JPWO2015072478A1 - 空間光変調素子モジュール、光描画装置、露光装置、空間光変調素子モジュール製造方法およびデバイス製造方法 - Google Patents
空間光変調素子モジュール、光描画装置、露光装置、空間光変調素子モジュール製造方法およびデバイス製造方法 Download PDFInfo
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract
Description
[特許文献1] 特開2007−052080号公報
[非特許文献1] Proc.of SPIE Vol.5377、p.777
Claims (16)
- ベース部材と、
複数の空間光変調素子アレイと
を備え、
前記複数の空間光変調素子アレイの各々は、入射光の強度および位相の少なくとも一方を変調して出射する光変調素子を有し、
前記ベース部材は、前記複数の空間光変調素子アレイを、ベアチップ状態で、予め定められた相対位置に保持する空間光変調素子モジュール。 - 前記複数の空間光変調素子アレイは、少なくとも1の方向について千鳥配置されている請求項1に記載の空間光変調素子モジュール。
- 前記少なくとも1の方向に直交する方向からみて、1の空間光変調素子アレイの少なくとも1つの反射素子と、前記1の空間光変調素子アレイに隣接する他の空間光変調素子アレイの少なくとも1つの反射素子とが隙間なく隣接する位置、あるいは、重なった位置に配される請求項2に記載の空間光変調素子モジュール。
- 前記ベース部材と前記複数の空間光変調素子アレイとの組を複数備え、
前記複数の空間光変調素子アレイが千鳥配置されるように、前記組同士が配された請求項1に記載の空間光変調素子モジュール。 - 前記複数の空間光変調素子アレイの各々は、前記ベース部材と対向する面に、前記ベース部材と電気的に接続するマイクロバンプを有する請求項1から4のいずれか1項に記載の空間光変調素子モジュール。
- 前記ベース部材、および、前記複数の空間光変調素子アレイの各々の少なくとも一部を覆うパッケージ部を更に備える請求項1から5のいずれか1項に記載の空間光変調素子モジュール。
- 前記パッケージ部は、前記複数の空間光変調素子アレイの各々が配された領域に開口が設けられたマスク部を有し、
前記マスク部は、入射光または反射光を吸収する吸収体を含む反射防止構造を更に有する請求項6に記載の空間光変調素子モジュール。 - 前記パッケージ部は、前記複数の空間光変調素子アレイの各々が配された領域に開口が設けられたマスク部を有し、
前記マスク部は、ミラー、回折格子およびブレーズ型回折光学素子のいずれかを含み、反射素子からの反射光とは異なる光路に向かって入射光を反射する構造を更に含む請求項6に記載の空間光変調素子モジュール。 - 請求項1から8のいずれか1項に記載の空間光変調素子モジュールを用いて光像を描画する光描画装置。
- 請求項9に記載の光描画装置を用いて半導体を露光する露光装置。
- 複数の反射素子をそれぞれが有する複数の空間光変調素子アレイを複数準備する段階と、
前記複数の空間光変調素子アレイの各々をベース部材に沿って並べる段階と
を備える空間光変調素子モジュール製造方法。 - 前記準備する段階において、前記複数の空間光変調素子アレイの各々において複数の反射素子を固定する犠牲層が設けられており、
前記並べる段階の後に、前記犠牲層を除去する段階をさらに備える請求項11に記載の空間光変調素子モジュール製造方法。 - 前記ベース部材および前記複数の空間光変調素子アレイの各々にアライメントマークが設けられており、
前記並べる段階において、前記アライメントマークを用いて前記複数の空間光変調素子アレイを位置決めする請求項11または12に記載の空間光変調素子モジュール製造方法。 - 前記並べる段階において、前記ベース部材と前記複数の空間光変調素子アレイの各々との間に挟まれる位置決め部材を用いて前記複数の空間光変調素子アレイを位置決めする請求項11から13のいずれか1項に記載の空間光変調素子モジュール製造方法。
- 前記ベース部材および前記複数の空間光変調素子アレイの各々には、前記位置決め部材を受け入れる溝が設けられている請求項14に記載の空間光変調素子モジュール製造方法。
- リソグラフィ工程を含むデバイス製造方法であって、
前記リソグラフィ工程では、請求項10に記載の露光装置を用いて露光を行うデバイス製造方法。
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US5497258A (en) * | 1994-05-27 | 1996-03-05 | The Regents Of The University Of Colorado | Spatial light modulator including a VLSI chip and using solder for horizontal and vertical component positioning |
JP2003098445A (ja) * | 2001-09-20 | 2003-04-03 | Sumitomo Electric Ind Ltd | 光部品の製造方法及び光スイッチ |
US20090009732A1 (en) * | 2003-07-29 | 2009-01-08 | Yoshihiro Maeda | Projection display system using laser light source |
JP2006098986A (ja) * | 2004-09-30 | 2006-04-13 | Fuji Photo Film Co Ltd | 反射型光変調アレイ素子および画像形成装置 |
JP2008235909A (ja) * | 2007-03-22 | 2008-10-02 | Asml Netherlands Bv | マスクレスリソグラフィにおける均一なバックグラウンド放射 |
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