JPWO2017090649A1 - Pinch valve and manifold with the same - Google Patents

Abstract

  The pinch type valve (V) of the present invention includes a rotating shaft (2) driven by a driving source (1), a first cam (3) fixed to the rotating shaft (2), and a first cam ( The first movable member (4) and the second movable member (5) that move in contact with the cam surface (3m) of 3) in two directions and the first movable member (4) are pressed and closed. The first movable member (4) is released when the pressure is released, and the first flexible tube (6) through which the fluid passes and the second movable member (5) are pressed and closed, and the second movable member ( And a second flexible pipe (7) through which the fluid is passed by releasing the pressure of 5).

Description

  The present invention relates to a pinch-type valve that opens and closes a tube by pressing or releasing the tube, and a manifold including the pinch-type valve.

  Conventionally, a servo valve that controls the supply direction, flow rate, and pressure of fluid in a pipe line has been used. The servo valve is provided with a plurality of ports such as a supply port and a discharge port. For example, when pressure control is performed using a servo valve, a connection port connected to a controlled object whose pressure is controlled is provided in addition to the supply port and the discharge port. The servo valve is referred to as a so-called three-port valve.

Patent Document 1 describes the following three-port valve servo valve.
The servo valve has three ports, a supply port, a load port, and an exhaust port. The servo valve accommodates a spool having a first valve body and a second valve body, the spool movably in the axial direction, and air is supplied between the first valve body and the second valve body. And a sleeve having a supply port for supply. The spool also has a third valve body different from the first and second valve bodies.

JP 2009-019684 A

  By the way, the servo valve described in Patent Document 1 has a non-linear flow rate characteristic in a lap region (a region where a built-in valve body and a sleeve face each other) in the servo valve. For this reason, it is difficult to control the flow rate of the fluid. Furthermore, it is difficult to grasp the relationship between the fluid flow rate and the pressure, and it is difficult to control the pressure.

  Moreover, the servo valve described in Patent Document 1 has a structure in which fluid leaks inside due to its structure. Specifically, since the valve body is configured to slide on the inner wall of the servo valve, fluid may leak from the gap between the inner wall and the valve body. In particular, when liquid is used, the servo valve is particularly required to be sealed. However, the servo valve described in Patent Document 1 has difficulty in using it as a liquid flow rate control valve because there is a gap with high possibility of fluid leakage.

  As described above, the servo valve described in Patent Document 1 may not be able to perform accurate control using various fluids. That is, the type of fluid that can be controlled is limited.

  Furthermore, the servo valve described in Patent Document 1 has a large number of parts. Specifically, the servo valve described in Patent Document 1 includes three valve bodies (first valve body, second valve body, and third valve body) having different sizes, a spool, a sleeve, and the like. Yes. Therefore, the structure of the apparatus is complicated, and manufacturing, maintenance, etc. are complicated. Further, since the valve is opened and closed by linear movement, the occupied space is large and the apparatus is configured by various types of parts, so that it is difficult to reduce the size of the apparatus.

  The present invention has been devised in view of the above circumstances, and an object of the present invention is to provide a pinch-type servo valve with good controllability without leakage of fluid in a pipeline and a manifold including the same.

  In order to solve the above-mentioned problem, a pinch type valve according to a first aspect of the present invention includes a rotating shaft driven by a driving source, a first cam fixed to the rotating shaft, and a cam surface of the first cam. The first movable member and the second movable member that move in contact with each other from two directions, and are pressed and closed by the first movable member, and the pressure of the first movable member is released and released to allow fluid to pass. A first flexible tube; and a second flexible tube that is pressed and closed by the second movable member and is released when the second movable member is depressurized and through which the fluid passes.

  According to the first aspect of the present invention, it is possible to obtain a pinch type valve that can be reliably closed without leakage of fluid in the pipe.

A pinch type valve according to a second aspect of the present invention includes a rotating shaft driven by a driving source, a first cam formed integrally with the rotating shaft, and a cam surface of the first cam from two directions. A first flexible member and a second movable member that move in contact with each other, and a first flexible member that is pressed and closed by the first movable member and that is released when the first movable member is released and released. A tube, and a second flexible tube that is pressed and closed by the second movable member, and is released when the second movable member is released from the pressure and passes through.
According to this invention, in addition to the effect of the first aspect of the present invention, the rotating shaft and the first cam are integrally formed, so that productivity is high.

The pinch type valve of the third aspect of the present invention moves in contact with a rotating shaft driven by a driving source, a first cam interlocked with the rotating shaft, and a cam surface of the first cam from two directions. A first movable member and a second movable member, a first flexible tube that is pressed and closed by the first movable member and is released when the first movable member is depressurized and through which fluid passes; And a second flexible tube that is pressed and closed by the second movable member and released by releasing the pressure of the second movable member.
According to the third aspect of the present invention, in addition to the effects of the first aspect of the present invention, since the rotating shaft and the first cam are interlocked, the control is flexible.

A pinch type valve according to a fourth aspect of the present invention moves in contact with a rotating shaft driven by a driving source, a first cam interlocked with the rotating shaft, and a cam surface of the first cam from two directions. The first movable member and the second movable member that are pressed and closed by the first movable member, and the first flow path through which the fluid is passed by releasing the pressure of the first movable member and releasing the first movable member; And a second flow path that is pressed and closed by the second movable member and is released by releasing the pressure of the second movable member and through which the fluid passes.
According to the fourth aspect of the present invention, in addition to the effects of the first aspect of the present invention, the first flow path and the second flow path can be variously configured, so that the degree of freedom in design and production is increased.

Desirably, in the pinch type valve of the third or fourth aspect of the present invention, there is play between the rotating shaft and the first cam.
According to the present invention, since there is play between the rotating shaft and the first cam, the timing at which the cam operates can be changed.

Desirably, in the pinch type valve according to any one of the first to fourth aspects of the present invention, the cam surface is formed asymmetrically about the rotation axis.
According to the present invention, the cam surface is formed asymmetrically about the rotation axis, so that the first cam that works at various timings can be obtained.

Desirably, in the pinch type valve according to any one of the first to fourth aspects of the present invention, the cam surface is bilaterally symmetric about the rotation axis, and forms the outer peripheral surface of the first cam. On the surface, the first movable member and the second movable member are arranged to face each other from one direction and the opposite direction.
According to the present invention, the first flexible tube and the second flexible tube can be opened and closed with little load on the rotating shaft.

Desirably, in any one of the first to fourth pinch type valves according to the present invention, the cam curve forming the cam surface of the first cam is differentiable.
According to the present invention, the cam curve forming the cam surface of the first cam can be differentiated, so that the first cam can operate smoothly.

Desirably, in the pinch type valve according to any one of the first to fourth aspects of the present invention, the cam surface of the first cam is an outer peripheral cam surface having a semicircular cross-sectional shape. And an outer peripheral cam surface having a cross-sectional shape with an eccentric radius shorter than the radius of the semicircle from the center of the semicircle.
According to the present invention, the first and second flexible tubes can be normally closed, and the first flexible tube and the second flexible tube can be alternately opened and closed.

Preferably, in the pinch type valve according to the ninth aspect of the present invention, the eccentric radius r has a relationship of r = R−aθ / (π / 2) where R is the radius of the semicircle and a deviation amount is a. is there.
According to the present invention, the first and second flexible pipes can be normally closed and the first flexible pipe and the second flexible pipe can be opened and closed smoothly.

Preferably, in any one of the first to third pinch type valves of the present invention, the first adjusting means for adjusting the deformation amount of the first flexible tube or the deformation amount of the second flexible tube. At least one of the second adjusting means for adjusting.
According to the present invention, the deformation amount of the first flexible tube and the deformation amount of the second flexible tube can be adjusted by the first adjusting means or the second adjusting means, respectively.

Preferably, in any one of the first to third pinch type valves of the present invention, the first adjusting means for adjusting the deformation amount of the first flexible tube or the deformation amount of the second flexible tube. At least one of the second adjusting means for adjusting the angle, the first adjusting means using a screw, and the second adjusting means using a screw.
According to the present invention, the deformation amount of the first flexible tube and the deformation amount of the second flexible tube can be adjusted with screws.

Preferably, in any one of the first to third pinch type valves of the present invention, the first adjusting means for adjusting the deformation amount of the first flexible tube or the deformation amount of the second flexible tube. And a second fixing means for fixing a deformation amount of the first flexible tube or a second fixing means for fixing the deformation amount of the second flexible tube. At least one of the fixing means.
According to the present invention, since at least one of the first fixing means and the second fixing means is provided, the deformation amount of the first flexible tube or the deformation amount of the second flexible tube At least one of them can be fixed.

Desirably, in the pinch type valve according to any one of the first to fourth aspects of the present invention, a steady state in which the pinch type valve is brought into a steady state by using a process in which the elastic force is reduced among changes in the elastic force of the elastic member. State stabilization means is provided.
According to the present invention, the pinch-type valve is brought into a steady state by using a process in which the elastic force is reduced among the changes in the elastic force of the elastic member, so that the steady state is stabilized in a stable state in which the elastic energy is released. be able to.

Preferably, in the pinch type valve according to the fourteenth aspect of the present invention, the steady state stabilizing means includes a return cam fixed to the rotating shaft and having a portion whose diameter from the rotation center is shorter than other portions. A third movable member and a fourth movable member that move in contact with the cam surface of the return cam from both sides, and the elastic member that presses the third movable member toward the cam surface of the return cam. And a second elastic member that is the elastic member that presses the fourth movable member toward the cam surface of the return cam.
According to the present invention, the steady state of the pinch-type valve is stabilized by pressing the location where the diameter of the return cam is shorter than the other locations with the first elastic member and the second elastic member. can do.

Preferably, in the pinch type valve of the fifteenth aspect of the present invention, the cam surface of the return cam is formed asymmetrically about the rotation axis.
According to the present invention, the cam surface of the return cam is formed asymmetrically about the rotation axis, so that the return position of the return cam can be changed.

Preferably, in the pinch type valve according to the fifteenth aspect of the present invention, the cam surface of the return cam is formed in a symmetrical shape having a curvature.
According to the present invention, since the cam surface of the return cam is formed in a symmetrical shape having a curvature, the steady state of the pinch type valve can be obtained with a small load applied to the rotating shaft.

Preferably, in the pinch type valve of the seventeenth aspect of the present invention, the cam surface of the return cam is formed in an elliptical shape.
According to the present invention, since the cam surface of the return cam is formed in an elliptical shape, the third movable member and the fourth movable member come into contact with the elliptical cam surface, so that the steady state of the pinch type valve is achieved. The state can be stabilized.

Preferably, in the pinch type valve according to the fifteenth aspect of the present invention, of the third adjusting means for adjusting the deformation amount of the first elastic member or the fourth adjusting means for adjusting the deformation amount of the second elastic member. At least one of them is provided.
According to the present invention, the deformation amount of the first elastic member and the deformation amount of the second elastic member can be adjusted by the third adjusting means or the fourth adjusting means, respectively.

Desirably, in any one of the first to fourth pinch type valves of the present invention, the first movable member has a first bearing that contacts the cam surface of the first cam, and the second movable member. The member has a second bearing that contacts the cam surface of the first cam.
According to the present invention, the frictional force between the first movable member and the cam surface of the second movable member can be reduced. Therefore, the torque of the drive source can be reduced.

Preferably, in the pinch type valve of the fifteenth aspect of the present invention, the third movable member has a third bearing that contacts the cam surface of the return cam, and the fourth movable member is the return cam. A fourth bearing in contact with the cam surface.
According to the present invention, the frictional force between the third movable member and the cam surface of the fourth movable member can be reduced. Therefore, the torque of the drive source can be reduced.

Preferably, in the pinch type valve according to any one of the first to third aspects of the present invention, the first flexible tube may be moved by the elastic force of the first flexible member before the pressing when the pressing of the first movable member is released. When the pressing of the second movable member is released, the second flexible tube returns to the shape before the pressing by its own elastic force.
According to the present invention, the first flexible tube and the second flexible tube can be restored to their original shapes when the pressure is released.

Desirably, in any one of the first to third pinch type valves of the present invention, at least one of the first flexible tube and the second flexible tube is a tube having a flat cross section. .
According to the present invention, since at least one of the first flexible tube and the second flexible tube is a tube having a flat cross section, the reaction torque is small and the motor torque can be reduced. Further, the durability of at least one of the first flexible tube and the second flexible tube can be improved.

Preferably, in any one of the first to fourth pinch type valves of the present invention, the second cam fixed to the rotating shaft and the cam surface of the second cam are brought into contact with each other from two directions and moved. A fifth flexible member and a sixth movable member that are pressed and closed by the fifth movable member, and a third flexible tube that is released by being released from being pressed by the fifth movable member; And a fourth flexible tube that is pressed and closed by the sixth movable member, and released by releasing the pressure of the sixth movable member.
According to the present invention, a 4-port valve (a 5-port valve when the discharge port is separated) can be obtained.

Desirably, in the pinch type valve of the twenty-fourth aspect of the present invention, the cam curve forming the cam surface of the second cam is differentiable.
According to the present invention, the second cam can operate smoothly.

Preferably, in the pinch type valve of the twenty-fourth aspect of the present invention, the cam surface of the first cam and the cam surface of the second cam are different in phase by 180 degrees.
According to the present invention, the length of the pipe line is short, and the control port and the supply port can be arranged on the same side.

Preferably, in any one of the first to third pinch type valves of the present invention, the first cam, the first movable member, the second movable member, the first flexible pipe, and the second It has multiple configurations with flexible tubes.
According to the present invention, it is possible to control the opening and closing of the plurality of first flexible tubes and the plurality of second flexible tubes.

Preferably, the pinch type valve according to the twenty-seventh aspect of the present invention comprises a plurality of steady state stabilizing means for bringing the pinch type valve into a steady state using a process in which the elastic force of the elastic member is lowered.
According to the present invention, since the pinch type valve is brought into a steady state using a process in which the elastic force of the elastic member is lowered, the steady state can be stabilized.

Preferably, the manifold comprises any one of the first to fourth pinch type valves of the present invention.
According to the present invention, a manifold having any one of the first to fourth effects of the present invention can be obtained.

Desirably, in the manifold of the 29th aspect of the present invention, the control port connected to the controlled object and the supply port to which the fluid is supplied are arranged on the same side or the same surface side.
According to the present invention, since the control port and the supply port are arranged on the same side or the same surface side, the handleability and maintainability of the manifold are good.

  According to the present invention, it is possible to realize a pinch type servo valve with good controllability and a manifold having the same without leakage of fluid in the pipe line.

The perspective view which looked at the pinch type servo valve of Embodiment 1 concerning the present invention from the slanting upper part. (A) is a conceptual diagram showing the operation of a pinch type servo valve in a mode in which two tubes are closed (neutral position mode), and (b) is one tube in an open state and the other tube is in an open state. A conceptual diagram showing the operation of the pinch type servo valve in the closed mode (Open left-port mode), (c) is a mode in which one tube is closed and the other tube is opened ( The conceptual diagram which shows operation | movement of the pinch type servo valve of Open right-port (right port opening). Sectional drawing which cut | disconnected the eccentric cam in the surface perpendicular | vertical to the rotating shaft of the A direction arrow of FIG. The perspective view which shows a 1st needle | mover. The perspective view which shows the cam for a return. The perspective view which shows the 1st return mover. (A) is a conceptual diagram showing the operation of the neutral position return section where the first operating section is in neutral position (neutral position), and (b) is the neutral position return section where the first operating section is open left-port (left port open). The conceptual diagram which shows operation | movement of (1), (c) is a conceptual diagram which shows operation | movement of the neutral position return part whose 1st action | operation part is Open right-port (right port opening). (A) is a figure which shows a control frequency (Hz) and a gain (dB), (b) is a figure which shows a control frequency (Hz) and a phase (degrees). The perspective view which looked at the pinch type servo valve of Embodiment 2 from diagonally upward. Sectional drawing which cut | disconnected the 2nd eccentric cam by the surface perpendicular | vertical to the rotating shaft of the B direction arrow of FIG. The perspective view which shows a 3rd needle | mover. (A) is a conceptual diagram showing the operation of the second operating portion of the pinch type servo valve in the closed mode (neutral position mode) of the third and fourth tubes, and (b) is the third tube closed. The conceptual diagram which shows operation | movement of the 2nd operation | movement part of the pinch type | mold servo valve of the mode (Open right-port (right port opening)) which is a state and the 4th tube is an open state, (c) is the 3rd tube open state The conceptual diagram which shows operation | movement of the 2nd operation | movement part of the pinch type | mold servo valve of the mode (Open left-port (left port open) mode) which is 4 and a 4th tube is closed. (A) is a conceptual cross-sectional view showing a state of an expansion mode of a pneumatic cylinder to which a pinch type servo valve is applied, and (b) is a conceptual cross section showing a state of a compression mode of a pneumatic cylinder to which a pinch type servo valve is applied. Figure. The figure which shows the fluid flow of the manifold at the time of the expansion | extension mode of the pneumatic cylinder of Fig.13 (a). The figure which shows the fluid flow of the manifold at the time of the compression mode of the pneumatic cylinder of FIG.13 (b). The perspective view which shows the manifold of a modification. (A), (b) is sectional drawing which shows the open / close state of the tube of a modification, respectively. (A) is a figure which shows an example of the relationship between the rotation angle of the eccentric cam in a pinch type servo valve, and the effective cross-sectional area of the flow path of a 1st tube, (b) is the rotation angle of an eccentric cam, and the 1st tube The figure which shows the example of the overlap with the effective cross-sectional area of a flow path, and an underlap. (A) The perspective view which looked at the eccentric cam of the 1st operation part provided in the rotating shaft of the motor of the pinch type servo valve of Embodiment 3 concerning the present invention, and the eccentric cam of the 2nd operation part from diagonally upward. FIG. 4B is a perspective view of the eccentric cam of the third embodiment. (A) is the figure which showed the half of the curve which comprises the outline of an eccentric cam, (b) is the graph which showed the relationship between angle (theta) of the cam curve of an eccentric cam, and eccentric radius r. (A) is the figure which looked at the eccentric cam of the pinch type servo valve of Embodiment 4 which concerns on this invention from the direction of the rotating shaft, (b) is a perspective view of the return cam which has a left-right asymmetrical outline. The perspective view of the eccentric cam and return cam of the modification of Embodiment 4. FIG. (A) is a perspective view which shows the case where the eccentric cam of Embodiment 5 which concerns on this invention and the rotating shaft are integrally formed, (b) shows the case where the eccentric cam is fixed to the rotating shaft using the key. A perspective view and (c) are perspective views showing the case where an eccentric cam is played on a rotating shaft and fixed with a key. The partially cutaway perspective view of the tube shown in Embodiment 1,2. FIG. 10 is a partially cutaway perspective view showing a tube having a flat shape of Example 1 of Embodiment 6. FIG. 10 is a partially cutaway perspective view showing a tube having a flat shape and a combined end portion of Example 2 of Embodiment 6. (A) is the perspective view which looked at the pinch type | mold servo valve of Embodiment 7 from diagonally upward, (b) is the arrow view which looked at the pinch type | mold servo valve from C direction, (c) is the front view of a micrometer.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.
<< Embodiment 1 >>
FIG. 1 is a perspective view of a pinch type servo valve according to a first embodiment of the present invention as viewed obliquely from above.
FIG. 2 is a conceptual diagram illustrating the operation of the pinch type servo valve according to the first embodiment. 2A shows a mode in which two tubes are in a closed state (Neutral position mode), and FIG. 2B shows a mode in which one tube is in an open state and the other tube is in a closed state ( Fig. 2 (c) shows a mode in which one tube is closed and the other tube is in an open state (Open right-port). ing.

The pinch type servo valve V of Embodiment 1 is a three-port valve having a supply port, a control port, and an exhaust port.
The pinch type servo valve V includes, as the first operating portion Va, an eccentric cam 3 fixed to the rotary shaft 2, first and second movable elements 4 and 5, first and second tubes 6 and 7, first and second Second tube displacement adjustment sections 8 and 9 are provided. The rotating shaft 2 is rotationally driven by a motor 1.

The first operation unit Va is responsible for opening and closing operations of the first and second tubes 6 and 7. A fluid such as air flows through the first and second tubes 6 and 7.
The pinch type servo valve V includes a return cam 10, first and second return movers 11 and 12, and first and second return springs 13 fixed to the rotary shaft 2 as a neutral position return portion Vb. , 14 and first and second spring adjusting portions 15, 16. The neutral position return unit Vb has a function of stably maintaining the pinch type servo valve V at the neutral position (neutral position) shown in FIG.
The first and second return springs 13 and 14 are compression coil springs, respectively.

The eccentric cam 3 and the return cam 10 are rotated by the rotation of the rotating shaft 2 driven by the motor 1.
As the motor 1, a servo motor, a DC motor, a stepping motor or the like is used. Here, a case where a DC motor is used as the motor 1 will be described. The motor 1 is provided with an encoder for measuring the rotation angle.
The rotating shaft 2 is rotatably supported by the frame body 17 via a bearing (not shown).

<Eccentric cam 3>
FIG. 3 is a cross-sectional view of the eccentric cam taken along a plane perpendicular to the rotation axis as viewed in the direction of arrow A in FIG.
The eccentric cam 3 has a semicircular portion 3a having a semicircular shape centered on the axis C on one side (upper side in FIG. 3) and a radius (from the axis C on the other side (lower side in FIG. 3)). r) has a cam surface 3m having an eccentric part 3h shorter than the radius (R) of the semicircular part 3a.

  In the eccentric cam 3, the radius of the semicircular portion 3a is R, the eccentric radius of the radius from the axis C of the eccentric portion 3h on the other side (lower side in FIG. 3) is r, and the deviation amount from R is a. When the angle from the semicircular boundary on one side (upper side in FIG. 3) is θ,

The eccentric radius r at the angle θ is expressed by the relationship of the following equation (1) using the radius R and the shift amount a.
r = R−aθ / (π / 2) (1)
2A to 2C show the eccentricity of the eccentric cam 3 with emphasis (exaggeration) for easy understanding, and the first and second tubes 6 and 7 are on the front side. It is shown in a state rotated 90 degrees.

The first and second movers 4 and 5 linearly move in the left-right direction (the left-right direction in FIG. 2A, the vertical direction of the rotating shaft 2 in FIG. 1 (substantially left-right direction in FIG. 1)).
In the neutral position (neutral position) shown in FIG. 2A, the eccentric portion 3h of the eccentric cam 3 is positioned below the pinch type servo valve V. Therefore, the first and second movable elements 4 and 5 are offset. The semi-circular portion 3a of the lead cam 3 is pressed outward in the left and right directions and moved outward in the left and right directions.
The first tube 6 is pressed and closed by the first mover 4 and the second tube 7 is pressed and closed by the second mover 4 by the left and right movements of the first and second movers 4 and 5. The

  In the Open left-port shown in FIG. 2B, the eccentric cam 3 rotates clockwise (arrow α1 in FIG. 2A) from the neutral position in FIG. 2A. Then, the first armature 4 comes into contact with the eccentric portion 3h of the eccentric cam 3 by the elastic force (restoring force) that tries to restore the original shape from the elastic deformation state of the first tube 6, and the rotating shaft 2 (Arrow β1 in FIG. 2B). Due to the movement of the first armature 4 toward the rotating shaft 2, the first tube 6 changes from the closed state to the open state due to an elastic force that restores the original shape from the elastic deformation. On the other hand, the second movable element 5 continues to contact the semicircular portion 3a of the eccentric cam 3 by the pressing force of the semicircular portion 3a of the eccentric cam 3, and the second movable element 5 is pressed by the second movable element 5. The tube 7 continues to be in a closed state.

  In the open right-port shown in FIG. 2 (c), the eccentric cam 3 rotates counterclockwise (arrow α2 in FIG. 2 (a)). Then, the 1st needle | mover 4 continues contact | abutting to the semicircle part 3a of the eccentric cam 3 with the pressing force of the semicircle part 3a of the eccentric cam 3. FIG. On the other hand, the second mover 5 abuts on the eccentric portion 3h of the eccentric cam 3 by an elastic force (restoring force) that attempts to restore the original shape from the elastic deformation state of the second tube 7, and is on the rotating shaft 2 side. (Arrow β2 in FIG. 2B). Due to the movement of the second mover 5 toward the rotating shaft 2, the second tube 7 is changed from the closed state to the open state by an elastic force for restoring the original shape from the elastically deformed state.

<First and second movers 4, 5>
FIG. 4 is a perspective view showing the first mover 4.
Since the first and second movers 4 and 5 have a plane-symmetric configuration with respect to a vertical plane passing through the axis of the rotation shaft 2, the first mover 4 will be described.

  The 1st needle | mover 4 has the bearing 4a, the support body 4b, and the press part 4c. The support 4b has a substantially U-shape sandwiching the bearing 4a, and is made of a resin such as POM (Polyoxymethylene). Other materials may be used for the support 4b as long as predetermined mechanical characteristics such as wear resistance and strength characteristics are obtained. The support body 4b is fitted into a guide groove (not shown) formed in the frame body 17 at the upper left and right end portions and the lower left and right end portions. Accordingly, the first movable element 4 is guided so as to move in a linear direction approaching the eccentric cam 3 or away from the eccentric cam 3.

For example, a ball bearing is used as the bearing 4a.
The pressing part 4c has a flat rectangular parallelepiped shape and is formed of aluminum or the like. The pressing portion 4c is fixed to the support 4b by press-fitting, bonding or the like. The pressing portion 4c and the support 4b may be integrally formed by resin injection molding or aluminum die casting.

  The bearing 4 a is disposed in contact with the cam surface 3 m of the eccentric cam 3 on one side of the first mover 4. On the other hand, the pressing portion 4 c is disposed to face the first tube 6 on the other side of the first mover 4.

  In the bearing 4a, an inner ring 4a1 is fixed to a shaft 4b1 supported by a support 4b. The outer ring 4 a 2 of the bearing 4 a rotates in contact with the cam surface 3 m of the eccentric cam 3. The frictional force between the eccentric cam 3 and the first armature 4 can be reduced by the outer ring 4a2 of the bearing 4a coming into contact with the cam surface 3m of the eccentric cam 3. Thereby, the torque of the motor 1 accompanying rotation of the eccentric cam 3 can be reduced.

  The first armature 4 moves to the first tube 6 side by contacting the semicircular portion 3 a of the eccentric cam 3, and the pressing portion 4 c presses the first tube 6 to close the first tube 6. (See FIG. 2 (a)). On the other hand, the first mover 4 moves to the rotating shaft 2 side by contacting the eccentric portion 3h of the eccentric cam 3, and the pressing of the pressing portion 4c to the first tube 6 is released, and the first tube 6 is released. Is opened (see FIG. 2B). Thereby, the fluid can pass through the inside of the first tube 6.

As described above, the second mover 5 has the same configuration that is symmetrical to the first mover 4.
The support body 5 b of the second mover 5 is fitted into a guide groove (not shown) formed in the frame body 17 at the upper left and right end portions and the lower left and right end portions. As a result, the second movable element 5 is guided so as to approach the eccentric cam 3 or to move in a linear direction away from the eccentric cam 3 (almost in the left-right direction in FIG. 1).

  The second mover 5 moves to the second tube 7 side by the outer ring 5a2 of the bearing 5a coming into contact with the semicircular portion 3a of the eccentric cam 3, and the pressing portion 5c presses the second tube 7, 2 The tube 7 is closed (see FIG. 2B). On the other hand, as shown in FIG. 2 (c), the second mover 5 moves to the rotating shaft 2 side by contacting the eccentric portion 3 h of the eccentric cam 3, and the pressure on the second tube 7 is released. Then, the second tube 7 is opened. Thereby, the fluid can pass through the inside of the second tube 7.

<First and second tubes 6, 7>
As the first and second tubes 6 and 7, resin tubes such as silicone, polyurethane, and nylon, rubber tubes, etc. having elastic properties are used. The first and second tubes 6 and 7 may be configured using other materials.
The first and second tubes 6 and 7 may be fixed to the first and second movable elements 4 and 5 using an adhesive, respectively. As a result, the first and second tubes 6 and 7 can be more reliably opened and closed by the first and second movers 4 and 5.

<First and second tube displacement adjusters 8, 9>
As shown in FIG. 1, the first tube displacement adjusting portion 8 includes a female screw (set screw) 8 a that is screwed to a female screw formed in the frame body 17, and a deformation of the first tube 6 that is pressed by the female screw 8 a. And an adjusting plate 8b for adjusting the amount. The adjustment plate 8b moves closer to or away from the rotary shaft 2 by moving the grommet screw 8a. The amount of deformation of the first tube 6 is adjusted by the movement of the adjustment plate 8b.

  Similarly, the second tube displacement adjusting unit 9 adjusts the deformation amount of the second tube 7 by being pressed by the female screw (set screw) 9a screwed to the female screw formed on the frame body 17 and the female screw 9a. And an adjusting plate 9b. The adjustment plate 9b moves closer to or away from the rotary shaft 2 by the movement of the glove screw 9a. The amount of deformation of the second tube 7 is adjusted by the movement of the adjustment plate 9b.

  FIG. 18A shows an example of the relationship between the rotation angle of the eccentric cam 3 in the pinch type servo valve V and the effective sectional area of the flow path of the first tube 6, and FIG. 18B shows the eccentric cam. 3 shows an example of overlap and underlap of the rotation angle of 3 and the effective cross-sectional area of the flow path of the first tube 6. The rotation angle 0 degrees of the eccentric cam 3 is the neutral position in FIG. In FIG. 18A, the solid line (◯ mark) is the measurement result when the effective cross-sectional area is increased, and is the result when the broken line (× mark) is decreased.

In the pinch type servo valve V, it is desirable that the rotational angle of the eccentric cam 3 and the effective sectional area of the flow path of the first tube 6 have a linear relationship from the viewpoint of controllability. Moreover, when the 1st tube 6 is obstruct | occluded in order to eliminate a leak in a neutral point, a dead zone tends to arise.
From FIG. 18A, the dead zone was a rotation angle of -5 ° to 0 °. Therefore, the dead band can be reduced conventionally. Further, a linear relationship was obtained in a flow rate zone where the effective cross-sectional area of the first tube 6 was 0.15 mm ² or less.

  As shown in FIG. 18B, in the pinch type servo valve V, ideally, the rotation angle of the eccentric cam 3 and the flow path of the first tube 6 as shown by the solid line in FIG. The relationship with the cross-sectional area. However, in reality, underlap (indicated by a broken line in FIG. 18B) or overlap (indicated by a one-dot chain line in FIG. 18B) may occur due to a processing error or the like.

For example, in the underlap, the fluid flows because the effective cross-sectional area of the first tube 6 is not “0” even when the rotation angle of the eccentric cam 3 is 0 °. On the other hand, in the overlap, since the effective sectional area of the first tube 6 becomes “0” even when the rotation angle of the eccentric cam 3 is close to 0 °, the fluid flows before the rotation angle of the eccentric cam 3 reaches 0 °. The flow stops.
Therefore, the underlap or overlap of the first tube 6 can be adjusted by adjusting the position of the adjustment plate 8b with the set screw (set screw) 8a shown in FIG. Similarly, by adjusting the position of the adjusting plate 9b with the set screw (set screw) 9a, the underlap or overlap of the second tube 7 can be adjusted.

Specifically, the effective cross-sectional area of the first tube 6 can be adjusted to “0” by adjusting the position of the adjustment plate 8b with the set screw 8a. Similarly, the effective cross-sectional area of the second tube 7 can be adjusted to “0” by adjusting the position of the adjustment plate 9 b with the grub screw 9 a.
Further, the dead zone of the first tube 6 can be widened or narrowed by adjusting the position of the adjusting plate 8b with the set screw 8a. Similarly, the dead zone of the second tube 7 can be widened or narrowed by adjusting the position of the adjusting plate 9b with the set screw 9a.

Further, the pressing force and the pressing amount of the first tube 6 by the eccentric cam 3 can be adjusted by adjusting the position of the adjusting plate 8b with the set screw 8a. Similarly, the pressing force and the pressing amount of the second tube 7 by the eccentric cam 3 can be adjusted by adjusting the position of the adjusting plate 9b with the set screw 9a.
As described above, the opening and closing of the left and right first tubes 6 and the second tubes 7 can be independently adjusted by the set screws 8a and the set screws 9a.

<Neutral position return part Vb>
In the neutral position (neutral position) shown in FIG. 2A, the first movable element 4 and the second movable element 5 come into contact with the semicircular portion 3 a of the eccentric cam 3. And the 2nd needle | mover 5 is in the outermost position. In this case, since the first and second tubes 6 and 7 are respectively deformed the most, the elastic force (elastic energy) resulting from the deformation is maximized. Therefore, the pressing force that presses the first movable element 4 and the second movable element 5 from the first and second tubes 6 and 7 against the eccentric cam 3 is maximized. Therefore, at the neutral position, the state of the pinch type servo valve V becomes unstable.

Therefore, the pinch type servo valve V is provided with a neutral position return portion Vb (see FIG. 1).
The return cam 10 of the neutral position return portion Vb is a cam for stably maintaining the pinch type servo valve V at the neutral position (neutral position) shown in FIG.

FIG. 5 is a perspective view showing the return cam.
The return cam 10 has a cam surface 10m having a symmetrical elliptical shape, for example. The return cam 10 has a short diameter portion 10a having a short diameter from the center and a long diameter portion 10b having a long diameter from the center.
Note that the cam surface 10m has a symmetrical shape, and the shape may be other than an elliptical shape as long as it has a short diameter portion and a long diameter portion.

As shown in FIG. 1, first and second return movers 11 and 12 are disposed adjacent to the return cam 10 on the left and right sides, respectively.
FIG. 6 is a perspective view showing the first return mover.
Since the first and second return movers 11 and 12 are configured symmetrically with respect to a vertical plane passing through the axis of the rotating shaft 2 (see FIG. 1), the first return mover 11 will be described. .

  The first return movable element 11 has a bearing 11a and a support 11b. The support 11b has a substantially U-shape sandwiching the bearing 11a, and is made of a resin such as POM (Polyoxymethylene). Other materials may be used for the support 11b as long as predetermined mechanical characteristics such as wear resistance and strength characteristics are obtained.

  The support body 11 b of the first return movable element 11 is fitted into a guide groove (not shown) formed in the frame body 17 at the upper left and right end portions and the lower left and right end portions. As a result, the first return movable element 11 is guided so as to move in the linear direction approaching the return cam 10 or away from the return cam 10.

For example, a ball bearing is used as the bearing 11a.
The bearing 11a is disposed in contact with the cam surface 10m of the return cam 10 on one side of the first return mover 11. On the other hand, the pressing surface 11b1 of the support 11b is disposed on the end winding portion on one side of the first return spring 13.

  In the bearing 11a, an inner ring 11a1 is fixed to a shaft 11b1 supported by a support 11b. The outer ring 11a2 of the bearing 11a rotates in contact with the cam surface 10m of the return cam 10. When the outer ring 11a2 of the bearing 11a contacts the cam surface 10m of the return cam 10, the frictional force between the return cam 10 and the first return mover 11 can be reduced. Thereby, the torque of the motor 1 accompanying rotation of the return cam 10 can be reduced.

  As shown in FIG. 7A, the first return movable element 11 contacts the cam surface 10 m of the return cam 10 by the elastic force of the first return spring 13. Therefore, when the outer ring 11a2 of the bearing 11a of the first return armature 11 abuts on the short diameter portion 10a of the return cam 10, the first return spring 13 extends, so that the amount of deformation is small and the elastic force is weak ( The elastic energy decreases) and becomes stable.

The second return movable element 12 has the same configuration as that of the first return movable element 11.
The support body 12 b of the second return movable element 12 is fitted into a guide groove (not shown) formed in the frame body 17 at the upper left and right end portions and the lower left and right end portions. As a result, the second return movable element 12 is guided so as to move in a linear direction approaching the return cam 10 or away from the return cam 10.

  In the second return movable element 12, the outer ring 12 a 2 of the bearing 12 a comes into contact with the cam surface 10 m of the return cam 10 by the elastic force of the second return spring 14. Therefore, when the outer ring 12a2 of the bearing 12a of the second return armature 12 abuts on the short diameter portion 10a of the return cam 10, the second return spring 14 extends, so that the amount of deformation is small and the elastic force is weak ( The elastic energy decreases) and becomes stable.

<First and second return spring displacement adjusters 15, 16>
As shown in FIG. 1, the first return spring displacement adjustment unit 15 includes a female screw 15 a that is screwed into a female screw formed in the frame body 17, and a deformation amount of the first return spring 13 that is pressed by the female screw. And an adjusting plate 15b for adjusting. The outer side of the first return spring 13 is in contact with the adjustment plate 15b. Therefore, the adjustment plate 15b moves closer to or away from the rotating shaft 2 by the movement of the grommet 15a, and the deformation amount of the first return spring 13 is adjusted.

Similarly, the second return spring displacement adjustment unit 16 adjusts the amount of deformation of the second return spring 14 by being pressed by the female screw 16a screwed to the female screw formed on the frame body 17 and the female screw 16a. And an adjusting plate 16b. The outer side of the second return spring 14 abuts on the adjustment plate 16b. For this reason, the adjustment plate 16b moves closer to or away from the rotary shaft 2 by the movement of the thread screw 16a, and the deformation amount of the second return spring 14 is adjusted.
In addition, it is good also as a structure provided with either the 1st, 2nd return spring displacement adjustment parts 15 and 16. FIG.

<Operation of the neutral position return portion Vb>
With the configuration of the neutral position return portion Vb shown in FIG. 7A, the cam surface 10m having an elliptical shape is pressed from the left and right by the first return mover 11 by the elastic force of the first return spring 13, and the first return mover 11 is pressed. 2 The second return mover 12 is pressed by the elastic force of the return spring 14.
When the short diameter portion 10a of the return cam 10 contacts the outer ring 11a2 of the bearing 11a of the first return mover 11 and the outer ring 12a2 of the bearing 12a of the second return mover 12, the first return spring 13 is deformed. The amount is small and the elastic force is the smallest, and the deformation amount of the second return spring 14 is small and the elastic force is the smallest (the respective elastic energies of the first return spring 13 and the second return spring 14 are the lowest). .

Therefore, the return cam 10 pressed by the first and second return springs 13 and 14 is the most stable position, and the return cam 10 stops rotating at this position.
Therefore, the eccentric cam 3 and the return cam 10 are fixed to the rotary shaft 2 so that the above-described position of the return cam 10 is a neutral position (neutral position) shown in FIG. . With this configuration, the pinch type servo valve V is stabilized at the neutral position (neutral position) shown in FIG.

<Operation of pinch type servo valve V>
Next, the operation of the pinch type servo valve V configured as described above will be described in detail.
<Nuetral position>
At the neutral position (neutral position) shown in FIG. 2 (a), the motor 1 is stopped. In this case, the outer ring 4a2 of the bearing 4a of the first armature 4 abuts on the semicircular portion 3a of the eccentric cam 3 and moves outward, so that the pressing portion 4c of the first armature 4 becomes the first tube 6. Is pressed outward to bring the first tube 6 into a closed state. On the other hand, the outer ring 5a2 of the bearing 5a of the second mover 5 contacts the semicircular portion 3a of the eccentric cam 3 and moves outward, so that the pressing portion 5c of the second mover 5 pushes the second tube 7 through. By pressing outward, the second tube 7 is closed.

  In this case, the first tube 6 and the second tube 7 are each deformed into a closed state, and the elastic force to restore the original shape is maximized. Therefore, it becomes difficult to maintain the neutral position (neutral position) equilibrium state. However, in the neutral position return portion Vb, as shown in FIG. 7A, the outer ring 11a2 of the bearing 11a of the first return mover 11 pressed by the elastic force of the first return spring 13 is connected to the return cam. 10 is pressed against the cam surface 10m of the short diameter portion 10a. Further, the outer ring 12 a 2 of the bearing 12 a of the second return movable element 12 pressed by the elastic force of the second return spring 14 is pressed against the cam surface 10 m of the short diameter portion 10 a of the return cam 10.

  At this time, since the first return spring 13 and the second return spring 14 are in the most extended state, the amount of deformation is the smallest and the elastic force is minimized. Therefore, this state (neutral position (neutral position)) of the neutral position return part Vb becomes the most stable, and the equilibrium state of the neutral position (neutral position) can be kept stable. FIG. 7A is a conceptual diagram showing the operation of the neutral position return unit where the first operation unit is in the neutral position, and FIG. 7B is a diagram illustrating the operation of the first operation unit as Open left-port. FIG. 7C is a conceptual diagram illustrating the operation of the neutral position return unit (left port open), and FIG. 7C is a conceptual diagram illustrating the operation of the neutral position return unit whose first operation unit is Open right-port (right port open). FIG.

<Open left-port>
The open left-port mode shown in FIG. 2B is a mode in which the first tube 6 is “open” and the second tube 7 is “closed”.
When the eccentric cam 3 fixed to the rotating shaft 2 by driving the motor 1 rotates clockwise (arrow α1 in FIG. 2B), the mode shifts to an open left-port mode. In the open left-port mode, the outer ring 4a2 of the bearing 4a of the first armature 4 abuts against the eccentric portion 3h of the eccentric cam 3, and the pressing portion 4c of the first armature 4 is the first. The position of pressing the 1 tube 6 moves to the rotating shaft 2 side. Thereby, the 1st tube 6 transfers from an obstruction | occlusion state to an open state by the elastic force which is going to restore | restore to an original shape. On the other hand, the outer ring 5a2 of the bearing 5a of the second mover 5 is in contact with the semicircular portion 3a of the eccentric cam 3, and the pressing portion 5c of the second mover 5 presses the second tube 7 outward to close it. Maintain state.

  On the other hand, as shown in FIG. 7B, the return cam 10 fixed to the rotary shaft 2 by driving the motor 1 is rotated clockwise (FIG. 7B) by the rotation of the rotary shaft 2. It turns to the arrow γ1). At this time, the first return spring 13 is compressed via the first return movable element 11 that contacts the cam surface 10 m of the return cam 10, and the second return movable that contacts the cam surface 10 m of the return cam 10. The second return spring 14 is compressed via the child 12.

<Open right-port>
The open right-port mode shown in FIG. 2C is a mode in which the first tube 6 is “closed” and the second tube 7 is “open”.
When the eccentric cam 3 fixed to the rotating shaft 2 by driving the motor 1 rotates counterclockwise (arrow α2 in FIG. 2C), the mode shifts to the Open right-port mode. In the open right-port mode, the outer ring 4a2 of the bearing 4a of the first armature 4 abuts on the semicircular portion 3a of the eccentric cam 3, and the pressing portion 4c of the first armature 4 is the first. 1 Move to a position where the tube 6 is pressed outward. Thereby, the 1st tube 6 will be in a blockade state.

  On the other hand, the outer ring 5a2 of the bearing 5a of the second movable element 5 is in contact with the eccentric part 3h of the eccentric cam 3, and the position where the pressing part 5c of the second movable element 5 presses the second tube 7 is the rotational axis 2. Move to the side. Thereby, the 2nd tube 7 transfers to an open state from the obstruction | occlusion state by the elastic force which is going to restore | restore to an original state (arrow (beta) 2 of FIG.2 (c)).

On the other hand, as shown in FIG. 7 (c), the return cam 10 fixed to the rotating shaft 2 by driving the motor 1 is rotated counterclockwise (FIG. 7 (c). ), The first return spring 13 is compressed via the first return movable element 11 which contacts the cam surface 10m of the return cam 10, and is moved to the cam surface 10m of the return cam 10. The second return spring 14 is compressed via the second return movable element 12 that abuts.
Thereafter, when a mode of neutral position (neutral position) is entered, the state shown in FIGS. 2 (a) and 7 (a) is obtained.

  The first and second tube displacement adjustment units 8 are smoothly performed so that the above-described neutral position, open left-port, and open right-port modes can be smoothly performed. 9 is used to adjust the amount of displacement of each of the first and second tubes 6 and 7. In particular, the first and second tubes 6 and 7 are adjusted so as to be reliably closed.

  Further, in the neutral position return portion Vb, the displacement amounts of the first and second return springs 13 and 14 are adjusted using the first and second return spring displacement adjustment portions 15 and 16. Thus, the pressing force of the first return movable element 11 and the second return movable element 12 to the return cam 10 is adjusted so that the neutral position can be held more stably and reliably. Adjusted.

The performance of the pinch type servo valve V having the above configuration is shown by the Bode diagrams of FIGS. 8A and 8B.
FIG. 8A shows the control frequency (Hz) and gain (dB), and FIG. 8B shows the control frequency (Hz) and phase (degrees).
8 (a) and 8 (b), it can be seen that the pinch type servo valve V can maintain a good gain and phase up to about 40 Hz.

According to the configuration of the pinch type servo valve V, the following effects are obtained.
1. In general, the spool valve has a problem of leakage in the pipe line, but the pinch type servo valve V has no sliding part in the pipe line and presses the first tube 6 and the second tube 7 from the outside to close each other. Since the pressure from the outside is released and released, there is no leakage of fluid flowing through the pipeline.

2. Since the tubes such as the first tube 6 and the second tube 7 are pressed from the eccentric cam 3 via the first movable element 4 and the second movable element 5, they can be reliably closed in a close contact state.

3. A normally closed mode in which the conduits such as the first tube 6 and the second tube 7 are reliably closed can be set.

4). Since it has a neutral position return portion Vb composed of the return cam 10, the first and second return movers 11 and 12, and the first and second return springs 13 and 14, the first tube 6 and the second tube 7 are It is possible to stabilize the holding of the neutral position (neutral position) in which each of them is closed.

5. Since the first and second tube displacement adjusting portions 8 and 9 are provided, the fully closed state of the first and second tubes 6 and 7 can be adjusted and reliably closed.

6). In addition, since the first and second return spring displacement adjustment portions 15 and 16 are provided, the pressing force of the first return movable element 11 and the second return movable element 12 to the return cam 10 is adjusted, The holding of the neutral position can be further stabilized.

7). Since the first and second movable elements 4 and 5 are configured to contact the eccentric cam 3 from one direction and the opposite direction, the load applied to the rotary shaft 2 is balanced and the load applied to the rotary shaft 2 is reduced. can do. Therefore, the wear durability of the pinch type servo valve V is improved, and the life can be extended.

8). As shown in FIGS. 8A and 8B, a possible pinch type servo valve V capable of high speed operation can be obtained.

<< Embodiment 2 >>
FIG. 9 is a perspective view of the pinch type servo valve according to the second embodiment when viewed obliquely from above.
The pinch type servo valve 2V according to the second embodiment is obtained by providing the pinch type servo valve V according to the first embodiment with a second action portion Vc in which the phases of the first action portion Va and the eccentric cam 3 are different by 180 degrees.
Since the other configuration is the same as that of the first embodiment, the same components are denoted by the same reference numerals, and detailed description thereof is omitted.

  The pinch type servo valve 2V according to the second embodiment is a four-port valve having a supply port sp1 (see FIGS. 13A and 13B), a first control port cp1, a second control port cp2, and an exhaust port ep1. . When the exhaust port ep1 of the 4-port valve is divided into two, the first and second exhaust ports, a 5-port valve is obtained.

  As described above, the pinch type servo valve 2V of the second embodiment has the second operation in which the phase of the eccentric cam 3 of the first operation unit Va is different from the pinch type servo valve V by 180 degrees. In this configuration, the part Vc is provided.

  The second operating portion Vc includes a second eccentric cam 23 fixed to the rotary shaft 2, third and fourth movers 24 and 25, third and fourth tubes 26 and 27, and third and fourth tube displacement adjustments. Parts 28 and 29. The second operation unit Vc performs opening / closing operations of the third and fourth tubes 26 and 27. A fluid such as air flows through the third and fourth tubes 26 and 27.

<Second eccentric cam 23>
10 is a cross-sectional view of the second eccentric cam cut along a plane perpendicular to the rotation axis as viewed in the direction of arrow B in FIG.
The second eccentric cam 23 has a semicircular portion 23a having a semicircular shape with the half on one side (lower side in FIG. 10) centered on the axis C, and a half on the other side (upper side in FIG. 10). The cam surface 23m has an eccentric portion 23h having a radius r1 shorter than the radius R of 23a.

In the second eccentric cam 23, the radius of the semicircular portion 23a is R, the eccentric radius from the axis C of the eccentric portion 23h on the other side (upper side in FIG. 10) is r1, the deviation amount from R is a, If the angle from the semicircular boundary on one side (lower side in FIG. 10) is θ,
The shift amount at the angle θ is expressed by the following equation (2) using the shift amount a and the radius R.
r1 = R−aθ / (π / 2) (2)
In FIGS. 12A to 12C, for easy understanding, the eccentricity of the second eccentric cam 23 is emphasized (exaggerated), and the third and fourth tubes 26 and 27 are shown. It is shown in a state rotated 90 degrees toward the front side.

<Third and fourth movers 24, 25>
FIG. 11 is a perspective view showing the third mover.
Since the third and fourth movers 24 and 25 are configured to be plane-symmetric with respect to the vertical plane passing through the center of the rotation shaft 2, the third mover 24 will be described.
The third mover 24 has the same configuration as the first mover 4 of the first embodiment. Therefore, the first mover 4 is shown by being numbered in the 20s and detailed description is omitted.

The support 24b of the third mover 24 is fitted into a guide groove (not shown) formed in the frame body 17A with upper left and right ends and lower left and right ends. As a result, the third movable element 24 is guided so as to move in a linear direction approaching the eccentric cam 23 or away from the eccentric cam 23.
As shown in FIG. 9, the bearing 24 a of the third mover 24 is disposed in contact with the cam surface 23 m of the eccentric cam 23 on one side of the third mover 24. On the other hand, the pressing portion 24 c of the third mover 24 is disposed to face the third tube 26 on the other side of the third mover 24.

  In the bearing 24a, an inner ring 24a1 is fixed to a shaft 24b1 supported by a support 24b. The outer ring 24a2 of the bearing 24a rotates in contact with the cam surface 23m of the eccentric cam 23. The outer ring 24a2 of the bearing 24a abuts against the cam surface 23m of the eccentric cam 23, thereby reducing the frictional force between the eccentric cam 23 and the third mover 24 by the action of the bearing 24a having a low frictional force. be able to. Thereby, the torque of the motor 1 accompanying rotation of the eccentric cam 23 can be reduced.

  FIG. 12 is a conceptual diagram illustrating the operation of the second operation unit of the pinch type servo valve according to the second embodiment. 12A shows a mode in which the third and fourth tubes are in a closed state (Neutral position mode), and FIG. 12B shows a state in which the third tube is in a closed state and the fourth tube is in an open state. FIG. 12C shows a mode in which the third tube is in an open state and a fourth tube is in a closed state (Open left-port mode). ).

  In the neutral position (neutral position) shown in FIG. 12 (a), the eccentric portion 23 h of the eccentric cam 23 is positioned upward, so that the third and fourth movers 24 and 25 are semicircular portions of the eccentric cam 23. The third and fourth movers 24 and 25 are respectively moved left and right outward by being pressed outwardly by the left and right sides 23a.

  As shown in FIG. 12B, the third mover 24 moves toward the third tube 26 by contacting the semicircular portion 23 a of the second eccentric cam 23, and the pressing portion 24 c is moved to the third tube 26. Is pressed to close the third tube 26. On the other hand, as shown in FIG. 12C, the third movable element 24 moves to the rotating shaft 2 side by contacting the eccentric portion 23 h of the eccentric cam 23, and the pressing portion 24 c moves to the third tube 26. Is released and the third tube 26 is opened.

The fourth mover 25 has a similar configuration that is symmetrical to the third mover 24. The fourth mover 25 has the same configuration as the second mover 5 of the first embodiment. Therefore, the fourth mover 25 is shown with the number 20 in the second mover 5 of the first embodiment and detailed description thereof is omitted.
The support body 25b of the fourth mover 25 is fitted into a guide groove (not shown) formed in the frame body 17A with upper left and right end portions and lower left and right end portions. Accordingly, the fourth movable element 25 is guided so as to move in a linear direction approaching the second eccentric cam 23 or moving away from the second eccentric cam 23.

  As shown in FIG. 12C, the fourth movable element 25 moves to the fourth tube 27 (see FIG. 9) side by contacting the semicircular portion 23a of the second eccentric cam 23, and the pressing portion 25c. Presses the fourth tube 27 and closes the fourth tube 27. On the other hand, as shown in FIG. 12B, the fourth mover 25 moves to the rotating shaft 2 side by contacting the eccentric portion 23 h of the eccentric cam 23, and the pressing portion 25 c moves to the fourth tube 27. Is released, and the fourth tube 27 is opened.

<Third and fourth tubes 26 and 27>
As the third and fourth tubes 26 and 27, resin tubes such as silicone, polyurethane, nylon, etc., which have elastic properties, and rubber tubes are used. The third and fourth tubes 26 and 27 may be configured using other materials.

<Third and fourth tube displacement adjusting sections 28 and 29>
The third tube displacement adjusting unit 28 shown in FIG. 9 includes a female screw 28a that is screwed into a female screw formed on the frame body 17A, and an adjustment plate 28b that is pressed by the female screw 28a to adjust the deformation amount of the third tube 26. And have. The adjustment plate 28b moves closer to or away from the rotary shaft 2 by the movement of the grub screw 28a, and the deformation amount of the third tube 26 is adjusted.

Similarly, the fourth tube displacement adjustment unit 29 includes a female screw 29a that is screwed into a female screw formed on the frame body 17A, and an adjustment plate 29b that is pressed by the female screw 29a to adjust the deformation amount of the fourth tube 27. have. The adjustment plate 29b moves closer to or away from the rotary shaft 2 by the movement of the glove screw 29a, and the deformation amount of the fourth tube 27 is adjusted.
In addition, it is good also as a structure provided with either the 3rd and 4th tube displacement adjustment parts 28 and 29. FIG.

<Operation of pinch type servo valve 2V>
Next, the operation of the pinch type servo valve 2V having the above configuration will be described in detail.
<Neetral position (neutral position) of the second operating part Vc>
In the neutral position (neutral position) of the second operation unit Vc shown in FIG. 12A, the first operation unit Va is in the state of the neutral position (neutral position) shown in FIG. Yes, the first and second tubes 6 and 7 are in a closed state. The neutral position return portion Vb is in the state shown in FIG.

  In the neutral position (neutral position) shown in FIG. 12A, the second operating portion Vc has the outer ring 24 a 2 of the bearing 24 a of the third mover 24 in contact with the semicircular portion 23 a of the eccentric cam 23 and outward. By moving, the pressing portion 24c of the third mover 24 presses the third tube 26 outward, and the third tube 26 is closed. On the other hand, the outer ring 25a2 of the bearing 25a of the fourth mover 25 contacts the semicircular portion 23a of the eccentric cam 23 and moves outward, so that the pressing portion 25c of the fourth mover 25 pushes the fourth tube 27 through. The fourth tube 27 is closed by pressing outward.

  In this case, the third tube 26 and the fourth tube 27 are each deformed to a closed state, and the elastic force to restore the original shape is maximized. For this reason, it is difficult to maintain the neutral position (neutral position) in an equilibrium state, but the neutral position (neutral position) equilibrium state is stabilized by the action of the neutral position return portion Vb shown in FIG. Can be kept.

<Open right-port>
The open right-port mode of the second operation unit Vc shown in FIG. 12B is a mode in which the third tube 26 is “closed” and the fourth tube 27 is “open”.
In the Open right-port of the second operation unit Vc, the first operation unit Va is in the Open left-port state shown in FIG. 2B described in the first embodiment. The first tube 6 is in an open state, and the second tube 7 is in a closed state. The neutral position return portion Vb is in the state shown in FIG.

  In the open right-port shown in FIG. 12 (b), the second operating portion Vc has the eccentric cam 23 fixed to the rotating shaft 2 by driving the motor 1 in the clockwise direction (FIG. 12 (b)). Rotate to the arrow α1) and enter the Open right-port mode. In the open right-port mode of the second operating portion Vc, the outer ring 24a2 of the bearing 24a of the third mover 24 abuts on the semicircular portion 23a of the eccentric cam 23, and the third mover 24 The pressing portion 24c is in a position to press the third tube 26 outward, and the third tube 26 is in a closed state.

On the other hand, the outer ring 25a2 of the bearing 25a of the fourth armature 25 abuts on the eccentric portion 23h of the eccentric cam 23, and the pressing portion 25c of the second armature 25 moves to the rotating shaft 2 side. Thereby, the 4th tube 27 transfers to an open state from an obstruction | occlusion state with the elastic force which is going to restore | restore to an original shape.
The neutral position return portion Vb is in the state shown in FIG.

<Open left-port>
The open left-port mode of the second operation unit Vc shown in FIG. 12C is a mode in which the third tube 26 is “open” and the fourth tube 27 is “closed”.
In the open left-port, the first operation unit Va is in the open right-port state shown in FIG. 2C described in the first embodiment, and the first tube 6 is In the closed state, the second tube 7 is in an open state.

  In the second operating portion Vc, in the open left-port shown in FIG. 12C, the eccentric cam 3 fixed to the rotating shaft 2 by driving the motor 1 is counterclockwise (FIG. 2B ) In the direction of the arrow α2) to shift to the Open left-port mode. In the open left-port mode, the outer ring 24a2 of the bearing 24a of the third mover 24 abuts on the eccentric part 23h of the eccentric cam 23, and the pressing part 24c of the third mover 24 becomes the first. The position of pressing the 3 tube 26 moves to the rotating shaft 2 side. Thereby, the 3rd tube 26 transfers to an open state from the obstruction | occlusion state (refer Fig.12 (a)) by the elastic force which is going to restore | restore to an original state.

On the other hand, the outer ring 25a2 of the bearing 25a of the fourth armature 25 abuts on the semicircular portion 23a of the eccentric cam 23, and the pressing portion 25c of the fourth armature 25 presses the fourth tube 27 outwardly. The 4 tube 27 maintains the closed state.
The neutral position return portion Vb is in the state shown in FIG.

  Thereafter, when the second operation unit Vc is in the neutral position mode, the second operation unit Vc is in the state shown in FIG. 12A, and the first operation unit Va is in the state shown in FIG. The neutral position return portion Vb is in the state shown in FIG.

  The third and fourth modes are performed so that the neutral position, neutral position, open right-port mode, and open left-port mode of the second operation unit Vc are smoothly performed. The displacement amounts of the third and fourth tubes 26 and 27 are adjusted using the tube displacement adjustment units 28 and 29.

Next, a manifold M of an example in which the pinch type servo valve 2V having the above configuration is applied to control of the pneumatic cylinder S will be described.
FIG. 13A is a conceptual cross-sectional view showing a state of the expansion mode of the pneumatic cylinder to which the pinch type servo valve is applied, and FIG. 13B is a compression of the pneumatic cylinder to which the pinch type servo valve is applied. It is a conceptual sectional view showing a mode state.

  FIG. 14 shows the fluid flow in the manifold during the expansion mode of the pneumatic cylinder of FIG. 13 (a). FIG. 15 shows the fluid flow in the manifold during the compression mode of the pneumatic cylinder of FIG. 13 (b). 14 and 15, the flow of the supply (supply air) fluid is indicated by a solid line, and the flow of the exhaust (exhaust) fluid is indicated by a broken line.

In the pneumatic cylinder S (see FIGS. 13A and 13B), the first tube 6 is connected to the first control port cp1 and the discharge port ep1, and the second tube 7 is connected to the second control port cp2 and the discharge port. It is connected to port ep1.
The third tube 26 is connected to the supply port sp1 and the first control port cp1 of the manifold M (see FIG. 14), and the fourth tube 27 is connected to the supply port sp1 and the second control port cp2 of the manifold M (see FIG. 15). It is connected to the.

  In the expansion mode of the pneumatic cylinder S shown in FIGS. 13A and 14, the first operating portion Va for opening and closing the first and second tubes 6 and 7 is that the first tube 6 is “open” and the second tube is open. 7 is in the “closed” Open left-port mode. On the other hand, in the second operation part Vc for opening and closing the third and fourth tubes 26 and 27, the third tube 26 is “closed” and the fourth tube 27 is “open” (open right-port). In the mode.

  In the compression mode of the pneumatic cylinder S shown in FIGS. 13B and 15, the first operating portion Va that opens and closes the first and second tubes 6 and 7 is that the first tube 6 is “closed” and the second tube. 7 is in the “open” Open right-port mode. On the other hand, in the second operation part Vc for opening and closing the third and fourth tubes 26 and 27, the third tube 26 is “open” and the fourth tube 27 is “closed”. In the mode.

FIG. 16 shows a manifold Mn according to a modification.
As shown in FIG. 16, a plurality of control objects (for example, pneumatic cylinders S) are controlled by using a manifold Mn having a plurality of configurations of the first operation unit Va, the second operation unit Vc, and the neutral position return unit Vb. Can do. As a result, the supply port sp1 and the first and second control ports cp1, cp2 are on the same side or the same surface side, and a manifold capable of controlling a plurality of controlled objects can be obtained.
Moreover, it is good also as a manifold provided with the 1st action | operation part Va and the neutral position return part Vb of the said Embodiment 1 as a single or several group.

According to the configuration of the pinch type servo valve 2V, the following effects are obtained.
1. A 4-port valve (or 5-port valve) with good responsiveness without leakage in the pipeline is obtained.

2. The first control port cp1, the second control port cp2, and the supply port sp1 are made different in phase by 180 degrees between the eccentric cam 3 of the first operation unit Va and the second eccentric cam 23 of the second operation unit Vc. The length of the pipe line that connects the first, second, third, and fourth tubes 6, 7, 26, and 27 can be shortened.

3. Further, the control ports (cp1, cp2) and the supply port sp1 are made the same by changing the phase of the eccentric cam 3 of the first operating portion Va and the second eccentric cam 23 of the second operating portion Vc by 180 degrees. Can be placed on the side.

4). By setting the manifold Mn to include a plurality of configurations of the first operation unit Va, the second operation unit Vc, and the neutral position return unit Vb illustrated in FIG. 16, a plurality of control objects (for example, pneumatic cylinders) can be controlled.

5. A plurality of configurations of the first operating part Va, the second operating part Vc, and the neutral position return part Vb in which the phases of the eccentric cam 3 of the operating part Vc and the eccentric cam 23 of the second operating part Vc are different by 180 degrees are provided. By using the manifold Mn, the control ports (cp1, cp2) and the supply port sp1 can be arranged on the same side to control a plurality of control objects (for example, pneumatic cylinders). Therefore, assembly, maintenance, and the like can be performed from the same side, and a manifold Mn having good workability and handleability can be realized.

<< Other Embodiments >>
1. In the said Embodiment 1, 2, although the cam surface 3m of the eccentric cam 3 was made into the shape shown in FIG. 3 represented by Formula (1), it is good also as another shape. For example, the eccentric radii r and r1 in the formulas (1) and (2) may be used as a locus of a quadratic function of the shift amount a or a multi-order function higher than a cubic function. For example, when r is a quadratic function of a, it is possible to increase the rising of the opening regions of the first and second tubes 6 and 7 in the lap region.

2. In the first and second embodiments, the pinch type servo valve is in an equilibrium state at the time of normal close, but the normal state other than the normal close, one side open, one side close, etc. is set as a steady state so as to maintain the equilibrium state of this steady state. You may comprise.

3. Moreover, as shown to Fig.17 (a) of a modification, the convex part 37a and the recessed part 37b are provided in the location where the tube 37 is opened and closed, and as shown in FIG.17 (b), obstruction | occlusion of the tube 37 is carried out. It is good also as a structure which can obstruct | occlude a tube (6, 7, 26, 27) more reliably by inserting in the recessed part 37b of the convex part 37a. FIGS. 17 (a) and 17 (b) are longitudinal sectional views showing the open / close state of the tube of the modification.

4). In the first and second embodiments, the configuration in which each single tube (6, 7, 26, 27) is controlled to open and close has been described. However, the eccentric cams (3, 23) respectively press a plurality of tubes. It is good also as a structure which is set as the structure which cancels | releases a press and controls opening and closing of several tubes.

5. In the first and second embodiments, the first and second movable elements 4 and 5 and the third and fourth movable elements 24 and 25 are in contact with the eccentric cam (3, 23) from one direction and the opposite direction, respectively. However, it may be configured to contact the eccentric cam (3, 23) from any two directions.

6). Further, a linear bearing may be provided between the first and second movable elements 4 and 5 and the frame bodies 17 and 17A or between the third and fourth movable elements 24 and 25 and the frame body 17A. As a result, the operations of the first and second movers 4 and 5 and the third and fourth movers 24 and 25 are smoothed, and the mechanical reliability is improved. Therefore, the reliability of the pinch type servo valves V and 2V is improved, and the life can be extended.
7). In the first and second embodiments, the tubes (6, 7, 26, 27) have been described by exemplifying elastic tubes. However, the tubes (6, 7, 26, 27) may not necessarily have elasticity as long as they are flexible.

8). In the second embodiment, the case where the phase of the eccentric cam 3 of the first operating portion Va and the phase of the second eccentric cam 23 of the second operating portion Vc differ by 180 degrees has been described. It is good also as a structure which changes the circuit structure by the side of a manifold, without shifting a phase. According to this configuration, it is possible to obtain a manifold having a 4-port valve (or 5-port valve) and a 4-port valve (or 5-port valve) having no leakage in the pipe line and good response.

9. In the first and second embodiments, the pinch-type servo valves V and 2V have been described by way of example in which the flow of air is controlled. However, the configuration may be such that the flow of gas or liquid other than air is controlled.

10. In the first and second embodiments, the first and second tube displacement adjusting portions 8 and 9 are described by exemplifying the female screws 8a and 9a. However, instead of the female screws 8a and 9a, bolts such as hexagonal holes are provided. A bolt, a hexagon head bolt, etc. may be sufficient, and arbitrary screws can be applied to the first and second tube displacement adjusting sections 8 and 9.

11. The first and second embodiments show examples of the configurations described in the claims of the present application, and various modifications and specific forms are possible within the scope of the claims. is there.

<< Embodiment 3 >>
FIG. 19A shows the eccentric cam 33 of the first operating part Vd and the eccentric cam of the second operating part Ve provided on the rotating shaft 2 of the motor 1 of the pinch type servo valve according to the third embodiment of the present invention. FIG. 19B is a perspective view of the eccentric cam 33 according to the third embodiment.

The pinch type servo valve of the third embodiment is formed by differentiating each cam curve of the eccentric cam 33 of the first operating part Vd and the eccentric cam 34 of the second operating part Ve. Furthermore, the eccentric radii r at the time of closing the eccentric cams 33 and 34 are each formed by slightly inflating outward. For example, the eccentric radius r is slightly expanded outward from the semicircular shape.
Since other configurations are the same as those of the first embodiment, the same components are denoted by the same reference numerals, and detailed description thereof is omitted.

In the pinch type servo valve according to the third embodiment, the eccentric cam 33 of the first operating part Vd and the eccentric cam 34 of the second operating part Ve are fixed to the rotating shaft 2 of the motor 1.
The eccentric cam 33 of the first operating part Vd and the eccentric cam 34 of the second operating part Ve are fixed to the rotary shaft 2 using keys k11 and k12, respectively. A return cam 10 is formed integrally with the rotary shaft 2 between the eccentric cam 33 and the eccentric cam 34.
The cam curves of the eccentric cam 33 of the first operating portion Vd and the eccentric cam 34 of the second operating portion Ve are the same, and only the phase is shifted by 180 °. Therefore, only the eccentric cam 33 of the first operating part Vd will be described.

FIG. 20A is a diagram showing a half of the curve constituting the contour 33r of the eccentric cam 33, and FIG. 20B shows the angle θ of the cam curve 33c of the eccentric cam 33 and the eccentric radius r. It is the graph which showed the relationship.
The curves constituting the contour 33r of the eccentric cam 33 are formed symmetrically. FIG. 20A shows one side thereof. In this example, the case where the curve constituting the contour 33r of the eccentric cam 33 is symmetric is illustrated, but the curve constituting the contour 33r, 34r of the eccentric cam 33, 34 is not necessarily symmetric. .

  As shown in FIG. 20B, the cam curve 33c on one side of the eccentric cam 33 includes a first region 33c1 (shown by a solid line in FIGS. 20A and 20B) and a second region 33c2 (see FIG. 20B). 20 (a) and (b) are indicated by a broken line) and the third region 33c3 (shown by a dashed line in FIGS. 20 (a) and (b)) is connected.

The locus of the cam curve in the first region 33c1 is expressed by equation (2).

The locus of the cam curve in the second region 33c2 is expressed by Expression (3).

The locus of the cam curve in the third region 33c3 is expressed by Expression (4).

The cam curve 33c of the eccentric cam 33 is continuous and the inclination changes smoothly. That is, the cam curve 33c of the eccentric cam 33 is formed by a differentiable line.
In other words, the cam curve 33c of the eccentric cam 33 is continuously formed by a smooth line.

For example, the boundary point p11 between the first region 33c1 and the second region 33c2 can be differentiated, and the boundary point p12 between the second region 33c2 and the third region 33c3 can be differentiated. In contrast, if the boundary point p12 of the second region 33c2 is connected to the straight line c9, the inclination of the boundary point p12 is not uniquely determined and cannot be differentiated.
By making the cam curve 33c of the eccentric cam 33 differentiable, the eccentric cam 33 can rotate smoothly. Therefore, the stability of control of the eccentric cam 33 is improved.

In other words, since the cam curve 33c of the eccentric cam 33 is a smooth line, the eccentric cam 33 rotates smoothly and the stability of control is improved.
On the other hand, the cam curve 33c of the eccentric cam 33 is continuous, but if the inclination changes abruptly (when it cannot be differentiated), the operation of the eccentric cam 33 will not be smooth.

Similarly, by making the cam curve 34c (see FIG. 20B) of the eccentric cam 34 differentiable, the eccentric cam 34 rotates smoothly and control stability is improved.
Further, the third region 33c3 of the cam curve 33c in which the eccentric cam 33 closes the first tube 6 or the second tube 7 increases the eccentric radius r so as to bulge outward. For example, the eccentric radius r may be a slightly expanded shape rather than a semicircle.

Here, leakage can be reduced by increasing the value of the eccentric radius r, but at the same time, the rotational load of the eccentric cam 33 increases. The length of the eccentric radius r is determined within a range where the load does not become too large.
Similarly, the third region of the cam curve where the eccentric cam 34 closes the third tube 26 or the fourth tube 27 increases the eccentric radius r so as to bulge outward.

  By increasing the eccentric radius r of the eccentric cams 33 and 34, the force for sealing the tube (6, 7, 26, 27) at the time of closing can be increased. For this reason, the degree of sealing of the tubes (6, 7) is increased, and fluid leakage at the time of closing can be prevented. Or the fluid leakage at the time of obstruction | occlusion can be suppressed more. For example, when the tube (6, 7, 26, 27) cannot be closed due to processing error, assembly error, etc., the tube (6, 7) is formed by expanding the eccentric radius r outward. , 26, 27) can be reliably closed.

<< Embodiment 4 >>
FIG. 21A is a view of the eccentric cam 53 of the pinch type servo valve according to the fourth embodiment of the present invention viewed from the direction of the rotating shaft 2, and FIG. 21B is a return having a left-right asymmetric contour. FIG.

As shown in FIG. 21 (a), the pinch type servo valve according to the fourth embodiment is asymmetrical with respect to the eccentric cam 53 in place of the eccentric cam 3 according to the first embodiment and the eccentric cams 3 and 23 according to the second embodiment. This is the shape.
As shown in FIG. 21, the eccentric cam 53 of the fourth embodiment has an eccentric radius r of the curve 53c1 constituting the right half side contour as the same circular locus, and the curve 53c2 constituting the left half side contour. The eccentric radius r is formed such that the lower side is continuous with the eccentric radius r on the right half side and becomes longer toward the upper side.
The lower side of the eccentric cam 53 is the open side of the tubes (6, 7), and the upper side of the eccentric cam 53 is the closed side of the tubes (6, 7).

Thus, the eccentric cam 53 for closing the tubes (6, 7) may not be symmetrical. As described above, the curves constituting the contours of the eccentric cam 3 of the first embodiment and the eccentric cams 3 and 23 of the second embodiment may not be symmetrical.
By making the curve constituting the contour of the eccentric cam 53 asymmetrical, the flow characteristics can be designed independently on the filling side (when closed) and the discharge side (when opened). Further, by making the eccentric cam 53 left-right asymmetric, when a plurality of eccentric cams 53 are used, it is possible to design the filling side and the discharge side according to various conditions.
Therefore, the design freedom of the pinch type servo valve is improved.

As shown in FIG. 21B, the curve constituting the contour (cam surface 50m) of the return cam 50 (corresponding to the return cam 10 in FIG. 9) may also be formed as an asymmetric shape. As a result, when the power supply of the pinch type servo valve is cut off, the eccentric cams 3 and 23 (see FIG. 9) are offset from the neutral position, or the eccentric cams 3 and 23 can be freely angled. You can stop it.
In addition, it is possible to change where the eccentric cams 3 and 23 are stopped.

<Modification of Embodiment 4>
FIG. 22 is a perspective view of the eccentric cams 3 and 23 and the return cam 20 according to a modification of the fourth embodiment. In FIG. 22, o1 indicates a neutral line of the eccentric cams 3 and 23, and o20 indicates a neutral line of the return cam 20.

In a modification of the fourth embodiment, the return cam 20 is configured at a position having an offset angle θ1 with respect to the eccentric cams 3 and 23.
Thus, the return cam 20 may be in a position having an offset angle θ1 with respect to the first eccentric cam 3 and the second eccentric cam 23 (see FIG. 9).

By setting the return cam 20 at a position having an offset angle θ1 with respect to the first eccentric cam 3 and the second eccentric cam 23, the eccentric cam 3 and the eccentric cam 23 can be placed at arbitrary positions. You can return. For example, the tubes (6, 7, 26, 27) can be normally opened.
Alternatively, by providing the eccentric cam 3 and the eccentric cam 23 with an offset angle, the opening and closing timings of the tubes (6, 7) and the tubes (26, 27) can be variously changed.

<< Embodiment 5 >>
FIG. 23A is a perspective view showing a case where the eccentric cam 3 and the rotary shaft 2 of Embodiment 5 according to the present invention are formed integrally. FIG. 23B is a perspective view showing a case where the eccentric cam 3 is fixed to the rotary shaft 2 using the key k13. FIG. 23 (c) is a perspective view showing the case where the eccentric cam 3 is fixed on the rotary shaft 2 with a key 3p.

The fifth embodiment shows a plurality of examples of fixing methods of the eccentric cams 3 and 23 of the first and second embodiments.
FIG. 23A shows the eccentric cam 3 formed integrally with the rotary shaft 2. That is, the eccentric cam 3 is integrated with the rotating shaft 2. The eccentric cam 3 and the rotating shaft 2 may be formed by cutting or die forming. For example, the eccentric cam 3 and the rotary shaft 2 may be molded by aluminum die casting, or may be formed by injection molding using a resin as long as necessary conditions such as strength and durability are satisfied.

  If the eccentric cam 3 and the rotating shaft 2 are integrally formed, the assembly work of the eccentric cam 3 and the rotating shaft 2 is eliminated, so that productivity is improved. Moreover, the dimensional accuracy of the eccentric cam 3 and the rotating shaft 2 increases. In addition, if the eccentric cams 3 and 23 and the rotating shaft 2 are integrally formed, the relative positional accuracy of the eccentric cam 3 and the eccentric cam 23 with respect to the rotating shaft 2 is increased. Further, the assembly work of the rotating shaft 2 and the eccentric cams 3 and 23 is eliminated, so that productivity is improved.

FIG. 23B shows a case where the eccentric cam 3 is fixed to the rotary shaft 2 by using a key k13. The rotary shaft 2 is formed with a key groove (not shown). By inserting a key k13 into the key groove between the eccentric cam 3 and the rotary shaft 2, the eccentric cam 3 is firmly fixed to the fixed shaft. Can be fixed.
FIG. 23 (c) shows a case where the eccentric cam 3 is fixed on the rotary shaft 2 with a key k14 with a play 3p.

  The eccentric cam 3 is formed with a key groove 3o into which the play 3p, which is a space between the key k14 and the key k14, is inserted. The rotary shaft 2 is formed with a key groove (not shown). By inserting the key k14 into the key groove between the eccentric cam 3 and the rotary shaft 2 and the key groove 3o, the eccentric cam 3 is The fixed shaft 2 is fitted with 3p play. That is, the eccentric cam 3 is fitted into the rotary shaft 2 with a gap.

Thereby, the eccentric cam 3 has a backlash (play 3p) between it and the rotating shaft 2. For this reason, the eccentric cam 3 starts rotating together with the rotating shaft 2 after the rotating shaft 2 rotates to a position where the rotation starts. That is, the eccentric cam 3 can be configured to interlock with the rotating shaft 2.
The configuration having the play 3p between the eccentric cam 3 and the rotating shaft 2 may be a configuration other than the configuration shown in FIG.

<< Embodiment 6 >>
FIG. 24 is a partially cutaway perspective view of the tube (6, 7, 26, 27) shown in the first and second embodiments.
FIG. 25 is a partially cutaway perspective view showing a tube 36 having a flat shape in Example 1 of Embodiment 6. FIG.
The sixth embodiment shows an example of the shape of the tube (6, 7, 26, 27).

The shape of the tube (6, 7, 26, 27) (see FIG. 24) shown in the first and second embodiments is not necessarily circular if it is formed in a tubular shape.
For example, the shape of the tubes (6, 7, 26, 27) shown in the first and second embodiments may be a tube 36 having a flat cross section as shown in FIG.

The tube 36 of Example 1 of Embodiment 6 includes flat plate-like tube walls 36a and 36b facing each other and semi-tubular tube walls 36c and 36d facing each other.
If the sides pressed by the eccentric cams 3 and 23 are flat tube walls 36a and 36b, the reaction force when the tube 36 is closed and deformed compared to the circular tubes (6, 7, 26 and 27) (see FIG. (Elastic force) decreases. Therefore, the pressing force applied to the tube 36 by the eccentric cams 3 and 23 is small, and the torque of the motor 1 can be reduced.

Further, since the elastic deformation amount when the tube 36 is closed is small, the generated stress is small, and the durability of the tube 36 is improved.
FIG. 26 is a partially cutaway perspective view showing a tube 37 having a flat shape and a combined end portion of Example 2 of Embodiment 6. FIG.
The tube 37 of Example 2 of Embodiment 6 has flat plate-like tube walls 37a and 37b facing each other and matching end portions 37c and 37d having a shape obtained by combining the flat plates.

  If the sides pressed by the eccentric cams 3 and 23 are flat tube walls 37a and 37b, the reaction force (elastic force) at the time of closing deformation of the tube 37 compared to the tube (6, 7, 26, 27). ) Is small. Therefore, the pressing force applied to the tube 36 by the eccentric cams 3 and 23 is small, and the torque of the motor 1 can be reduced. Further, the durability of the tube 37 is also improved.

In addition, since the tube 37 has matching end portions 37c and 37d having a shape in which flat plates are combined, the deformation amount when the tube 37 is closed is smaller at the end portion than the tube 36 of Example 1 of the sixth embodiment.
Therefore, since the fluctuation of the stress generated in the mating end portions 37c and 37d at the time of opening / closing deformation of the tube 37 is small, the durability of the tube 37 is further improved and the fatigue life can be extended.

<Modification of Embodiment 6>
In the sixth embodiment, an example of the shape of the tube (6, 7, 26, 27) has been shown. However, a location that is opened and closed by the eccentric cams 3 and 23 forms a flow path, can be opened and closed, and watertight The part to be opened and closed does not necessarily have a tube shape.
For example, it is good also as a structure which forms the location which opens and closes water-tight with two films, and a tube continues water-tightly on the upstream and downstream sides of the location which opens and closes, respectively.

Or it is good also as a structure which forms the location which opens and closes easily and is watertight, and a tube continues watertightly at the both ends of the location to open and close.
Or the location to open and close is comprised with the watertight manifold which can be opened and closed, and it is good also as a structure which connects a tube watertightly to this manifold.

<< Embodiment 7 >>
FIG. 27A is a perspective view of the pinch type servo valve 7V of the seventh embodiment as viewed obliquely from above. FIG. 27B is an arrow view of the pinch type servo valve 7V as viewed from the C direction. FIG. 27C is a front view of the micrometer 38a.
The seventh embodiment shows an example of wrap amount adjustment using screws.

In the pinch type servo valve 7V according to the seventh embodiment, the return cam 10 is disposed between the first operating portion Va and the second operating portion Vc provided in the pinch type servo valve 2V according to the second embodiment. And the 1st operation part Va is provided with the 1st tube displacement adjustment part 38 which adjusts with micrometer 38a, and the 2nd tube displacement adjustment part 39 which adjusts with micrometer 39a is provided. Moreover, the 3rd tube displacement adjustment part 48 which adjusts the 2nd action | operation part Vc with the micrometer 48a, and the 2nd tube displacement adjustment part 49 adjusted with the micrometer 49a are provided.
Since other configurations are the same as those of the second embodiment, the same components are denoted by the same reference numerals, and detailed description thereof is omitted.

<Micrometers 38a, 39a, 48a, 49a>
Since the micrometers 38a, 39a, 48a, and 49a have the same configuration, the configuration of the micrometer 38a shown in FIG. 27C will be described, and the description of the micrometers 39a, 48a, and 49a will be omitted.

As shown in FIG. 27C, the micrometer 38a includes a spindle 38a1, a nut 38a2, a screw portion 38a3, and a grip portion 38a4. The tip of the spindle 38a1 has a substantially spherical shape.
The spindle 38a1, the screw part 38a3, and the grip part 38a4 are integrated.

  The male screw of the screw portion 38a3 is screwed into the female screw of the nut 38a2. Therefore, by turning the grip portion 38a4, the spindle 38a1, the screw portion 38a3, and the grip portion 38a4 advance and retract with respect to the nut 38a2.

  From the above configuration, by fixing the nut 38a2 to the frame 27A, the position of the spindle 38a1 can be advanced and retracted with respect to the adjustment plate 38b.

<Position adjustment of the adjusting plates 38b, 38b, 48b, 49b>
In the first operating portion Va of the pinch type servo valve 7V of the seventh embodiment, the opening degree of the first tube 6 and the opening degree of the second tube 7 are adjusted as follows.
By turning the grip portion 38a4 of the micrometer 38a, the spindle 38a1 contacts the adjustment plate 38b, and the opening / closing degree of the first tube 6 is adjusted. Further, by turning the grip portion 39a4 of the micrometer 39a, the spindle 39a1 comes into contact with the adjustment plate 39b, and the opening / closing degree of the second tube 7 is adjusted.

Similarly, in the second operating portion Vc of the pinch type servo valve 7V, the opening degree of the third tube 26 and the opening degree of the fourth tube 27 are adjusted as follows.
By turning the grip portion 48a4 of the micrometer 48a, the spindle 48a1 comes into contact with the adjustment plate 48b and the degree of opening and closing of the third tube 26 is adjusted. Further, by turning the grip portion 49a4 of the micrometer 49a, the spindle 49a1 abuts on the adjustment plate 49b, and the opening / closing degree of the fourth tube 27 is adjusted.

  On the side of the adjustment plate 38b of the first operating portion Va, a positioning screw 38c that contacts the adjustment plate 38b from the side is screwed into the frame 27A. Further, on the side of the adjustment plate 39b of the first operating portion Va, a positioning screw 39c that contacts the adjustment plate 39b from the side is screwed into the frame 27A.

  Similarly, on the side of the adjustment plate 48b of the second operating portion Vc, a positioning screw 48c that contacts the adjustment plate 48b from the side is screwed into the frame 27A. In addition, a positioning screw 49c that abuts the adjustment plate 49b from the side is screwed into the frame body 27A on the side of the adjustment plate 49b.

<Positioning of adjusting plates 38b, 38b, 48b, 49b and adjustment of dead zone>
In the first operation unit Va, the opening / closing degree of the first tube 6 is adjusted by the micrometer 38a. At this time, the dead zone of the first tube 6 is adjusted. Thereafter, the positioning screw 38c is brought into strong contact with the side of the adjustment plate 38b to position the adjustment plate 38b. After the positioning adjustment of the adjustment plate 38b, the micrometer 38a is removed.

  Further, the opening / closing degree of the second tube 7 is adjusted by the micrometer 39a. At this time, the dead zone of the second tube 7 is adjusted. Thereafter, the positioning screw 39c is brought into strong contact with the side of the adjustment plate 39b to position the adjustment plate 39b. After positioning adjustment of the adjustment plate 39b, the micrometer 39a is removed.

  Similarly, in the second operation unit Vc, the degree of opening and closing of the third tube 26 is adjusted by the micrometer 48a. At this time, the dead zone of the third tube 26 is adjusted. Thereafter, the positioning screw 48c is brought into strong contact with the side of the adjustment plate 48b to position the adjustment plate 48b. After the positioning adjustment of the adjustment plate 48b, the micrometer 48a is removed.

  Further, the open / close degree of the fourth tube 27 is adjusted by the micrometer 49a. At this time, the dead zone of the fourth tube 27 is adjusted. Thereafter, the positioning screw 49c is brought into strong contact with the side of the adjustment plate 49b to position the adjustment plate 49b. After the positioning adjustment of the adjustment plate 49b, the micrometer 49a is removed.

<Adjustment of “0” of effective sectional area of tube (6, 7, 26, 27) and adjustment of pressing force and pressing amount>
By adjusting the position of the adjustment plate 38b with the micrometer 38a in the first operating portion Va, the underlap or overlap of the first tube 6 as shown in FIG. 18B can be adjusted. Similarly, by adjusting the position of the adjustment plate 9b with the micrometer 39a, the underlap or overlap of the second tube 7 can be adjusted.

  By adjusting the position of the adjustment plate 48b with the micrometer 48a in the second operating portion Vc, the underlap or overlap of the third tube 26 can be adjusted. Similarly, the underlap and the overlap of the fourth tube 27 can be adjusted by adjusting the position of the adjustment plate 49b with the micrometer 49a.

  Specifically, in the first operating portion Va, the effective cross-sectional area of the first tube 6 can be adjusted to “0” by adjusting the position of the adjustment plate 38b with the micrometer 38a. At this time, the pressing force and pressing amount of the first tube 6 by the eccentric cam 3 can be adjusted. Similarly, the effective cross-sectional area of the second tube 7 can be adjusted to “0” by adjusting the position of the adjustment plate 39b with the micrometer 39a. At this time, the pressing force and pressing amount of the second tube 7 by the eccentric cam 3 can be adjusted.

  Similarly, in the second operating portion Vc, the effective cross-sectional area of the third tube 26 can be adjusted to “0” by adjusting the position of the adjustment plate 48b with the micrometer 48a. At this time, the pressing force and pressing amount of the third tube 26 by the eccentric cam 23 can be adjusted. Similarly, the effective cross-sectional area of the fourth tube 27 can be adjusted to “0” by adjusting the position of the adjustment plate 49b with the micrometer 49a. At this time, the pressing force and the pressing amount of the fourth tube 27 by the eccentric cam 23 can be adjusted.

  According to the seventh embodiment, the opening and closing of the left and right first tubes 6 and 26 and the second tubes 7 and 27 can be independently adjusted by the micrometers 38a, 39a, 48a, and 49a. Specifically, “0” adjustment of the effective cross-sectional area (underlap and overlap adjustment) and adjustment of the pressing force and the pressing amount of the tube (6, 7, 26, 27) can be performed. In particular, fine adjustment is possible by using the micrometers 38a, 39a, 48a, and 49a.

<< Other Embodiments >>
1. In the first to seventh embodiments and the modified examples, various configurations have been described. However, the configurations may be appropriately combined.

2. Moreover, the said Embodiments 3-7, a modification, etc. show an example of the structure described in the claim of this application, and various deformation | transformation forms, concrete examples are within the scope of the claim. Forms are possible.

1 Motor (drive source)
2 Rotating shaft 3 Eccentric cam (first cam)
3a Semicircular part (cam surface on the outer peripheral surface having a semicircular cross-sectional shape)
3h Eccentric part (cam surface of outer peripheral surface having a cross-sectional shape shorter than the radius of the semicircle)
3m Cam surface of the first cam 3p Play 4 First mover (first movable member)
4a Bearing (first bearing)
5 Second mover (second movable member)
5a Bearing (second bearing)
6 1st tube (1st flexible pipe | tube, 1st flow path)
7 Second tube (second flexible tube, second flow path)
8 1st adjustment means (1st tube displacement adjustment part)
8a female screw (screw)
9 Second adjustment means (second tube displacement adjustment section)
9a female screw (screw)
10 return cam 11 first return mover (third movable member, steady state stabilization means)
11a Bearing (third bearing)
12 Second mover for return (fourth movable member, steady state stabilization means)
12a Bearing (fourth bearing)
13 First return spring (elastic member, first elastic member, steady state stabilization means)
14 Second return spring (elastic member, second elastic member, steady state stabilization means)
28 3rd tube displacement adjustment part (3rd adjustment means)
29 4th tube displacement adjustment part (4th adjustment means)
23 Second eccentric cam (second cam)
23m Cam surface 24 3rd mover (5th movable member)
25 Fourth mover (sixth movable member)
26 3rd tube (3rd flexible pipe | tube, 1st flow path)
27 Fourth tube (fourth flexible tube, second flow path)
33 Eccentric cam (first cam)
33c Cam curve 34 Eccentric cam (second cam)
34c cam curve
36, 37 tube (tube with flat cross section)
38c Positioning screw (first fixing means)
39c Positioning screw (second fixing means)
50 Return cam (asymmetrical return cam)
50m cam surface 53 Eccentric cam (first asymmetrical cam)
cp1 first control port (control port)
cp2 Second control port (control port)
M, Mn Manifold sp1 Supply port S Pneumatic cylinder (control target)
V, 2V pinch type servo valve (pinch type valve)
Vb Neutral position return section (steady state stabilization means)

Claims (30)

A rotating shaft driven by a drive source;
A first cam fixed to the rotating shaft;
A first movable member and a second movable member that move in contact with the cam surface of the first cam from two directions;
A first flexible tube that is pressed and closed by the first movable member and is released by releasing the pressure of the first movable member;
A pinch-type valve comprising: a second flexible tube that is pressed and closed by the second movable member, and is released when the second movable member is released and through which fluid passes. A rotating shaft driven by a drive source;
A first cam formed integrally with the rotating shaft;
A first movable member and a second movable member that move in contact with the cam surface of the first cam from two directions;
A first flexible tube that is pressed and closed by the first movable member and is released by releasing the pressure of the first movable member;
A pinch-type valve comprising: a second flexible tube that is pressed and closed by the second movable member, and is released when the second movable member is released and through which fluid passes. A rotating shaft driven by a drive source;
A first cam interlocking with the rotating shaft;
A first movable member and a second movable member that move in contact with the cam surface of the first cam from two directions;
A first flexible tube that is pressed and closed by the first movable member and is released by releasing the pressure of the first movable member;
A pinch-type valve comprising: a second flexible tube that is pressed and closed by the second movable member, and is released when the second movable member is released and through which fluid passes. A rotating shaft driven by a drive source;
A first cam interlocking with the rotating shaft;
A first movable member and a second movable member that move in contact with the cam surface of the first cam from two directions;
A first flow path that is pressed and closed by the first movable member and is released by releasing the pressure of the first movable member;
A pinch type valve comprising: a second flow path that is pressed and closed by the second movable member, and is released when the second movable member is released from the pressure, and through which a fluid passes. In the pinch type valve according to claim 3 or 4,
A pinch type valve characterized in that there is play between the rotating shaft and the first cam. In the pinch type valve according to any one of claims 1 to 4,
The pinch-type valve, wherein the cam surface is formed asymmetrically about the rotation axis. In the pinch type valve according to any one of claims 1 to 4,
The cam surface is symmetric about the rotation axis,
The pinch, wherein the first movable member and the second movable member are arranged to face each other from one direction and the opposite direction on the cam surface forming the outer peripheral surface of the first cam. Type valve. In the pinch type valve according to any one of claims 1 to 4,
A pinch type valve characterized in that a cam curve forming the cam surface of the first cam is differentiable. In the pinch type valve according to any one of claims 1 to 4,
The cam surface of the first cam has an outer circumferential cam surface having a cross-sectional shape of at least a semicircle, and an outer circumference having a cross-sectional shape of an eccentric radius shorter than the radius of the semicircle from the center of the semicircle. A pinch-type valve characterized by having a cam surface. The pinch type valve according to claim 9,
As for the eccentric radius r, the radius of the semicircle is R, and the deviation amount a is
r = R−aθ / (π / 2)
A pinch-type valve characterized by In the pinch type valve according to any one of claims 1 to 3,
A pinch type comprising: at least one of a first adjusting means for adjusting a deformation amount of the first flexible tube or a second adjusting means for adjusting a deformation amount of the second flexible tube. valve. In the pinch type valve according to any one of claims 1 to 3,
Comprising at least one of first adjustment means for adjusting the deformation amount of the first flexible tube or second adjustment means for adjusting the deformation amount of the second flexible tube;
The first adjusting means uses a screw,
A pinch type valve characterized in that the second adjusting means uses a screw. In the pinch type valve according to any one of claims 1 to 3,
Comprising at least one of first adjustment means for adjusting the deformation amount of the first flexible tube or second adjustment means for adjusting the deformation amount of the second flexible tube;
At least one of the first fixing means for fixing the deformation amount of the first flexible tube or the second fixing means for fixing the deformation amount of the second flexible tube is provided. Pinch type valve. In the pinch type valve according to any one of claims 1 to 4,
A pinch type valve characterized by comprising steady state stabilization means for bringing the pinch type valve into a steady state using a process in which the elastic force of the elastic member decreases. The pinch type valve according to claim 14,
The steady state stabilization means includes
A return cam fixed to the rotary shaft and having a portion whose diameter from the center of rotation is shorter than other portions;
A third movable member and a fourth movable member that move in contact with the cam surface of the return cam from both sides;
A first elastic member that is the elastic member that presses the third movable member toward the cam surface of the return cam;
A pinch-type valve comprising: a second elastic member that is the elastic member that presses the fourth movable member toward the cam surface of the return cam. The pinch type valve according to claim 15,
The pinch-type valve, wherein the cam surface of the return cam is formed asymmetrically about the rotation axis. The pinch type valve according to claim 15,
The pinch-type valve, wherein the cam surface of the return cam is formed in a symmetrical shape having a curvature. The pinch type valve according to claim 17,
The pinch-type valve, wherein the cam surface of the return cam is formed in an elliptical shape. The pinch type valve according to claim 15,
A pinch type valve comprising at least one of third adjusting means for adjusting a deformation amount of the first elastic member and a fourth adjusting means for adjusting a deformation amount of the second elastic member. In the pinch type valve according to any one of claims 1 to 4,
The first movable member has a first bearing that contacts the cam surface of the first cam;
The second movable member has a second bearing that contacts the cam surface of the first cam. The pinch type valve according to claim 15,
The third movable member has a third bearing that contacts the cam surface of the return cam,
The fourth movable member has a fourth bearing that contacts the cam surface of the return cam. In the pinch type valve according to any one of claims 1 to 3,
The first flexible tube returns to the shape before the pressing by its own elastic force when the pressing of the first movable member is released,
The pinch-type valve, wherein when the second movable member is released from the pressure, the second flexible tube returns to its pre-pressed shape by its own elastic force. In the pinch type valve according to any one of claims 1 to 3,
At least one of the first flexible tube and the second flexible tube is a tube having a flat cross section. In the pinch type valve according to any one of claims 1 to 4,
A second cam fixed to the rotating shaft;
A fifth movable member and a sixth movable member that move in contact with the cam surface of the second cam from two directions, respectively;
A third flexible tube that is pressed and closed by the fifth movable member and is released by being released from being pressed by the fifth movable member;
A pinch-type valve comprising: a fourth flexible tube that is pressed and closed by the sixth movable member, and is released by being released from being pressed by the sixth movable member. The pinch type valve according to claim 24,
A pinch type valve characterized in that a cam curve forming the cam surface of the second cam is differentiable. The pinch type valve according to claim 24,
A pinch type valve characterized in that the cam surface of the first cam and the cam surface of the second cam are 180 degrees out of phase. In the pinch type valve according to any one of claims 1 to 3,
A pinch-type valve comprising a plurality of configurations of the first cam, the first movable member, the second movable member, the first flexible tube, and the second flexible tube. The pinch type valve according to claim 27,
A pinch type valve comprising a plurality of steady state stabilizing means for bringing the pinch type valve into a steady state using a process in which the elastic force of the elastic member is reduced. A manifold comprising the pinch-type valve according to any one of claims 1 to 4. 30. The manifold of claim 29.
A manifold characterized in that a control port connected to a controlled object and a supply port to which the fluid is supplied are arranged on the same side or the same surface side.

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