JPWO2016110881A1 - Lightweight surface plate - Google Patents

Abstract

The aim is to develop a lightweight surface plate that can be manufactured at the lowest possible cost while ensuring sufficient performance. The lightweight surface plate A includes an upper plate 10, a lower plate 20, and an intermediate structure 30. The intermediate structure 30 is obtained by bending the plate material 31 to the opposite side every second time, and forming the folded plate material 34 in which the U-shaped portion 32 and the inverted U-shaped portion 33 are continuous, the U-shaped portion 32 or the inverted U-shaped portion 33. Are arranged in parallel so as to be located on opposite sides of each other. The contact surface 35 of the U-shaped portion 32 or the inverted U-shaped portion 33 is fixed to the bent plate material 34 disposed adjacently.

Description

  The present invention relates to a lightweight surface plate for placing precision instruments such as precision balances, optical instruments and measuring instruments.

  In recent years, with the rapid advancement of measurement technology, the influence of the surrounding environment on the manufacturing equipment in every manufacturing site including the semiconductor industry and nanotechnology has reached a stage where it cannot be ignored. For example, vibrations traveling on the floor, vibrations generated by surrounding equipment, and sound propagating from the air can cause problems with the resolution and data reproducibility of the measurement equipment installed on the vibration isolation table or workbench. It has been pointed out.

  In order to demonstrate the performance of the above precision instruments in the presence of such disturbances, a lightweight surface plate equipped with these precision instruments has high vibration resistance (anti-vibration mode), high resonance suppression, and high bending resistance mode. It is important to provide a high torsion resistant mode. Therefore, in the honeycomb surface plate described in Patent Document 1, the intermediate structure provided between the upper plate and the lower plate is a honeycomb structure, and the viscoelasticity is formed in the honeycomb space where the displacement of the lightweight surface plate due to vibration is large. An attempt was made to solve this problem by housing the body and consuming vibration energy with this viscoelastic body (see Patent Document 1).

JP 2005-195154 A

  Honeycomb structure is a very excellent structure in terms of material mechanics, but there is a problem that if you try to compose this with an extruded product of aluminum, the mold will be costly and it will not be profitable unless it is mass-produced, Large ones are not possible. Therefore, for example, the core part is cut at regular intervals in the steel plate material, the cut cut on the opposite side of the intersecting steel plate material is inserted and combined, and the plug is joined by welding to form a honeycomb structure. Although this method can be applied to this method, it can be applied to small-scale production, but there is a problem that it is very time-consuming and expensive. In addition, when used as a mounting table for precision equipment, it is necessary to drill a large number of female screw holes at regular intervals in the upper plate. This female screw hole processing is performed after drilling each one. However, tapping must be performed, and there is a problem that the cost is considerably increased in this aspect.

  The present invention has been made to solve such a conventional problem, and an object of the present invention is to develop a lightweight surface plate that can be manufactured at the lowest possible cost while sufficiently securing necessary performance.

The invention described in claim 1 includes the upper plate 10 on which the load W is installed, the lower plate 20 installed on the floor surface 50, and the intermediate structure 30 installed between the upper plate 10 and the lower plate 20. A lightweight surface plate A configured,
The intermediate structure 30 is obtained by bending the plate material 31 to the opposite side every second time to form a folded plate material 34 in which the U-shaped portion 32 and the inverted U-shaped portion 33 are continuous, and the U-shaped portion 32 or the inverted U-shaped portion 33. Are arranged in parallel so that they are located on opposite sides of each other,
The contact surface 35 of the U-shaped portion 32 or the inverted U-shaped portion 33 of the bent plate material 34 disposed adjacent to the bent plate material 34 is fixed.

The invention described in claim 2 is the lightweight surface plate A according to claim 1,
The upper plate 10 has a three-layer structure of an upper surface plate portion 11, an intermediate plate portion 12, and a lower surface plate portion 13. The upper surface plate portion 11 is provided with fastening screw insertion holes 11a at regular intervals. The part 13 is provided with a locking hole 13a corresponding to the fastening screw insertion hole 11a,
The intermediate plate portion 12 is made of resin, and a locking projection 12a inserted into the locking hole 13a is provided on the lower surface of the intermediate plate portion 12 and a female screw extending from the upper surface of the intermediate plate portion 12 to the locking projection 12a. A hole 12b is formed,
The female screw hole 12b is a fastening screw so that it is expanded by the fastening screw 40 screwed from the fastening screw insertion hole 11a and the hole edge of the locking hole 13a bites into the outer peripheral surface of the locking projection 12a and is locked. It is characterized by being formed thinner than 40.

The invention described in claim 3 is the lightweight surface plate A according to claim 1,
The upper plate 10 is composed of a two-layer structure of an upper plate portion 11 and an insert lower plate portion 14,
Fastening screw insertion holes 11a are formed in the upper surface plate portion 11 at regular intervals.
The insert lower plate portion 14 is made of resin, a through hole 14b is formed in accordance with the fastening screw insertion hole 11a, and a nut member 14a into which the fastening screw 40 screwed into the insertion hole 11a is screwed is a female screw hole. It is characterized by being inserted in conformity with 12b.

The invention described in claim 4 is the lightweight surface plate A according to any one of claims 1 to 3,
The core material 36 is disposed in the space K of the central portion T of the intermediate structure 30 where the lightweight surface plate A bends most when receiving the load W.

The invention described in claim 5 is the lightweight surface plate A according to claim 4,
A viscoelastic material 37 that contacts the lower surface of the upper plate 10 is attached to the core material 36.

  According to the present invention, since the intermediate structure 30 is constituted by the bent plate members 34 and their joining (adhesion or welding), the intermediate structure 30 can be manufactured by simple sheet metal work, and can be manufactured at a very low cost and with a lightweight surface plate. A can be produced. Moreover, since the bent plate members 34 arranged adjacent to each other are fixed to each other by a method such as adhesion or welding at the contact surface 35, the thickness of the fixed portion becomes twice the thickness of the plate, thereby the intermediate structure 30. The mechanical strength of is greatly improved.

  Then, instead of the female screw hole screwed directly on the conventional upper plate made of steel plate, the female screw hole 12b is formed in the resin intermediate plate portion 12 formed by a method such as injection molding. Or the existing nut member 14a can be inserted into the resin lower insert plate portion 14 by a method such as injection molding, so that the female screw hole processing can be omitted, and the processing cost is greatly increased. Can be reduced. In addition, since a resin plate is employed as a constituent member of the upper plate 10, a certain portion of vibration transmitted through this portion can be converted into heat and absorbed to be internally damped.

  The lightweight surface plate A is evaluated as having higher performance as the primary natural frequency is driven to the highest possible region. Since the natural frequency is calculated using the stiffness of the numerator and the mass of the denominator, the higher the stiffness or the lower the mass, the higher the natural frequency. By arranging the block-shaped core material 36 in the space K of the central portion T of 30 in advance, the rigidity can be increased without substantially increasing the mass of the lightweight surface plate A, and the natural frequency component of the lightweight surface plate A can be reduced. The required frequency can be increased. In addition, if the viscoelastic material 37 that contacts the lower surface of the upper plate 10 is attached to the core material 36, the vibration transmitted from the upper plate 10 can be effectively converted into heat by the viscoelastic material 37, High vibration resistance can be obtained.

It is a top view of Example 1 of the present invention. It is a side view of FIG. It is a top view of the intermediate structure used for the present invention. It is a perspective view of the bending board | plate material which comprises an intermediate structure. It is a partial expanded sectional view of Example 1 of the present invention. (A)-(c) is sectional drawing of the assembly procedure of FIG. It is a partial expanded sectional perspective view of Example 2 of the present invention. It is a perspective view of a core material.

  The present invention will be described below with reference to the illustrated embodiments. The lightweight surface plate A includes an upper plate 10, a lower plate 20, an intermediate structure 30 installed between the upper plate 10 and the lower plate 20, and a side plate 26 provided as necessary.

  As shown in FIG. 6, the first embodiment of the upper plate 10 has a three-layer structure of an upper surface plate portion 11, an intermediate plate portion 12, and a lower surface plate portion 13. The upper surface plate portion 11 is made of a steel plate or stone plate, and the upper surface thereof is finished to the required flatness and flatness. In the case of a steel plate, fastening screw insertion holes 11a are formed vertically and horizontally at regular intervals.

  The intermediate plate portion 12 is made of a hard resin plate, and a locking projection 12a protrudes from the lower surface thereof in accordance with the fastening screw insertion hole 11a. The locking protrusion 12a is slightly thicker at the tip than the base, and has a diameter that can be inserted into a locking hole 13a formed in the lower surface plate 13 described later. A female screw hole 12b extending from the upper surface of the intermediate plate 12 to the tip of the locking projection 12a is formed. The female screw hole 12b is expanded by the fastening screw 40 screwed from the fastening screw insertion hole 11a, and the hole edge of the locking hole 13a bites into the outer peripheral surface of the base portion of the locking projection 12a and is locked. The entire inner diameter of the female screw hole 12b or the inner diameter of the female screw hole 12b in the portion of the locking projection 12a is formed slightly narrower than the outer shape of the fastening screw 40. The female screw hole 12b does not need to be engraved with a female screw from the beginning, but is a simple round hole, and is engraved with a male screw of the fastening screw 40 by screwing a fastening screw 40 such as a tapping screw. Also good.

  The lower surface plate portion 13 is a simple thin steel plate having a locking projection 12a that is penetrated by press-fitting and protrudes to the lower surface. Locking holes 13a are formed vertically and horizontally at regular intervals according to the fastening screw insertion holes 11a. Yes. These are laminated in three layers as shown in FIG.

  The intermediate structure 30 is composed of a plurality of bent plate members 34. The bent plate material 34 has a zigzag shape in which the U-shaped portion 32 and the inverted U-shaped portion 33 are continuous by bending the plate material 31 to the opposite side every two times. The folded plate members 34 are arranged in parallel so that the U-shaped portions 32 or the inverted U-shaped portions 33 are located on the opposite sides, and the U-shaped portions 32 or the inverted U-shaped portions of the folded plate materials 34 arranged adjacent to each other. The contact surface 35 of the character-shaped part 33 is integrated by adhesion or welding. At this time, the length of the contact surface 35 of the U-shaped portion 32 or the inverted U-shaped portion may be the same length as the surface orthogonal to the contact surface 35, and either one is made longer than either one. Is also possible. In the case of the same length, the planar shape of the intermediate structure 30 is a square lattice. If the length is different, it becomes a rectangle. When the length of the contact surface 35 is made longer than the surface orthogonal to the contact surface 35, the portion of the contact surface 35 that becomes double due to fixation increases, and the rigidity increases. The bending length of the bending plate member 34 is selected so as not to interfere with the fastening screw insertion hole 11a.

  The core material 36 is used as necessary, and is formed according to the size accommodated in the space K of the lattice-like intermediate structure 30. Since the rigidity of the lightweight surface plate A is increased, the steel plate is bent to form a square frame formed of four pieces or a hollow square box formed of six pieces.

  A viscoelastic body 37 is also used as necessary. The viscoelastic body 37 is, for example, a member such as butyl rubber, and is attached to the outer peripheral surface of the core material 36 or is built in the core material 36 so that a part thereof is exposed from the core material 36. The viscoelastic body 37 is attached so as to contact the lower surface of the upper plate 10.

  And the intermediate structure 30 is installed on the lower board 20, the contact part of both is adhere | attached, and it integrates firmly. Subsequently, the upper plate 10 integrated on the intermediate structure 30 is placed, and the contact portion between the lower surface plate portion 13 and the intermediate structure 30 is bonded and firmly integrated. For example, a wooden side plate 26 is attached around the intermediate structure 30, and fastening bolts 45 inserted through the upper plate 10 and the side plate 26 are screwed to the lower plate 20, so that the whole is integrated. Is done.

  When it is used as a flooring material in a clean room, the magnitude of the load W to be placed is known in advance, and when the strength of the lightweight surface plate A must be reinforced, the lightweight constant A required number of core members 36 are fitted into the rectangular space K of the intermediate structure 30 in a place where the board A is most bent, generally in the central portion T, so that the strength of the lightweight surface board A is increased.

  In addition, when the vibration due to the disturbance of the lightweight surface plate A is disliked, the core material 36 equipped with the viscoelastic body 37 is used. At this time, the viscoelastic body 37 is preferably in contact with the lower surface of the upper plate 10.

  The lightweight surface plate A thus configured is used as a floor material for a clean room as described above. The leg 60 of the load W is fixed to the upper plate 10 by the fastening screw 40 as shown in FIG. At this time, as described above, the fastening screw 40 is screwed into the female screw hole 12b through the fastening screw insertion hole 11a, and is expanded to engage the locking protrusion 12a with the locking hole 13a. As a result, the load W can be reliably fixed to the upper plate 10.

  Embodiment 2 of the lightweight surface plate A is as shown in FIG. 7, and in this case, the upper plate 10 has a two-layer structure of an upper plate portion 11 and an insert lower plate portion 14. The upper surface plate portion 11 is the same as in the first embodiment, and a plurality of fastening screw insertion holes 11a are formed vertically and horizontally at regular intervals.

  The insert lower plate portion 14 is made of resin and has a through hole 14b formed in accordance with the fastening screw insertion hole 11a of the upper plate portion 11, and a nut member 14a is inserted into the through hole 14b. In the illustrated embodiment, the fastening screw insertion hole 11a of the upper surface plate portion 11 has a larger inner diameter than that of the first embodiment, and a cylindrical portion 14c protruding from the upper surface of the lower insert plate portion 14 is inserted from below. . The insert position of the nut member 14a is not limited to the illustrated embodiment, and any position may be used as long as the insert molding can be performed at the position where the fastening with the fastening screw 40 is possible. The lower insert plate portion 14 is integrated with the upper plate portion 11 by means such as bonding or screwing. The other parts are the same as in the first embodiment.

  A: Lightweight surface plate, T: Central portion, K: Space, W: Load (load), 10: Upper plate, 11: Upper surface plate portion, 11a: Fastening screw insertion hole, 12: Intermediate plate portion, 12a: Locking Protrusion, 12b: female screw hole, 13: bottom plate portion, 13a: locking hole, 14: insert lower plate portion, 14a: nut member, 14b: through hole, 14c: cylindrical portion, 20: lower plate, 26: side Face plate, 30: intermediate structure, 31: plate material, 32: U-shaped portion, 33: inverted U-shaped portion, 34: bent plate material, 35: contact surface, 36: core material, 37: viscoelastic material, 40: Fastening screw, 45: fastening bolt, 50: floor surface, 60: foot.

Claims (5)

A lightweight surface plate composed of an upper plate on which a load is installed, a lower plate installed on a floor surface, and an intermediate structure installed between the upper plate and the lower plate,
The intermediate structure is a folded plate material in which a U-shaped portion and an inverted U-shaped portion are continuous by bending the plate material to the opposite side every two times, and the U-shaped portion or the inverted U-shaped portion is positioned on the opposite side. Are arranged in parallel so that
A lightweight surface plate characterized in that a contact surface of a U-shaped portion or an inverted U-shaped portion of a bent plate material arranged adjacently is fixed. The upper plate has a three-layer structure of an upper plate portion, an intermediate plate portion, and a lower plate portion. Fastening screw insertion holes are formed in the upper plate portion at regular intervals, and fastening screws are inserted into the lower plate portion. A locking hole is drilled to match the hole,
The intermediate plate portion is made of resin, and the lower surface of the intermediate plate portion is provided with a locking projection that is inserted into the locking hole, and a female screw hole extending from the upper surface of the intermediate plate portion to the locking projection is provided. And
The female screw hole is formed narrower than the fastening screw so that it is expanded by the fastening screw threaded from the fastening screw insertion hole and the hole edge of the locking hole bites into the outer peripheral surface of the locking projection and is locked. The lightweight surface plate according to claim 1, wherein: The upper plate is composed of a two-layer structure of an upper plate portion and an insert lower plate portion,
Fastening screw insertion holes are drilled in the top plate at regular intervals.
The insert lower plate portion is made of resin, and a through hole is formed in accordance with the fastening screw insertion hole, and a nut member into which the fastening screw screwed in from the insertion hole is screwed is inserted into the female screw hole. The lightweight surface plate according to claim 1, wherein:   The lightweight surface plate according to any one of claims 1 to 3, wherein the core material is disposed in a space in a central portion of the intermediate structure, where the lightweight surface plate is most bent when subjected to a load. A lightweight surface plate.   5. The lightweight surface plate according to claim 4, wherein a viscoelastic material contacting the lower surface of the upper plate is attached to the core material.

Images