 4 and R 5 are each independently an alkyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or 6 to 30 carbon atoms. An aryloxy group, an aralkyl group having 7 to 30 carbon atoms, a heterocyclic group having 2 to 20 carbon atoms, a cyano group or a halogen atom, an alkyl group, an alkoxy group, an aryl group, an aryloxy group, an aralkyl group, and hydrogen atoms of the heterocyclic group, further oR 14, COR 14, SR 14 , NR 15 R 16, -NCOR 15 -OCOR 16, CN, halogen atom, -CR 14 = CR 15 R 16 or -CO-CR 14 = CR 15 R 16 may be substituted, and R 14 , R 15 and R 16 are each independently a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, 7-30 carbon atoms The alkylene part of the substituent represented by R 3 , R 4 , R 5 , R 14 , R 15 and R 16 is an unsaturated bond, It may be interrupted 1 to 5 times by an ether bond, thioether bond, ester bond, thioester bond, amide bond or urethane bond, and the alkyl part of the above substituent may have a branched side chain and is a cyclic alkyl In some cases, the alkyl terminal of the substituent may be an unsaturated bond, and a, b and d are each independently an integer of 0 to 3.
A 1 is represented by the general formula (3), and in the general formula (3), R 7 , R 8 and R 9 each independently represent a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, The hydrogen atom of the alkyl group may be substituted with a halogen atom, and the methylene group of the alkylene part of the alkyl group is 1 by an unsaturated bond, an ether bond, a thioether bond, an ester bond, a thioester bond, an amide bond or a urethane bond. May be interrupted ˜5 times, the alkyl moiety may have branched side chains, may be cyclic alkyl, the alkyl terminus may be an unsaturated bond, R 7 and R 8 are May form a ring together.
Component (B): Light containing at least one oxime ester compound represented by the following general formula (2-1) or (2-2), which has a cycloalkyl structure represented by the following general formula (4) Polymerization initiator.
R 23 and R 24 are each independently an alkyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or an aryloxy having 6 to 30 carbon atoms. Group, an aralkyl group having 7 to 30 carbon atoms, a heterocyclic group having 2 to 20 carbon atoms, a cyano group or a halogen atom, an alkyl group, an alkoxy group, an aryl group, an aryloxy group, an aralkyl group and a heterocyclic group The hydrogen atom of is further OR 34 , COR 34 , SR 34 , NR 35 R 36 , —NCOR 35 —OCOR 36 , CN, halogen atom, —CR 34 ═CR 35 R 36 or —CO—CR 34 ═CR 35 R may have been replaced by 36, R 34, R 35 and R 36 each independently represent a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, aryl group having 6 to 30 carbon atoms, carbon atoms 7-30 a It represents alkyl group, or a heterocyclic group having 2 to 20 carbon atoms, alkylene moiety of the substituents represented by R 23, R 24, R 34 , R 35 and R 36, unsaturated bond, an ether bond, a thioether May be interrupted 1 to 5 times by a bond, ester bond, thioester bond, amide bond or urethane bond, the alkyl part of the substituent may have a branched side chain, and may be a cyclic alkyl, The alkyl terminal of the substituent may be an unsaturated bond, and u and v are each independently an integer of 0 to 3.
Ar represents an aryl group or a heterocyclic group selected from the following structures,
X 1 represents a direct bond or a carbonyl group,
G 1 represents a group of the general formula (4) in formula (4), n is an integer of 1 to 5, m is an integer from 1 to 6.
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