JPWO2016104632A1 - Vibration unit - Google Patents

Abstract

It is possible to reduce the size of a vibrating body unit that uses resonance vibration. The vibrating body unit 10 includes a loop spring 12 having an elastically deformable annular shape, an inner mass body 30 connected to the loop spring 12, and a spring mass system including the loop spring 12 and the inner mass body 30. An electromagnetic actuator 40 that vibrates at a predetermined frequency. The electromagnetic actuator 40 is disposed in the annular inner space 24 of the loop spring 12. Adding the outer mass body to the loop spring 12 in addition to the inner mass body 30 makes it easy to change the resonance frequency of the vibrating body unit 10.

Description

  The present invention relates to a vibrating body unit, and more particularly to a vibrating body unit that utilizes the natural vibration of a spring mass system composed of a spring and a mass body.

  In driving a spring mass system composed of a spring and a mass body, it is known that if a drive signal having a resonance frequency of the spring mass system is used, the power required for driving can be greatly reduced.

  For example, Patent Document 1 includes a piezoelectric actuator and a mechanical drive element that is driven by the piezoelectric actuator as a drive device that is a motor. The piezoelectric actuator and the mechanical drive element form a spring mass system. Is disclosed to have the highest efficiency in its resonant operation. Here, a first arc spring and a second arc spring are provided in parallel on the non-flexible base plate, and a piezoelectric actuator is stretched between the arcs of the first arc spring, and the second arc spring has its end face. And having a structure for supporting the mass body.

JP 2002-536146 A

  In the structure of Patent Document 1, a double-shaped bow spring is used, a piezoelectric actuator is arranged in the first bow spring, and a mass body is provided in the second bow spring, so that the overall shape is complicated and large.

  The objective of this invention is providing the vibrating body unit which enables size reduction.

  A vibrating body unit according to the present invention includes a loop spring having an elastically deformable annular shape, a mass body connected to the loop spring, and a spring mass system including the loop spring and the mass body at a predetermined frequency. And an electromagnetic actuator to be oscillated, wherein the electromagnetic actuator is arranged in an annular inner space of the loop spring.

  Moreover, in the vibrating body unit according to the present invention, it is preferable that the mass body is an inner mass body that is arranged in an annular inner space of the loop spring and connected to the loop spring.

  In the vibrating body unit according to the present invention, it is preferable that the mass body has an outer mass body that is disposed outside the annular shape of the loop spring and connected to the loop spring, separately from the inner mass body.

  In the vibrator unit according to the present invention, it is preferable that the loop spring is a cup-type spring having a three-dimensional closed shell structure that forms an inner space, and the cross-sectional shape of the shell is an annular shape.

  In the vibrating body unit according to the present invention, the shell forming the outer shape of the cup-shaped spring is preferably made of an electromagnetic wave shielding material.

  In the vibrating body unit according to the present invention, it is preferable that the cup-type spring includes an outer cup body and an inner cup body arranged with a predetermined parallel gap from the outer cup body.

  Moreover, the vibrating body unit according to the present invention preferably includes a rigid frame that holds the outer peripheral edge of the cup-shaped spring, and the electromagnetic actuator is attached to the rigid frame.

  Further, in the vibrating body unit according to the present invention, the cup-type spring includes a half-cup-type other side spring body and an inner circumferential side disk facing the other side spring body, and the other side spring body and the inner circumferential side. It is preferable that a rigid frame body that holds the disc is provided, and the electromagnetic actuator is attached to the rigid frame body.

  Further, in the vibrating body unit according to the present invention, the loop spring includes two long side plate portions facing each other and two long lengths with a uniform outer thickness between the outer peripheral surface and the inner peripheral surface. An oblong annular spring body having two semicircular annular portions connecting respective end portions of the side plate portions, and an electromagnetic actuator is attached to the long side plate portion on one side of the two long side plate portions. The mass body is preferably attached to the long side plate portion on the other side.

  Further, in the vibrating body unit according to the present invention, the oval spring body includes an outer peripheral side thin part, an inner peripheral side thin part, and a parallel slot between the outer peripheral side thin part and the inner peripheral side thin part, It is preferable to contain.

  In the vibrating body unit configured as described above, an electromagnetic actuator that vibrates a spring mass system composed of a loop spring and a mass body at a predetermined frequency is disposed in an annular inner space of the loop spring. The size can be the size of a loop spring, and the vibrator unit can be integrated into a small size.

  Further, in the vibrating body unit, the mass body is an inner mass body that is disposed in the annular inner space of the loop spring and is connected to the loop spring. Therefore, the overall size of the vibrating body unit is the size of the loop spring. Thus, the vibration unit can be integrated into a small size.

  In addition, the vibrating body unit has an outer mass body that is connected to the loop spring outside the annular shape of the loop spring, separately from the inner mass body, so that vibration can be achieved by changing the mass of the outer mass body. It becomes possible to change the resonance frequency of the body unit.

  Further, in the vibrating body unit, the loop spring is a cup-type spring having a three-dimensional closed shell structure that forms an inner space, and the cross-sectional shape of the shell is an annular shape. An actuator is arranged. Thereby, the whole size of the vibrating body unit becomes the size of the cup-shaped spring, and the vibrating body unit can be integrated into a small size.

  Further, in the vibrating body unit, the shell forming the outer shape of the cup-shaped spring is made of an electromagnetic shielding material, so that noise from the actuator is not leaked to the outside.

  In the vibrating body unit, the cup-type spring has a double spring structure of an outer cup body and an inner cup body arranged with a predetermined parallel gap from the outer cup body. As a result, even when the vibration direction is set to be inclined from the direction of gravity, the moment applied to the spring mass system can be suppressed and the vibration state can be stably maintained.

  Further, the vibrating body unit is provided with a rigid frame that holds the outer peripheral edge of the cup-shaped spring, and the electromagnetic actuator is attached to the rigid frame. As a result, even when the vibration direction is set to be inclined from the direction of gravity, the moment applied to the spring mass system can be suppressed and the vibration state can be stably maintained.

  In the vibrating body unit according to the present invention, the cup-type spring includes a semi-cup-type other-side spring body and an inner circumferential disc facing the other-side spring body. Then, the rigid frame body holds the other side spring body and the inner peripheral side disk, and the electromagnetic actuator is attached to the rigid frame body. As a result, even when the vibration direction is set to be inclined from the direction of gravity, the moment applied to the spring mass system can be suppressed and the vibration state can be stably maintained.

  Further, in the vibrating body unit according to the present invention, the loop spring includes two long side plate portions facing each other and two long lengths with a uniform outer thickness between the outer peripheral surface and the inner peripheral surface. It is an ellipsoidal spring body which has two semi-annular parts which connect each edge part of a side plate part. Thereby, it can be set as the vibrating body unit which integrated the structure where the both sides | surfaces were open | released, and a component structure becomes easy.

  Further, in the vibrating body unit according to the present invention, the oval spring body includes an outer peripheral side thin part, an inner peripheral side thin part, and a parallel slot between the outer peripheral side thin part and the inner peripheral side thin part. Including. This makes it possible to create a vibrating unit that is open on both sides with a parallel double spring integrated, and even when the direction of vibration is tilted from the direction of gravity, the moment applied to the spring mass system is suppressed and the vibration state is stabilized. Can be maintained.

It is a figure which shows the structure of the vibrating body unit of embodiment which concerns on this invention. Here, the electromagnetic actuator is an outer magnet type in which a magnet is disposed on the outer peripheral side of the coil. 1A is a cross-sectional view, and FIG. 1B is a top view. In the vibrating body unit according to the embodiment of the present invention, the electromagnetic actuator is a cross-sectional view of an example of an internal magnet type in which a magnet is disposed on the inner peripheral side of a coil. Here, an example in which the mass body includes an outer mass body separately from the inner mass body is shown. It is a figure which shows the example which incorporates the vibrating body unit of embodiment which concerns on this invention in a vibration testing apparatus. It is a figure which shows the example which incorporates the vibrating body unit of embodiment which concerns on this invention in a vibration isolator. It is a figure which shows the example which makes a cup type | mold spring a parallel double structure in the vibrating body unit of embodiment which concerns on this invention. FIG. 5A is a top view, and FIGS. 5B and 5C are side views from directions orthogonal to each other. It is a figure which shows the example which hold | maintains a cup type spring with a rigid body frame in the vibrating body unit of embodiment which concerns on this invention. FIG. 6A is a top view, and FIGS. 6B and 6C are side views from directions orthogonal to each other. As a modification of FIG. 6, it is a figure which shows the example which comprises a cup type spring with the other side spring body and an inner peripheral side disk. FIG. 7A is a top view, and FIGS. 7B and 7C are side views from directions orthogonal to each other. In the vibrating body unit according to the embodiment of the present invention, the loop spring is an integrated structure in which both side surfaces are opened, and is a diagram illustrating an example of a parallel double spring type. FIG. 8A is a top view, and FIGS. 8B and 8C are side views from directions orthogonal to each other. (D) is the external view seen from the side surface. It is a figure which shows two examples which change the part of a parallel double spring as a modification of FIG.

  Embodiments according to the present invention will be described below in detail with reference to the drawings. The dimensions, shapes, materials, and the like described below are examples for explanation, and can be appropriately changed according to the specifications of the vibrating body unit. Below, the same code | symbol is attached | subjected to the same element in all the drawings, and the overlapping description is abbreviate | omitted.

  FIG. 1 is a configuration diagram of the vibrating body unit 10. FIG. 1A is a cross-sectional view, and FIG. 1B is a top view. The vibrating body unit 10 includes a spring mass system including the loop spring 12 and the inner mass body 30 and an electromagnetic actuator 40 that vibrates the spring mass system. The vibrator unit 10 is a spring mass vibrator with a built-in electromagnetic actuator. A drive control unit that drives the electromagnetic actuator 40 is not shown, but is provided separately from the vibrator unit 10.

  The loop spring 12 is a spring body having an annular shape that can be elastically deformed. The loop refers to a U shape instead of a flat plate shape. The loop spring 12 in FIG. 1 includes a fixing member 18 having a U-shaped lid body 14 and a spring body 16 having the same shape as the spring body 14 facing each other opening. And has a three-dimensional closed shell structure that forms an inner space 24. The cross-sectional shape of the shell has an annular shape. The loop spring 12 is a cup-matching spring that is a combination of two cup-shaped springs, but is hereinafter simply referred to as a cup-shaped spring.

  The relationship between the shape of the cup-shaped spring and the spring constant k of the loop spring 12 can be obtained in advance by simulation or experiment. As shown in FIG. 1B, the one-side spring body 14 has a regular circular outer peripheral shape, a mounting portion 20 is provided at the center of the regular circle, and a thin-walled portion that is radially thin from the center. 15 is provided. A plurality of thin portions 15 are provided in a number necessary for improving the elasticity of the one-side spring body 14 to an appropriate value.

  The hole portion 21 provided in the attachment portion 20 is a hole through which the signal line 48 drawn from the inner space 24 is passed. The other side spring body 16 also has the same structure as the one side spring body 14 and includes the attachment portion 22, but the hole portion 21 may not be provided. If necessary, the mating surface of the one side spring body 14 and the other side spring body 16 and the hole 21 have a waterproof structure or an airtight structure, so that the vibrator unit 10 can be used under reduced pressure or in water. Become.

  As the one-side spring body 14 and the other-side spring body 16, a metal thin plate formed into a predetermined shape is used. As the material of the metal thin plate, a steel material such as spring steel can be used. Among steel materials, it is preferable to use one having electromagnetic shielding ability. The three-dimensional closed shell structure having electromagnetic shielding ability can prevent external electromagnetic noise from entering the inner space 24 and can also prevent leakage of electromagnetic noise generated in the inner space 24 to the outside.

  The inner mass body 30 is a mass body that is disposed in the annular inner space 24 of the loop spring 12 and connected to the loop spring 12. The outer shape of the inner mass body 30 is set to a shape having an appropriate gap space between the inner wall of the three-dimensional closed shell structure of the loop spring 12. The appropriate size of the gap space is set according to the magnitude of the vibration amplitude between the loop spring 12 and the inner mass body 30 when the vibrating body unit 10 is used. As the inner mass body 30, a material molded into a predetermined shape using a metal material having a large specific gravity can be used. As the metal material, iron, brass, or the like can be used.

The mass M of the inner mass body 30 is set to be a predetermined resonance frequency f ₀ with the spring constant k of the loop spring 12. The size of the inner mass 30 is limited by the outer shape of the loop springs 12, to a predetermined resonance frequency f ₀ is sometimes lack the mass M of the inner mass 30. Alternatively, there may be a case where a plurality of vibrator units 10 having specifications having different resonance frequencies are desired. In such a case, the outer mass body 32 having the additional mass M _ADD can be attached using the attachment portion 20 or the attachment portion 22 (see FIG. 2). In this way, the resonance frequency of the spring mass system can be easily changed only by changing the mass M _ADD of the outer mass body while _leaving the loop spring 12, the inner mass body 30 and the electromagnetic actuator 40 as they are.

  The electromagnetic actuator 40 is a force motor provided on the inner peripheral side of the inner mass body 30 in the inner space 24 of the loop spring 12. The electromagnetic actuator 40 includes a yoke body 42, a permanent magnet 44, and a voice coil 46.

  The yoke body 42 is a magnetic body having an annular shape, and the outer peripheral surface thereof is integrally fixed with the inner peripheral side wall surface of the inner mass body 30, and a groove portion on which the voice coil 46 can move is provided on the inner peripheral side of the annular shape. The bottom surface is fixed to the other spring body 16. In this way, the inner mass body 30 is connected to the other spring body 16 via the yoke body 42.

  The permanent magnet 44 is a magnet that is attached to the outer peripheral side wall surface of the groove portion provided on the inner peripheral side of the annular shape of the yoke body 42 and applies interlinkage magnetic flux to the voice coil 46. Since the permanent magnet 44 is in a fixed positional relationship with the inner mass body 30, when a driving force is applied from the voice coil 46 to the permanent magnet 44, the inner mass body 30 is driven to move relative to the voice coil 46.

  The voice coil 46 is an annular coil wound around an arm portion whose root portion is fixed to the one side spring body 14. The two terminals of the voice coil 46 are drawn out to the outside of the vibrating body unit 10 through the hole 21 as two signal lines 48. The drawn signal line 48 is connected to a drive control unit not shown in FIG. The voice coil 46 faces the permanent magnet 44 attached to the outer peripheral side surface of the groove portion provided on the inner peripheral side of the annular shape of the yoke body 42, and between the inner peripheral wall surface of the groove portion of the yoke body 42 and the permanent magnet 44. The magnetic gap is disposed so as to be movable relative to the permanent magnet 44.

In the magnetic gap, the interlinkage magnetic flux passes from the permanent magnet 44 to the voice coil 46. When a drive electric signal is supplied to the voice coil 46 via two signal lines 48 connected to an external drive control unit (not shown), the electromagnetic interaction between the drive current and the interlinkage magnetic flux causes a permanent change. A relative movement driving force is generated between the magnet 44 and the voice coil 46. The direction of the movement driving force is a direction along the longitudinal direction of the magnetic gap. Since the voice coil 46 is fixedly connected to the one-side spring body 14 and the permanent magnet 44 is fixedly connected to the other-side spring body 16 via the inner mass body 30, The distance between the side spring body 14 and the other side spring body 16 changes according to the spring constant k of the loop spring 12. If an AC signal driving electrical signal has a frequency f _1, in accordance with the relationship between the resonance frequency f ₀ and the frequency f ₁ which is determined by the mass M of the spring constant k and the inner mass body 30 of the loop spring 12, vibrator unit 10 vibrates.

  The electromagnetic actuator 40 in FIG. 1 is an outer magnet type force motor in which a permanent magnet 44 is disposed on the outer peripheral side of the voice coil 46, but an inner magnet type force motor may be used. The vibrating body unit 50 shown in FIG. 2 is an example in which an internal magnet type force motor is used as the electromagnetic actuator 52. In FIG. 2, the case where the outer mass body 32 is added using the attachment portion 22 is shown. Also in the vibrating body unit 10 of FIG. 1, the outer mass body 32 can be added in the same manner as in FIG.

  The electromagnetic actuator 52 includes a yoke body 54, two voice coils 56 and 58 around which windings are wound in a reversely wound relationship, a permanent magnet 60, and a magnet side yoke portion 62.

  The yoke body 54 is a magnetic body having an annular shape, and an outer peripheral surface thereof is integrally fixed with an inner peripheral side wall surface of the inner mass body 30, and voice coils 56 and 58 are fixed and connected to the inner peripheral side of the annular shape. The bottom surface is fixed to the other spring body 16. Thus, the inner mass body 30 and the voice coils 56 and 58 are connected to the other spring body 16 via the yoke body 54.

  The voice coils 56 and 58 are wound in a reversely wound relationship, and are arranged side by side on the annular inner peripheral surface of the yoke body 54 in the vertical direction. The vertical direction is a direction in which the one side spring body 14 and the other side spring body 16 are arranged. In the example of FIG. 2, the voice coil 56 is disposed on the other side spring body 16 side, and the voice coil 58 is disposed on the one side spring body 14 side. Since this arrangement relationship is relative, the arrangement relationship may be opposite to that shown in FIG. The four terminals of the voice coils 56 and 58 are directly drawn out to the outside of the vibrating body unit 50 through the hole 21 (see FIG. 1B) as four signal lines 64. The drawn signal line 64 is connected to a drive control unit not shown in FIG. One of the two terminals of each of the voice coils 56 and 58 may be connected to each other so as to be combined into one and led out to a total of three signal lines 64.

  The permanent magnet 60 is a magnet in which N and S poles are arranged in the same direction as the arrangement direction of the two voice coils 56 and 58. The magnet side yoke portion 62 is a magnetic plate fixedly connected to each of the N pole side and the S pole side, and is fixedly connected to the one side spring body 14. That is, the permanent magnet 60 is connected to the one side spring body 14 via the magnet side yoke portion 62.

  In the example of FIG. 2, the N pole side of the permanent magnet 60 is the voice coil 58 side, and the S pole side of the permanent magnet 60 is the voice coil 56 side. Therefore, the magnetic flux from the N pole of the permanent magnet 60 is linked to the voice coil 58 from the magnet side yoke portion 62 arranged on the N pole side, and flows to the voice coil 56 via the yoke body 54 in the reverse flow direction. The chain links and returns to the S pole of the permanent magnet 60 via the magnet side yoke portion 62 arranged on the S pole side.

  Thus, the direction of the interlinkage magnetic flux from the permanent magnet 60 is opposite between the voice coil 56 and the voice coil 58. When the windings of the windings of the voice coils 56 and 58 are reversed from each other, when the same driving electric signal is supplied to each of the voice coils 56 and 58, the electromagnetic current between the driving current and the linkage magnetic flux is reduced. Due to the interaction, a relative driving force is generated between the permanent magnet 60 and the voice coils 56 and 58. The direction of the movement driving force is a direction along the arrangement direction of the voice coils 56 and 58.

Since the permanent magnet 60 is fixedly connected to the one-side spring body 14 and the voice coils 56 and 58 are fixedly connected to the other-side spring body 16 via the inner mass body 30, this relative movement driving force The distance between the one side spring body 14 and the other side spring body 16 changes according to the spring constant k of the loop spring 12. If the drive electric signal is an alternating current signal having a frequency f ₁ , when the mass body is only the inner mass body 30, the resonance frequency f ₀ and the frequency determined by the spring constant k of the loop spring 12 and the mass M of the inner mass body 30. The vibrating body unit 50 vibrates according to the relationship with f ₁ . When the mass bodies are both the inner mass body 30 and the outer mass body 32, the mass (M + M) of the spring constant k of the loop spring 12 and the sum of the mass M of the inner mass body 30 and the mass M _ADD of the outer mass body 32. _The vibrating body unit 50 vibrates according to the relationship between the resonance frequency f ₀ determined by _ADD ) and the frequency f ₁ . Therefore, the vibrating body unit 50 using the inner magnet type force motor as the electromagnetic actuator 52 also has the same effect as the vibrating body unit 10 using the outer magnet type force motor of FIG. Below, it demonstrates using the vibrating body unit 10 provided with the outer side mass body 32. FIG.

  Depending on the specifications of the vibrating body unit 10, the loop spring 12 may not have a three-dimensional closed shell structure, but may have a structure in which both side surfaces are open, for example. In this case, the one-side spring body and the other-side spring body formed by flattening the flat plate into an arcuate shape are combined to form an open inner space that is not a closed type, and the inner mass body 30 and the electromagnetic actuator 40 are formed in the inner space. Is placed.

  By connecting the signal line 48 of the vibrating body unit 10 to an external drive control unit (not shown), the drive electric signal to the electromagnetic actuator 40 can be controlled. 3 and 4 show application examples using the vibrating body unit 10.

  FIG. 3 is a diagram illustrating a configuration of the vibration testing apparatus 120 using the vibrating body unit 10. The vibration test apparatus 120 can test how the characteristics of the test object change when a dynamic vibration amplitude load is applied. For example, the vibration durability characteristic of the test object can be tested using the vibration test apparatus 120. By using the vibrating body unit 10 that vibrates at the resonance frequency as a vibration amplitude load to the test object 8, the power consumption of the vibration testing device 120 can be significantly reduced.

  The vibration test apparatus 120 includes an apparatus main body 122 and a drive controller 130. FIG. 4 illustrates the test object 8 that is not a constituent element of the vibration test apparatus 120 but is disposed in the apparatus main body 122.

  When the vibrator unit 10 is driven to vibrate at the resonance frequency and the vibration is directly applied to the test object 8, the amplitude of the vibration load of the test object 8 becomes too large. Therefore, in order to detect the vibration state of the test object 8, and to make the detected vibration state a predetermined test condition, resonance control using feedback is performed.

  The apparatus main body 122 includes a gantry 74, a load cell 86 installed on the upper surface of the gantry 74, and the vibrating body unit 10 disposed on the upper surface of the load cell 86 via the mount 27. The arrangement of the vibrating body unit 10 is reversed upside down in the configuration of FIG. 2, and the additional outer mass body 32 is arranged on the upper side. The test object 8 is attached and arranged on the upper surface of the outer mass body 32 of the vibrating body unit 10 by an appropriate attachment method. In the vertical direction, upward, and the like, the direction perpendicular to the top surface of the gantry 74 is the X direction, and the + X direction is the upward direction.

The load cell 86 detects a load force as a load state of the test object 8, converts the magnitude of the detected load force into an acceleration (d ² X / dt ² ), and an electric signal e (d ² ) corresponding to the acceleration. X / dt ² ) is output to the drive control unit 130. Since only the vibration amplitude load from the vibrating body unit 10 is applied to the test object 8, the electric signal e (d ² X / dt ² ) output from the load cell 86 corresponds to an acceleration amplitude value as an AC component. Signal. Therefore, the load cell 86 detects the acceleration amplitude value of the test object 8.

  For example, the drive control unit 130 sets the test condition of the vibration test as the target vibration state of the test object 8, and feeds back the acceleration amplitude value of the test object 8 detected by the load cell 86. It is possible to perform a vibration test by performing feedback that approaches the target vibration state. The target vibration state can be a target acceleration amplitude value.

  Thus, in the vibration test apparatus 120, the actual vibration state of the test object 8 detected by the load cell 86 as the vibration detection unit is fed back to the drive control unit 130, whereby the acceleration amplitude value of the test object 8 is obtained. Resonance control can be performed to suppress the acceleration to a target acceleration amplitude value.

  In addition to the configuration of the vibration test apparatus 120, a vibration test apparatus that tests a vibration state under a static load by providing a mechanism that applies a static load force to the test object 8; can do. As a mechanism for applying a static load force, a mechanism for displacing the loop spring 12 of the vibrating body unit 10 in the vertical direction and pulling or compressing the test object 8 according to the displacement amount can be used. For example, in FIG. 3, the test object 8 is disposed between the mounting base 27 of the vibrating body unit 10 and the load cell 86, the upper surface of the vibrating body unit 10 is fixed to the lifting platform, and the lifting platform is moved vertically by a motor or the like. It can be set as the structure displaced to.

  FIG. 4 is a diagram illustrating a configuration of a vibration isolation device 150 using the vibrating body unit 11 including an appropriate damper element therein. The vibration isolation device 150 includes an apparatus main body 152 and a drive control unit 170. The apparatus main body 152 includes a table 160 provided on an anti-vibration table 154 erected on the upper surface of the gantry 74 along the X direction, and the vibrator unit 11 attached to the lower surface of the table 160 via the attachment unit 20. And an acceleration sensor 162 which is an acceleration detection means for detecting the acceleration α of the table 160 and outputting it as an electric signal e (α).

  The table 160 is a precision table on which precision work is performed or precision equipment is arranged. The vibration isolation device 150 is a device that performs vibration isolation of the table 160, and the vibration isolation target is the table 160.

  The vibrating body unit 11 is obtained by disposing an appropriate damper element 156 in the inner space 24 in the vibrating body unit 10 described with reference to FIG. As a suitable damper element 156, rubber or the like can be used. In some cases, the inner space may be filled with oil having an appropriate viscosity. Therefore, the vibrating body unit 11 is configured by a spring mass damper system, unlike the vibrating body unit 10 described up to FIG. 3 by a spring mass system.

  The drive control unit 170 can feed back the detection result of the acceleration α of the table 160 that is the object of vibration isolation, and perform feedback to bring the table 160 close to a no-vibration state, thereby performing vibration isolation of the table 160.

  In this way, the vibration of the vibration isolation table 160 can be isolated. Here, the vibrating body unit 11 is used as an active damper that performs vibration isolation of the vibration isolation target table 160.

  As described above, by providing an AC signal as a drive electric signal to the electromagnetic actuator, the spring mass system of the loop spring and the inner mass body can be vibrated. Even if an outer mass body is added, it can be vibrated similarly. Here, since the vibrating body units 10 and 11 have a three-dimensional structure, the center of gravity of the inner mass body and the center of gravity of the outer mass body are deviated from the center of gravity of the vibrating body units 10 and 11 as a whole. If there is a center of gravity shift of the mass body, when the vibration direction is set to be tilted from the direction of gravity, a moment is applied to the spring mass system due to the center of gravity shift. The same applies to the case where the spring mass system receives a rotational moment due to gravity in addition to the deviation of the center of gravity of the mass body. When such a state is referred to as a “state receiving a rotational moment due to gravity”, in this state, for example, the vibration state is not stable, and the vibration frequency of the spring mass system varies.

  As a result of the experiment, it is effective to make the loop spring a parallel double structure in order to suppress the influence of the moment on the spring mass system due to the “state of receiving a rotational moment due to gravity”. It is also effective to hold the outer peripheral edge of the loop spring with a rigid frame. These structures are shown in FIGS. In each of these drawings, (a) is a top view, and (b) and (c) are side views from directions orthogonal to each other. In each figure, X direction, Y direction, and Z direction are shown as three orthogonal directions. The Z direction is the vibration direction.

  The vibrator unit 200 of FIG. 5 includes a cup-type spring 202 having a parallel double structure as a loop spring. The cup-type spring 202 includes an outer cup body 204 and an inner cup body 206 that is disposed with a predetermined parallel gap from the outer cup body 204. The outer cup body 204 is a cup body in which the openings of the two half-cup members face each other and the outer peripheral edges 205 are aligned to form a closed space inside. The inner cup body 206 is a cup body in which the openings of two half-cup members that are slightly smaller than the outer cup body 204 face each other and the outer peripheral edges 205 are aligned to form a closed space inside. The four half cup bodies are overlapped with each other at the outer peripheral edge 205 and integrated using a plurality of fixing members 208. In the example of FIG. 5, eight fixing members 208 are used.

  As the outer cup body 204 and the inner cup body 206, a metal thin plate formed into a predetermined shape is used. The predetermined shape is set so that when the outer cup body 204 and the inner cup body 206 are integrated by the fixing member 208, they are parallel to each other with a predetermined interval. As a material of the metal thin plate, a steel material, for example, spring steel having electromagnetic shielding ability can be used. In the example of FIG. 5, a steel plate having a uniform thickness is formed into a cup shape. A bolt and a nut can be used as the fixing member 208. You may use a washer as needed.

  The electromagnetic actuator 210 is an outer magnet type similar to that shown in FIG. 1, and the basic structure is the same as that of the electromagnetic actuator 40 shown in FIG. 1 except for changes in dimensions and the like associated with the use of the cup spring 202 having a parallel double structure. . That is, it has a yoke body 212, a permanent magnet 214, and a voice coil 216. The cone 217 is an umbrella-shaped part that winds the voice coil 216. The signal line 48 from the terminal of the voice coil 216 is drawn out from a hole 221 provided in the outer cup body 204 and the inner cup body 206.

  The attachment portion 220 is composed of a plurality of members and has a plurality of female screw holes into which the integrated screws 222 and 223 are screwed. The plurality of members of the attachment portion 220, the outer cup body 204, the inner cup body 206, and the cone 217 are integrally fixed using the female screw holes and the integrated screws 222 and 223. The plurality of female screw holes is used to prevent rotation of the cone 217 and the like. In the example of FIG. 5, two female screw holes and two integrated screws 222 and 223 are used. The attachment portion 220 is a member for attaching the vibrating body unit 200 to an object that is an object such as vibration or vibration isolation, and is provided with attachment screw holes 224 and 225 for the attachment.

  The attachment portion 230 is also composed of a plurality of members and has a plurality of female screw holes into which the integrated screws 232 and 233 are screwed. The plurality of members of the attachment portion 230, the outer cup body 204, the inner cup body 206, the yoke body 212, and the inner mass body 30 are integrally fixed using the female screw holes and the integrated screws 232 and 233. Although not shown in FIG. 5, the yoke body 212 and the inner mass body 30 are integrally fixed by appropriate fixing means. As suitable fixing means, screwing, adhesion, or the like is used. The plurality of female screw holes is used to prevent the inner mass body 30 and the like from rotating. In the example of FIG. 5, two female screw holes and two integrated screws 232 and 233 are used. The attachment portion 230 is a member for attaching the outer mass body 32 to the vibrating body unit 200, and is provided with attachment screw holes 234 and 235 for the attachment.

  As shown in FIG. 5, since the outer cup body 204 and the inner cup body 206 are deformed in parallel with each other by using a cup-type spring 202 having a parallel double structure as the loop spring, the deformation of the loop spring as a whole is deformed. Faces the Z direction which is the vibration direction. As a result, the influence of the moment on the spring mass system due to the “state of receiving a rotational moment due to gravity” can be suppressed. FIGS. 6 and 7 are diagrams showing an example in which the outer peripheral edge of the loop spring is held by a rigid frame body having rigidity higher than that of the loop spring without using the parallel-type cup-shaped spring 202 as the loop spring. is there.

  A vibrating body unit 250 shown in FIG. 6 uses a single cup-type spring 252 instead of a parallel-type cup-type spring, and is a rigid frame 260 having a higher rigidity than that of the cup-type spring 252. The outer peripheral edge 258 of the mold spring 252 is held. The cup-type spring 252 corresponds to the inner cup body 206 described in FIG. 5, but the other side of the half-cup type spring body 254 and one side having a circular hole through which the cone or the like of the electromagnetic actuator 270 passes in the center of the convex portion. And a spring body 256. The cup-type spring 252 is a cup body that faces the openings of the other-side spring body 254 and the one-side spring body 256 and aligns the outer peripheral edges 258 to form an internal space. Such a cup-shaped spring 252 can be made of the same material as the inner cup body 206 described in FIG.

  The rigid frame 260 includes a rigid disk portion 262 and a ring-shaped wall portion 264 provided on the outer peripheral edge thereof. The annular shape of the ring-shaped wall portion 264 is the same shape as the outer peripheral edge 258 of the cup-shaped spring 252. The rigid frame 260 is formed by molding a material having an appropriate strength into a predetermined shape. The rigidity of the rigid frame body 260 needs to be higher than the rigidity of the cup-shaped spring 252. The outer peripheral edge 258 of the cup-shaped spring 252 is integrated using a plurality of fixing members 266. In the example of FIG. 6, eight fixing members 266 are used. As a suitable fixing member 266, a combination of a female thread portion and a bolt provided on the ring-shaped wall portion 264 of the rigid frame 260 can be used. Accordingly, the outer peripheral edge 258 of the other side spring body 254 and the one side spring body 256 of the cup-shaped spring 252 is held by the outer peripheral edge 258. The one-side spring body 256 is attached to the inner mass body 31 by a plurality of attachment screws 276 at the peripheral edge portion of the circular hole at the center of the convex portion.

  The basic structure of the electromagnetic actuator 270 and the mounting portion 274 is the same as that described with reference to FIG. 5 except for the change in shape and dimensions associated with the use of the cup-shaped spring 252 and the rigid frame 260. Description is omitted. The attachment portion 272 is different from the attachment portion 220 of FIG. 5 in that the rigid frame 260, the cup-type spring 252 and the cone of the electromagnetic actuator 270 are integrally fixed, but the other configurations are the same.

  The vibrator unit 280 shown in FIG. 7 is different from the cup-type spring 252 shown in FIG. 6 in that a cup-type spring 282 is used. The cup-type spring 282 uses an inner circumferential disc 284 facing the other side spring body 254 instead of the one side spring body 256 of FIG. The inner circumferential disc 284 is not a bow shape but a flat plate shape. The inner peripheral disc 284 includes a disc main body 286 to which the inner mass body 31 is attached and an outer peripheral edge 288 thereof. The disk main body 286 is a thin disk, but has a characteristic that the rigidity in the Z direction, which is the axial direction, is lower than the rigidity in the radial direction. The disc main body 286 may be a leaf spring having a flexible arm and a window having a pattern in which the shape of the portion extending in the radial direction and the shape of the portion extending in the circumferential direction are appropriately combined. As an example of such a leaf spring, a cloud spring is known. For example, those disclosed in International Publication No. 2007/077788 can be used.

  The inner mass body 31 has the same configuration as the inner mass body 31 of FIG. In the rigid frame 290, a sandwiching ring 294 is used in addition to the ring-shaped wall portion 292 in order to hold the outer peripheral edge 258 of the other-side spring body 254 and the outer peripheral edge 288 of the inner peripheral disc 284. 6 different from the rigid frame 260 of FIG. The outer peripheral edge 288 of the inner peripheral disc 284 is sandwiched between the ring-shaped wall 292 and the sandwiching ring 294, and the outer peripheral edge 258 of the other spring body 254 is addressed to the end of the sandwiching ring 294. Then, using the fixing members 296 and 296, the outer peripheral edge 258 of the inner peripheral disc 284 and the outer peripheral edge 258 of the other spring body 254 are held by the rigid frame 290.

  The basic structure of the electromagnetic actuator 302 and the mounting portions 304 and 306 is the same as that described in FIG. 6 except for the change in shape and dimensions associated with the use of the cup-shaped spring 282 and the rigid frame 290. Detailed description is omitted.

  5 to 8, the loop spring has a three-dimensional closed shell structure. As a method of making the both side surfaces open, a loop spring can be formed by combining the one side spring body and the other side spring body formed of a flat plate into an arcuate shape or the like. Proceeding further, two long side plate portions and two semicircular ring portions connecting the respective end portions of the two long side plate portions are formed into a shape in which they are connected to each other, thereby integrating them. It is possible to make a vibrator unit that is open on both sides.

  FIG. 8 shows an example of a parallel double spring type in which a double-sided open-type loop spring having an integrated structure is used in order to suppress the influence of the moment on the spring mass system due to the “state of receiving a rotational moment due to gravity”. It is a figure which shows the example to do. The vibrating body unit 310 of FIG. 8 includes a loop spring 312 having an integrated structure in which both side surfaces are open. FIG. 8A is a top view, and FIGS. 8B and 8C are side views from directions orthogonal to each other. (D) is the external view seen from the side surface.

  The loop spring 312 has a uniform thickness between the outer peripheral surface and the inner peripheral surface, and connects the two long side plate portions facing each other and the respective end portions of the two long side plate portions. An oval spring body having two semi-annular portions. Mounting portions 332 and 334 are also integrally formed with the loop spring 312. The oval spring body is integrally formed by forming a metal material into a predetermined shape using cutting or electric discharge machining.

  The electromagnetic actuator 330 is attached to the attachment portion 332, and the inner mass body 30 and the yoke body of the electromagnetic actuator 330 are attached to the attachment portion 334. Since the structure of the electromagnetic actuator 330 and the mounting portions 332 and 334 is the same as that described in FIGS. 5 to 8, detailed description thereof will be omitted.

  The ellipsoidal spring body which is the loop spring 312 further includes an outer peripheral side thin part 322, an inner peripheral side thin part 324, and parallel grooves 326 between the outer peripheral side thin part 322 and the inner peripheral side thin part 324. 327. The parallel slots 326 and 327 are slots extending in the Y direction that is the width direction of the oval spring body. Since the parallel slots 326 and 327 are not provided in the attachment portions 332 and 334, the outer thin portion 322 and the inner thin portion 324 are connected to each other at the attachment portions 332 and 334. As a result, the loop spring 312 has a parallel double spring configuration including an inner arched spring having an inner thin portion and an outer arch spring having an outer thin portion.

  FIG. 9 is a diagram showing two examples of changing the portion of the parallel double spring as a modification of FIG. FIG. 9A shows an example in which parallel slots 328 and 329 are provided and the parallel double spring portion is dispersed into four. (B) is an example in which the parallel slots 326 and 327 are stopped at the portion on the attachment portion 334 side.

  As shown in FIGS. 8 and 9, a parallel double spring type loop spring 312 can be formed by providing a parallel slot in an integral oval spring body. As a result, even in the case of the open-side vibrator unit, even when the vibration direction is set to be inclined from the gravitational direction, the moment applied to the spring mass system can be suppressed and the vibration state can be stably maintained. Note that the cup-type spring described with reference to FIGS. 5 to 8 may be a double-sided open-type vibrating body unit by forming a belt-like flat plate into a bow shape. Even when these structures are used, even when the vibration direction is set to be inclined from the direction of gravity, the moment applied to the spring mass system can be suppressed and the vibration state can be stably maintained.

  8 Test object 10, 11, 50, 200, 250, 280, 310 Vibrating body unit, 12, 312 Loop spring, 14, 256 One side spring body, 15 Thin part, 16, 254 Other side spring body, 18, 208, 266, 296, 298 fixing member, 20, 22, 220, 230, 272, 274, 304, 306, 310, 332, 334 mounting portion, 21, 22 hole portion, 24 inner space, 27 mounting base, 30, 31 inner mass body, 32 outer mass body, 40, 52, 210, 270, 302, 330 electromagnetic actuator, 42, 54, 212 yoke body, 44, 60, 214 permanent magnet, 46, 56, 58, 216 voice coil, 48, 64 signal line, 62 magnet side yoke part, 74 frame, 86 load cell, 120 excitation test device, 122 (excitation Device main body (for test device), 130 (control device for vibration test device) drive control unit, 150 vibration isolation device, device main body for 152 (vibration isolation device), 154 vibration isolation table, 156 damper element, 160 table, 162 acceleration Sensor, 170 (Control of vibration isolator), 202,252,282 Cup type spring, 204 Outer cup body, 205,258,288 Outer peripheral edge, 206 Inner cup body, 217 Cone, 222,223,232,233 Integrated screw, 224, 225, 234, 235 Mounting screw hole, 260, 290 Rigid frame, 262 Rigid disk part, 264, 292 Ring-shaped wall part, 284 Inner circumferential side disk, 286 Disc body part, 294 Ring, 322 Outer peripheral side thin part, 324 Inner peripheral side thin part, 326, 327, 328, 329 Parallel slot.

Claims (10)

With an elastically deformable annular shape,
A mass connected to the loop spring;
An electromagnetic actuator that vibrates a spring mass system composed of a loop spring and a mass body at a predetermined frequency;
With
The electromagnetic actuator is disposed in an annular inner space of a loop spring. The vibrating body unit according to claim 1,
Mass body is
An oscillating body unit comprising an inner mass body disposed in an annular inner space of a loop spring and connected to the loop spring. The vibrating body unit according to claim 2,
Mass body is
Apart from the inner mass body,
An oscillating body unit comprising an outer mass body that is disposed outside an annular shape of a loop spring and connected to the loop spring. The vibrating body unit according to claim 2,
Loop spring
A vibrator unit having a three-dimensional closed shell structure that forms an inner space and a cup-shaped spring having a circular cross-sectional shape of the shell. The vibrating body unit according to claim 4,
The shell forming the outer shape of the cup-shaped spring is made of an electromagnetic wave shielding material. The vibrating body unit according to claim 4,
Cup type spring
An outer cup body,
An inner cup body arranged with a predetermined parallel gap from the outer cup body;
A vibrating body unit comprising: The vibrating body unit according to claim 4,
A rigid frame body that holds the outer peripheral edge of the cup-shaped spring,
An electromagnetic actuator is attached to a rigid frame, and a vibrating body unit. The vibrating body unit according to claim 4,
Cup type spring
A half cup type spring body,
An inner circumferential disk facing the other spring body,
Including
A rigid frame body that holds the other side spring body and the inner circumference side disk,
The electromagnetic actuator is attached to a rigid frame, and a vibrating body unit. The vibrating body unit according to claim 2,
Loop spring
The outer peripheral side surface and the inner peripheral side surface have a uniform external thickness,
Two long side plates facing each other,
Two semi-annular parts connecting the respective ends of the two long side plate parts;
An oval annular spring body having
A vibrating body unit, wherein an electromagnetic actuator is attached to one long side plate portion of two long side plate portions, and a mass body is attached to the other long side plate portion. The vibrator unit according to claim 9, wherein
The oval spring body has a thin outer peripheral portion,
An inner peripheral thin-walled portion;
A parallel slot between the outer peripheral side thin part and the inner peripheral side thin part;
A vibrating body unit comprising:

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