JPWO2013001982A1 - Cylindrical body and vacuum pump - Google Patents

Abstract

It is an object of the present invention to provide a cylindrical body made of FRP and improved in corrosion resistance, and a vacuum pump that includes the cylindrical body and has an extended life due to improved quality of corrosion-resistant surface treatment.
In the embodiment of the present invention, with respect to the cylindrical rotating part manufactured with the FRP material, the hole (gap) formed in the manufacturing process of the cylindrical rotating part is subjected to hole filling processing, and then subjected to corrosion-resistant surface processing. . Alternatively, after the corrosion-resistant surface treatment is performed, a hole filling process is performed on the cylindrical rotating portion. As the hole filling process, the hole is filled with resin using painting, embedding, or melting (heating process).

Description

  The present invention relates to a cylindrical body and a vacuum pump, and relates to a cylindrical body subjected to a corrosion-resistant surface treatment and a vacuum pump containing the cylindrical body.

Among various vacuum pumps, turbo molecular pumps and thread groove pumps are frequently used to realize a high vacuum environment.
In such a vacuum pump, a structure that allows the vacuum pump to perform an exhaust function is housed in a casing forming an exterior body having an intake port and an exhaust port. The structure that exhibits the exhaust function is roughly divided into a rotating part (rotor part) that is rotatably supported and a fixed part (stator part) fixed to the casing.
In the case of a turbo molecular pump, the rotating part is composed of a rotating shaft and a rotating body fixed to the rotating shaft, and rotor blades (moving blades) provided radially are arranged in multiple stages on the rotating body. . In the fixed portion, stator blades (stator blades) are arranged in multiple stages alternately with respect to the rotor blades. In addition, a motor for rotating the rotating shaft at high speed is provided, and when the rotating shaft rotates at high speed by the action of this motor, gas is sucked from the intake port due to the interaction between the rotor blade and the stator blade, and from the exhaust port. It is supposed to be discharged.

In such a vacuum pump such as a turbo molecular pump or a thread groove pump, the rotating part is usually made of a metal such as aluminum or an aluminum alloy.
However, in recent years, for the purpose of improving performance (especially, rotating at a higher speed), a cylindrical rotating part that rotates at a high speed is a lighter and stronger fiber-reinforced composite material (fiber-reinforced plastic material, Fiber Reinforced Plastics (hereinafter referred to as FRP material). In this case, fibers used for the FRP material include aramid fibers (AFRP), boron fibers (BFRP), glass fibers (GFRP), carbon fibers (CFRP), and polyethylene fibers (DFRP).
As described above, as a method of manufacturing the cylindrical rotating portion with the FRP material, the filament winding method in which a fiber bundle is wound and hardened with a resin, as proposed in Patent Document 1 below, There is a sheet winding method in which a sheet in which fibers are embedded is wound.

JP 2004-278512 A

  Patent Document 1 discloses a holder made of a composite material of an organic base material based on a resin filled with reinforcing fibers such as glass fiber or carbon fiber, and continuously wound around a core by a filament winding method. The Bexkart downstream rotor segment (5c) is described.

By the way, the fibers in the FRP material are held by the resin, but in the process of forming the cylindrical shape of the rotating part, a narrow gap is formed between the fibers and between the fiber layers (between the sheets in the sheet winding) as shown in FIG. 90 (hole, through hole) may be formed. The gap 90 is structurally easy to be configured in the axial direction with respect to the width, and is thin enough that the resin cannot flow. As a result, as shown in FIG. A long and narrow gap 90 (hole, through hole) was formed so as to be connected to the direction.
On the other hand, the resin of the FRP material (for example, epoxy resin) has a feature that it is easily corroded by halogen gas or the like. However, the vacuum pump containing the cylindrical rotating part made of this FRP material is corrosive. In some cases, the gas (for example, halogen gas) is exhausted. Therefore, as a countermeasure against corrosion, it is necessary to perform a corrosion-resistant surface treatment on the surface of the part (component) through which the gas flows. Usually, a vacuum pump performs a corrosion-resistant surface treatment by electroless nickel plating. Other examples include vapor deposition methods such as physical vapor deposition (PVD), chemical vapor deposition (CVD), sputtering, ion plating, and electrodeposition coating.

12 and 13 are views for explaining a conventional gap 90 formed between fibers or between fiber layers.
However, in the configuration in which the FRP material is used for the cylindrical rotating portion, as shown in FIGS. 12 and 13, there are the following problems when performing the corrosion-resistant surface treatment 80 (for example, electroplating).
As described above, since the gap 90 is formed from the end face of the FRP material, when the corrosion-resistant surface treatment 80 (plating) is performed, a corrosion-resistant surface is provided in a deep portion of the gap 90 (that is, the back of the hole). In some cases, the treatment 80 was not sufficiently performed, and the surface of the cylindrical rotating portion could not be completely plated. As a result, when corrosive gas has flowed in, corrosion may start from the back of the hole where the plating process was incomplete.

  Accordingly, an object of the present invention is to provide a cylindrical body made of FRP material and having improved corrosion resistance, and a vacuum pump that includes the cylindrical body and has an extended life due to improved quality of corrosion-resistant surface treatment. .

The invention according to claim 1 is a cylindrical body made of a fiber reinforced composite material fixed to a rotor disposed in a vacuum pump, wherein the cylindrical body is filled in a hole formed in the manufacturing process. A cylindrical body characterized in that is provided.
According to a second aspect of the present invention, there is provided the cylindrical body according to the first aspect, wherein a corrosion-resistant surface treatment is performed after the hole filling treatment.
According to a third aspect of the present invention, there is provided the cylindrical body according to the first aspect, wherein a corrosion-resistant surface treatment is performed before the hole filling treatment.
According to a fourth aspect of the present invention, there is provided the cylindrical body according to the first, second, or third aspect, wherein the hole filling process is a process of filling the hole with a hole filling agent.
The invention according to claim 5 provides the cylindrical body according to claim 4, wherein the hole filling agent is the same resin as that used in the fiber-reinforced composite material.
The invention according to claim 6 is characterized in that, in the hole filling process, the cylindrical body made of the fiber reinforced composite material is heated before the hole is filled with the hole filling agent. Item 6. A cylindrical body according to Item 5 is provided.
According to a seventh aspect of the present invention, there is provided the cylindrical body according to the fourth, fifth or sixth aspect, wherein the hole filling agent has a shrinkage ratio of less than 5% due to curing.
The invention according to claim 8 is characterized in that the hole filling process is a process of melting the cylindrical body made of the fiber reinforced composite material. A cylindrical body is provided.
The invention according to claim 9 provides the cylindrical body according to claim 8, wherein the fiber-reinforced composite material used for the cylindrical body is a thermoplastic resin.
The invention according to claim 10 provides the cylindrical body according to claim 8 or 9, wherein the hole filling process by the process of melting the cylindrical body is heated only at a portion to be filled.
The invention according to claim 11 is characterized in that the hole filling process by the process of melting the cylindrical body is a process of heating in a vacuum. A cylindrical body is provided.
The invention according to claim 12 is characterized in that the hole filling process by the process of melting the cylindrical body is a process of heating by frictional heat. A cylinder is provided.
According to a thirteenth aspect of the present invention, there is provided a vacuum pump including a rotor, wherein the rotor includes a cylindrical body made of a fiber reinforced composite material, and the cylindrical body is any one of the first to twelfth aspects. A vacuum pump characterized by being a cylindrical body according to claim 1.

  According to the present invention, it is possible to provide a cylindrical body made of FRP material and having improved corrosion resistance, and a vacuum pump whose life is extended by improving the quality of the corrosion-resistant surface treatment.

It is the figure which showed the example of schematic structure of the turbo-molecular pump provided with the cylindrical rotation part manufactured with FRP which concerns on embodiment of this invention. It is the figure which showed the conceptual diagram of the cylindrical rotation part which performed the corrosion-resistant surface treatment after performing the hole-filling process based on 1st Embodiment of this invention. It is a figure for demonstrating the hole-filling method using the coating which concerns on each embodiment of this invention. It is a figure for demonstrating the masking which concerns on the modification of each embodiment of this invention. It is a figure for demonstrating the hole-filling method using the capillary phenomenon which concerns on each embodiment of this invention. It is a figure for demonstrating the hole-filling method using gas contraction which concerns on each embodiment of this invention. It is a figure for demonstrating the hole-filling method using the vacuum impregnation based on each embodiment of this invention. It is a figure for demonstrating the hole-filling method by embedding which concerns on each embodiment of this invention. It is a figure for demonstrating the hole-filling method using the fusion | melting which concerns on each embodiment of this invention. It is the figure which showed the conceptual diagram of the cylindrical rotation part which performed the hole-filling process after giving a corrosion-resistant surface treatment based on 2nd Embodiment of this invention. It is a figure for demonstrating the clearance gap formed between fibers or between fiber layers. It is a figure for demonstrating the clearance gap formed between fibers or between fiber layers. It is a figure for demonstrating the clearance gap formed between fibers or between fiber layers.

(I) Outline of Embodiment In the embodiment of the present invention, a hole (gap) formed in the manufacturing process of the cylindrical rotating portion is filled in with respect to the cylindrical rotating portion (cylindrical body) manufactured of the FRP material. After the treatment, a corrosion-resistant surface treatment is applied. Alternatively, after performing the corrosion-resistant surface treatment, a hole filling process is performed on the hole formed in the cylindrical rotating part.
As the hole filling process, the hole is filled with resin using painting, embedding, or melting (heating process). Further, a masking process is performed as necessary on a portion where the resin should not be applied or a portion where it is not desired to apply the resin.

(Ii) Details of Embodiments Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS.
In the present embodiment, as an example of a vacuum pump, a so-called composite turbo molecular pump including a turbo molecular pump unit and a thread groove type pump unit will be described.

FIG. 1 is a diagram illustrating a schematic configuration example of a turbo molecular pump 1 including a cylindrical rotating part 9b manufactured by FRP according to the first embodiment of the present invention. 1 shows a cross-sectional view of the turbo molecular pump 1 in the axial direction.
A casing 2 that forms an exterior body of the turbo molecular pump 1 has a substantially cylindrical shape, and constitutes a casing of the turbo molecular pump 1 together with a base 3 provided at a lower portion (exhaust port 6 side) of the casing 2. doing. And inside this housing | casing, the gas transfer mechanism which is a structure which makes the turbo molecular pump 1 exhibit an exhaust function is accommodated.
This gas transfer mechanism is roughly divided into a rotating part that is rotatably supported and a fixed part that is fixed to the casing.

An inlet 4 for introducing gas into the turbo molecular pump 1 is formed at the end of the casing 2. A flange portion 5 is formed on the end surface of the casing 2 on the intake port 4 side so as to project to the outer peripheral side.
The base 3 is formed with an exhaust port 6 for exhausting gas from the turbo molecular pump 1.

The rotating part is provided on the shaft 7 which is a rotating shaft, the rotor 8 disposed on the shaft 7, a plurality of rotor blades 9a provided on the rotor 8, and the exhaust port 6 side (screw groove type pump part). It is comprised from the cylindrical rotation part 9b. The shaft 7 and the rotor 8 constitute a rotor part.
Each rotor blade 9a is composed of blades extending radially from the shaft 7 at a predetermined angle from a plane perpendicular to the axis of the shaft 7.
The cylindrical rotating portion 9 b is formed of a cylindrical member having a cylindrical shape concentric with the rotation axis of the rotor 8.

A motor unit 20 for rotating the shaft 7 at a high speed is provided in the middle of the shaft 7 in the axial direction, and is included in the stator column 10.
Further, on the intake port 4 side and the exhaust port 6 side with respect to the motor portion 20 of the shaft 7, radial magnetic bearing devices 30 and 31 for supporting the shaft 7 in a radial direction (radial direction) in a non-contact manner, a shaft 7 is provided with an axial magnetic bearing device 40 for supporting the shaft 7 in the axial direction (axial direction) in a non-contact manner.

A fixing portion is formed on the inner peripheral side of the housing. The fixed portion includes a plurality of fixed blades 50 provided on the intake port 4 side (turbo molecular pump portion), a thread groove spacer 60 provided on the inner peripheral surface of the casing 2, and the like.
Each fixed wing 50 is composed of a blade that is inclined by a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extends from the inner peripheral surface of the housing toward the shaft 7.
The fixed wings 50 at each stage are separated and fixed by a spacer 70 having a cylindrical shape.
In the turbo molecular pump unit, the fixed blades 50 and the rotary blades 9a are alternately arranged and formed in a plurality of stages in the axial direction.

In the thread groove spacer 60, a spiral groove is formed on the surface facing the cylindrical rotating portion 9b.
The thread groove spacer 60 faces the outer peripheral surface of the cylindrical rotating part 9b with a predetermined clearance, and when the cylindrical rotating part 9b rotates at a high speed, the gas compressed by the turbo molecular pump 1 is converted into the cylindrical rotating part. It is sent out to the exhaust port 6 side while being guided by a screw groove (spiral groove) with the rotation of 9b. That is, the thread groove is a flow path for transporting gas. The screw groove spacer 60 and the cylindrical rotating portion 9b are opposed to each other with a predetermined clearance to constitute a gas transfer mechanism that transfers gas through the screw groove.
In addition, in order to reduce the force by which the gas flows backward to the intake port 4, the smaller the clearance, the better.
The direction of the spiral groove formed in the thread groove spacer 60 is the direction toward the exhaust port 6 when the gas is transported in the spiral groove in the rotational direction of the rotor 8.
Further, the depth of the spiral groove becomes shallower as it approaches the exhaust port 6, and the gas transported through the spiral groove is compressed as it approaches the exhaust port 6. As described above, the gas sucked from the intake port 4 is compressed by the turbo molecular pump unit, and further compressed by the thread groove type pump unit, and discharged from the exhaust port 6.

  The turbo molecular pump 1 provided with the cylindrical rotating part 9b manufactured using FRP, which is configured as described above, transmits various process gases such as halogen gas, fluorine gas, chlorine gas, or bromine gas to the semiconductor. When used for semiconductor manufacturing where there are many processes that act on the substrate, corrosion-resistant surface treatments such as electroless nickel plating are applied to the locations (components) where the gas comes into contact to prevent corrosion due to the gas. Applied.

(Ii-1) First Embodiment First, a first embodiment in which the corrosion-resistant surface treatment 80 is performed after the hole filling process in the cylindrical rotating unit 9b according to the present invention will be described with reference to FIGS.
FIG. 2 shows a conceptual diagram of the cylindrical rotating part 9b according to the first embodiment of the present invention, which has been subjected to the corrosion-resistant surface treatment 80 after the hole filling process.
In the turbo molecular pump 1 according to the first embodiment of the present invention, as shown in FIG. 2, the resin 1000 or the like is used for the hole (gap 90) formed in the cylindrical rotating part 9b made of FRP material. After the hole filling process, a corrosion-resistant surface treatment 80 such as electroless nickel plating is performed.
Hereinafter, as the hole filling process, a method of filling a hole formed in the cylindrical rotating portion 9b with a resin is divided into (A) to (C) and will be described in more detail.

(Ii-1-A: Filling process by painting)
FIG. 3 is a diagram for explaining a hole filling method (A) using painting according to the first embodiment of the present invention.
In the hole filling method A using coating according to the first embodiment of the present invention, a cylindrical rotating part manufactured by FRP using a liquid coating agent 1004 having a low viscosity and a coating tool 1002 for coating the coating agent 1004. The gap 90 (hole) on the surface of 9b is filled. As shown in FIG. 3A, various methods such as spray painting by spraying, painting by brush, or dip coating (dip coating) by a dip coater are conceivable.
In this method, as the coating agent 1004 (material for filling a hole), a material generally used for coating can be used. For example, a resin or glass particle not containing fibers can be coated. That is, various coating agents 1004 can be selected in view of the plating process performed after the hole filling process, and can be used according to the purpose and situation.
By painting in this way, as shown in FIG. 3B, it is possible to fill a hole formed in the cylindrical rotating portion 9b made of FRP.
It should be noted that the hole filling process by painting does not completely fill the back of the gap 90 (hole), but only closes the vicinity of the surface.

  In the cylindrical rotating part 9b according to the first embodiment of the present invention described above, the corrosion-resistant surface treatment 80 can be performed more efficiently by adopting the configurations described in the following modified examples 1 to 6. It becomes possible.

(1) Modification 1
In the hole-filling processing method according to the first modification of the first embodiment of the present invention, as the resin 1000 used for the hole-filling process, a material resin, that is, a resin used for the FRP material forming the cylindrical rotating portion 9b, A similar resin is used. For example, when the resin used for the FRP forming the cylindrical rotating portion 9b is an epoxy resin, the resin 1000 used for the hole filling process is also configured to use the epoxy resin.
With this configuration, when the embedded resin is cured and volume shrinkage occurs, the possibility that a new gap 90 or unevenness will remain can be reduced.
Moreover, the effect which improves the intensity | strength of the cylindrical rotation part 9b can be acquired because resin fills the hole (gap 90) formed in the cylindrical rotation part 9b.

(2) Modification 2
In the hole filling processing method according to the second modification of the first embodiment of the present invention, the cylindrical rotating part 9b is heated before the previous step (that is, the step of filling the cylindrical rotating part 9b with the resin 1000). Make a configuration to keep.
With this configuration, excess water adhering to the surface of the cylindrical rotating portion 9b, the gap 90, or the like can be blown away, and the hole filling process can be performed more efficiently.

(3) Modification 3
FIG. 4 is a view for explaining a masking 1006 according to the third modification of the first embodiment of the present invention, and shows a view in which the inner and outer circumferences other than the end face are masked 1006 in the cylindrical rotating portion 9b.
Here, in the first embodiment of the present invention, after the cylindrical rotating part 9b is manufactured by FRP, hole filling processing is performed on the cylindrical rotating part 9b using the resin 1000. Therefore, the cylindrical rotating part 9b Unevenness is formed on the surface by the applied resin 1000. On the other hand, in order to obtain dimensional accuracy, the unevenness needs to be processed. Therefore, it is desirable that the range in which the unevenness is formed, that is, the range in which the resin 1000 is applied, is minimized. .
Therefore, in the hole filling process method according to the third modification of the first embodiment of the present invention, as shown in FIG. 4, it is not desired to attach the resin 1000 used for the hole filling process in the cylindrical rotating portion 9b, or the resin 1000 A portion (range) where it is not desired to be applied is masked 1006.
With this configuration, since the resin 1000 is not applied to the end surface of the cylindrical rotating part 9b, the processing load for removing irregularities formed on the surface of the cylindrical rotating part 9b by the resin 1000 is minimized. Can be suppressed.

(4) Modification 4
In the hole-filling processing method according to the fourth modification of the first embodiment of the present invention, a resin having a small volume deformation after curing is used as the resin 1000 used for the hole-filling process.
With this configuration, the possibility that the embedded resin is cured to form the gap 90 can be reduced. In addition, as for resin used for a hole-filling agent, it is desirable that the ratio of shrinkage by hardening is less than 5%.

(5) Modification 5
Here, generally, the lower the viscosity of the resin, the shorter the time required for the resin to enter the gap, so that the working efficiency is improved. However, in the first embodiment of the present invention, if the viscosity of the resin 1000 used for the hole filling process is too low, the resin 1000 does not efficiently remain in the vicinity of the surface of the hole and may not function as a hole filling agent.
Therefore, in the hole filling processing method according to the fifth modification of the first embodiment of the present invention, a resin material having a viscosity enough to stay near the surface of the hole (gap 90) formed in the cylindrical rotating portion 9b is used. Make the configuration. Specifically, although it depends on the resin to be used, about 1 to 100 [Pa · s] is desirable.

(6) Modification 6
In the hole-filling method according to the sixth modification of the first embodiment of the present invention, the resin 1000 used for the hole-filling process is heated during the above-described hole-filling processes according to the first to fifth modifications. Specifically, although it depends on the resin to be used, the heating temperature is preferably about 40 ° C. because it is easy to handle. Depending on the resin, the viscosity is reduced to about half even by heating at the above temperature.
With this configuration, the viscosity of the resin used for the hole filling process can be reduced to a desired viscosity, so that the resin can easily enter the gap 90 formed in the cylindrical rotating portion 9b and efficiently. A hole filling process can be performed.

Here, there are two types of gaps 90 formed in the cylindrical rotating part 9b manufactured by FRP: a through hole in which a hole (gap 90) is connected from the end face to the end face, and a retaining hole in which the hole stays in the middle. . In the case of a through hole, there is a possibility that the hole filling process such as painting cannot be efficiently performed.
Therefore, for the through hole, the hole filling method using the capillary phenomenon by dip coating of the hole filling method (A) according to the first embodiment of the present invention is effective.
(Ii-1-A-1: Filling process by dip coating (capillary phenomenon))
FIG. 5 is a view for explaining a hole filling method using capillary action according to the first embodiment of the present invention.
In the hole filling method using the capillary phenomenon according to the first embodiment of the present invention, the cylindrical rotating part 9b manufactured by FRP is immersed in the resin tank 1001 (FIG. 5A).
FIG. 5B is an enlarged view of the α portion in FIG.
As shown in FIG. 5B, when the cylindrical rotating part 9b manufactured by FRP is immersed in the resin tank 1001, the resin 1000 is sucked into the gap 90 portion by capillary action.

(7) Modification 7 (Modification related to dip coating)
In the dip coating method of the hole filling process according to the first embodiment of the present invention, the portion immersed in the resin tank 1001 during the hole filling process in the cylindrical rotating part 9b is the lower part in the axial direction of the cylindrical rotating part 9b (that is, the exhaust port 6). Side). In other words, the resin 1000 is brought into contact with only the end surface of the cylindrical rotating portion 9b or a desired range on the end surface side, not the entire cylindrical rotating portion 9b (the entire surface).
With this configuration, the resin 1000 used for the hole filling process is applied to the end face of the cylindrical rotating part 9b or only on the end face side. 9b surface treatment etc.) can be reduced.

Subsequently, a hole filling method using gas contraction and a hole filling method using vacuum impregnation according to the first embodiment of the present invention will be described.
These methods require special equipment as compared with the above-described method, but a resin having a relatively high viscosity can be used.

(Ii-1-A-2: Filling process by dip coating (gas contraction))
FIG. 6 is a view for explaining a hole filling method (A-2) using gas contraction according to the first embodiment of the present invention.
In the hole filling method A-2 of the first embodiment, as shown in FIG. 6A, the cylindrical rotating part 9b manufactured by FRP is placed in the resin tank 1001 in which the liquid resin 1000 that is not solidified is placed. Is immersed (soaked) perpendicularly to the resin surface. At this time, in the hole filling method A-2 of the first embodiment, the end surface of the lower part in the axial direction of the cylindrical rotating part 9b is immersed (contacted) in the resin 1000, and the entire cylindrical rotating part 9b is immersed in the resin 1000. Not configured. After the hole filling process for the lower end face, the hole filling process for the other end face (end face in the axial direction) is performed. Note that either side of the hole filling process may be performed first.
In some cases, the entire cylindrical rotating portion 9b (the entire surface) may be immersed in the resin 1000.
More specifically, in the hole filling method A-2 using gas contraction according to the first embodiment of the present invention, first, the cylindrical rotating part 9b manufactured by FRP is heated (for example, about 100 to 150 ° C.).
Next, the heated cylindrical rotating part 9b is put in a resin tank 1001 in which a resin 1000 having a lower temperature (for example, about 40 ° C.) than the heated cylindrical rotating part 9b is accumulated.
6 (b) and 6 (c) are enlarged views of the β portion of FIG. 6 (a).
As shown in FIG. 6B, before entering the resin tank 1001, air 1005 exists in the gap 90 formed in the cylindrical rotating portion 9b made of FRP. When the cylindrical rotating part 9b manufactured by FRP and the resin 1000 are brought into contact with each other with a temperature difference (the cylindrical rotating part 9b is immersed in the resin tank 1001), the cylindrical rotating part 9b manufactured by the FRP is formed. The air 1005 existing in the gap 90 is cooled and contracts in volume.
When the volume of the air 1005 is thus contracted, the resin 1000 is sucked into a space formed by the contraction of the air 1005 as shown in FIG.
In this way, the resin 1000 is injected into the gap 90 of the cylindrical rotating part 9b manufactured by FRP using gas contraction, thereby filling the hole (gap 90) formed in the cylindrical rotating part 9b. Can do.

(Variation related to hole filling process by gas contraction (A-2))
In the hole filling process A-2 according to the first embodiment of the present invention, by using the configurations of the first to seventh modifications of the first embodiment described in the hole filling process (A) by painting, A more efficient corrosion-resistant surface treatment 80 can be performed.

(8) Modification 8
Furthermore, in the hole-filling method (A-2) according to the first embodiment of the present invention, when performing gas contraction, the cylindrical rotating part 9b is heated, while the resin 1000 used for the hole-filling process is a heated cylindrical shape. It is set as the structure made into temperature lower than the rotation part 9b. Specifically, it is desirable to warm the cylindrical rotating portion 9b to about 100 ° C to 150 ° C. In addition, it is desirable that the resin 1000 be kept at room temperature to about 40 ° C.
With this configuration, the air present in the gap 90 (hole) formed in the cylindrical rotating portion 9b is also warmed by heating the cylindrical rotating portion 9b. And the said warmed air is cooled by contacting with resin 1000 whose temperature is lower than the said air. By providing such a temperature difference, gas contraction can be efficiently performed in the gap 90 of the cylindrical rotating portion 9b.

(Ii-1-A-3: Filling process by dip coating (vacuum impregnation))
FIG. 7 is a view for explaining a hole filling method (A-3) using vacuum impregnation according to the first embodiment of the present invention.
In the hole filling method A-3 using vacuum impregnation according to the first embodiment of the present invention, first, the cylindrical rotating part 9b manufactured by FRP is put in a vacuum furnace while being immersed in the resin tank 1001, and the cylindrical rotation is performed. Air and moisture in the gap 90 formed in the portion 9b are removed by vacuum. Next, the said vacuum furnace is made into an atmospheric condition (FIG. 7 (a)).
FIG. 7B is an enlarged view of the γ portion in FIG. As shown in FIG. 7 (b), the cylindrical rotating part 9b is immersed in the resin tank 1001, and the vacuum state is changed to the atmospheric state, so that the gap 90 formed in the cylindrical rotating part 9b and the gap are formed. A large atmospheric pressure difference occurs between the surroundings of the 90 and the resin 1000 is sucked into the gap 90 by the atmospheric pressure difference.
Thus, by filling the resin 1000 into the gap 90 of the cylindrical rotating part 9b manufactured by FRP using vacuum impregnation, the hole formed in the cylindrical rotating part 9b can be filled.
In the hole filling method A-3 according to the first embodiment, the end surface of the axially lower portion of the cylindrical rotating portion 9b is immersed in the resin 1000 as in the configuration of the modification 7 of the first embodiment of the present invention (contact). You can also do so. At this time, since the end faces of the cylindrical rotating portion 9b are vertically above and below, the vacuum impregnation is performed separately on both the end faces.
By adopting a configuration in which vacuum impregnation is performed only from the end face as described above, the equipment for performing vacuum impregnation can be reduced in scale.
In some cases, instead of being immersed in the resin tank 1001 from the beginning, air or moisture in the gap 90 formed in the cylindrical rotating part 9b is removed by vacuum, and then the cylindrical rotating part 9b is removed from the resin tank 1001. A dipping configuration is also possible.

(Variation related to hole filling process (A-3) by vacuum impregnation)
In the method A-3 of the hole filling process according to the first embodiment of the present invention, by using the configurations of the first to seventh modifications of the first embodiment described in the method (A) of the hole filling process by painting, A more efficient corrosion-resistant surface treatment 80 can be performed.

(Ii-1-B: hole filling process by embedding)
FIG. 8 is a diagram for explaining a hole filling method (B) by embedding according to the first embodiment of the present invention.
In the hole-filling method B by embedding according to the first embodiment of the present invention, a liquid paste-like hole-filling agent having a high viscosity and a hole (gap 90) formed in the cylindrical rotating portion 9b manufactured by FRP using the hole-filling agent. Using the embedding tool 1003, the gap 90 on the surface of the cylindrical rotating part 9b manufactured by FRP is filled.
As an embedding method, as shown in FIG. 8A, using a tool 1003 such as a spatula, the resin 1000 was manufactured by FRP so as to fill the irregularities on the surface of the cylindrical rotating portion 9b manufactured by FRP. It pushes into the hole formed in the cylindrical rotation part 9b.
By performing the embedding process in this way, as shown in FIG. 8B, it is possible to perform the hole embedding process for the hole formed in the cylindrical rotating part 9b manufactured by FRP.

(Variation related to hole filling processing (B) by embedding)
In the method B of the hole filling process according to the first embodiment of the present invention, by using the configurations of the first to sixth modifications of the first embodiment described in the method (A) of the hole filling process by painting, it is more efficient. It is possible to perform a good corrosion-resistant surface treatment 80.

(Ii-1-C: filling process by melting)
FIG. 9 is a diagram for explaining a hole filling method (C) by melting according to the first embodiment of the present invention.
In the hole filling method C by melting according to the first embodiment of the present invention, the cylindrical rotating part 9b is heat-treated in order to close the hole (gap 90) formed in the cylindrical rotating part 9b manufactured by FRP. By heating in this way, as shown in FIG. 9A, the inlet of the gap 90 formed in the cylindrical rotating portion 9b (that is, the end surface in the axial direction of the cylindrical rotating portion 9b) is melted at the same time. The air that has existed in the gas escapes, and the pressure in the gap 90 is lowered by the amount of the air that has escaped, so that the melted surface portion is deformed so as to be closed inside the gap 90.
As a method for melting the surface, the end face of the cylindrical rotating portion 9b is brought into contact with a high temperature member such as a hot plate, and only the vicinity of the end face of the cylindrical rotating portion 9b is melted. In this method, the entire cylindrical rotating part 9b is not heated, but only the vicinity of the end face of the cylindrical rotating part 9b is heated, so that the entire cylindrical rotating part 9b is less likely to be distorted by heat.
As another method for melting the surface, there is a method using frictional heat. For example, the cylindrical rotating portion 9b is rotated and pressed against a fixed object, or the cylindrical rotating portion 9b is fixed and pressed against a rotating member, and melted by frictional heat.
As shown in FIG. 9B, the surface near the hole (gap 90) formed in the cylindrical rotating portion 9b manufactured by FRP is melted by heat treatment, and the melted surface is solidified. In this way, the melted portion can be closely adhered and hardened and bonded, and the hole formed in the cylindrical rotating portion 9b manufactured by FRP can be filled.

(Variation related to hole filling process (C) by melting)
In the hole filling process C according to the first embodiment of the present invention, a more efficient corrosion-resistant surface can be obtained by using the configuration of each modification 2 of the first embodiment described in the hole filling process (A) by painting. Processing 80 can be performed.

(9) Modification 9
Furthermore, in the method C of the hole filling process according to the modification 9 of the first embodiment of the present invention, the fiber reinforced composite material used for the cylindrical rotating part 9b is made of a thermoplastic resin.
With this configuration, in the hole filling process according to Modification 9 of the first embodiment of the present invention, the effect of the hole filling process by melting is further enhanced.

(10) Modification 10
Furthermore, in the hole filling process C according to Modification 10 of the first embodiment of the present invention, the hole filling process by melting is performed in a vacuum.
With this configuration, in the hole filling process according to Modification 10 of the first embodiment of the present invention, heat transfer due to gas convection is less likely to occur, and the entire cylindrical rotating portion 9b is suppressed from being heated. It is possible to prevent the entire rotating part 9b from being distorted by heat. As a result, it is possible to efficiently perform hole filling processing by melting only necessary portions.

As described above, with the above-described configuration, the turbo molecular pump 1 according to the first embodiment of the present invention realizes the quality improvement of the corrosion-resistant surface treatment 80 for the cylindrical rotating portion 9b formed of the fiber reinforced plastic material (FRP material). be able to.
In addition, the turbo molecular pump 1 according to the first embodiment and each of the modifications of the present invention is provided with the fiber-reinforced plastic material by disposing the cylindrical rotating part 9b made of the fiber-reinforced plastic material with improved corrosion resistance. Compared with the conventional vacuum pump in which the cylindrical rotating part 9b made of a heavier metal is disposed, the performance is improved (particularly, the rotational speed is increased), and the cylindrical rotating part 9b Due to the improved corrosion resistance, it can continue to operate for a longer period of time.

(Ii-2) Second Embodiment Next, a second embodiment in which a hole filling process is performed after the corrosion-resistant surface treatment 80 in the cylindrical rotating unit 9b according to the present invention will be described with reference to FIG.
FIG. 10 shows a conceptual diagram of a cylindrical rotating portion 9b that performs hole filling after the corrosion-resistant surface treatment 80 according to the second embodiment of the present invention.
In the turbo molecular pump 1 according to the second embodiment of the present invention, as shown in FIG. 10, after the corrosion-resistant surface treatment 80 such as electroless nickel plating is performed, it is formed on the cylindrical rotating part 9b made of FRP. A hole filling process is performed on the formed hole (gap 90).
In addition, about the hole-filling process, since (A)-(C) and each modification (1)-(8) of 1st Embodiment mentioned above can be applied, description is abbreviate | omitted.

In addition, as in the second embodiment of the present invention described above, when the hole filling process is performed after the corrosion-resistant surface treatment 80 is performed, the resin 1000 used for the hole filling process is desirably more resistant to corrosion than the base material (FRP). Use a high material (resin).
By adopting this configuration, even when the hole filling process is performed after the corrosion-resistant surface treatment 80 is applied, corrosion starts from the gap 90 where the corrosion-resistant surface treatment 80 is difficult to reach, and the corrosion resistance is prevented from being lowered. Can do.

With the configuration described above, in the turbo molecular pump 1 according to the second embodiment of the present invention, it is possible to improve the quality of the corrosion-resistant surface treatment 80 for the cylindrical rotating portion 9b formed of a fiber reinforced plastic material (FRP material). it can.
In addition, the turbo molecular pump 1 according to the second embodiment of the present invention is heavier than the fiber reinforced plastic material by disposing the cylindrical rotating part 9b made of the fiber reinforced plastic material with improved corrosion resistance. Compared with the conventional vacuum pump provided with a cylindrical rotating part 9b made of a certain metal, the performance (particularly the speeding up of the rotation speed) is improved, and the corrosion resistance of the cylindrical rotating part 9b is improved. Therefore, it can continue to operate for a longer period than before.

The first embodiment, the second embodiment, and each modification of the present invention can be configured as (i) and (ii) below.
(I) The hole filling methods (A) to (C) of the first embodiment can be combined. For example, after performing a hole filling process (a hole filling process method) using melting on the cylindrical rotating part 9b manufactured by FRP, a hole filling process (a hole filling process B) using a tool 1003 such as a spatula is further performed. When performing the hole filling process using dip coating (hole filling process A-3), the cylindrical rotating portion 9b is heated in the vacuum furnace, and the hole filling process using melting (hole filling method C) is performed. Various combinations can be considered according to the situation and conditions.
(Ii) If sufficient corrosion resistance can be ensured, in the hole filling process to which the first embodiment, each modification of the first embodiment, or a combination of each modification is applied, the base material (that is, cylindrical rotation) It is possible to employ a configuration in which a material having higher corrosion resistance than the FRP forming the portion 9b) is used as a hole filling agent, and the hole filling process is incorporated into the manufacturing process as an alternative to the corrosion resistant surface treatment 80.

As described above, in the turbo molecular pump 1 according to each embodiment and each modification, the cylindrical rotation formed of the fiber reinforced plastic material (FRP material) is configured by the configuration of each embodiment and each modification of the present invention described above. The quality improvement of the corrosion-resistant surface treatment 80 for the portion 9b can be realized.
In addition, the turbo molecular pump 1 according to each embodiment and each modification of the present invention is provided with a cylindrical rotating portion 9b made of a fiber reinforced plastic material having improved corrosion resistance, thereby providing a fiber reinforced plastic material. Compared with the conventional vacuum pump provided with the cylindrical rotating part 9b made of heavy metal, the performance (particularly the rotating performance) is improved, and the corrosion resistance of the cylindrical rotating part 9b is improved. Therefore, it can continue to operate for a longer period than before.

DESCRIPTION OF SYMBOLS 1 Turbo molecular pump 2 Casing 3 Base 4 Intake port 5 Flange part 6 Exhaust port 7 Shaft 8 Rotor 9a Rotary blade 9b Cylindrical rotary part 10 Stator column 20 Motor part 30, 31 Radial direction magnetic bearing apparatus 40 Axial direction magnetic bearing apparatus 50 Fixed blade 60 Thread groove spacer 70 Spacer 80 Corrosion resistant surface treatment 90 Crevice 1000 Resin 1001 Resin tank 1002 Paint tool 1003 Tool 1004 Coating agent 1005 Air 1006 existing in the gap Masking

Claims (13)

A cylinder made of a fiber reinforced composite material, fixed to a rotor arranged in a vacuum pump,
The cylindrical body is characterized in that a hole formed in a manufacturing process is subjected to a hole filling process.   The cylindrical body according to claim 1, wherein a corrosion-resistant surface treatment is performed after the hole filling treatment.   The cylindrical body according to claim 1, wherein a corrosion-resistant surface treatment is performed before the hole filling treatment.   The cylindrical body according to claim 1, wherein the hole filling process is a process of filling the hole with a hole filling agent.   The cylindrical body according to claim 4, wherein the hole filling agent is the same resin as that used in the fiber-reinforced composite material.   6. The cylindrical body according to claim 4 or 5, wherein in the hole filling process, the cylindrical body made of the fiber reinforced composite material is heated before the hole is filled with the hole filling agent.   The cylindrical body according to claim 4, wherein the hole filling agent has a shrinkage ratio of less than 5% due to curing.   The said hole-filling process is a process which melt | dissolves the said cylindrical body manufactured with the said fiber reinforced composite material, The cylindrical body of Claim 1, Claim 2, or Claim 3 characterized by the above-mentioned.   The cylindrical body according to claim 8, wherein the fiber reinforced composite material used for the cylindrical body is a thermoplastic resin.   The cylindrical body according to claim 8 or 9, wherein in the hole filling process by the process of melting the cylindrical body, only a portion to be filled is heated.   The cylindrical body according to any one of claims 8 to 10, wherein the hole filling process by a process of melting the cylindrical body is a process of heating in a vacuum.   The cylindrical body according to any one of claims 8 to 11, wherein the hole filling process by the process of melting the cylindrical body is a process of heating by frictional heat. A vacuum pump with a rotor,
The rotor comprises a cylindrical body made of fiber reinforced composite material,
The vacuum pump according to any one of claims 1 to 12, wherein the cylindrical body is the cylindrical body according to any one of claims 1 to 12.

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