JPWO2015146874A1 - Actuator, mover and armature - Google Patents

Abstract

Provided are an actuator capable of shortening the overall length and reducing the overall height when applied to a vertical actuator, and a mover and an armature used for the actuator. The first magnet 11a and the third magnet 11c provided on one orthogonal plane and the second magnet 11b and the fourth magnet 11d provided on the other plane are shifted by ¼ of the field period. The actuator 3 is configured by inserting the cross-shaped movable element 1 having a cross-section into a cross-shaped through-hole in the center of the armature 2. Even if it is the configuration of the collective winding of phases by applying current to the four first to fourth drive coils 41a-41d and generating independent alternating magnetic fields in the through holes by shifting the phases by 90 ° from each other. One armature 2 obtains continuous thrust over time.

Description

  The present invention relates to an actuator that extracts linear motion, and a mover and an armature used for the actuator.

  High-speed movement and high precision in vertical movement devices for drills used in drilling machines such as electronic circuit boards, or vertical movement mechanisms in pick-and-place (grabbing and placing parts) robots Positioning is required. Therefore, the conventional method in which the output of the rotary motor is converted into linear motion (vertical motion) with a ball screw cannot satisfy such a requirement because the moving speed is low.

  Therefore, for such vertical movement, use of an actuator (linear motor) capable of directly extracting a parallel motion output has been promoted. For example, there has been proposed an actuator having a configuration in which a permanent magnet structure having a plurality of flat permanent magnets is used as a mover, an armature having a drive coil is used as a stator, and the mover is passed through the stator. (Patent Document 1). The actuator disclosed in Patent Document 1 has a structure in which a magnetic flux that short-circuits magnetic poles of different polarities is unlikely to be generated, and a large maximum thrust can be obtained by bipolar driving, and a thrust magnetomotive force ratio can be increased. . Further, as a conventional technique, a stator in which a plurality of permanent magnets having different magnetic poles are alternately arranged, and a plurality of coils are wound around a core having a slot and the stator arranged through a magnetic gap. A linear motor provided with a mover constituting an armature is disclosed (Patent Document 2).

International Publication No. 2011/118568 JP 2002-165433 A

  In recent years, in addition to higher machining accuracy, higher rigidity is required to reduce errors due to deflection of vertical actuators. In such a case, if the total height of the actuator is high, the position of the center of gravity also becomes high, and the flexure of the mover due to the bending moment becomes large, causing deterioration in machining accuracy. Therefore, there is an increasing demand for shortening the length of the actuator to reduce the overall height and reducing the flexure of the mover due to the bending moment during movement when used as a vertical actuator. In the magnet movable actuator described in Patent Document 1, it is possible to obtain the excellent thrust characteristics as described above, but in the case of three-phase driving, the armatures of each phase are arranged in series. There is a problem that it is difficult to reduce the overall height when the overall length is long and it is used as a vertical actuator. On the other hand, in the configuration of Patent Document 2, it is necessary to increase the number of turns of the coil or increase the thickness of the coil in order to increase the thrust. is there.

  The present invention has been made in view of such circumstances, and has a structure in which a magnetic flux that short-circuits magnetic poles of different polarities is unlikely to be generated, and obtains a thrust that is continuous over time by using only one armature. It is an object of the present invention to provide an actuator that can be used, and a mover and an armature used for the actuator.

  Another object of the present invention is that it is not necessary to arrange armatures of each phase in series, the overall length can be shortened, the overall height can be lowered when applied to a vertical actuator, and the flexure of the mover can be reduced, and An object of the present invention is to provide a mover and an armature used for the actuator.

  In the actuator according to the present invention, a plurality of flat magnets are disposed on each of two planes orthogonal to the cross shape, and the plurality of magnets magnetized in the thickness direction are provided on one of the two planes. The two magnets are arranged in the intersecting direction of the two planes, and the magnetization directions of the adjacent magnets are opposite to each other, and the plurality of magnets magnetized in the thickness direction are on the other plane of the two planes. The magnetization directions of adjacent magnets are opposite to each other, and the arrangement of the plurality of magnets in the one plane and the arrangement of the plurality of magnets in the other plane are the intersecting direction. Are divided into four by a cross-shaped opening through which the mover penetrates, and each of the fractional regions is opposed to the opening. Two magnetic pole parts, a yoke part arranged on the outer edge, and the yoke part and the magnet A first core unit made of a soft magnetic material having a core part connecting the parts, and a cross-shaped opening through which the mover passes, and each of the fractional areas is Soft magnetism having two magnetic pole parts facing the opening, a yoke part arranged on the outer edge, and a core part connecting the yoke part and the magnetic pole part, and the first core unit and the front and back are reversed. The second core unit made of the body is alternately stacked with the spacer core unit made of the soft magnetic material interposed therebetween, and the core portion of the overlapping first core unit and the second core unit is provided with a winding line. The first and second core units are penetrated through openings.

  In the actuator of the present invention, an independent alternating magnetic field is generated in a cross-shaped gap located in two directions (two directions orthogonal to each other) in one armature, and the phases of these magnetic fields are shifted by 90 °, A movable member having a cross-shaped cross section in which the arrangement of the magnets is shifted by 1/4 of the field period in two directions orthogonal to each other is inserted into the cross-shaped gap. Therefore, a thrust that is continuous over time can be obtained even if one armature is used, even though the configuration is a single-phase concentrated concentrated configuration (configuration in which magnetic pole teeth of the same phase are collectively excited by one drive coil). The total length of the actuator is shortened while having the advantage of low copper loss due to the low electrical resistance of the winding wire, which is a feature of the phase collective winding configuration.

  The actuator according to the present invention includes a frame member that supports and fixes the plurality of magnets.

  In the actuator of the present invention, the magnet of the mover is supported and fixed by the frame material. Thus, an accurate arrangement of the magnets can be reliably obtained.

  The actuator according to the present invention is characterized in that the core part has a larger width (thickness) than the yoke part.

  In the actuator according to the present invention, the core portion in each segmented region of the armature has a larger (width × thickness) than the yoke portion. Therefore, sufficient magnetic flux can be obtained even in the core portion.

  In the actuator according to the present invention, the yoke portions of the adjacent fraction regions of the first core unit are connected via a nonmagnetic material, and the yoke portions of the adjacent fraction regions of the second core unit are made of a nonmagnetic material. It is characterized by being connected via.

  In the actuator of the present invention, the yoke portions of the adjacent fraction regions of the armature are connected to each other via a nonmagnetic material. Therefore, a magnetic short circuit between adjacent fractional areas is reliably prevented.

  The mover according to the present invention is a mover of an actuator having a plurality of plate-like magnets, wherein the plurality of magnets are arranged on two planes orthogonal to each other in a cross shape, and are arranged on one of the two planes. The magnets magnetized in the thickness direction are arranged in the intersecting direction of the two planes, the magnetization directions of adjacent magnets are opposite, and the other plane of the two planes has a thickness. The plurality of magnets magnetized in the direction are arranged in the intersecting direction, and the magnetization directions of the adjacent magnets are opposite directions, and the arrangement of the plurality of magnets in the one plane and the other plane The arrangement of the plurality of magnets is characterized by being shifted by a quarter of the field period in the direction of the intersecting line.

  The armature according to the present invention is divided into four by a cross-shaped opening through which the mover passes, in a cubic armature of an actuator through which the mover passes, A first core unit made of a soft magnetic material having two magnetic pole parts facing the opening, a yoke part arranged on an outer edge, and a core part connecting the yoke part and the magnetic pole part, and the movable It is divided into four by a cross-shaped opening through which the child penetrates, and each of the divided areas includes two magnetic pole parts facing the opening, a yoke part arranged on the outer edge, the yoke part, A second core unit made of a soft magnetic material having a core portion for connecting the magnetic pole portion, and the first core unit and the second core unit made upside down with the spacer core unit made of a soft magnetic material sandwiched alternately. And the overlapping first core unit Wherein the beauty are subjected to Maki wire in the core portion of the second core unit.

  The actuator of the present invention has a structure in which a magnetic flux that short-circuits magnetic poles of different polarities is unlikely to be generated, and a thrust can be obtained continuously over time by using only one armature. Since it is not necessary to arrange the armatures of each phase in series, the overall length can be shortened, and the overall height can be lowered when applied to a vertical actuator. As a result, since the overall height can be reduced, the bending moment applied to the mover can be reduced. Therefore, it is possible to reduce the bending and achieve both high precision and downsizing of the processing apparatus. In addition, since downsizing can be realized, driving with high efficiency can be performed and a large thrust magnetomotive force ratio can be obtained.

It is a perspective view which shows the structure of a needle | mover. It is a perspective view which shows the structure of the magnet arrangement | sequence frame used for a needle | mover. It is a top view which shows the core unit used for an armature. It is a top view which shows the shape of an armature core. It is a perspective view which shows the structure method of an armature core. It is a perspective view which shows the drive coil used for an armature. It is a perspective view which shows the structure of an armature. It is a perspective view which shows the structure of an actuator. It is a perspective view which shows the block unit used for an armature core. It is a perspective view which shows the 1/4 block used for an armature core. It is a perspective view which shows the structure of an armature core. It is a figure which shows the flow of the magnetic flux which generate | occur | produces in an armature. It is a perspective view which shows the Example of a magnet arrangement | sequence frame. It is a perspective view which shows the Example of a needle | mover. It is a top view which shows the armature raw material used for preparation of the armature of an Example. It is a perspective view which shows the Example of 1/4 block. It is a perspective view which shows the Example of an armature core. It is a perspective view which shows the Example of a drive coil. It is a perspective view which shows the Example of an armature. It is a graph which shows the relationship between the drive magnetomotive force of the drive coil in the actuator of an Example, and the generated thrust. It is a graph which shows the thrust fluctuation | variation in the actuator of an Example. It is a perspective view which shows the structure of the actuator of a comparative example. It is a figure which shows the size of the actuator of a comparative example. It is a graph which shows the characteristic of the actuator of a comparative example. It is a perspective view which shows the structure of the other example of the magnet arrangement | sequence frame used for a needle | mover. It is a perspective view which shows the structure of the further another example of the magnet arrangement | sequence frame used for a needle | mover. It is a perspective view which shows the other example of the block unit used for an armature core.

  Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments thereof.

  First, the configuration of the mover will be described. FIG. 1 is a perspective view showing a configuration of a mover, and FIG. 2 is a perspective view showing a configuration of a magnet arrangement frame used for the mover. The mover 1 has a configuration in which a plurality of plate-like permanent magnets are arranged in the magnet arrangement frame 10 shown in FIG.

  The magnet arrangement frame 10 as a frame material for supporting and fixing the magnet is formed of a nonmagnetic material such as aluminum. The magnet arrangement frame 10 is symmetrical with respect to the central axis on one surface (vertical surface in FIG. 2) of two planes orthogonal to each other with the central axis in the movable direction (longitudinal direction) of the mover 1 as an intersecting line. In addition, a plurality of frame members 10a are arranged in the movable direction at equal intervals, and the other two surfaces (the left and right surfaces in FIG. 2) are symmetrical with respect to the central axis. 10b are arranged in the movable direction at equal intervals.

  The plate-like permanent magnet in the mover 1 is magnetized in the thickness direction (see the white arrow in FIG. 1 for the magnetization direction), and between the adjacent frame members 10a and 10a of the magnet array frame 10, 10b and 10b. It is inserted and fixed in each gap. Therefore, the mover 1 has a cross-sectional shape as a whole.

  One surface (vertical surface in FIG. 1) of two planes orthogonal to each other with the central axis in the movable direction (longitudinal direction) of the mover 1 as an intersection line is symmetrical with respect to the central axis in the thickness direction. Eight first magnets 11a and third magnets 11c each having the magnetization direction (the direction indicated by the white arrow in FIG. 1) in opposite directions are alternately arranged in the movable direction (intersecting direction of two planes). The magnetization directions of the two first magnets 11a and the third magnets 11c that are symmetric with respect to the central axis of the movable direction are the same.

  Further, the magnetization direction in the thickness direction (the direction of the white arrow in FIG. 1) is reversed on the other surface of the two planes (the surface in the left-right direction in FIG. 1) symmetrically with respect to the central axis. Eight second magnets 11b and four fourth magnets 11d are alternately arranged in the movable direction. The magnetization directions of the two second magnets 11b and the fourth magnets 11d that are symmetric with respect to the central axis of the movable direction are the same.

  The arrangement of the eight first magnets 11a and the third magnet 11c on one surface and the arrangement of the eight second magnets 11b and the fourth magnet 11d on the other surface are the S pole and N of the permanent magnet. When the pole pair has a field period (λ, 360 °), it is shifted by 1/4 (λ / 4, 90 °) of the field period in the movable direction (longitudinal direction). Here, the field period is an arrangement period of a pair of magnets of the first magnet 11a and the third magnet 11c or the second magnet 11b and the fourth magnet 11d which are magnetized in opposite directions in the thickness direction. .

  Next, the configuration of the armature will be described. FIG. 3 is a plan view showing a core unit used in the armature. FIG. 3A shows a first core unit 21a, FIG. 3B shows a second core unit 21b, and FIG. 3C shows a spacer core unit 21c.

  The first core unit 21a has a cross-shaped opening 22a through which the mover 1 passes. The first core unit 21a is divided into four by the opening 22a. Each fraction area is formed of a soft magnetic material, and includes two magnetic pole portions 23a, 23a facing the opening 22a, a yoke portion 24a disposed on the outer edge, a yoke portion 24a, and magnetic pole portions 23a, 23a. And a core portion 25a to be connected. The width of the core portion 25a is longer than the width of the yoke portion 24a, and the width × thickness of the core portion 25a is larger than the width × thickness of the yoke portion 24a. Adjacent fractionation regions are configured to be rotated by 90 ° around the center of the cross-shaped opening 22a. Adjacent fractional regions are connected by nonmagnetic spacers 26a at the ends of the yoke portions 24a, 24a. Therefore, adjacent fraction areas are magnetically insulated from each other.

  The second core unit 21b is reversed from the first core unit 21a. The second core unit 21b has a cross-shaped opening 22b through which the mover 1 passes, and the second core unit 21b is divided into four by the opening 22b. Each fraction area is made of a soft magnetic material, and includes two magnetic pole portions 23b and 23b facing the opening 22b, a yoke portion 24b arranged on the outer edge, a yoke portion 24b and magnetic pole portions 23b and 23b. And a core portion 25b to be connected. The width of the core portion 25b is longer than the width of the yoke portion 24b, and the width × thickness of the core portion 25b is larger than the width × thickness of the yoke portion 24b. Adjacent fractionation regions are configured to be rotated 90 ° around the center of the cross-shaped opening 22b. Further, the adjacent fraction regions are connected to each other at the end portions of the yoke portions 24b, 24b by a nonmagnetic spacer 26b. Therefore, adjacent fraction areas are magnetically insulated from each other.

  The spacer core unit 21c has a yoke portion 24c divided into four at the edge. The yoke portion 24c is formed of a soft magnetic material, and the adjacent yoke portions 24c are connected to each other by a nonmagnetic spacer 26c. The central portion of the spacer core unit 21c is a rectangular opening 22c larger than the openings 22a and 22b through which the mover 1 passes. The yoke portion 24c has the same width as the yoke portions 24a and 24b.

  The openings 22a and 22b are provided at the same position in plan view. When the first core unit 21a, the spacer core unit 21c, and the second core unit 21b are stacked, the openings 22a and 22b are It overlaps via the opening 22c. The nonmagnetic spacers 26a, 26b, and 26c are provided at the same position in plan view. When the first core unit 21a, the spacer core unit 21c, and the second core unit 21b are stacked, the nonmagnetic spacers 26a are provided. , 26b and 26c overlap each other.

  The armature core is configured by stacking such first core knit 21a, spacer core unit 21c, and second core unit 21b. FIG. 4 is a plan view showing the shape of the armature core, and FIG. 5 is a perspective view showing a configuration method of the armature core.

  The armature core 30 is configured by stacking two first core units 21a, 21a, two second core units 21b, 21b, and three spacer core units 21c, 21c, 21c. Specifically, as shown in FIG. 5, the first core unit 21a, the spacer core unit 21c, the second core unit 21b, the spacer core unit 21c, the first core unit 21a, the spacer core unit 21c, and the second core unit 21b. The armature core 30 is configured by stacking in this order.

  At this time, in the adjacent first core unit 21a and second core unit 21b, the yoke part 24a and the yoke part 24b are magnetically coupled via the yoke part 24c of the spacer core unit 21c. The magnetic pole portions 23a and 23a and the magnetic pole portions 23b and 23b, and the core portion 25a and the core portion 25b are magnetically insulated with a gap corresponding to the thickness of the spacer core unit 21c. These yoke part 24a, yoke part 24b and yoke part 24c function as a magnetic flux return path. The magnetic pole part 23a and the magnetic pole part 23b, and the core part 25a and the core part 25b are spaced apart from each other to prevent a magnetic short circuit.

  By laminating these core units, the openings 22a, 22b, and 22c of each core unit communicate with each other to form a cross-shaped through hole 22 into which the mover 1 is inserted. Further, the nonmagnetic spacers 26a, 26b and 26c of each core unit are connected to form a nonmagnetic spacer support frame 26 having a function of insulating magnetic coupling and a function of holding each core unit.

  FIG. 6 is a perspective view showing a drive coil used in the armature. As drive coils, two drive coils (first drive coil 41a and second drive coil 41b) for applying a sinusoidal current and two drive coils (third drive coil 41c and for applying a cosine wave current) A fourth drive coil 41d). The first drive coil 41a and the second drive coil 41b that make a pair are spaced apart in the left-right direction in FIG. 6, and the third drive coil 41c and the fourth drive coil 41d that make a pair are placed in the up-down direction in FIG. They are spaced apart. A current is applied in the same direction to the paired first drive coil 41a and the second drive coil 41b, and a current is applied in the same direction to the paired third drive coil 41c and the fourth drive coil 41d.

  The armature 2 is configured by arranging the four first to fourth drive coils 41a to 41d on the armature core 30 so as to be wound around the core portions 25a and 25b. FIG. 7 is a perspective view showing the configuration of the armature 2.

  7 is inserted into the cross-shaped through hole 22 at the center of the armature 2 shown in FIG. FIG. 8 is a perspective view showing the configuration of the actuator 3.

  Here, a method for manufacturing the armature 2 having the above-described configuration will be described.

  9 is a perspective view showing a block unit used for the armature core 30, FIG. 9A shows a first block unit 31a, FIG. 9B shows a second block unit 31b, and FIG. 9C shows a feedback block unit 31c.

  The first block unit 31a corresponds to one fractional area of the first core knit 21a described above, and is formed of a soft magnetic material. The first block unit 31a includes two magnetic pole portions 33a and 33a, a yoke portion 34a disposed on the outer edge, and a core portion 35a that connects the yoke portion 34a and the magnetic pole portions 33a and 33a.

  The second block unit 31b is rotated by 90 ° about the normal to the paper surface with the front and back reversed from the first block unit 31a, and corresponds to one fractional area of the second core unit 21b described above. It is made of a soft magnetic material. The second block unit 31b includes two magnetic pole portions 33b and 33b, a yoke portion 34b disposed on the outer edge, and a core portion 35b connecting the yoke portion 34b and the magnetic pole portions 33b and 33b.

  The feedback block unit 31c corresponds to one fractional area of the spacer core unit 21c described above, and is formed of a soft magnetic material. The return block unit 31c has a yoke part 34c.

  Then, in order of the first block unit 31a, the feedback block unit 31c, and the second block unit 31b, the yoke portions 34a, 34b, and 34c are aligned and laminated to produce a quarter block 37. FIG. 10 shows the configuration of the manufactured quarter block 37.

  Next, the eight quarter blocks 37 are coupled by a spacer support frame 36 made of a non-magnetic material, and the armature core 30 is manufactured so as to have a cross-shaped opening through which the mover passes. FIG. 11 shows the configuration of the manufactured armature core 30.

  Finally, four first to fourth drive coils 41a to 41d as shown in FIG. 6 are arranged so as to circulate through the four through-holes of the armature core 30, as shown in FIG. An armature 2 is produced.

  Hereinafter, the operation of the actuator 3 in the present invention will be described.

  FIGS. 12A to 12D show the flow of magnetic flux generated in the armature when current is applied to the four drive coils. 12A, 12B, 12C, and 12D show the flow of magnetic flux at an electrical angle of 0 °, an electrical angle of 90 °, an electrical angle of 180 °, and an electrical angle of 270 °, respectively. 12A to 12D, each drive coil is represented by a cross section, and the core unit is represented by a plane.

  In FIGS. 12A to 12D, the ● mark in each drive coil represents the direction of current flowing from the back of the paper to the front, and the x represents the direction of current flowing from the front to the back of the paper. The white arrow indicates the flow (path and direction) of the magnetic flux in the core unit (first core unit 21a) on the front side of the page, and the dotted arrow indicates the core unit (second core unit) on the back side of the page. 21b) shows the flow of magnetic flux (path and direction).

  12A, the sine wave current flowing through the first drive coil 41a and the second drive coil 41b is zero and flows through the third drive coil 41c and the fourth drive coil 41d. The cosine wave (cos wave) current has a maximum value. At this time, as shown in FIG. 12A, magnetic fluxes that are 180 ° different from each other are generated in the gap extending in the vertical direction of the paper surface, but no magnetic flux is generated in the gap extending in the horizontal direction of the paper surface.

  Next, in the state of the electrical angle of 90 ° shown in FIG. 12B, the sine wave current flowing through the first drive coil 41a and the second drive coil 41b becomes the maximum value, and the cosine flowing through the third drive coil 41c and the fourth drive coil 41d. The wave current becomes zero. At this time, as shown in FIG. 12B, magnetic fluxes that are 180 ° different from each other are generated in the gap extending in the left-right direction on the paper surface, but no magnetic flux is generated in the gap extending in the vertical direction on the paper surface.

  Next, in the state where the electrical angle is 180 ° shown in FIG. 12C, the sine wave current is zero, the cosine wave current is the maximum value, and the magnetic fluxes whose directions are different from each other by 180 ° in the gap extending in the vertical direction on the paper surface. However, no magnetic flux is generated in the gap extending in the left-right direction on the paper surface. The direction of the magnetic flux generated in this case is 180 ° different from the direction of the magnetic flux when the electrical angle is 0 ° shown in FIG. 12A.

  Next, in the state of the electrical angle of 270 ° shown in FIG. 12D, the sine wave current becomes the maximum value, the cosine wave current becomes zero, and the magnetic fluxes whose directions are different by 180 ° in the gap extending in the left-right direction on the paper surface. However, no magnetic flux is generated in the gap extending in the vertical direction on the paper surface. The direction of the magnetic flux generated in this case is 180 ° different from the direction of the magnetic flux in the case of the electrical angle of 90 ° shown in FIG. 12B.

  Inside the armature 2, the change in the flow of magnetic flux as described above is repeated periodically with a period of 360 °.

  On the other hand, as described above, the arrangement of the plate-like magnets in the mover 1 is as follows. That is, on the surface in the vertical direction in FIG. 1, the first magnet 11a and the third magnet 11c having the magnetization direction in the thickness direction opposite to each other are movable symmetrically with respect to the central axis of the movable direction (longitudinal direction). The second magnet 11b and the fourth magnet are arranged alternately in the direction, and in the plane in the left-right direction in FIG. 11d are alternately arranged in the movable direction, and the arrangement of the first magnet 11a and the third magnet 11c on the vertical surface and the arrangement of the second magnet 11b and the fourth magnet 11d on the horizontal surface are movable. The direction is shifted by λ / 4 (λ: field period).

  By combining the armature 1 and the armature 2 having such a configuration, it is possible to obtain thrust continuously over time even when one armature 2 is used. The operation will be described below.

  After inserting the mover 1 having a cross-shaped cross section into the cross-shaped through hole 22 of the armature 2, first, the magnetic pole teeth (the magnetic pole portion 23a of the first core unit 21a) on the front side in FIG. The mover 1 is arranged so that the first magnet 11a is positioned between the first magnetic pole teeth (the magnetic pole portion 23b of the second core unit 21b). In this state, when a current having an electrical angle of 0 ° as shown in FIG. 12A is applied to the first to fourth drive coils 41a to 41d, the first magnet 11a has a repulsive force between the magnetic pole teeth on the front side in the drawing. And an attractive force is generated between the magnetic pole teeth on the rear side of the paper. As a result, the mover 1 is moved in the depth direction of the page.

  When the first magnet 11a reaches the same position in the axial direction as the magnetic pole teeth on the rear side of the paper, the second magnet 11b is connected to the magnetic pole teeth on the rear side of the paper (the magnetic pole portion 23b of the second core unit 21b). It is located between the magnetic pole teeth on the front side of the paper (the magnetic pole portion 23a of the first core unit 21a). In this state, when a current having an electrical angle of 90 ° as shown in FIG. 12B is applied to the first to fourth drive coils 41a to 41d, the repulsive force is exerted between the second magnet 11b and the magnetic pole teeth on the front side of the sheet. And an attractive force is generated between the magnetic pole teeth on the rear side of the paper. As a result, the mover 1 is moved in the depth direction of the page.

  When the second magnet 11b reaches the same position in the axial direction as the magnetic pole teeth on the rear side of the paper, the third magnet 11c is connected to the magnetic pole teeth on the rear side of the paper (the magnetic pole portion 23b of the second core unit 21b). It is located between the magnetic pole teeth on the front side of the paper (the magnetic pole portion 23a of the first core unit 21a). In this state, when a current having an electrical angle of 180 ° as shown in FIG. 12C is applied to the first to fourth drive coils 41a to 41d, a magnetic flux in the opposite direction to that in the case of an electrical angle of 0 ° is generated in the armature 2. (Refer to FIG. 12C), the magnetization direction of the third magnet 11c is also opposite to that of the first magnet 11a. Therefore, a repulsive force is generated between the third magnet 11c and the magnetic pole teeth on the front side of the paper, An attractive force is generated between the magnetic pole teeth on the rear side. As a result, the mover 1 is moved in the depth direction of the page.

  When the third magnet 11c reaches the same position in the axial direction as the magnetic pole teeth on the rear side of the paper surface, the fourth magnet 11d is connected to the magnetic pole teeth on the rear side of the paper surface (the magnetic pole portion 23b of the second core unit 21b). It is located between the magnetic pole teeth on the front side of the paper (the magnetic pole portion 23a of the first core unit 21a). In this state, when a current having an electrical angle of 270 ° as shown in FIG. 12D is applied to the first to fourth drive coils 41a-41d, a magnetic flux in the opposite direction to that in the case of an electrical angle of 90 ° is generated in the armature 2. (Refer to FIG. 12D), the magnetization direction of the fourth magnet 11d is also opposite to that of the second magnet 11b. Therefore, a repulsive force is generated between the fourth magnet 11d and the magnetic pole teeth on the front side of the paper, An attractive force is generated between the magnetic pole teeth on the rear side. As a result, the mover 1 is moved in the depth direction of the page.

  By periodically repeating the above, it is possible to obtain thrust that is continuous over time with respect to the movement of the mover 1.

  In addition, by making the direction of the current applied to the first to fourth drive coils 41a-41d to be opposite to that described above, the mover 1 is moved in the opposite direction to that described above, that is, toward the front side of the drawing. Can move.

  In the actuator 3 of the present invention, an independent alternating magnetic field is generated by shifting the phase by 90 ° in the cross-shaped through-holes 22 positioned in two directions (two directions orthogonal to each other) of one armature 2, and this cross The movable member 1 having a cross-shaped cross section in which the arrangement of the magnets is shifted by ¼ of the field period in two directions orthogonal to each other is inserted into the through hole 22 having a cross shape.

  Therefore, in the actuator 3 of the present invention, even when one armature 2 is used, thrust for moving the mover 1 can be provided continuously over time. Since it is not necessary to arrange the armatures of the respective phases in series as in the prior art, the overall length can be shortened.

  Therefore, since the overall length of the actuator 3 of the present invention can be shortened, when applied to a vertical actuator, the overall height can be lowered, and the height is lowered. Is obtained. As a result, precise positioning with respect to the workpiece can be performed, and machining accuracy can be improved.

  Since the actuator 3 according to the present invention has a phase collective concentrating structure, the electrical resistance of the drive coils 41a-41d is low, so that the copper loss is small and the overall length can be shortened.

  Since the actuator 3 of the present invention can be downsized, it can be driven with high efficiency and a large thrust magnetomotive force ratio can be obtained. Further, the actuator 3 of the present invention has a large linkage surface with the magnetic path, which also contributes to the improvement of the thrust magnetomotive force ratio. Since the thrust magnetomotive force ratio is increased, less current is required to obtain the same thrust, and the amount of heat generation can be kept low.

  In a three-phase actuator of a comparative example, which will be described later, there are a time zone in which a magnetic flux is generated by a driving magnetomotive force (applied current × the number of coil turns) and a time zone in which it does not occur in the core portion of each phase armature. On the other hand, in the actuator 3 of the present invention, a magnetic flux is always generated in the core portions 25a and 25b of the armature 2 with time (see FIGS. 12A to 12D). Therefore, in the present invention, since the core material is always magnetized, the saturation magnetization of the core material can be effectively used over time. As a result, the amount of the core material to be used can be reduced.

  Hereinafter, a specific configuration of the actuator manufactured by the present inventor and characteristics of the manufactured actuator will be described.

  An example of manufacturing the mover 1 used for the actuator will be described. First, an aluminum magnet arrangement frame 10 as shown in FIG. 13 was produced.

The flat permanent magnet used is an Nd—Fe—B sintered magnet having a maximum energy product of 370 kJ / m ³ and a residual magnetic flux density of Br = 1.4 T, a length of 24 mm and a width of 10 mm. Then, it was cut into a shape with a thickness of 4.5 mm. After magnetizing the cut-out magnets in the thickness direction, a total of 32 magnets (first magnet 11a, second magnet 11b, and third magnet), each having 16 pieces on one surface in the arrangement as described above (see FIG. 1). 11c and the fourth magnet 11d) were bonded to the magnet arrangement frame 10 with an epoxy adhesive to produce the movable element 1. The structure of the manufactured mover 1 is shown in FIG. In this case, the field period (the length of the period of the S pole N pole pair of the magnet of the mover 1) λ is 24 mm, so the arrangement of the first magnet 11a and the third magnet 11c, the second magnet 11b and the fourth magnet. The magnet 11d is displaced by 6 mm (= λ / 4).

  Next, the armature core 30 was produced. A block unit having a thickness of 10 mm is obtained by cutting 20 pieces of armature material having a shape as shown in FIG. 15A from a 0.5 mm-thick silicon steel plate, and by superposing these 20 cut pieces and integrating them by resin impregnation. Was made. Sixteen block units having the same shape were produced. Eight block units out of the 16 manufactured were directly used as the first block unit 31a (see FIG. 9A), and the remaining eight block units were turned over to form the second block unit 31b (see FIG. 9B).

  15B is cut out from a silicon steel plate having a thickness of 0.5 mm, and the four cut out pieces are overlapped and impregnated with a resin so as to be integrated, thereby returning block unit 31c. As shown in FIG. 9C, two first feedback block units 31d having a thickness of 2 mm are manufactured, and 10 armature materials having a shape as shown in FIG. 15B are cut out from a 0.5 mm-thick silicon steel plate, These 10 cut outs were overlapped and impregnated with resin to integrate them, thereby producing one second feedback block unit 31e having a thickness of 5 mm as a feedback block unit 31c (see FIG. 9C).

  Then, the first block unit 31a, the first feedback block unit 31d, the second block unit 31b, the second feedback block unit 31e, the first block unit 31a, the first feedback block unit 31d, and the second block unit 31b are stacked in this order. And it integrated with the epoxy-type adhesive agent, and produced the 1/4 block 37 as shown in FIG.

  The four quarter blocks 37 thus produced are arranged by being rotated by 90 ° about the stacking direction, and four aluminum spacer support frames 36 (length: 49 mm, width) are arranged on the outer periphery thereof. : 6 mm, height: 5 mm) was placed and adhered to produce an armature core 30 as shown in FIG. Here, the length of the armature core 30 in the movable direction (longitudinal direction) is 49 mm (= 10 mm + 2 mm + 10 mm + 5 mm + 10 m + 2 mm + 10 mm).

  The width (17 mm) of the core part in the block unit is made longer than the width (5 mm) of the yoke part, and the width x thickness of the core part is made larger than the width x thickness of the yoke part. This is because when the layers are stacked, the plurality of yoke portions are continuously stacked, whereas the core portion is stacked with a gap, so that the small thickness is compensated by the width. This is because magnetic flux is obtained at the core.

  The thickness of the first feedback block unit 31d is 2 mm, whereas the thickness of the second feedback block unit 31e is 5 mm. This is to reduce the detent force. The set of the front first block unit 31a, the first feedback block unit 31d, and the second block unit 31b in FIG. 17, and the set of the rear first block unit 31a, the first feedback block unit 31d, and the second block unit 31b in FIG. The thickness of the second feedback block unit 31e is made 3 mm longer than the thickness of the first feedback block unit 31d so as to cancel the fourth harmonic component of the detent force at.

  Next, four first to fourth drive coils 41a to 41d as shown in FIG. 18 were produced. An enamel-coated copper wire having a diameter of 0.7 mm is wound 100 times in the through space of the core portion of the armature core 30 shown in FIG. 17 and impregnated with varnish to harden the first to fourth drive coils 41a to 41d. did. As described above, the four first to fourth drive coils 41 a to 41 d were arranged on the armature core 30 to produce the armature 2. The produced armature 2 is shown in FIG.

  A guide roller (not shown) is installed at each tip of the cross-shaped through-hole 22 of the armature 2 manufactured as described above, and the mover shown in FIG. 14 is manufactured along the guide roller. 1 was inserted into the cross-shaped through hole 22 of the armature 2 to constitute the actuator 3. By this guide roller, the movable element 1 is held at the center of the cross-shaped through hole 22 of the armature 2, and the movable element 1 can freely move in the axial direction (movable direction) of the through hole 22. Here, since the inserted mover 1 has a cross-shaped cross section, each guide roller only needs to restrain movement in one direction other than the movable direction, so a flat guide roller having a simple configuration is used. However, the movable element 1 can be positioned.

  Next, the center of each pole of the first magnet 11a and the third magnet 11c in the vertical direction of the mover 1 is between the adjacent magnetic pole part 23a and the magnetic pole part 23b of the armature 2 (between the magnetic pole part 23a and the magnetic pole part 23b). The mover 1 is arranged so as to be located in the center of the gap. A sinusoidal current having an electrical angle of 0 ° and a field period of 360 ° is applied to the first drive coil 41a and the second drive coil 411b in the same direction, and a cosine wave current is applied to the third drive coil 41c and The motor driver was connected to each drive coil 41a-41d so that it might apply to the 4th drive coil 41d in the same direction.

  And the actuator 3 was fixed to the thrust test bench, and the thrust characteristic was measured. FIG. 20 shows the relationship between the drive magnetomotive force (applied current × the number of coil turns) per drive coil applied to the drive coil and the generated thrust. In FIG. 20, graph (a) represents thrust (N), and graph (b) represents thrust magnetomotive force ratio (N / A). As shown in FIG. 20, when the point where the thrust magnetomotive force ratio is reduced by 10% is the thrust proportional limit, the actuator 3 having the proportional limit thrust of 120 N is obtained. The thrust magnetomotive force ratio when the proportional thrust was 120 N was 0.24 N / A.

  FIG. 21 shows the measurement results of the thrust fluctuation when the position of the mover 1 is moved 50 mm from the starting point. In FIG. 21, graphs (a), (b), (c), and (d) represent measurement results when the drive magnetomotive force applied to each drive coil is 0 A, 100 A, 200 A, and 400 A, respectively. . As shown in FIG. 21, when the driving magnetomotive force is 400 A, a thrust ripple of about ± 10% can be seen, but it can be seen that a continuous thrust can be obtained within a range where there is no practical problem.

  Hereinafter, the comparison between the actuator of the present invention as described above and the actuator of the comparative example will be described.

  FIG. 22 is a perspective view showing a configuration of a comparative example actuator having substantially the same rating as the actuator of the present invention, and FIG. 23 is a view showing the size of the comparative example actuator. The actuator of the comparative example uses an armature core material and a magnet material equivalent to the present invention, and has three armatures (U-phase unit 53a, V-phase unit 53b, W-phase) having an armature core 51 and drive coils 52a and 52b. Units 53c) are arranged in series at a predetermined distance, and a plate-like magnet 61a (length: 20 mm, width: 4 mm, thickness: 4 mm) and a plate-like iron yoke (long) are arranged in series at a predetermined distance. (Spacing: 26 mm, width: 3.5 mm, thickness: 4 mm) is a three-phase driving type actuator having a configuration in which a movable element 60 formed by alternately arranging 61b in parallel in a movable direction is passed. Here, the magnetization direction of the magnet 61a of the mover 60 is the move direction of the mover 60, and the magnetization directions of the adjacent magnets 61a and 61a via the iron yoke 61b are opposite to each other.

  FIG. 24 shows the characteristics (thrust force and thrust magnetomotive force ratio) of the actuator of this comparative example. In FIG. 24, graph (a) represents thrust (N), and graph (b) represents thrust magnetomotive force ratio (N / A). As shown in FIG. 24, when the point where the thrust magnetomotive force ratio is reduced by 10% is the thrust proportional limit, the thrust of the proportional limit is 205 N, and the thrust magnetomotive force ratio is 0 when the proportional thrust is 205 N. 0.08 to 0.09 N / A.

  When the characteristics of the comparative example shown in FIG. 24 and the characteristics of the example of the present invention shown in FIG. 20 are compared, in the example of the present invention, the thrust and thrust when the thrust magnetomotive force ratio is the same are the same. The thrust magnetomotive force ratio is superior to the conventional example. Here, the configuration of the armature having a total length of 86 mm (see FIG. 23) is necessary in the comparative example, whereas the configuration of the armature 2 having a total length of 49 mm (see FIG. 19) is sufficient in the example of the present invention. Is obtained.

  In a vertical actuator, it is known that the amount of deflection is proportional to the cube of its height. In the example of the present invention, the total length can be shortened to about ½ compared to the comparative example. Therefore, when the example of the present invention is applied to a vertical actuator, the amount of deflection is 1 as compared with the case of applying the comparative example. It becomes possible to reduce to about / 8.

  As described above, in the actuator 3 of the present invention, a continuous thrust can be obtained by one armature 2, so that the overall length can be shortened to almost half compared with the conventional same rating. For this reason, when the actuator 3 of the present invention is used for a vertical actuator, the overall height can be reduced, the burden of the bending moment on the processing apparatus can be reduced, and the size and weight can be reduced.

  Further, in the actuator 3 of the present invention, the cross section of the mover 1 has a cross shape, and the magnetic teeth of the armature 2 surely face the magnet of the mover 1 so that the mover 1 (magnet) and the armature 2 ( Large interlinkage area with magnetic pole teeth) can be secured. As a result, since the thrust magnetomotive force ratio can be increased by about three times as compared with the actuator of the comparative example (see FIGS. 20 and 24), the drive power can be reduced, and the power use efficiency can be increased and the heat generation can be reduced. The actuator 3 of the present invention is particularly suitable for high-speed continuous driving.

  In addition, although the form which uses a flat permanent magnet for a needle | mover was demonstrated, you may make it use a rod-shaped permanent magnet, for example. In addition, when the actuator is driven, a plane perpendicular to the magnetization direction of the permanent magnet may be curved as long as a continuous thrust can be secured over time within a range where there is no practical problem.

  Although the silicon steel plate is used as the nonmagnetic material, the material is not limited to the silicon steel plate. Amorphous metal, iron, or ferrite such as manganese zinc ferrite or nickel zinc ferrite can be selected depending on the application.

  FIG. 25 is a perspective view showing the configuration of another example of the magnet arrangement frame 10 used for the mover 1. In FIG. 25, the same components as those in FIG. In the configuration of the magnet arrangement frame 10 shown in FIG. 25, the ends of the plurality of frame members 10a and 10b arranged at equal intervals in the movable direction (longitudinal direction) are integrated with the frame member 10c that is long in the movable direction. It is fixed. By doing in this way, it becomes the structure enclosed by the whole, and the rigidity of the magnet arrangement | sequence frame 10 becomes high.

  Further, in the configuration example of FIG. 25, the peripheral edge portion of each of the four frame members 10c is a linear guide rail 10d that is long in the movable direction and has a substantially circular cross section. In addition, although illustration is abbreviate | omitted, the linear guide slider for letting this linear guide rail 10d pass is provided in the inner surface side of each spacer support frame 26 (refer FIG. 7) made from the nonmagnetic material of the armature 2. By providing such a linear guide rail 10d, smooth movement of the mover 1 can be realized, and even when the actuator is driven at a high speed, large vibration does not occur, and the stable mover 1 does not rattle. Linear movement can be realized.

  FIG. 26 is a perspective view showing a configuration of still another example of the magnet arrangement frame 10 used for the mover 1. In FIG. 26, the same components as those of FIG. 25 are denoted by the same reference numerals, and description thereof is omitted. In the configuration of the magnet arrangement frame 10 shown in FIG. 26, the surface extending in the longitudinal direction in contact with the magnets of the frame members 10 a and 10 b is slightly shifted (skewed) from the direction perpendicular to the movable direction of the mover 10. Members 10a and 10b are provided. The shift angle (skew angle) is about several degrees. With such a configuration, the permanent magnets 11a to 11d can be provided in a skew arrangement that is inclined by a predetermined angle (skew angle) with respect to a direction orthogonal to the moving direction. By arranging the permanent magnets 11a to 11d in a skewed manner, it is possible to suppress vibration caused by detent force when the actuator is driven.

  FIG. 27 is a perspective view showing another example of a block unit used for the armature core 30. 27A shows the first block unit 31a, FIG. 27B shows the second block unit 31b, and FIG. 27C shows the feedback block unit 31c. In the example shown in FIG. 27, unlike the example described above (see FIG. 9), the inner side surfaces of the core portions 35a, 35b and the yoke portions 34a, 34b, 34c are not flat surfaces but curved surfaces. With such a configuration, the number of windings of each of the first to fourth drive coils 41a to 41d can be increased.

DESCRIPTION OF SYMBOLS 1 Mover 2 Armature 3 Actuator 10 Magnet arrangement frame 11a 1st magnet 11b 2nd magnet 11c 3rd magnet 11d 4th magnet 21a 1st core unit 21b 2nd core unit 21c Spacer core unit 22 Through-hole 22a, 22b Opening part 23a, 23b Magnetic pole part 24a, 24b, 24c Yoke part 25a, 25b Core part 26, 36 Spacer support frame 26a, 26b, 26c Nonmagnetic spacer 30 Armature core 31a First block unit 31b Second block unit 31c Feedback block unit 33a , 33b Magnetic pole part 34a, 34b, 34c Yoke part 35a, 35b Core part 37 1/4 block 41a First drive coil 41b Second drive coil 41c Third drive coil 41d Fourth drive coil

Claims (6)

A plurality of plate-like magnets are arranged on each of two planes orthogonal to the cross shape, and the plurality of magnets magnetized in the thickness direction on one of the two planes are intersecting directions of the two planes. The magnetization directions of adjacent magnets are opposite to each other, and the plurality of magnets magnetized in the thickness direction are arranged in the intersecting direction on the other plane of the two planes. The magnetization directions of adjacent magnets are opposite, and the arrangement of the plurality of magnets in the one plane and the arrangement of the plurality of magnets in the other plane are 1 / of the field period in the intersecting direction. 4 move the mover,
The movable element is divided into four by a cross-shaped opening through which each of the movable elements is penetrated, and each of the divided areas includes two magnetic pole parts facing the opening, a yoke part arranged on an outer edge, and the yoke And a first core unit made of a soft magnetic material having a core part connecting the magnetic pole part and a cross-shaped opening through which the mover passes, and each fraction is divided into four parts The region has two magnetic pole portions facing the opening, a yoke portion arranged on the outer edge, and a core portion connecting the yoke portion and the magnetic pole portion, and the first core unit is turned upside down. The second core unit made of soft magnetic material is alternately stacked with the spacer core unit made of soft magnetic material sandwiched therebetween, and the core portions of the first core unit and the second core unit that overlap each other are marked with a wire. Of the first and second core units of an armature Actuator, characterized in that are passed through the mouth.   The actuator according to claim 1, further comprising a frame member that supports and fixes the plurality of magnets.   The actuator according to claim 1, wherein the core portion has a width (width × height) larger than that of the yoke portion.   The yoke parts of adjacent fractional areas of the first core unit are connected via a nonmagnetic material, and the yoke parts of adjacent fractional areas of the second core unit are connected via a nonmagnetic material. The actuator according to any one of claims 1 to 3, wherein: In the actuator mover having a plurality of flat magnets,
The plurality of magnets are disposed in two planes orthogonal to each other in a cross shape, and the plurality of magnets magnetized in the thickness direction are arranged in the intersecting direction of the two planes on one of the two planes. The magnetization directions of adjacent magnets are opposite to each other, and the plurality of magnets magnetized in the thickness direction are arranged in the intersecting direction on the other plane of the two planes. The magnetization direction of the magnets to be matched is opposite, and the arrangement of the plurality of magnets in the one plane and the arrangement of the plurality of magnets in the other plane are shifted by ¼ of the field period in the intersecting direction. A mover characterized by that. In the cubic armature of the actuator through which the mover passes,
The movable element is divided into four by a cross-shaped opening through which each of the movable elements is penetrated, and each of the divided areas includes two magnetic pole parts facing the opening, a yoke part arranged on an outer edge, and the yoke And a first core unit made of a soft magnetic material having a core part connecting the magnetic pole part and a cross-shaped opening through which the mover passes, and each fraction is divided into four parts The region has two magnetic pole portions facing the opening, a yoke portion arranged on the outer edge, and a core portion connecting the yoke portion and the magnetic pole portion, and the first core unit is turned upside down. The second core unit made of soft magnetic material is alternately stacked with the spacer core unit made of soft magnetic material sandwiched between them, and the core portions of the first core unit and the second core unit that overlap each other are marked with a wire. Armature characterized by

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