JPWO2006134675A1 - Optical multiplexer / demultiplexer and assembly apparatus therefor - Google Patents

Abstract

On the optical path connecting a plurality of light emitting / receiving elements (1-5), a plurality of light branching elements (11-14) that transmit part of incident light and reflect the rest, and the corresponding light receiving / emitting elements and light branching elements And a plurality of coupling elements (6 to 10) arranged on the optical path, and a waveguide element (15 to 18) arranged on the optical path until a reflected light beam from one light beam branching element enters another light beam branching element. I have. All coupling elements are integrally formed in a single coupling element block (25). Thereby, the increase in assembly time can be suppressed and manufacturing cost can be suppressed. Further, by using a spherical mirror with few design parameters as a coupling element, the yield can be increased even if the coupling elements are arrayed in a single block. Further, by using a concave mirror as a waveguide element and arranging all the waveguide elements in a single waveguide element block, the alignment tolerance of the waveguide element block becomes loose and assembly becomes easy.

Description

  The present invention relates to an optical multiplexer / demultiplexer that multiplexes and demultiplexes an optical signal and an assembling apparatus thereof, for example, a wavelength multiplexing optical transmission apparatus that multiplexes and transmits optical signals of a plurality of wavelengths on a single transmission line, and an assembling apparatus thereof. About.

  A wavelength division multiplexing optical transmission technique is known as a technique that makes effective use of a single optical transmission line and enables large-capacity transmission. In wavelength division multiplexing optical transmission, a plurality of optical signals with different wavelengths are generated on the transmission side, and these signals are multiplexed and transmitted on a single transmission line using an optical multiplexer, and optical demultiplexing is performed on the reception side. A signal having a different wavelength is separated by a detector, and the signal is received by a light receiving element prepared for each wavelength.

  Wavelength multiplexing transmission makes it easy to increase the transmission capacity per fiber compared to transmission using only one wavelength, and the transmission path is more than that using multiple transmission paths. Since the cost can be reduced, it is effective for increasing the communication capacity and reducing the communication cost. When performing wavelength division multiplexing optical transmission, an optical multiplexer / demultiplexer is used to perform optical multiplexing on the transmitting side and optical demultiplexing on the receiving side.

<First Conventional Example>
As a first example of a conventional optical multiplexer / demultiplexer, there is one described in Document 1 (US Pat. No. 6,832,031). A schematic configuration of this optical multiplexer / demultiplexer is shown in FIG. This optical multiplexer / demultiplexer demultiplexes the optical signal received by the receiving element 1001a into a plurality of wavelength ranges by the wave converting elements 1003a to 1003d, and transmits the optical signals in the respective wavelength ranges from the transmitting elements 1002a to 1002d. It is.

  More specifically, the optical multiplexer / demultiplexer includes a lower carrier 1004a and an upper carrier 1004b. Coupling devices 1005a to 1005c are attached to the lower carrier 1004a. In the coupling devices 1005a to 1005c, a receiving element 1001 and transmitting elements 1002b and 1002d are individually arranged. Two coupling devices are also attached to the upper carrier 1004b, and the remaining transmitting elements 1002a and 1002c are disposed in the respective coupling devices. In addition, wave conversion elements 1003a to 1003d are disposed in a space between the lower carrier 1004a and the upper carrier 1004b. The wave conversion elements 1003a to 1003d are elements that transmit only light beams having different specific wavelengths and reflect light beams having other wavelengths.

  The configuration of the coupling device 1005a will be further described with reference to FIG. The coupling device 1005 a has a stopper surface 1006 that holds the receiving element 1001. The coupling device 1005a is formed with a reflecting surface 1007 that reflects an optical signal from the receiving element 1001 in an angle direction of 90 ° with respect to the incident direction at a position facing the receiving element 1001 on the stopper surface 1006. Has been. The reflection surface 1007 has a vertical section depicting a part of a parabola, a hyperbola, or an ellipse. Further, a stopper 1008 is provided on the side of the stopper surface 1006 to facilitate positioning of the receiving element 1001 with respect to the coupling device 1005a. The coupling devices 1005b and 1005c have the same configuration as the coupling device 1005a.

  In the optical multiplexer / demultiplexer configured as described above, when an optical signal is emitted from the receiving element 1001, the optical axis of the optical signal is converted by 90 ° by the reflecting surface 1007 of the coupling device 1005a as shown in FIG. Reflected toward the wave conversion element 1003a. Only a light beam having a specific wavelength passes through the wave conversion element 1003a and is transmitted from the transmission element 1002a. The light beam reflected by the wave conversion element 1003a reaches the wave conversion element 1003b, and a light beam having a wavelength region different from that of the wave conversion element 1003a is transmitted and transmitted from the transmission element 1002b. By repeating the same operation, the demultiplexed monochromatic light beam is transmitted from each of the transmitting elements 1002a to 1002d.

<Second Conventional Example>
A second example of a conventional optical multiplexer / demultiplexer is described in Document 2 (Japanese Patent Application Laid-Open No. 2004-206057). FIG. 40 shows a schematic configuration of this optical multiplexer / demultiplexer. This optical multiplexer / demultiplexer includes an optical fiber array 2003 in which optical fibers 2001a to 2001f are arranged in parallel and a connector 2002 is attached to the tip, a microlens array 2005 in which microlenses 2004a to 2004f are arranged on the lower surface, and a transparent cover member. 2006, a filter layer 2008 including filters 2007a to 2007d, a light guide block 2009, and a planar mirror layer 2010 formed on the lower surface of the light guide block 2009.

  In the optical multiplexer / demultiplexer having such a configuration, light obtained by multiplexing light of wavelengths λ1, λ2, λ3, and λ4 is emitted from the optical fiber 2001a, and its optical axis is bent by the microlens 2004a of the microlens array 2005, thereby being parallel light. And reflected by the mirror layer 2010 to enter the filter layer 2008. At this position of the filter layer 2008, a filter 2007a that transmits only light of wavelength λ1 and reflects light of other wavelengths is disposed. Therefore, the light of wavelength λ1 is transmitted through the filter 2007a, and the optical axis is bent by the microlens 2004c to be coupled to the optical fiber 2001c. Therefore, light having the wavelength λ1 is extracted from the light emitting end of the optical fiber 2001c.

  On the other hand, the light (wavelengths λ2, λ3, λ4) reflected by the filter 2007a is reflected again by the mirror layer 2010 and enters the filter layer 2008. A filter 2007b is disposed at this position of the filter layer 2008, and the light having the wavelength λ2 transmitted through the filter 2007b is incident on the microlens 2004d, bent in the optical axis direction, and coupled to the optical fiber 2001d. Therefore, only the light of wavelength λ2 is extracted from the light emitting end of the optical fiber 2001d. By repeating the same operation, light having wavelengths λ3 and λ4 is extracted from the light emitting ends of the optical fibers 2001d and 2001e.

<Third conventional example>
A third example of a conventional optical multiplexer / demultiplexer is shown in FIG. In this optical multiplexer / demultiplexer, dielectric multilayer filters 3102-1 to 3102-4 are fixed to a holding member 3101. Optical fibers 3103-1 to 3103-5 for inputting / outputting light, and emitted from the optical fiber Lenses 3104-1 to 3104-5 that convert light into parallel light and condense light that has passed through the dielectric multilayer filter to an optical fiber are mounted in alignment.

  This optical multiplexer / demultiplexer multiplexes / demultiplexes wavelength multiplexed light in which lights of four wavelengths λ1 to λ4 are multiplexed. The wavelength multiplexed light emitted from the first optical fiber 3103-1 for light input is converted into parallel rays by the lens 3104-1, transmitted through the holding member 3101, and then the first dielectric multilayer filter. Incident on 3102-1. The first dielectric multilayer filter 3102-1 has a characteristic of transmitting light of wavelength λ4 and reflecting light of other wavelengths. The light of wavelength λ4 selected by this filter is the lens 3104-2. Thus, the light is condensed on the second fiber 3103-2 and output. The light reflected by the first dielectric multilayer filter 3102-1 propagates through the holding member 3101 and sequentially enters the filters 3102-2 to 3102-4. Hereinafter, since the second filter 3102-2 transmits the wavelength λ3 and reflects other wavelengths, the light of λ3 is similarly output from the third fiber 3103-3. Similarly, light of λ2 is transmitted from the fourth fiber 3103-4 by the third filter 3102-3 that transmits λ2, and light of λ1 is transmitted from the fourth fiber 3103-4 that transmits λ1 to the fifth fiber 3103. Output from -5.

  In such a configuration, the number of lenses required to convert the light emitted from the fiber into parallel light and to collect the parallel light on the fiber is increased, and the number of components increases. Further, it is necessary to adjust the position of each fiber and lens, and the number of assembly steps increases. In order to solve these problems, several inventions have been made to reduce the number of lens components for converting the emitted light from each fiber into parallel light or condensing the parallel light onto the fiber.

<Fourth Conventional Example>
As a fourth example of a conventional optical multiplexer / demultiplexer, Reference 3 (Okabe and one other, “Development of a WWDM multiplexer / demultiplexer SMOP”, IEICE General Conference, 2002, Proceedings C-3-76 , P208). FIG. 42 shows a schematic configuration of this optical multiplexer / demultiplexer. This optical multiplexer / demultiplexer guides wavelength multiplexed light obliquely from a plurality of beam splitters 3106 arranged at intervals between transparent holding members 3105 and the port 3107 to the beam splitter 3106. A first lens 3109 and a plurality of second lenses 3110 for condensing the light of each wavelength reflected by the filter reflecting surface on the port 3107 are provided. In this configuration, since the first lens 3109 and the plurality of second lenses 3110 can be manufactured over one optical substrate, the number of components can be reduced.

<Fifth conventional example>
As a fifth example of a conventional optical demultiplexer, there is one described in Document 4 (US Pat. No. 6,1988,864). A schematic configuration of this optical demultiplexer is shown in FIG. In this optical demultiplexer, a plurality of converging reflectors 3201 are formed on the surface of the main optical block 3200, and a plurality of wavelength specifying filters 3202 are connected. The light reflected by each filter is inside the main optical block 3200. , Is reflected by the convergence reflector 3201, and is sequentially guided to the next adjacent wavelength specifying filter.

  In this optical demultiplexer, the light incident from the incident fiber 3203 is reflected and collected by the reflecting surface 3204, then enters the first filter 3202a, and the light transmitted through the first filter 3202a is the lens. The light passes through the lens 3206a of the array block 3205, is collected, and is incident on the detector 3207a. The light reflected by the first filter 3202a is reflected by the convergence reflector 3201a and is incident on the second filter 3202b. Thereafter, the same operation is repeated in the second filter 3202b, the third filter 3202c, and the fourth filter 3202d to demultiplex the wavelength multiplexed light.

  In this optical demultiplexer, a lens array block 3205 in which a plurality of lenses are integrated is aligned with the main optical block 3200 by a protrusion, and light incident from the fiber 3203 is incident on the main optical block 3200. Therefore, it is not necessary to align individual lenses and the assembly cost can be reduced.

<Sixth Conventional Example>
As a sixth example of a conventional optical multiplexer / demultiplexer, there is one described in Document 5 (Japanese Patent Laid-Open No. 2005-17811). FIG. 44 shows a schematic configuration of this optical multiplexer / demultiplexer. This optical multiplexer / demultiplexer includes a waveguide element block 3001 in which waveguide elements 3003 to 3005 are formed, and an array element mounting block 3002 in which light beam branching elements 3006 and 3007 and transmission windows 3008 and 3009 are formed. A holding structure for holding the array element mounting block 3002 is integrally formed with the waveguide element block 3001.

  Light rays sent into the optical multiplexer / demultiplexer through the transmission window 3008 are alternately reflected by the waveguide elements and the light branching elements, and propagate along the zigzag optical path. Light beams having wavelengths that pass through the light beam splitting elements 3006 and 3007 are extracted from the light beam splitting elements 3006 and 3007, and light beams having other wavelengths are extracted from the transmission window 3009.

  With such a configuration, the elements on the waveguide element block 3001 and the elements on the array element mounting block 3002 can be accurately positioned by simply placing the array element mounting block 3002 on the waveguide element block 3001. .

  However, the conventional optical multiplexer / demultiplexer described above has several problems.

<Problem 1>
In the conventional optical multiplexer / demultiplexer shown in FIG. 37, a receiving element 1001 and transmitting elements 1002a to 1002d are individually arranged in a plurality of coupling devices. For this reason, when assembling the optical multiplexer / demultiplexer, it is necessary to align the relative positions of the reception-side coupling device and the transmission-side coupling device so as to reduce excess loss. Therefore, it is necessary to align the plurality of reception side coupling devices for each channel during the demultiplexing operation and the plurality of transmission side coupling devices for each channel during the multiplexing operation. For this reason, there is a problem that the alignment man-hours increase with the increase in the number of channels of the optical multiplexer / demultiplexer, the assembly time becomes long, and the manufacturing cost increases.

<Problem 2>
In the conventional optical multiplexer / demultiplexer shown in FIG. 37, the reception side coupling device and the transmission side coupling device are separated. For this reason, when the environmental temperature changes after the optical multiplexer / demultiplexer is assembled, non-uniform expansion / contraction occurs due to the influence of the temperature gradient in the device, and the relative relationship between the reception side coupling device and the transmission side coupling device is generated. There is a high possibility of misalignment. Since the position shift causes a loss, the conventional optical multiplexer / demultiplexer has a problem that a loss fluctuation accompanying an environmental temperature change is large.

<Problem 3>
In the conventional optical multiplexer / demultiplexer shown in FIG. 40, the mirror layer 2010 serving as a waveguide element that reflects the light propagating between the filters has a planar shape. For this reason, even if the position of the mirror layer 2010 is adjusted, the angle of the reflected light cannot be changed and alignment cannot be performed. Therefore, as shown in FIG. 45, alignment is performed by adjusting the position of the optical fiber array 2003 (or the microlens array 2005). In this case, the positional deviation tolerance of the incident light with respect to the microlenses 2004a to 2004f as the coupling elements is important. Since the microlenses 2004a to 2004f are intended to mutually convert collimated light and convergent light, they have a large light collecting power. Therefore, even if the positional deviation of the incident light with respect to the microlenses 2004a to 2004f is slight, a large angular deviation occurs in the outgoing (reflected) light, resulting in a large optical axis deviation as the optical path length of the propagating light becomes long. appear.

  FIG. 46 shows the dependence of the coupling efficiency on the fiber array shift amount in the conventional optical multiplexer / demultiplexer shown in FIG. As can be seen from this figure, a large excess loss of 5 dB or more may occur only by shifting the position of the optical fiber array 2003 by several μm. As described above, this optical multiplexer / demultiplexer requires a high-accuracy assembly apparatus because the tolerance of alignment of the optical fiber array 2003 is severe with respect to the allowable excess loss, and requires a high-precision assembly apparatus. There was a problem of increasing.

<Problem 4>
In addition, in the conventional optical multiplexer / demultiplexer shown in FIG. 40, when the adhesive used for fixing the light guide block 2009 on which the mirror layer 2010 is formed expands and contracts due to a change in environmental temperature, the angle of the mirror layer 2010 is increased. May deviate from the design value. In this case, when attention is paid to the optical axis of the propagating light beam that is multiply reflected between the mirror layer 2010 and the filter layer 2008, neither the mirror layer 2010 nor the filter layer 2008 can correct the optical axis angle deviation of the propagating light beam. As a result, as shown in FIG. 47, the optical axis position shift increases as the optical path length increases. Therefore, the conventional optical multiplexer / demultiplexer shown in FIG. 40 has a problem that a large loss fluctuation occurs with respect to a change in environmental temperature.

<Problem 5>
The conventional optical multiplexer / demultiplexer shown in FIG. 42 and FIG. 43 uses a lens array that can integrally mold the diffused light emitted from the fiber into the filter so that the number of parts can be increased. Have reduced. However, small optical multiplexers / demultiplexers using these lens arrays have the following problems.

First, since the light is guided inside the optical block, it is necessary to use a material having high optical transparency, so that the degree of freedom in material selection is limited and the material cost is increased. Further, light loss is unavoidable when the light is guided inside the block.
Next, since the fixing member for the fiber or photodetector and the lens array are separate, prepare a member for fixing the fiber or photodetector separately from the lens array, and adjust the position to the lens array and fix it. There is a need to.
Furthermore, the distance between the lens and the filter is uniquely determined by the dimensions of the optical substrate or optical block, and has no mechanism for adjusting the error.

<Problem 6>
In the conventional optical multiplexer / demultiplexer shown in FIG. 42, the lenses 3109 and 3110, the filters 3106, and the optical fibers 3107 are manufactured as separate array elements, and these are assembled. At this time, alignment work has to be performed, and moreover, since the number of alignment axes is large, there is a problem that adjustment time increases. Further, if the optical multiplexer / demultiplexer assembling apparatus is provided with an adjustment function for each alignment axis, there is a problem that the apparatus itself becomes complicated because of the large number of alignment axes.

<Problem 7>
In the conventional optical multiplexer / demultiplexer shown in FIG. 44, the waveguide elements 3003 to 3005 are concave mirrors, and attention is paid to the optical axis of the propagating light beam that is multiply reflected between the waveguide element and the light beam branching element.

  In this optical multiplexer / demultiplexer, since the holding structure of the array element mounting block 3002 is integrally formed with the waveguide element block 3001, when an angle shift occurs in the waveguide element block 3001, the same applies to the array element mounting block 3002. An amount of angular misalignment occurs. The beam splitters 3006 and 3007 formed in the array element mounting block 3002 correspond to plane mirrors, but the angle deviation of the plane mirror amplifies the angle deviation of the incident optical axis. Therefore, every time the propagating light beam enters and reflects the light beam splitting elements 3006 and 3007, a large angular deviation occurs in the propagating optical axis, resulting in a large positional deviation when the propagating light beam enters the waveguide elements 3003 to 3005.

  On the other hand, since the waveguide elements 3003 to 3005 have condensing power, the angular deviation can be corrected every time the propagating light beam is reflected on the waveguide elements 3003 to 3005. However, when the incident position deviation is extremely large, the effect of correcting the angular deviation may not be sufficiently obtained, or the angular deviation may be amplified. The above effects act synergistically, and the angle deviation of the propagating light beam becomes larger than the case where there is no angle deviation of the array element mounting block 3002.

  An example is shown in FIGS. 48A and 48B. As shown in FIG. 48A, when the waveguide element block 3001 is not inclined, the incident / reflection angle of the propagating light beam to the waveguide element is 11.31 °. On the other hand, for example, when the radius of curvature of the waveguide elements 3003 to 3005 is about 5 mm and the distance between the waveguide elements 3003 to 3005 and the beam splitters 3006 and 3007 is also about 5 mm, the waveguide is guided as shown in FIG. 48B. It can be seen that when the element block 3001 is inclined by 5 °, the incident / reflection angle of the propagating light beam is 2 ° to 17 °, and the angular deviation of the propagating light beam is increased. The angular deviation of the propagating light beam causes excessive loss. Therefore, the conventional optical multiplexer / demultiplexer has a problem that a slight angle shift of the waveguide element block 3001 causes a large excess loss.

A main object of the present invention is to reduce the manufacturing cost of an optical multiplexer / demultiplexer.
In addition, the present invention has the following objects. That is, another object of the present invention is to reduce the loss fluctuation accompanying the environmental temperature change in the optical multiplexer / demultiplexer, increase the freedom of material selection of the optical multiplexer / demultiplexer, reduce the optical loss of the optical multiplexer / demultiplexer, Reduce the number of alignment axes when assembling the optical multiplexer / demultiplexer, simplify the position adjustment of the optical multiplexer / demultiplexer and reduce the adjustment time, simplify the assembly device of the optical multiplexer / demultiplexer, angle deviation of the waveguide element block It is to suppress the excessive loss caused by.

  In order to achieve such an object, an optical multiplexer / demultiplexer according to the present invention includes a plurality of light receiving and emitting elements that perform at least one of light reception and light emission, and a part of the incident light beam and the remaining light is reflected. A plurality of beam branching elements, a plurality of coupling elements arranged on an optical path connecting the corresponding light emitting / receiving element and the beam branching element, and a reflected beam from one beam branching element until it enters another beam branching element And all of the coupling elements are integrally formed in a single coupling element block.

  In the optical multiplexer / demultiplexer according to the present invention, the coupling element is a concave mirror made of a spherical surface.

  In the optical multiplexer / demultiplexer according to the present invention, the waveguide element is a concave mirror.

  In addition, the optical multiplexer / demultiplexer according to the present invention has a light receiving / emitting element fixing structure in which the light receiving / emitting elements are arranged in parallel at a constant interval and each end face of the light receiving / emitting element is positioned on the same plane. A light receiving / emitting element fixing block, a light beam branching element block in which each of the light beam splitting elements is arranged on the same plane at the same regular intervals as the light receiving / emitting element, and a wave guide element on the same plane. The waveguide element block arranged at the same fixed interval, the light receiving and emitting element fixing block, the coupling element block, the beam splitter block, and the waveguide element block are arranged through a space, and the coupling element block And the waveguide element block are arranged in parallel to face each other, and the beam splitter block is disposed between the coupling element block and the waveguide element block. An optical main block arranged in parallel; and the coupling element block is configured such that each of the coupling elements is arranged on the same plane at the same fixed interval as the light receiving and emitting elements, and the coupling elements are separated from the light emitting and receiving elements. The light beam from the coupling element is reflected by the coupling element adjacent to the coupling element. The beam branching element block is positioned so as to be reflected, and the beam branching element block is positioned so that the beam branching element is disposed on an optical path between the coupling element and the waveguide element.

  In the optical multiplexer / demultiplexer according to the present invention, the waveguide element block further includes a protrusion having a curved surface on a surface opposite to the surface on which the waveguide elements are arranged.

  The optical multiplexer / demultiplexer assembling apparatus according to the present invention includes a gripping means capable of gripping a protrusion formed of a curved surface formed on a waveguide element block in which waveguide elements are arranged, and the gripping means in the vertical direction and It comprises a position adjusting means that is movable in the horizontal direction, and a reaction force generating means that generates a reaction force in accordance with the movement of the gripping means.

  In the optical multiplexer / demultiplexer according to the present invention, all of the waveguide elements are arranged in a single waveguide element block, and the coupling element block includes a holding structure for holding the beam splitter, and the coupling The element block and the waveguide element block are separated from each other.

  In the optical multiplexer / demultiplexer of the present invention, since the coupling element for the light receiving element and the coupling element for the light emitting element are integrally formed in a single coupling element block, an increase in assembly time can be suppressed and manufacturing cost can be suppressed. Further, the loss fluctuation accompanying the environmental temperature change is reduced.

  Further, in the optical multiplexer / demultiplexer according to the present invention, by using a spherical mirror with few design parameters as a coupling element, the yield is increased even if the coupling elements are arrayed in a single block, and as a result, the manufacturing cost can be suppressed. .

  In the optical multiplexer / demultiplexer according to the present invention, the waveguide elements are concave mirrors, and all the waveguide elements are arranged in a single waveguide element block, so that the assembly can be facilitated and the manufacturing cost is reduced. it can. Moreover, the loss fluctuation | variation with respect to the change of environmental temperature can be suppressed.

Further, in the optical multiplexer / demultiplexer according to the present invention, the signal light propagates through the space, so that the degree of freedom in selecting the material of the block constituting the optical multiplexer / demultiplexer can be increased and the optical loss can be reduced.
In addition, since it is not necessary to use an optically transparent member as the block, it is possible to manufacture the light receiving and emitting element fixing block with a material that is inexpensive and excellent in mechanical strength and thermal characteristics.
When assembling the optical multiplexer / demultiplexer, simply fix a plurality of light emitting / receiving elements to the light receiving / emitting element fixing block in advance, adjust the position of the light receiving / emitting element fixing block, and fix it to the optical main block. The alignment of the plurality of light emitting / receiving elements with respect to the coupling element can be performed without individually adjusting the individual light emitting / receiving elements. As a result, both positioning operations can be facilitated, and the assembly cost can be reduced.
In addition, since the optical main block and the waveguide element block are independent blocks, the coupling element formed on the coupling element block and the waveguide element mounted on the waveguide element block at the time of assembly. It is possible to adjust the angle and position of the light to an optimal position with little loss, and light loss can be reduced.

  According to the optical multiplexer / demultiplexer and its assembling apparatus of the present invention, a complicated rotating mechanism such as a three-axis rotating stage is not required, and the assembling apparatus itself has a simple structure, so that the manufacturing cost can be reduced. Since all the rotating shafts are assembled without having to be adjusted to a predetermined angle, the assembling procedure is simplified, and the assembling time and assembling work can be reduced. In addition, by arranging the protrusion at the center of the substrate of the waveguide element block, when the waveguide element block is gripped by the assembling apparatus, the gripped position coincides with the gravity center position of the waveguide element block. The wave element block can be gripped stably. Further, since the vacuum chuck pipe is smaller than the diameter of the projection of the waveguide element block, the vacuum chuck pipe can be brought into close contact with the projection of the waveguide element block, and the waveguide element block can be easily held. .

  In the optical multiplexer / demultiplexer according to the present invention, since the holding structure for holding the beam branching element is separated from the waveguide element block, the influence of the angular deviation of the waveguide element block on the increase in excess loss can be suppressed.

FIG. 1 is a perspective schematic internal structure diagram of an optical multiplexer / demultiplexer according to a first embodiment. FIG. 2 is a schematic internal configuration diagram in the direction of arrow II of the optical multiplexer / demultiplexer according to the first embodiment. FIG. 3 is a schematic internal configuration diagram in the direction of arrow III of the optical multiplexer / demultiplexer according to the first embodiment. FIG. 4 is a schematic internal configuration diagram in the direction of arrow IV of the optical multiplexer / demultiplexer according to the first embodiment. FIG. 5 is a perspective schematic external view of a specific mirror array block of the optical multiplexer / demultiplexer according to the first embodiment. FIG. 6 is a perspective schematic external view of the optical multiplexer / demultiplexer according to the first embodiment in which a specific mirror array block and a specific waveguide structure are assembled. FIG. 7 is a perspective schematic external view of the mirror array block of the optical multiplexer / demultiplexer according to the second embodiment, which has a structure for holding the beam splitter. FIG. 8 is a schematic perspective view of an optical multiplexer / demultiplexer according to the second embodiment. FIG. 9 is a schematic side view of the optical system of the optical multiplexer / demultiplexer according to the third embodiment. FIG. 10 is a perspective schematic external view of a specific mirror array block of the optical multiplexer / demultiplexer according to the third embodiment. FIG. 11 is a schematic perspective view of an optical multiplexer / demultiplexer according to the third embodiment in which a specific mirror array block and a specific waveguide structure are assembled. FIG. 12 is a perspective schematic external view of a specific mirror array block of the optical multiplexer / demultiplexer according to the fourth embodiment. FIG. 13 is a schematic perspective view of an optical multiplexer / demultiplexer according to the fourth embodiment in which a specific mirror array block and a specific waveguide structure are assembled. FIG. 14 is a schematic configuration diagram of an optical multiplexer / demultiplexer according to the fifth embodiment, which is an application example of the first embodiment. FIG. 15 is a conceptual diagram of an optical multiplexer / demultiplexer according to the sixth embodiment. FIG. 16 is a graph showing the dependence of the coupling efficiency on the waveguide block shift amount in the optical multiplexer / demultiplexer according to the sixth embodiment. FIG. 17 is a conceptual diagram illustrating a state in which optical axis deviations do not accumulate in the optical multiplexer / demultiplexer according to the sixth embodiment. FIG. 18 is a schematic perspective view of the optical multiplexer / demultiplexer according to the seventh embodiment (front side). FIG. 19 is a schematic perspective view of the optical multiplexer / demultiplexer according to the seventh embodiment (rear side). FIG. 20 is a schematic diagram of an optical main block according to the seventh embodiment. FIG. 21 is a diagram illustrating a case where protrusions are formed on the filter block fixing surface and the optical waveguide mirror block fixing surface of the optical main block according to the seventh embodiment. FIG. 22 is a schematic view of an optical fiber fixing block according to the seventh embodiment. FIG. 23 is a schematic diagram of a beam splitter block according to the seventh embodiment. FIG. 24 is a schematic diagram of a different form from FIG. 23 in the light beam splitter block according to the seventh embodiment. FIG. 25 is a schematic diagram of an optical waveguide mirror block according to the seventh embodiment. FIG. 26 is a schematic internal structural diagram of the optical multiplexer / demultiplexer according to the seventh embodiment, and illustrates the optical path therein. FIG. 27 is a perspective view of the optical element array in accordance with the eighth embodiment when viewed from one direction. FIG. 28 is a perspective view of the optical element array in accordance with the eighth embodiment when viewed from the other direction. FIG. 29 is a perspective view of an optical multiplexer / demultiplexer using the optical element array according to the eighth embodiment when viewed from one direction. FIG. 30 is a perspective view of the optical multiplexer / demultiplexer using the optical element array according to the eighth embodiment when viewed from the other direction. FIG. 31 is an explanatory diagram for explaining the operation principle of the optical multiplexer / demultiplexer using the optical element array according to the eighth embodiment. FIG. 32 is a schematic view of an optical device array assembling apparatus according to the eighth embodiment. FIG. 33 is a diagram illustrating a state in which the vacuum chuck of the optical device array assembly apparatus according to the eighth example is in contact with the optical device array. FIG. 34 is a diagram showing a state where the optical element array is chucked by the vacuum chuck of the optical element array assembling apparatus according to the eighth embodiment. FIG. 35 is a diagram illustrating a state where the optical element array chucked by the vacuum chuck of the optical element array assembling apparatus according to the eighth embodiment is moved in the Y-axis direction. FIG. 36 is a diagram for explaining an optical multiplexer / demultiplexer according to the ninth embodiment of the present invention. FIG. 37 is a schematic configuration diagram of an optical multiplexer / demultiplexer according to the first conventional example. FIG. 38 is a schematic configuration diagram of a coupling device used in the optical multiplexer / demultiplexer according to the first conventional example. FIG. 39 is a side view showing an optical path inside the optical multiplexer / demultiplexer according to the first conventional example. FIG. 40 is a schematic configuration diagram of an optical multiplexer / demultiplexer according to the second conventional example. FIG. 41 is a schematic configuration diagram of an optical multiplexer / demultiplexer according to a third conventional example. FIG. 42 is a schematic configuration diagram of an optical multiplexer / demultiplexer according to a fourth conventional example. FIG. 43 is a schematic configuration diagram of an optical demultiplexer according to a fifth conventional example. FIG. 44 is a schematic configuration diagram of an optical multiplexer / demultiplexer according to a sixth conventional example. FIG. 45 is a conceptual diagram for explaining the alignment method of the optical multiplexer / demultiplexer according to the second conventional example. FIG. 46 is a graph showing the dependence of the coupling efficiency on the fiber array shift amount in the optical multiplexer / demultiplexer according to the second conventional example. FIG. 47 is a conceptual diagram showing a state in which optical axis deviations accumulate in the optical multiplexer / demultiplexer according to the second conventional example. FIG. 48A is a diagram illustrating a state when the waveguide element block is not inclined in the optical multiplexer / demultiplexer according to the sixth conventional example. FIG. 48B is a diagram illustrating a state when the waveguide element block is inclined in the optical multiplexer / demultiplexer according to the sixth conventional example.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the following examples do not limit the present invention.

<First embodiment>
1 to 6 are diagrams for explaining an optical multiplexer / demultiplexer according to a first embodiment of the present invention. 1 to 4 conceptually show the light rays propagating through the optical multiplexer / demultiplexer when the optical demultiplexer is used.

  As shown in FIG. 1, the optical multiplexer / demultiplexer according to this embodiment includes a mirror array block 25 portion and a waveguide structure 24 portion. The mirror array block 25 includes coupling elements (including auxiliary lines for indicating a curved surface) 6 to 10 including concave spherical mirrors, and optical fibers 1 to 5 for inputting / outputting wavelength-multiplexed rays or monochromatic rays. Is provided. The waveguide structure 24 is provided with light branching elements 11 to 14 that transmit light including a specific wavelength range and reflect light other than the specific wavelength range, and reflecting surfaces 15 to 18 that reflect the light. ing.

  Here, the reflecting surfaces 15 to 18 function as waveguide elements. The mirror array block 25 provided with the coupling elements 6 to 10 can be called a coupling element block.

  An operation principle when the optical multiplexer / demultiplexer according to the present embodiment is used as a demultiplexer will be described. The wavelength multiplexed light input from the outside of the optical multiplexer / demultiplexer propagates through the optical fiber 1, is guided into the optical multiplexer / demultiplexer, and is emitted to the coupling element 6 as a wavelength diffused light beam that is slightly diffused. The coupling element 6 reflects the emitted wavelength multiplexed light while collimating it and propagates it to the reflecting surface 15. The propagated wavelength multiplexed light is reflected again by the reflecting surface 15 and enters the light beam splitting element 11.

  The wavelength-multiplexed light incident on the beam splitter 11 is transmitted through the beam splitter 11 with a light having a specific wavelength range, becomes a monochromatic beam, propagates to the coupling device 7, is reflected on the coupling device 7, and is collected. Are coupled to the optical fiber 2 and output to the outside of the optical multiplexer / demultiplexer.

  A wavelength-multiplexed light beam composed of a light beam outside a specific wavelength range is reflected without being transmitted by the light beam branching element 11 and propagated to the reflecting surface 16. The wavelength multiplexed light propagated to the reflecting surface 16 is reflected by the reflecting surface 16 and enters the light beam splitting element 12.

  The wavelength multiplexed light incident on the beam splitter 12 is transmitted through the beam splitter 12 with a light having a specific wavelength range different from that of the beam splitter 11, becomes a monochromatic beam, and propagates to the coupler 8. 8 is reflected and collected, coupled to the optical fiber 3, and output to the outside of the optical multiplexer / demultiplexer.

  By repeating the above process, the wavelength multiplexed light incident from the optical fiber 1 can be extracted from the optical fibers 2 to 5 as a plurality of demultiplexed monochromatic light beams.

  Further, when the optical multiplexer / demultiplexer according to the present embodiment is used as a multiplexer, it corresponds to a case where the traveling directions of the wavelength multiplexed light and the monochromatic light in the above-described demultiplexing operation are reversed. That is, by inputting monochromatic rays to the optical fibers 2 to 5 from the outside of the optical multiplexer / demultiplexer, the plurality of monochromatic rays can be extracted from the optical fiber 1 as multiplexed wavelength multiplexed rays.

  In the present embodiment, the number of beam branching elements is four, the number of coupling elements is five, the number of reflecting surfaces is four, and the number of optical fibers is five. It is not limited to. Further, the wavelength-multiplexed light and monochromatic light receiving and emitting elements are not limited to optical fibers, and some or all of the light receiving and emitting elements may be light emitting and receiving elements such as laser diodes and photodiodes. The light emitting / receiving element refers to an element that performs at least one of light reception and light emission. Furthermore, a configuration may be adopted in which a plurality of light emitting points and light receiving points exist in one optical multiplexer / demultiplexer.

  As shown in FIG. 1, in the optical multiplexer / demultiplexer according to the present embodiment, the light receiving and emitting points of all the optical fibers 1 to 5, all the coupling elements 6 to 10, all the beam branching elements 11 to 14, and all the reflections. Each of the surfaces 15 to 18 is arranged on one straight line. For this reason, each optical element can be collectively arranged in an array, and each optical element can be easily arranged, formed, and fixed.

  FIG. 2 shows a state in which the optical system of the optical multiplexer / demultiplexer according to the present embodiment is viewed from the optical axis direction of the optical fiber (II arrow direction). In this figure, the same members as those shown in FIG. 1 are denoted by the same reference numerals as those in FIG.

  As described above, during the demultiplexing operation, wavelength multiplexed signal light can be input to the optical fiber 1 from the outside, and monochromatic rays can be extracted from the optical fibers 2 to 5 respectively.

  As for the optical path of the light beam propagating between the reflecting surfaces 15 to 18 and the light beam branching elements 11 to 14, the optical path length between the reflecting surface and the light beam branching device, the distance between the adjacent light beam branching devices, It can be uniquely determined by fixing two of the three elements of the light incident angle. Therefore, in general, it is desirable to shorten the optical path length and reduce the light incident angle to the light branching element. These designs are restricted by the size of the beam splitters 11 to 14 and the coupling elements 6 to 10.

  When the surfaces of the coupling elements 6 to 10 are spherical as in this embodiment, the radius of curvature of the reflecting surface that the incident light beam feels does not depend on the incident position of the light beam on the reflecting surface. Therefore, as shown in FIG. 2, by arranging the incident / reflecting point of the light beam at an appropriate position on the reflection surface of the coupling element, the optical axis of the incident light beam and the light of the reflected light beam are maintained while maintaining a desired focal length. The angle formed by the axis can be arbitrarily set.

  FIG. 3 shows a state in which the optical system of the optical multiplexer / demultiplexer according to the present embodiment is viewed from the side surface direction (the direction of arrow III). In this figure, the same members as those shown in FIG. 1 are denoted by the same reference numerals as those in FIG. In addition, the part shown with the code | symbol 30 is an end surface of the optical fiber 1 which is a light-receiving / emitting surface.

  Since converged light (in the case of a multiplexer) or diffused light (in the case of a demultiplexer) propagates between the end face 30 of the optical fiber 1 and the coupling element 6, in order to propagate the light as designed. Therefore, it is necessary to precisely determine the relative position and angle between the optical fiber 1 and the coupling element 6.

  Further, the radius of curvature of the coupling element 6 composed of a spherical mirror, the optical path length from the optical fiber end face 30 to the coupling element 6 are the mode field diameter (NA) of the optical fiber, and the optical path length from the coupling element 6 to the reflecting surface 15. Must be optimized as constraints. The effective reflection area of the coupling element 6 also needs to be optimized so that vignetting of incident and reflected light rays does not occur.

  FIG. 4 shows a state in which the optical system of the optical multiplexer / demultiplexer according to the present embodiment is viewed from the direction perpendicular to the plane including the plurality of optical fibers (in the direction of the arrow IV). In this figure, the same members as those shown in FIG. 1 are denoted by the same reference numerals as those in FIG.

The optical fibers 1 to 5 of all the channels are arranged so that the straight line Y connecting adjacent end faces and the optical axes X _{1 to} X ₅ of the light rays passing through the end faces are orthogonal to each other. The optical path lengths to the end faces of ˜5 are almost the same in all channels.

  Therefore, the radius of curvature of the coupling elements 6 to 10 is optically designed so that the highest possible coupling efficiency is obtained regardless of whether the propagation optical path of the collimated light is the shortest optical path length channel or the longest optical path length channel. There is a need.

  FIG. 5 is a perspective schematic external view showing a specific example of a mirror array block 25 in which a coupling element and a V groove for fixing an optical fiber are integrally formed among members constituting the optical multiplexer / demultiplexer according to the present embodiment. It is.

  As shown in FIG. 5, the mirror array block 25 includes a first V-groove 36 formed linearly at one substrate end on the surface of the plate-like substrate and one inclined surface constituting the V-groove 36. The coupling elements 6 to 10 formed by being arranged along the linear axis direction of the V-groove 36 in 36a are connected to the V-groove 36 perpendicular to the linear axis direction of the V-groove 36 and facing the coupling elements 6-10. And a plurality of linear V grooves (fixed structures) 19 to 23 formed as described above. The plurality of V-grooves 19 to 23 are V-grooves for fixing optical fibers, and are formed so as to face the coupling elements 6 to 10, respectively. A U-groove can be used instead of the V-grooves 19-23.

  As a method of forming the V-grooves 19 to 23, the V-groove 36, and the coupling elements 6 to 10, the plate-like substrate is directly cut into a target shape, or after cutting a target shape mold, An injection molding method in which a resin or the like is poured and heating / molding is considered. When the same mirror array block 25 is manufactured in large quantities, the injection molding method is suitable.

  FIG. 6 shows a specific example of the optical multiplexer / demultiplexer according to the first embodiment, in which the mirror array block 25 shown in FIG. 5 is combined with a waveguide structure for holding a reflecting surface and a plurality of beam splitters. It is a perspective schematic external view which shows an example.

  As shown in FIG. 6, the optical multiplexer / demultiplexer according to the first embodiment is configured by fixing the waveguide structure 24 so as to cover the upper part of the V groove 36 in the mirror array block 25 shown in FIG. Yes. The waveguide structure 24 includes a middle shelf 39 for installing the beam splitters 11 to 14 inside a planar U-shaped structure composed of wall surfaces extending upward in three directions, and a long plate-like structure. An upper holding projection 38 for installing the reflecting surface 35 is formed, and the inside of the planar U-shaped structure is partially hollow.

  The waveguide structure 24 is installed on the mirror array block 25 so that the side of the planar U-shaped structure on which the wall surface is not formed faces the V grooves 19 to 23. The upper holding projections 38 support both ends of the long plate-like reflection surface 35, and the reflection surface 35 is installed in the upper part of the waveguide structure 24.

  The middle shelf 39 has mounting portions 24-1 to 24-4 formed by cutting out positions corresponding to the coupling elements 6 to 10 formed in the lower V-groove 36. The beam splitters 11 to 14 are mounted on the mounting portions 24-1 to 24-4 from above, and are held so as not to fall downward.

  As in the present embodiment, as the beam branching elements 11 to 14, a form in which each element is fitted in each channel is conceivable. In this case, an optical multiplexer / demultiplexer having an arbitrary multiplexing / demultiplexing spectrum can be realized by simply replacing the elements. Further, as in the present embodiment, a single flat plate separate from the waveguide structure 24 can be applied as the reflecting surface 35, but if possible, it is integrally formed with the waveguide structure 24. May be.

  In this embodiment, the light beam propagating between the light beam splitting elements 11 to 14 propagates through the space. However, another embodiment in which the light beam propagates inside an optical block formed of, for example, glass or transparent resin is also possible. Conceivable.

  That is, a reflective surface is formed on the surface of a rectangular parallelepiped optical block, and light beam splitting elements are formed in an array on the back surface. Then, this rectangular parallelepiped-shaped optical block is replaced with, for example, the reflecting surface 35, the middle shelf 39, and the beam splitters 11 to 14 in the planar U-shaped structure of the waveguide structure 24 shown in FIG. It is an Example which installs and comprises an optical multiplexer / demultiplexer. According to such an embodiment, there is an advantage that the optical path length accuracy between the light beam branching element and the reflecting surface can be improved, or a plurality of light beam branching elements can be formed in a continuous manner.

  Hereinafter, the effect of the present embodiment will be described.

<A plurality of coupling elements 6 to 10 are integrally formed in the same mirror array block 25>
In the optical multiplexer / demultiplexer according to the present embodiment, since the coupling elements 6 to 10 corresponding to the optical fibers 1 to 5 are integrally formed in the same mirror array block 25, all the optical fibers 1 to 5 are mirrors. The optical system is arranged so as to be adjacent to the array block 25. Therefore, the alignment operation can be completed only by adjusting the position of the single mirror array block 25. For this reason, even if the number of channels of the optical multiplexer / demultiplexer increases, the alignment man-hour becomes constant. Therefore, as compared with the conventional optical multiplexer / demultiplexer shown in FIG. 37, the increase in assembly time can be suppressed and the manufacturing cost can be suppressed.

  Further, since the coupling elements 6 to 10 corresponding to the optical fibers 1 to 5 are formed in the same mirror array block 25, a temperature gradient is generated even if the environmental temperature changes after the optical multiplexer / demultiplexer is assembled. It is suppressed. As a result, expansion and contraction become uniform, and relative displacement between the corresponding optical fiber and the coupling element is suppressed. Therefore, the loss fluctuation accompanying the environmental temperature change becomes smaller than that of the conventional optical multiplexer / demultiplexer shown in FIG.

  When the coupling element is formed integrally with the coupling element block, it is desirable that the coupling element is a concave mirror as in this embodiment. The reason for this is that the optical transparency of the coupling element block is not questioned if it is a concave mirror, so it is possible to use a material suitable for mass production, such as resin, which is easy to process at a low cost, and can be manufactured at a lower cost. Because it becomes.

<Shape of coupling element 6-10>
In the conventional optical multiplexer / demultiplexer shown in FIG. 37, the reflecting surface 1007 as a coupling element has a rotating paraboloid, a rotating hyperboloid, or a rotating ellipsoid. However, these shapes have many design parameters. Specifically, a total of seven parameters are required, which are the focus position coordinates (three parameters), the rotation axis direction vector (three parameters), and the secondary coefficient (one parameter). If the reflective surface 1007 having such a shape is arrayed by injection molding using a die in a single block, as in the present embodiment, the probability that a reflective surface having the shape as designed is reduced, and the yield is reduced. It will decline. It is also difficult to evaluate whether it can be manufactured as designed. As a result, the manufacturing cost increases.

  On the other hand, since the coupling elements 6 to 10 are spherical mirrors in this embodiment, there are few design parameters. Specifically, only a total of four parameters are required, that is, the position coordinates of the curvature center (three parameters) and the radius of curvature (one parameter). Therefore, even if the coupling elements 6 to 10 made of spherical mirrors are arrayed in a single block as described above, it is easy to form a reflecting surface having a shape as designed, so that the yield is increased. It is also relatively easy to evaluate whether it can be manufactured as designed. As a result, the manufacturing cost can be reduced.

  When the coupling elements 6 to 10 are spherical mirrors, the angle formed between the incident optical axis of the light incident on the coupling elements 6 to 10 and the reflected optical axis of the light reflected by the coupling elements 6 to 10 is sufficient. Small is desirable. The reason is that when the beam is incident on the spherical mirror, the coma aberration increases and the excessive loss increases as the incident angle increases. Also, it is desirable that all the coupling elements 6 to 10 have the same radius of curvature. When the coupling elements 6 to 10 having a plurality of curvature radii are formed, it is desirable that the difference in the curvature radii be sufficiently small in order to reduce the types of tools for cutting the mold as much as possible.

<All optical fibers 1 to 5 are arranged on a single plane>
In the conventional optical multiplexer / demultiplexer shown in FIG. 37, a receiving element 1001, transmitting elements 1002b and 1002d are arranged on the lower carrier 1004a, and transmitting elements 1002a and 1002c are arranged on the upper carrier 1004b. That is, the receiving element 1001 and the transmitting elements 1002a to 1002d are arranged on two planes. For this reason, when assembling the optical multiplexer / demultiplexer, it is not possible to mount all the transmitting and receiving elements at once. As a result, the assembly time becomes longer and the manufacturing cost becomes higher.

  On the other hand, in this embodiment, the optical fibers 1 to 5 as light emitting / receiving elements corresponding to the transmitting / receiving elements are arranged on a single plane of the mirror array block 25. For this reason, all the optical fibers 1-5 can be mounted collectively. As a result, the assembly time can be shortened and the manufacturing cost can be reduced as compared with the conventional optical multiplexer / demultiplexer.

  The optical axes of all the light emitting / receiving elements are parallel to each other, all the light receiving / emitting points are arranged on the same straight line (light receiving / emitting point connecting line), and the optical axis of all the light receiving / emitting elements is orthogonal to the light receiving / emitting point connecting line. System is desirable. For example, when an optical fiber is used as the light emitting / receiving element, as shown in FIG. 4, it is possible to align the optical fibers 1 to 5 so that all the fibers are parallel to each other and the protruding amounts of all the fibers are uniform. It is relatively easy. In addition, by preparing separately a fiber array block in which the optical fibers 1 to 5 are arranged and arranged in this manner and fitting the fiber array block into the mirror array block, all the fibers can be easily mounted.

<V groove 19-23>
The conventional optical multiplexer / demultiplexer shown in FIG. 37 has a plurality of coupling devices 1005a to 1005c provided with stoppers 1008 for positioning transmitting and receiving elements. For this reason, when the alignment operation is performed so as to reduce the excess loss, the coupling devices 1005a to 1005c must be finely adjusted after the transmitting element 1001 or the receiving elements 1002a to 1002d are mounted. As a result, the assembly time of the optical multiplexer / demultiplexer becomes longer and the manufacturing cost becomes higher.

  On the other hand, in this embodiment, V grooves 19 to 23 used for positioning the plurality of optical fibers 1 to 5 are integrally formed in the mirror array block 25. For this reason, the relative positions of the optical fibers 1 to 5 and the coupling elements 6 to 10 can be determined accurately and easily, and fine adjustment of the coupling elements 6 to 10 after the optical fibers 1 to 5 are mounted is not necessary. As a result, the assembly time can be shortened and the manufacturing cost can be reduced as compared with the conventional optical multiplexer / demultiplexer.

<Second embodiment>
FIG. 7 is a perspective schematic external view of the mirror array block of the optical multiplexer / demultiplexer according to the second embodiment, which has a structure for holding the beam splitter. FIG. 8 is a schematic perspective view of an optical multiplexer / demultiplexer according to the second embodiment. This embodiment is a modification of the first embodiment.

  As shown in FIG. 7, the mirror array block 25 of the optical multiplexer / demultiplexer according to the second embodiment includes a V-groove 36 formed linearly at one substrate end on the surface of the plate substrate, and the V The coupling elements 6 to 10 formed by being arranged along the linear axis direction of the V groove 36 on one inclined surface 36a constituting the groove 36, and the coupling elements 6 to 10 perpendicular to the linear axis direction of the V groove 36 And a plurality of linear V grooves 19 to 23 formed so as to be connected to the V groove 36. The plurality of V-grooves 19 to 23 are V-grooves for fixing an optical fiber, and are formed so as to face each of the coupling elements 6 to 10.

  Furthermore, a plurality of upwardly extending wall portions provided so as to partition the coupling elements 6 to 10 are formed on the substrate end portion and the inclined surface 36a, and the planar comb-teeth-like light branching element holding structure 24a is provided. It is composed. The beam splitter holding structure 24 a constitutes a part of the waveguide structure 24. The upper surfaces of the side walls on both sides sandwiching the coupling elements 6 to 10 are mounting portions 24-1 to 24-4, respectively, and a beam branching element is installed in each mounting portion.

  As shown in FIG. 8, the optical multiplexer / demultiplexer according to the present embodiment covers the waveguide section structure 24 so as to cover the upper part of the V groove 36 (that is, the beam splitter holding structure 24a) in the mirror array block 25 shown in FIG. The reflecting surface holding structure 24b, which is a part of the structure, is fixed. The waveguide structure 24 includes a beam splitter holding structure 24 a provided in the mirror array block 25 and a reflection surface holding structure 24 b installed on the upper part of the mirror array block 25.

  The reflecting surface holding structure 24b includes a wall portion extending upward at both ends in the linear axis direction of the V-groove 36 of the mirror array block 25 and a ceiling portion extending over the upper surfaces of the two wall portions. This is a structure that is formed so as to straddle from the V-groove 19 side to the V-groove 23 side, and the inside of the side U-shape is hollow. Reflecting surfaces 15 to 18 are formed on the lower surface of the ceiling portion at positions corresponding to the beam branching elements 11 to 14 installed below the ceiling portion.

  In the present embodiment, it is necessary to form the coupling elements 6 to 10 between the walls separating the respective channels in the planar comb-like beam branching element holding structure 24a. Therefore, injection molding in which a mold having a target shape is cut and manufactured is more suitable as a manufacturing method than applying a cutting process in which the mirror array block 25 is directly cut into a target shape.

  The waveguide structure 24 includes a light beam branching element holding structure 24a and a reflection surface holding structure 24b. Since the light beam branching element holding structure 24a is formed integrally with the mirror array block 25, the reflection surface holding structure 24b. The degree of processing freedom can be improved. Therefore, it is optimal when the reflecting surfaces 15 to 18 are concave and formed integrally with the reflecting surface holding structure 24b.

  Further, by forming the beam branching element holding structure 24a based on a predetermined design, the beam branching elements 11-14 and the coupling element 6 can be simply mounted on the upper surface of the beam branching element holding structure 24a. A relative position and angle of -10 can be determined.

  In this embodiment, the same effect as that of the first embodiment described above can be obtained.

<Third embodiment>
FIGS. 9-11 is a figure explaining the optical multiplexer / demultiplexer based on the 3rd Example of this invention. FIG. 9 is a schematic side view of the optical system of the optical multiplexer / demultiplexer according to the present embodiment. FIG. 9 conceptually shows light rays propagating through the optical multiplexer / demultiplexer.

  In the present embodiment, as shown in FIG. 9, the angle formed by the optical axis of the light beam passing through the end face 50, which is the light receiving / emitting surface of the optical fiber 41, and the optical axis of the light beam transmitted through the light beam splitting element 48-1. It is characterized by being smaller than 45 °. Therefore, the incident angle of the light beam incident on the coupling element 43 can be made sufficiently small to reduce coma and loss.

  In the present embodiment, the light branching elements 48-1 to 48-8 and the reflection surface 49 (with respect to a plane including a plurality of V grooves 41, 42-1 to 42-8 (see FIGS. 10 and 11)) 11) is required to be accurately tilted with respect to the surface of the mirror array block 40, and therefore it is desirable to make structural measures for accurately and simply positioning these members. . A specific example will be described with reference to FIGS.

  FIG. 10 shows a mirror array block 40 in which a coupling element, a V-groove for fixing an optical fiber, and a part of a waveguide structure are integrally formed among members constituting the optical multiplexer / demultiplexer according to the present embodiment. It is a perspective schematic external view which shows a specific example.

  As shown in FIG. 10, the mirror array block 40 includes a V-groove 51 formed linearly at one substrate end on the surface of the plate-like substrate, and V on one inclined surface 51 a constituting the V-groove 51. The coupling elements 43, 44-1 to 44-8 formed by being arranged along the linear axis direction of the groove 51, and the coupling elements 43, 44-1 to 44-8 perpendicular to the linear axis direction of the V groove 51 And a plurality of linear V grooves 41, 42-1 to 42-8 formed so as to be connected to the V groove 51. The plurality of V-grooves 41 and 42-1 to 42-8 are V-grooves for fixing an optical fiber, and are formed so as to face the coupling elements 43 and 44-1 to 44-8, respectively.

  In addition, the two substrate end portions perpendicular to the substrate end portions are portions where the V-groove 51 is not formed, and are light beams that are a pair of substantially prismatic projection portions outside the V-grooves 43 and 44-8. A branch element holding portion 45 and a reflection surface holding portion 46 which is also a pair of substantially prismatic protrusions are formed. The beam splitter holding part 45 is formed closer to the coupling element than the reflecting surface holding part 46. Further, in the light beam branching element holding unit 45 and the reflecting surface holding unit 46, the surfaces opposite to the coupling element side surfaces are a flat inclined surface 45a and a flat inclined surface 46a, respectively.

  The inclination angle of the inclined surface 51a is relatively more steep than the inclined surface of the mirror array shown in FIG. 5 or the like in order to sufficiently reduce the incident angle of the light incident on the coupling elements 43 and 44-1 to 44-8 ( The inclined surface is substantially perpendicular to the substrate surface.

  When forming a holding structure for directly and obliquely arranging the beam branching elements in the mirror array block 40, it is necessary to sufficiently increase the area of the beam branching elements in order to improve the accuracy of the arrangement angle. However, if the area of the beam splitter increases, the manufacturing cost increases, the size of the optical multiplexer / demultiplexer increases, the optical path length of the propagating beam increases as the channel spacing increases, and the variation in loss between channels increases. Problems occur.

  In order to avoid these problems, a flat plate (filter array flat plate) in which a plurality of beam branching elements are arranged in an array is prepared separately, and a holding for accurately determining the position and angle of the filter array flat plate is provided. The part is preferably formed integrally with the mirror array block.

  This eliminates the need for a comb-like structure for holding each light-branching element between adjacent light-branching elements, and eliminates the need to increase the channel spacing to form the comb-like structure. . In addition, since a holding portion may be formed outside the arrayed V-groove, a holding portion having a sufficiently large size can be formed, and a flat plate having a reflection region (a beam splitter arranged in each channel or a plurality of light beams). The accuracy of the arrangement angle of the filter array flat plate in which the branch elements are formed in an array can also be improved. Of course, this holding part can also be used to accurately determine the position and angle of the reflecting surface other than the beam splitter.

  FIG. 11 shows an optical multiplexer / demultiplexer in which the filter array flat plate 47 and the reflection surface 49 are held by the beam splitter holding unit 45 and the reflection surface holding unit 46, respectively. A waveguide structure is constituted by the light beam branching element holding unit 45 and the filter array flat plate 47, the reflecting surface holding unit 46 and the held reflecting surface 49.

  The filter array flat plate 47 is held in an inclined manner by contacting the inclined surfaces 45a of the pair of beam branching element holding portions 45 at both end surfaces. Further, the flat reflection surface 49 is inclined and held by contacting the inclined surfaces 46 a of the pair of reflection surface holding portions 46 at both end surfaces. The filter array flat plate 47 has a frame-like appearance, and light branching elements 48-1 to 48-8 are fitted into the frame corresponding to the coupling elements 44-1 to 44-8.

  The filter array flat plate 47 is not limited to the type in which each light branching element is fitted into a physical hole in the form of an array as in this embodiment, and each light beam is applied to an optically transparent flat plate such as a glass plate. A type in which branch elements are attached in an array form, a type in which dielectric multilayer films having different transmission wavelength ranges are formed in an array form on an optically transparent flat plate, and the like are also conceivable. In either case, it is necessary to manufacture the filter array flat plate with care so that the reflecting surfaces of all the light branching elements are arranged on the same plane.

  Hereinafter, the effect of the present embodiment will be described.

<An angle formed by the incident / reflection optical axis is smaller than 45 °>
When a mirror is used as the coupling element, the angle formed between the incident light incident on the coupling element and the reflected light reflected by the coupling element is greater than 0 °. Therefore, when the optical axes of all the light emitting / receiving elements are arranged on the same plane, the angle formed by the incident light and the reflected light in each coupling element is made uniform, and the optical path length connecting the light receiving / emitting element and the coupling element is made uniform. Includes a plane including the optical axis of the light emitting / receiving element (hereinafter referred to as light receiving / emitting element plane) and a plane including the optical axis of the light beam transmitted / reflected by each light branching element (hereinafter referred to as the light beam splitting element plane). Must be crossed. Furthermore, a reflection surface, that is, a waveguide element, is required to make a light beam reflected by a certain light beam branching element enter another light beam branching element.

  In the conventional optical multiplexer / demultiplexer shown in FIG. 37, the reflecting surface 1007 corresponding to the coupling element is a paraboloid of revolution, a hyperboloid of revolution, and a ellipsoid of revolution. In this case, the angle formed by the incident / reflection optical axis of the coupling element is about 90 °, and the angle formed by the light beam splitting element plane and the light receiving / emitting element plane is often about 90 °. Therefore, the waveguide element is disposed at the farthest position with respect to the light emitting / receiving element plane, and it is difficult to form a structure for positioning the light emitting / receiving element and the waveguide element in a single block. .

  For this reason, the structure for positioning the light emitting / receiving element and the structure for positioning the waveguide element must be configured in separate blocks. Therefore, the number of parts and the number of assembly steps increase, and the manufacturing cost increases. In addition, it is easily affected by distortion at the time of temperature gradient generation, and excessive loss increases. Furthermore, when the pitch of the adjacent beam branching elements and the incident angle of the light beam incident on the beam branching element are the same, the size of the optical system becomes large.

  On the other hand, in this embodiment, the angle formed by the incident / reflecting optical axes of the coupling elements 43, 44-1 to 44-8 is smaller than 45 °, so the angle formed by the light beam splitting element plane and the light receiving / emitting element plane is the same. It becomes possible to make it small. Therefore, the reflecting surface 49 corresponding to the waveguide element can be disposed closer to the light receiving / emitting element plane than when the angle formed by the two planes is 90 °. It is easy to construct a structure for positioning the substrate in a single block.

  For this reason, the number of parts and assembly man-hours can be reduced, and the manufacturing cost can be suppressed. In addition, it is difficult to be affected by distortion at the time of temperature gradient occurrence, and excessive loss can be suppressed. Furthermore, when the pitch of the adjacent beam splitter and the incident angle of the beam incident on the beam splitter are the same, the size of the optical system can be reduced.

  When the coupling element is a spherical mirror, it is desirable that the angle formed by the light beam splitting element plane and the light receiving / emitting element plane is as small as possible in order to reduce the influence of coma aberration. However, care must be taken so that the propagating light beam and the light emitting / receiving element do not interfere with each other.

<The light beam splitting element holding part 45 and the reflecting surface holding part 46 are integrally formed with the mirror block 45>
The beam splitters 48-1 to 48-8 and the reflecting surface 49 have a function as a mirror. For this reason, these positional / angular deviations cause the optical axis deviation of the propagating light beam and increase the excess loss, so that high mounting accuracy is required. In particular, it is necessary to pay attention because the beam splitters 48-1 to 48-8 are plane mirrors that amplify the angle deviation of the reflected beam.

  Here, in this embodiment, the beam branching element holding part 45 and the reflecting surface holding part 46 are integrally formed with the mirror array block 40. Therefore, the filter array flat plate (filter array block) 47 in which the beam branching elements 48-1 to 48-8 are formed in an array is provided on the inclined surface 45a of the beam branching element holding unit 45, and the reflection surface 49 is provided on the reflection surface holding unit. The assembly is completed simply by pressing, abutting and adhering to the inclined surface 46a of 46. For this reason, the manufacturing cost can be reduced because parts can be assembled with high accuracy and simplicity without requiring a special assembling apparatus or advanced skills.

  It is possible to adopt a mode in which one of the light beam splitting element holding part 45 and the reflecting surface holding part 46 is integrally formed with the mirror array block, but both are integrally formed with the mirror array block as in this embodiment. It is desirable to be. Then, the relative positions and angles of the coupling elements 43, 44-1 to 44-8, the beam branching elements 48-1 to 48-8, and the reflecting surface 49 can be determined accurately and easily. Time can be greatly reduced.

<Space is interposed between the beam splitters 48-1 to 48-8 and the reflecting surface 49>
When resin is used for the propagation medium, the propagation loss of an optical signal having a wavelength of about 1.5 μm used in long-distance optical communication is large. When optical glass is used as the propagation medium, propagation loss can be reduced, but it is difficult to manufacture waveguide elements such as concave mirrors in a highly accurate array. When mass production is performed using glass injection molding, the yield that can be produced with a single mold is reduced, resulting in an increase in production cost. Therefore, like the conventional optical demultiplexer shown in FIG. 43, when the light beam propagates between the wavelength specifying filter 3202 corresponding to the light beam splitting element and the converging reflector 3201 corresponding to the wave guide element, the propagation is performed. Both losses and manufacturing costs increase.

  On the other hand, in the present embodiment, a space is interposed between the beam splitters 48-1 to 48-8 and the reflecting surface 49 corresponding to the waveguide element. Therefore, since light rays propagate through space, the propagation loss is negligibly small. Therefore, the propagation loss is much smaller than that of the conventional optical demultiplexer. Further, even if the pitch of the beam splitters 48-1 to 48-8 is increased or the incident angle of the propagating beam to the beam splitters 48-1 to 48-8 is increased, the propagation loss does not increase. Design flexibility can also be improved. In this embodiment, since the optical transparency of the waveguide element is not questioned, it is desirable to use a material (such as resin) that is easy to process at low cost and suitable for mass production.

<Fourth embodiment>
12 and 13 are diagrams for explaining an optical multiplexer / demultiplexer according to the fourth embodiment of the present invention. FIG. 12 is a perspective schematic external view of a specific mirror array block of the optical multiplexer / demultiplexer according to the present embodiment. FIG. 13 is a perspective schematic external view of the optical multiplexer / demultiplexer according to the present embodiment in which a specific mirror array block and a specific waveguide structure are assembled. This embodiment is an application example of the third embodiment.

  As shown in FIG. 12, the mirror array block 40 is formed on the surface of the plate-like substrate at the side wall portions 40a, 40b, 40c formed at the three substrate end portions and the substrate end portion at which the side wall portion 40a is formed. A V-groove 51 formed linearly along the side wall portion 40a, and coupling elements 43 formed by being arranged along the linear axis direction of the V-groove 51 on one inclined surface 51a constituting the V-groove 51, 44-1 to 44-8 and a plurality of linear shapes formed so as to be perpendicular to the linear axis direction of the V-groove 51 and to be connected to the V-groove 51 so as to face the coupling elements 43 and 44-1 to 44-8. It consists of V-groove 41 and 42-1 to 42-8. The plurality of V-grooves 41 and 42-1 to 42-8 are V-grooves for fixing an optical fiber, and are formed so as to face the coupling elements 43 and 44-1 to 44-8, respectively.

  The side walls 40a, 40b, and 40c formed at the three substrate ends form a shape in which the outer sides of the optical fiber array and the upper side of the coupling element are surrounded. In the side wall portion 40b, an inclined surface 45a serving as a light beam branching element holding portion and an inclined surface 46a serving as a reflecting surface holding portion are formed, and similarly, inclined surfaces 45a and 46a corresponding to the side wall portion 40c are also formed. The inclined surface 45a of the beam branching element holding part is formed closer to the coupling element than the inclined surface 46a of the reflecting surface holding part. Each inclined surface 45a, 46a is a flat inclined surface.

  As shown in FIG. 13, the length in the array direction of the filter array flat plate 47 in which a plurality of beam branching elements 48-1 to 48-8 are formed in an array is longer than the length in the longitudinal direction of the flat reflective surface 49. Correspondingly, the inclined surfaces 45a and 46a are formed on the side wall portions 40b and 40c so that the planar shape of the side wall portions is stepped.

  In this embodiment, the four inclined surfaces for positioning the filter array flat plate 47 and the reflecting surface 49 are rectangular flat surfaces. However, if two minute protrusion structures are formed on each rectangular plane, Since the flat plate can be positioned by point contact rather than surface contact, the positioning accuracy can be further improved.

  Further, as in the present embodiment, by forming a side wall on three surfaces so as to surround the V-groove portion, and forming a flat plate holding portion (inclined surface) and a plurality of coupling elements on those side surfaces. The mirror array block is improved in mechanical strength and hardly deforms even when the environmental temperature changes.

  In this embodiment, the same effect as that of the third embodiment described above can be obtained.

  As described above, as a method of forming the coupling element, the beam branching element holding structure, the V-groove, and the like described in each embodiment, a cutting process in which a substrate is directly cut into a target shape or a mold having a target shape is cut. Thereafter, injection molding or the like in which resin or the like is poured into the mold and heated and molded can be considered. However, when the same mirror array block or the like is manufactured in large quantities, the injection molding method is suitable. In addition, as for the shape of the V-groove, as long as sufficient attention is paid only to the shape accuracy of the region close to the coupling element and the relative positional accuracy with respect to the coupling element, the other portions do not need to have a very high accuracy.

<Fifth embodiment>
FIG. 14 is a schematic configuration diagram of an optical multiplexer / demultiplexer according to the fifth embodiment of the present invention. In the figure, light rays propagating through the optical multiplexer / demultiplexer are conceptually shown.

  As shown in FIG. 14, the optical multiplexer / demultiplexer according to the fifth embodiment transmits a light beam including a specific wavelength region, and a lens array block 110 in which lenses for inputting / outputting the light beam are integrally formed. It is composed of light beam branching elements 111 to 114 that reflect light beams outside a specific wavelength range, and a reflective surface 128 that reflects light beams. In addition, optical fibers 115 to 119 are coupled to the optical multiplexer / demultiplexer so that wavelength multiplexed light or monochromatic light can be input and output.

  The lens array block 110 protrudes from the lens array block main body and holds the light beam splitting elements 111 to 114, a lens 120 for inputting and outputting wavelength-multiplexed rays, lenses 101 to 104 for inputting and outputting monochromatic rays. It is comprised from the beam branching element holding structure 105-109. In the lens array block 110, the lenses 101 to 104 and the beam branching element holding structures 105 to 109 are alternately arranged. For example, the lens 101 is disposed between the projection-shaped beam branching element holding structure 105 and the beam-branching element holding structure 106, and the other lenses 102 to 104 are respectively disposed between two projection-shaped beam branching element holding structures. Is arranged.

  Further, for example, the light beam branching element 111 is held at both ends on the upper surfaces of the protruding light beam branching element holding structure 105 and the light beam branching element holding structure 106, and each of the other light beam branching elements 112 to 114 has two Both ends thereof are held by the protruding beam branching element holding structure. As a result, the lenses 101 to 104 and the beam splitters 111 to 114 corresponding to the lenses 101 to 104 are paired (four pairs in FIG. 14) and arranged on the lens array block body. The lenses 101 to 104 are lenses that are convex toward the beam splitters 111 to 114.

  The beam splitters 111 to 114 are held by the beam splitter holding structures 105 to 109 so that their light incident / reflecting surfaces are parallel to the surfaces of the lens array block 110 where the lenses 101 to 104 and 120 are aligned. The Further, on the side of the light beam splitting elements 111 to 114 held by the lens array block 110, the reflecting surface 128 is arranged such that the surface that reflects the light beam is parallel to the light incident / reflecting surfaces of the light beam splitting elements 111 to 114. Installed.

  The optical fiber 115 that inputs and outputs wavelength multiplexed light is installed on the opposite side of the reflecting surface 128 with the lens array block 110 interposed therebetween, along with optical fibers 116 to 119 that input and output monochromatic light.

  A line connecting light receiving and emitting points (points for receiving and emitting light rays at the end face) in each of the optical fibers 115 to 119 is parallel to the filter array surface and the reflecting surfaces of the light beam splitting elements 111 to 114, while the optical fibers 115 to 115 are connected. 119 is not parallel to the light emitting / receiving surface (end surface). That is, the optical fibers 115 to 119 are arranged so that their light receiving and emitting surfaces are inclined with respect to the filter array surface. Since the beam splitters 111 to 114 are parallel (not inclined) to the lens array surface or the filter array surface, a single flat plate can be used as the reflecting surface 128.

  When the optical multiplexer / demultiplexer according to the present embodiment is used as a demultiplexer, the operation principle of the demultiplexer is as follows. The wavelength multiplexed light propagated through the optical fiber 115 from the outside of the optical multiplexer / demultiplexer is guided into the optical multiplexer / demultiplexer and enters the lens 120 as a slightly diffused wavelength multiplexed light. The wavelength multiplexed light is collimated by the lens 120 and then propagates to the reflecting surface 128. The wavelength multiplexed light propagated to the reflecting surface 128 is reflected by the reflecting surface 128 and enters the light beam splitting element 111.

  The wavelength-multiplexed light that has entered the light beam splitting element 111 is transmitted through the light beam splitting element 111 with a light having a specific wavelength range, and becomes a monochromatic light beam and enters the lens 101. Then, the light is collected by the lens 101, coupled to the optical fiber 116, and output to the outside of the optical multiplexer / demultiplexer.

  A wavelength-multiplexed light beam composed of a light beam outside the specific wavelength band is reflected without passing through the light beam splitting element 111 and propagates to the reflecting surface 128. The wavelength multiplexed light propagated to the reflecting surface 128 is reflected by the reflecting surface 128 and enters the light beam splitting element 112.

  The wavelength-multiplexed light that has entered the light beam splitting element 112 is transmitted through the light beam splitting element 112 with a light having a specific wavelength range, and enters the lens 102 as a monochromatic light beam. Then, the light is collected by the lens 102, coupled to the optical fiber 117, and output to the outside of the optical multiplexer / demultiplexer.

  By repeating the above process, the wavelength multiplexed light incident from the optical fiber 115 can be extracted from the optical fibers 116 to 119 as a plurality of demultiplexed monochromatic light beams.

  Further, when the optical multiplexer / demultiplexer according to the present embodiment is used as a multiplexer, it corresponds to the case where the traveling directions of the wavelength multiplexed light and the monochromatic light in the above-described demultiplexing operation are reversed. That is, by inputting monochromatic rays to the optical fibers 116 to 119 from the outside of the optical multiplexer / demultiplexer, the monochromatic rays can be extracted from the optical fiber 115 as multiplexed wavelength multiplexed rays.

  Convergent light (in the case of a demultiplexer) or diffused light (in the case of a multiplexer) propagates between the end faces of the optical fibers 116 to 119 and the lenses 101 to 104. For this reason, in order to propagate the beam as designed, it is necessary to precisely determine the relative position and angle between the optical fiber and the lens. Therefore, it is desirable to integrally form a structure for fixing the optical fibers 116 to 119 in the lens array block 110 in a simple and accurate manner.

  In this embodiment, the optical fibers 116 to 119 for inputting / outputting monochromatic light, the lenses 101 to 104, and the light branching elements 111 to 114 are arranged on one straight line. Can be collectively arranged in an array, and each optical element can be easily arranged, formed and fixed. Further, in this embodiment, since all the optical fibers 115 to 119 are arranged on one surface of the optical multiplexer / demultiplexer, it is suitable for mounting the optical multiplexer / demultiplexer on the corner of the package or the like.

  In the present embodiment, the number of beam branching elements is four, the number of lenses is five, the number of reflecting surfaces is three, and the number of optical fibers is five. However, the present invention is limited to these numbers. It is not limited. The light receiving and emitting points for wavelength multiplexed light and monochromatic light are not limited to optical fibers, and some or all of the light receiving and emitting points may be light receiving and emitting elements such as laser diodes and photodiodes. Furthermore, a configuration may be adopted in which a plurality of light emitting points and light receiving points exist in one optical multiplexer / demultiplexer.

<Sixth embodiment>
FIG. 15 is a conceptual diagram of an optical multiplexer / demultiplexer according to a sixth embodiment of the present invention. In the optical multiplexer / demultiplexer according to the present embodiment, the waveguide elements arranged on the optical path of the light beam propagating between the adjacent light beam branching elements are the concave mirrors 215 to 218, and all the concave mirrors 215 to 218 are provided. Are integrally formed in a waveguide element block 220 separate from the mirror array block.

  With such a configuration, only by adjusting the position of the waveguide element block 220, the angle of the reflected light from the concave mirrors 215 to 218 is changed, and an alignment that reduces the excess loss of all channels is achieved. Is possible. In this case, the positional deviation allowable amount of the incident light with respect to the concave mirrors 215 to 218 is important. The concave mirrors 215 to 218 have a light condensing power smaller than that of the coupling elements 206 to 210 because the purpose is to mutually convert collimated light (that is, to invert the phase of the wavefront while maintaining the beam diameter substantially). Therefore, it is possible to suppress the influence of the positional deviation of the incident light beam with respect to the concave mirrors 215 to 218 on the angular deviation of the reflected light beam, that is, excess loss due to the optical axis deviation.

  FIG. 16 shows an example of the dependence of the coupling efficiency on the waveguide element block shift amount in this optical multiplexer / demultiplexer. As can be seen from this graph, for example, even if the position of the waveguide element block 220 is shifted by about 10 μm, an optical design that can suppress excess loss within 1 dB is possible. As described above, the optical multiplexer / demultiplexer has a loose alignment tolerance of the waveguide element block 220 with respect to an allowable excess loss, and can be easily assembled. Therefore, the manufacturing cost can be reduced.

  Next, after the optical multiplexer / demultiplexer is assembled, when the angle of the waveguide element block 220 is deviated from the design value due to a change in the environmental temperature, the gap between the concave mirrors 215 to 218 and the beam splitters 211 to 214 is determined. When attention is paid to the optical axis of the propagating light beam that is reflected multiple times, since the concave mirrors 215 to 218 have a condensing power, as shown in FIG. 17, every time the propagating light beam enters and reflects the concave mirrors 215 to 218, The positional deviation and the angular deviation are corrected periodically. Therefore, even if the optical path length is extended, the positional deviation and angular deviation of the propagation optical axis do not accumulate. Therefore, it is possible to suppress loss fluctuations with respect to changes in environmental temperature.

<Seventh embodiment>
Next, a seventh embodiment of the present invention will be described. The optical multiplexer / demultiplexer according to the present embodiment eliminates the need for an optical block through which light propagates, thereby increasing the degree of freedom in material selection and reducing optical loss. Further, a fiber alignment member (a flange described later) By integrating a fixed surface 316 and the like and an optical system (a coupling element block 305 described later) that collects light, fiber alignment is facilitated, and a filter (a beam splitter block 303 described later) and an optical system ( Low loss can be realized by alignment of an optical waveguide mirror block 304 or the like, which will be described later. As a result, downsizing and cost reduction are achieved. Hereinafter, although a present Example is described based on drawing, this Example does not limit this invention. In addition, the member and part which are common in all the drawings in a present Example are shown with the same code | symbol, and the overlapping description is abbreviate | omitted.

18 and 19 are perspective external views of an optical multiplexer / demultiplexer according to the seventh embodiment of the present invention. 18 is a perspective view from the front side of the optical multiplexer / demultiplexer, and FIG. 19 is a perspective view from the rear side of the optical multiplexer / demultiplexer.
The optical multiplexer / demultiplexer according to the present embodiment can multiplex signal light of eight wavelengths into wavelength multiplexed light, or can demultiplex wavelength multiplexed light into signal light of eight wavelengths. It is an example of a channel optical multiplexer / demultiplexer.

  As shown in these drawings, in the optical multiplexer / demultiplexer according to the present embodiment, an optical main block 301, a fiber fixing block 302 to which a plurality of optical fibers are fixed, and a plurality of dielectric multilayer filters are fixed. It consists of a beam splitter block 303 and an optical waveguide mirror block 304. The optical waveguide mirror block 304 corresponds to a waveguide element block. Here, the coupling element block 305 and the optical main block 301 are integrally formed.

FIG. 20 is a schematic perspective view of the optical main block.
The optical main block 301 includes a flat bottom surface 313, and a coupling element block 305 and a wall surface 312 that are erected on the bottom surface 313 so as to surround three sides of the bottom surface 313. Inside the coupling element block 305, a mirror surface 311 is formed in which a plurality of coupling elements 317 made of a concave mirror, a plane mirror, or the like is formed, and both ends of the mirror surface 311 are substantially perpendicular to the mirror surface 311. Two wall surfaces 312 are formed. On the two wall surfaces 312, a step having a filter block fixing surface 314 parallel to the mirror surface 311 is formed inside each wall 312, and the beam splitter block 303 can be fixed to the step. .

  Further, on the wall surface 312, a notch having an optical waveguide mirror block fixing surface 315 parallel to the mirror surface 311 is formed on the upper surface of the wall surface 311 in the vicinity of the terminal portion opposite to the mirror surface 311 (coupling element block 305). The optical waveguide mirror block 304 can be fixed to the notch. Further, a flange fixing surface 316 for fixing the optical fiber fixing block 302 is formed at the terminal portion of the bottom surface 313 and the two wall surfaces 312 opposite to the mirror surface 311 (the coupling element block 305).

  Here, the wall surface 312 has a low height on the back side (coupling element block 305 side) in FIG. 20 and a high height on the near side (flange fixing surface 316 side). The arrangement position of the beam splitter block 303 and the optical waveguide mirror block 304 is made higher than the optical fiber fixing block 302. Further, the coupling element 317 is arranged on the mirror surface 311 so that 13 coupling elements 317 are arranged in a line at the same interval as the fiber fixing groove 321 of the optical fiber fixing block 302 described later, that is, at the same interval as the optical fiber 323. It is formed.

  Note that the filter block fixing surface 314 and the optical waveguide mirror block fixing surface 315 on the optical main block 301 do not have to be completely flat, and a protrusion 318 as shown in FIG. 21 may be formed. If the surface connecting the vertices of the projections 318 is made to be parallel to the mirror surface 311, the beam branching element block 303 and the optical waveguide mirror block 304 are pressed against the vertices of the projections 318, so that the mirror Aligned parallel to the surface 311. If such a projection 318 is used, it is only necessary to control the height of each projection 318 without controlling the flatness of the entire surface with high accuracy, so that the optical main block 301 can be easily molded.

FIG. 22 is a schematic view of the optical fiber fixing block 302.
In the optical fiber fixing block 302, a plurality of fiber fixing grooves 321 are formed in parallel on the upper surface of a rectangular parallelepiped block 320, and a flange 322 having a plane perpendicular to the fiber fixing grooves 321 is formed. The optical fiber 323 is fitted in the fiber fixing groove 321 on the upper surface of the optical fiber fixing block 302, and the plurality of optical fibers 323 are fixed in parallel. Examples of the cross-sectional shape of the fiber fixing groove 321 include a V shape, a U shape, and a trapezoid. The position where the tip of the optical fiber 323 faces the coupling element 317 formed on the optical main block 301 by fixing the flange 322 of the optical fiber fixing block 302 so as to contact the flange fixing surface 316 of the optical main block 301. The light entering and exiting from the end face of the optical fiber 323 is coupled to the coupling element 317 formed in the optical main block 301.

FIG. 23 is a cross-sectional view of the beam splitter block 303.
The beam splitter block 303 has a plate-like substrate 331 in which nine through holes 332 are arranged in a line at the same interval as the fiber fixing groove 321 of the optical fiber fixing block 302, that is, at the same interval as the optical fiber 323. The eight dielectric multilayer filters 333 are attached to the filter mounting surface 334 so as to close the eight through holes 332 except for one of the through holes 332. .

  In the example of FIG. 18 (FIG. 20), the beam splitter block 303 has a surface 336 opposite to the filter mounting surface 334 in contact with the filter block fixing surface 314 inside the wall surface 312 of the optical main block 301. Are glued together. Therefore, if the dielectric multilayer filter 333 is attached so that the surface 336 opposite to the filter mounting surface 334 of the beam splitter block 303 and the surface of the dielectric multilayer filter 333 are parallel, Since the filter block fixing surface 314 and the mirror surface 311 are formed in parallel, the wavelength selection block 3 is simply pressed and fixed to the filter block fixing surface 314 of the optical main block 301, and the dielectric without adjusting the angle. The multilayer filter 333 is attached so that the surface of the multilayer filter 333 and the mirror surface 311 are parallel, and the assembly procedure can be simplified.

  As shown in FIG. 24, the beam splitter block 303 may have a configuration in which eight dielectric multilayer filters 333 are attached in a row to a plate-like transparent substrate 335 having no through-holes. . In this case, it is desirable to form a non-reflective coating layer on the surface 336 opposite to the filter mounting surface 334 of the transparent substrate 335 and perform antireflection processing to prevent the occurrence of reflection loss and stray light. By using a substrate having no through-holes, the adhesion area of the dielectric multilayer filter 333 can be increased, the adhesion strength can be increased, and the gap between the transparent substrate 335 and the dielectric multilayer filter 333 is generated. By adhering while observing the interference fringes, it is possible to adhere while ensuring the parallelism between the transparent substrate 335 and the dielectric multilayer filter 333 with high accuracy.

FIG. 25 is a schematic view of the optical waveguide mirror block 304.
The optical waveguide mirror block 304 has eight concave mirrors 343 on the waveguide mirror forming surface 342 of the plate-like member 341 at the same interval as the fiber fixing groove 321 of the optical fiber fixing block, that is, at the same interval as the optical fiber 323. It is formed. The optical waveguide mirror block 304 is attached so that the waveguide mirror block fixing surface 315 formed at the notch of the optical main block 301 and the waveguide mirror forming surface 342 are in contact with each other. That is, the optical waveguide block fixing surface 315 and the waveguide mirror forming surface 342 are mounted in parallel. Further, since the optical waveguide block fixing surface 315 of the optical main block 301 is formed to be parallel to the mirror surface 311 of the optical main block 301, the optical waveguide mirror block 304 is replaced with the waveguide mirror block of the optical main block 301. By simply pressing and fixing to the fixing surface 315, the waveguide mirror forming surface 342 is attached in parallel with the mirror surface 311 of the optical main block 301 without complicated angle adjustment, and the assembly procedure can be simplified. .

  Next, the operation when the optical multiplexer / demultiplexer according to the present embodiment is used as an optical demultiplexer will be described.

FIG. 26 is a schematic internal structure diagram of the optical multiplexer / demultiplexer according to the present embodiment, in which the optical path inside is illustrated. The coupling elements 317-1 to 317-9 can be formed by concave mirrors.
As shown in the figure, the diffused light emitted from the end face of the input optical fiber 323-1 is reflected by a common coupling element 317-1 formed in the optical main block 301 to become a parallel light beam or a light beam close to parallel. It is converted and folded in the direction of the optical waveguide mirror block 304. The folded light beam passes through the through-hole 332 of the light beam splitter block 303, is reflected by the first concave mirror 343-1 of the optical waveguide mirror block 304, and is incident on the first dielectric multilayer filter 333-1. .

  The light transmitted through the first dielectric multilayer filter 333-1 is collected and output to the first output fiber 23-2 by the channel 1 coupling element 317-2. The light reflected by the first dielectric multilayer filter 333-1 is reflected again by the second concave mirror 343-2 of the optical waveguide mirror block 304 and enters the second dielectric multilayer filter 333-2. Is done. The light transmitted through the second dielectric multilayer filter 333-2 is condensed and output to the second output fiber 23-3 by the channel 2 coupling element 317-3. The light reflected by the second dielectric multilayer filter 333-2 is reflected again by the concave mirror 343-3 of the optical waveguide mirror block and is incident on the third dielectric multilayer filter 333-3. In the same manner, wavelength division multiplexed light is demultiplexed by sequentially repeating incidence on the third, fourth,... Dielectric multilayer filters 333-3, 333-4.

  When the coupling element 317 of the optical main block 301 is a curved surface having a radius of curvature that is approximately twice the distance from the optical fiber 323 to the coupling element 317, the light emitted from the optical fiber 323 and reflected by the coupling element 317 is Propagating through space as almost parallel rays. In this case, the respective curvatures are adjusted so that the coupling element 317 of the optical main block 301 and the concave mirror 343 of the optical waveguide mirror block 304 form a confocal system, and the dielectric multilayer filter 333 is positioned at the beam waist. If the filter surfaces are arranged, the beam spot diameters of the light beams on all the dielectric multilayer filters 333 are aligned, and at the same time, the beam spot diameters on the end faces of all the outgoing optical fibers 323-2 to 323-9. Therefore, an optical system optimally coupled to all the output optical fibers 323-2 to 323-9 can be realized, and light loss can be reduced.

  When the optical path inside the optical multiplexer / demultiplexer is viewed from the side (in FIG. 26, when the inside of the optical multiplexer / demultiplexer is viewed from the wall surface 312 side), for example, when functioning as a demultiplexer, the outgoing optical fiber 323- The light emitted from 1 is reflected upward at a predetermined angle by the common coupling element 317-1 and passes through the through-hole 332 of the beam splitter block 303 disposed above the optical fiber fixing block 302. The light is incident on the concave mirror 343-1 of the optical waveguide mirror block 304 disposed above the optical fiber fixing block 302. Then, the light incident on the coupling element 343-1 is reflected downward at a predetermined angle by the concave mirror 343-1, and is incident on the first dielectric multilayer filter 333-1 of the beam splitter block 303. Further, the light transmitted through the first dielectric multilayer filter 333-1 is incident on the channel 1 coupling element 317-2 of the optical main block 301, and then reflected and collected by the coupling element 317-2. And output from the output optical fiber 323-2. The light reflected by the first dielectric multilayer filter 333-1 is reflected again by the second concave mirror 343-2 of the optical waveguide mirror block 304 and enters the second dielectric multilayer filter 333-2. Is done. The light transmitted through the second dielectric multilayer filter 333-2 is condensed and output to the second output fiber 23-3 by the channel 2 coupling element 317-3. Thereafter, the same incident light, reflection, etc. are sequentially repeated to demultiplex the wavelength multiplexed light.

The procedure for assembling the optical multiplexer / demultiplexer according to this embodiment will be described in detail below.
First, the optical fiber 323 is bonded and fixed to the plurality of fiber fixing grooves 321 of the optical fiber fixing block 302. When bonding and fixing, the tips of all the optical fibers 323 are aligned so that the tips of all the optical fibers 323 protrude from the tip of the optical fiber fixing block 302 by a method such as abutting the tip of the optical fiber 323 against the wall surface. After the optical fiber 323 is bonded and fixed to the optical fiber fixing block 302, the tips of all the optical fibers 323 may be aligned by polishing the tips of the optical fiber fixing blocks 302. In other words, the end face of the optical fiber 323 is arranged perpendicular to the optical axis of the optical fiber 323 and on the same plane. Note that the tip of the optical fiber 323 is preferably provided with a non-reflective coating in order to reduce reflection loss.

  Next, alignment is performed so that the flange 322 of the optical fiber fixing block 302 to which the optical fiber 323 is fixed is shifted on the flange fixing surface 316 of the optical main block 301, and the optical fiber fixing block 302 and the optical main block 301 are aligned. After alignment, perform adhesive fixing. The alignment is started by adjusting the angles of the optical main block 301 and the optical fiber fixing block 302 by using the plane mirror 317-10 including the plane mirror of the optical main block 301 and the plane mirror fiber 323-10. . Since the plane mirror 317-10 is made to be perpendicular to the design value of the optical axis of the optical fiber 323, the light emitted from the plane mirror fiber 323-10 is reflected by the plane mirror 317-10, The amount of light that returns to the plane mirror fiber 323-10 again increases most when the angle is adjusted so that the optical fiber fixing block 302 has an angle as designed. Therefore, it is possible to confirm whether or not the optical fiber fixing block 302 is attached at a predetermined angle by monitoring the light incident and returning from the plane mirror fiber 323-10.

  After the adjustment of the angle of the optical fiber fixing block 302, the position is adjusted. The alignment mirrors 317-11 and 317-12 at both ends of the optical main block 301 are spherical surfaces (distances from the optical fiber to the concave mirror) that are centered at positions that are the end surfaces of the alignment optical fibers 323-11 and 323-12. And a concave mirror made up of a spherical surface having a radius substantially equal to. Therefore, the amount of light emitted from the alignment optical fibers 323-11 and 323-12 is reflected by the alignment mirrors 317-11 and 317-12 and returns to the same fiber end face again. The number increases when the end faces of the fibers 323-11 and 323-12 are at the centers of the alignment mirrors 317-11 and 317-12. Since the alignment mirrors 317-11 and 317-12 are provided at both ends of the mirror surface 311, light enters from the two alignment optical fibers 323-11 and 323-12, and the returning light is monitored. By doing so, the optical fiber fixing block 302 can be adjusted to a position as designed.

  In this way, the optical main block 301 and the optical fiber fixing block 302 whose angles and positions are adjusted are bonded and fixed.

  Next, the beam splitter block 303 is fixed to the optical main block 301. As described above, the optical main block 301 is formed with the filter block fixing surface 314 parallel to the mirror surface 311, and the light branching element block 303 is fixed while being pressed against the filter block fixing surface 314. The membrane filter 333 is mechanically fixed at a predetermined angle. If the area of the dielectric multilayer filter 333 is sufficiently large compared to the beam diameter of the light beam, the alignment accuracy of the light beam branching element block 303 is not required. Sufficient alignment is possible by a technique such as mechanically abutting the corner of the step of the filter block fixing surface 314.

  After fixing the beam splitter block 303, the optical waveguide mirror block 304 is fixed to the optical main block 301. Here, as described above, since the waveguide mirror block fixing surface 315 is formed on the optical main block 301, the optical main block 301 and the optical waveguide mirror block 304 are predetermined by pressing the optical waveguide mirror block 304 against this surface. It is adjusted to be an angle of.

  In this embodiment, in order to confirm whether the optical main block 301 and the optical waveguide mirror block 304 are correctly attached at a predetermined angle, the optical waveguide block angle adjusting mirror 317 is used as one of the coupling elements 317 of the optical main block 301. -13 is formed. The light emitted from the optical waveguide mirror block angle adjusting fiber 323-13 is reflected by the optical waveguide mirror block angle adjusting mirror 317-13 and converted into parallel rays perpendicular to the waveguide mirror forming surface 342 of the optical waveguide mirror block 304. Is done. The parallel rays are reflected by the plane mirror 344 formed on the waveguide mirror forming surface 342 of the optical waveguide mirror block 304, and are reflected and condensed again by the optical waveguide mirror block angle adjusting mirror 317-13 to adjust the optical waveguide mirror block angle. Return to fiber 323-13. Since the return light returning to the optical waveguide mirror block angle adjusting fiber 323-13 is the largest when the optical waveguide mirror block 304 is attached at a predetermined angle, the intensity of the return light should be monitored. Thus, it can be confirmed whether or not the optical waveguide mirror block 304 is attached at a predetermined angle.

  After adjusting the angle of the optical waveguide mirror block 304, the light is incident from the input optical fiber 323-1, and the position of the optical waveguide mirror block 304 is set so that the output light from the respective output optical fibers 323-2 to 323-9 is maximized. Adjust and fix. By providing the optical main block 301 with the plane mirror 317-10, the alignment mirrors 317-11 and 317-12, and the optical waveguide mirror block angle adjusting mirror 317-13, the optical main block 301 and the optical fiber are obtained by the above procedure. The fixing block 302, the beam splitter block 303, and the optical waveguide mirror block 304 can be fixed at the correct angle and position.

  The optical multiplexer / demultiplexer according to the present embodiment inputs a signal having a wavelength corresponding to the transmission spectrum of each dielectric multilayer film from each output optical fiber, with the input / output of light being in the opposite direction to that described above. Thus, it can be emitted from the input optical fiber as wavelength multiplexed light, and can be used as an optical multiplexer.

  In this embodiment, the optical fiber 323 is exemplified as the light emitting / receiving element. However, as the light emitting / receiving element, a laser diode, a photodiode, an optical fiber, a laser diode, a photodiode, and the like are combined with an optical lens system. In other words, there are optical package parts such as a front-end fiber, a fiber collimator, a transmission optical subassembly (TOSA), and a reception optical subassembly (ROSA).

  Also, the light receiving and emitting element fixing structure for positioning these may be other structures such as a V groove, a U groove and a concave groove. For example, when the optical fiber 323 is used as the light emitting / receiving element, the end face of the optical fiber 323 is arranged on the same plane, and when the photodiode is used as the light receiving / emitting element, Positioning is performed using a V-groove or the like so that the light emitting and receiving points are arranged on the same plane.

  The coupling element 317 refers to an element that reflects incident light and collimates or condenses the incident light.

  Moreover, although the dielectric multilayer filter 333 has been exemplified as the light beam branching element, this light beam branching element is an element that transmits a light beam in a specific wavelength region and reflects a light beam in other wavelength region among incident light beams. It is. Specific examples of beam splitters in the case of using a specific wavelength range fixedly include a bandpass filter using a dielectric multilayer film, an edge filter, and a resonance in which a fine grating structure of the wavelength order is formed on the surface. A mode filter or the like can be considered. In addition, the wavelength range to be transmitted can be changed independently for each beam splitter by external control. In that case, a wavelength tunable filter using the electro-optic effect or thermo-optic effect, or MEMS technology is used. An etalon filter or the like can be considered. Naturally, there may be a case where the wavelength range that transmits the light beam includes all the wavelength ranges of the incident light beam. In that case, the beam splitter corresponds to an optical transmission window. On the contrary, a light beam splitting element that does not transmit all the wavelength ranges of incident light has a function equivalent to a planar reflecting surface.

  In this embodiment, the light incident from the light receiving and emitting elements such as the optical fiber 323 propagates through the space, is reflected by the coupling elements 317-1 to 317-9 formed in the optical main block 301, and propagates again through the space. Thereafter, the light is reflected by a waveguide element such as a concave mirror 343 formed on the optical waveguide mirror block 304. This reflected light is demultiplexed or multiplexed by repeating reflection between a waveguide element formed on the optical waveguide mirror block 304 and a beam branching element such as the dielectric multilayer filter 333.

  As described above, since all the light incident from the light emitting / receiving element propagates through the space, it is necessary to use an optically transparent material as a material for forming the coupling element block 305 and the optical waveguide mirror block 304. However, a material that is optically opaque but inexpensive and excellent in mechanical strength and thermal properties can be used. Further, the diffused light emitted from the light emitting / receiving element is collected by the coupling elements 317-1 to 317-9 instead of the lens, and is converted into a light beam suitable for guiding through the space. In addition, a light beam that has been multiplexed / demultiplexed by repeating reflection between a waveguide element formed on the optical waveguide mirror block 304 and a beam branching element such as a dielectric multilayer filter 333 is: Since the light is collected on the light receiving and emitting elements by the coupling elements 317-1 to 317-9 formed on the optical main block 301, it can be efficiently coupled to the light emitting and receiving elements and output from the optical multiplexer / demultiplexer.

  In addition, a plurality of light emitting / receiving elements are fixed to the light receiving / emitting element fixing block such as the optical fiber fixing block 302, and when the optical multiplexer / demultiplexer is assembled, the position of the light receiving / emitting element fixing block is adjusted. By simply fixing to the main block 301, it is possible to align the plurality of light emitting / receiving elements with respect to the coupling element without individually adjusting the individual light emitting / receiving elements, so that the aligning operation of both is facilitated. Further, since the optical main block 301 and the optical waveguide mirror block 304 are independent blocks, the coupling element formed on the coupling element block and the optical waveguide block 304 mounted on the optical waveguide mirror block 304 at the time of assembly. It is possible to adjust the angle and position of the wave element to an optimum position with little loss, and light loss can be reduced.

  In the present embodiment, as the coupling elements 317-1 to 317-9, concave mirrors made of spherical surfaces having a radius approximately twice the distance from the light emitting / receiving element to the coupling element can be used. In this case, the light emitted from the light input / output element for light input / output is converted into a light beam close to a parallel light beam by the concave mirror, but enters the light beam branching element, although some spherical aberration occurs. A light beam close to a parallel light beam combined or demultiplexed by the light beam branching element is collected by another concave mirror and output from the light receiving / emitting element for light output. The radius of curvature of the concave mirror is about twice as long as the distance from the light incident / exit point of the light emitting / receiving element to the coupling element. Ideally, the beam waist of the light beam reflected from the light emitting / receiving element is the beam branching element. It is desirable to have a radius as formed above.

  In the present embodiment, as the coupling elements 317-1 to 317-9, concave mirrors made of a parabolic curved surface having a focal point in the vicinity of the light emitting / receiving element can be used. In this case, the light emitted from the light input / output element for light input / output is converted into a parallel light beam by the concave mirror and enters the light beam branching element. This parallel light beam is a light beam that can be best selected by the beam splitter. The parallel light beam combined or demultiplexed by the light beam branching element is condensed by another concave mirror and output from the light emitting / receiving element for light output. Further, the parallel light beam emitted from the light emitting / receiving element and converted by the coupling element is reflected by the plane mirror 344 formed on the optical waveguide mirror block 304 and then condensed again on the light receiving / emitting element by the coupling element. It may be output. With this configuration, when the optical waveguide mirror block 304 is mounted at a different angle from the predetermined mounting angle, the light reflected by the flat mirror 344 of the optical waveguide mirror block 304 is reflected by the coupling element on the light receiving and emitting element. Light is collected at a point different from the light receiving point. For this reason, it is possible to confirm whether the optical waveguide mirror block 304 is attached at a predetermined attachment angle by observing the output light from the light emitting / receiving element. Therefore, the optical waveguide mirror block 304 is attached to the optical main block 301 with high angular accuracy. Can be fixed.

  In this embodiment, as the coupling elements 317-1 to 317-9, concave mirrors made of spherical surfaces having a radius substantially equal to the distance from the light emitting / receiving element to the coupling element can be used. In this case, the light emitted from the light receiving / emitting element for light input / output is reflected by the concave mirror, and is again condensed and output to the light receiving / emitting point of the light receiving / emitting element. With such a configuration, when the light receiving / emitting element fixing block and the optical main block 301 are mounted differently from the predetermined mounting position, the light receiving / emitting element is emitted and reflected by the concave mirror of the optical main block 301. The light is condensed at a point different from the light emitting / receiving point of the light emitting / receiving element. Therefore, by observing the intensity of the output light from the light emitting / receiving element, it is possible to confirm whether the light receiving / emitting element fixing block is attached at a predetermined position. 301 can be fixed.

  In this embodiment, a plane mirror 317-10 having a surface perpendicular to the optical axis of the light emitting / receiving element can be used as the positioning mirror. In this case, since the plane mirror 317-10 is designed to be perpendicular to the optical axis of the light receiving / emitting element, the light emitted from the light receiving / emitting element is reflected by the plane mirror 317-10 and travels toward the light receiving / emitting element. Reflected. The output when the reflected light is received by the light emitting / receiving element is the highest when the light receiving / emitting element is mounted at the designed angle, and when the light receiving / emitting element is mounted with a deviation from the designed angle, the flat mirror 317 is provided. −10 and the light receiving / issuing means are not perpendicular to each other, and the reflected light from the reflecting surface that can be received by the light emitting / receiving element is reduced as compared with the case where it is mounted as designed. Therefore, by observing the intensity of the output light from the light emitting / receiving element, it is possible to confirm whether the light receiving / emitting element fixing block is attached at a predetermined angle. 301 can be fixed.

  In this embodiment, a concave mirror 343 can be used as the waveguide element of the optical waveguide mirror block 304. In this case, since the light beam in the optical multiplexer that propagates by reflecting the reflection surface of the optical waveguide mirror block 304 is the same as the lens array waveguide that propagates the light while condensing the beam, a plane mirror is used. Light loss can be reduced compared to the case. In particular, when the number of wavelengths to be multiplexed / demultiplexed increases and the number of reflections in the optical waveguide mirror block 304 increases, the loss can be greatly reduced as compared with the case of using a plane mirror.

  Further, as in this embodiment, if a light receiving / emitting element fixing block in which a plurality of optical fibers 323 are fixed in the fiber fixing groove is prepared in advance, the light receiving / emitting element fixing block is aligned with the optical main block 301. As a result, the assembly procedure can be reduced because each of the plurality of fibers can be fixed to the optical main block 301 without being individually positioned. Further, when a plurality of optical fibers 323 are fixed to the light receiving / emitting element fixing block, the light receiving / emitting element fixing block has a plurality of grooves having a V-shaped cross section, a U-shaped cross section, or a square cross section for fixing the optical fiber 323. Since this is formed, the light receiving / emitting element fixing block and the optical fiber 323 are aligned only by fitting the optical fiber 323 into the groove, and the assembly procedure can be reduced.

  As the beam branching element block, when a transparent member such as glass is used as the substrate 335 and the beam branching element is pasted on the substrate 335, if a substrate 335 having high flatness is used, a plurality of beam branching elements are formed on this plane. Since the plurality of beam branching elements are mounted with a small angle variation by pressing and fixing, a beam splitting element block with high accuracy can be manufactured. However, in this case, a non-reflective coating is necessary so that reflection loss does not occur on the surface of the substrate 335, and it is necessary to use an expensive member with high optical transparency, which causes an increase in cost. In addition, loss of light due to absorption of the transparent member is inevitable.

  On the other hand, if the substrate 331 having the through-holes 332 is used as the beam branching element block, an expensive optically transparent member is not used, and a non-reflective coating is not required, thereby reducing costs. Further, light loss due to light absorption of the substrate 331 can be avoided.

<Eighth embodiment>
Next, an eighth embodiment of the present invention will be described with reference to the drawings. The present embodiment is an example in which the optical multiplexer / demultiplexer of the present invention and its assembling apparatus are applied to an optical demultiplexer that demultiplexes eight wavelength multiplexed light into light beams of respective wavelengths. This example does not limit the invention. In addition, the member and part which are common in all the drawings are shown with the same code | symbol, and the overlapping description is abbreviate | omitted.

  FIG. 27 is a perspective view of the optical element array in accordance with the eighth embodiment of the present invention viewed from one direction (projection portion side). FIG. 28 is a perspective view of the optical element array as viewed from the other direction (optical element side).

  As shown in FIGS. 27 and 28, the optical element array 410 has a hemispherical (dome-shaped) chuck dome 403, which is a curved projection, formed on one surface (dome forming surface) 402, and the other side. The first to eighth concave mirrors 405a to 405h are arranged in a line on the surface (mirror forming surface) 404, and are a concave mirror array composed of a plate-like substrate 401. Are reflected by the concave mirrors 405a to 405h. However, the chuck dome 403 is molded so that its center coincides with the substantially center of the substrate 401, that is, the position of the center of gravity of the substrate 401. By molding the chuck dome 403 at such a position, when the optical element array 410 is gripped by an assembly apparatus described later, the gripped position and the center of gravity of the optical element array 410 coincide with each other. 410 can be stably held.

  29 and 30 are perspective views of an 8-wave optical multiplexer / demultiplexer using the optical element array 410. FIG. As shown in these drawings, the optical multiplexer / demultiplexer 420 includes an optical main block 421, an input fiber 422, and output fibers 423a to 423h, and first to eighth dielectric multilayer films having different transmission wavelengths. It has a filter array flat plate 425 on which filters 424 a to 424 h are arranged and attached in a line, and an optical element array 410.

  That is, on the surface of the plate-like substrate of the optical main block 421, side wall portions 421a, 421b, and 421c are respectively formed at three substrate end portions, and the side wall portions 421b and 421c have a filter that holds the filter array flat plate 425. Array holding portions 426a and 426b and reflecting surface holding portions 427a and 427b for holding the optical element array 410 are formed, respectively. However, the mirror forming surface 404 of the optical element array 410 is disposed to face a coupling element 429 of the optical main block 421 described later.

  Further, a V-groove 428 is formed linearly along the side wall portion 421a on the surface of the plate-like substrate of the optical main block 421. The first to ninth coupling elements 429a to 429i are arranged along the direction. The input fiber 422 and the output fibers 423a to 423h are respectively installed in V grooves formed at predetermined intervals on the surface of the plate-like substrate of the optical main block 421, and their ports are first to first. Nine coupling elements 429a to 429i are arranged to face each other. The filter array holding portions 426a and 426b are formed so as to hold the filter array flat plate 425 at a predetermined angle. The reflection surface holding portions 427a and 427b are formed so as to hold the optical element array 410 at a predetermined angle. Further, when the side surface of the optical element array 410 is pressed against the holding portions 427a and 427b, the angle around the axis perpendicular to the mirror forming surface 404 is adjusted to be a predetermined angle.

  The operating principle of such an optical multiplexer / demultiplexer 420 will be described with reference to FIG. In order to make this operation principle easy to understand, rays are drawn in this figure. Hereinafter, the demultiplexing operation by the optical multiplexer / demultiplexer 420 will be described. As shown in this figure, the diffused light input from the input fiber 422 is reflected in the direction of the optical element array 410 as a substantially parallel light beam by the first coupling element 429a of the optical main block 421. The light is reflected by the first concave mirror 405a of the array 410 and is incident on the first dielectric multilayer filter 424a. The light in the specific wavelength range that has passed through the first dielectric multilayer filter 424a is collected by the second coupling element 429b and output from the first output fiber 423a. The light beam reflected by the first dielectric multilayer filter 424a is reflected again by the second concave mirror 405b of the optical element array 410 and is incident on the second dielectric multilayer filter 424b.

  The light beam transmitted through the second dielectric multilayer filter 424b is condensed by the third coupling element 429c and output from the second output fiber 423b. The light beam in the specific wavelength region reflected by the second dielectric multilayer filter 424b is reflected again by the third concave mirror 405c of the optical element array 410 and is incident on the third dielectric multilayer filter 424c. Thereafter, the same operation is repeated to demultiplex wavelength multiplexed light. If the input and output are reversed, the wavelength multiplexed light is multiplexed and functions as a multiplexer.

  FIG. 32 is a schematic diagram of an optical multiplexer / demultiplexer assembling apparatus according to the present embodiment. The assembling apparatus 450 includes a gripping mechanism (gripping means) 441 capable of gripping the chuck dome 403 of the optical element array 410, and a position adjusting mechanism (position adjusting means) 442 capable of moving the gripping mechanism 441 in the vertical and horizontal directions. And a telescopic member 443 that is a reaction force generating means for generating a reaction force accompanying the movement of the position adjustment mechanism 442, and an arm 452 that supports the gripping mechanism 441 via a holding member 459. The arm 452 is installed on an XYZ stage 458 that can move in three directions, the X direction, the Y direction, and the Z direction.

  The position adjustment mechanism 442 includes two slide rails 453 and 454 that slide (move) in the Z direction (vertical direction) and the Y direction (horizontal direction), respectively. The gripping mechanism 441 is a vacuum chuck 451 having a pipe at the tip, and the inner diameter of the pipe is smaller than the diameter of the chuck dome 403 of the optical element array 410. Since the pipe has such a shape, the pipe of the vacuum chuck 451 can be brought into close contact with the chuck dome 403 of the optical element array 410, and the optical element array 410 can be easily held (adsorbed).

  The telescopic member 443 is attached between the vacuum chuck 451 and the holding member 459, and is attached between the leaf spring 455 that generates a pressing force downward in the Z direction, and between the holding member 459 and the tip of the arm 452, and in the Y direction. And a coil spring 456 that generates a pressing force in a direction away from the arm 452. A rubber hose 457 connected to a vacuum pump (not shown) is connected to the upper end of the vacuum chuck 451, and the chuck dome 403 of the optical element array 410 is adsorbed (gripped) to the lower end of the vacuum chuck 451. Further, the arm 452 has a shape that extends upward and the upper tip thereof further extends in the lateral direction, and the tip of the vacuum chuck 451 is attached to the tip of the arm 452 downward, so that the arm 452 is attracted to the vacuum chuck 451. The optical element array 410 can be arbitrarily moved in the X direction, the Y direction, and the Z direction.

A procedure for aligning and attaching (assembling) the optical element array 410 to the optical main block 421 using the assembling apparatus 450 will be described with reference to FIGS. 33, 34, and 35.
First, the optical element array 410 is mounted on the reflection surface holding portion 427 such that the reflection surface holding portion 427 of the optical main block 421 is fixed upward and the mirror formation surface 404 is downward.

  The XYZ stage 458 of the assembling apparatus 450 is moved in the X and Y directions so that the vacuum chuck 451 is arranged above the chuck dome 403 of the optical element array 410 mounted on the optical main block 421. Thereafter, the Z direction of the stage 458 is adjusted, the vacuum chuck 451 is lowered, and the tip of the vacuum chuck 451 is brought into contact with the chuck dome 403 as shown in FIG.

  As the arm 452 descends, the vacuum chuck 451 comes into contact with the chuck dome 403 and is then pressed against the chuck dome 403 by the pressing force of the leaf spring 455. If the vacuum pump connected to the vacuum chuck 451 is operated in a state where the vacuum chuck 451 is pressed against the chuck dome 403, a portion to be sucked by the vacuum chuck 451 is formed in a dome shape. Since it has a pipe shape, even if the reflecting surface holding portion 427 of the optical main block 421 does not face exactly upward, the reflecting surface holding portion of the optical main block 421 is adjusted without adjusting the angle of the vacuum chuck 451. The optical element array 410 is fixed to the vacuum chuck 451 while the parallelism of the mirror forming surface 404 of 427 and the optical element array 410 is maintained.

  By slightly moving the optical element array 410 fixed to the vacuum chuck 451 in the Z direction of the XYZ stage 458, a slight gap is generated between the optical main block 421 and the optical element array 410 as shown in FIG. Avoid frictional forces on both.

  In this state, by moving the XYZ stage 458 in the Y direction, the vacuum chuck 451 moves in the Y-axis direction, and the optical element array 410 abuts against the abutment surface 431 of the optical main block 421 as shown in FIG. be able to. Since the vacuum chuck 451 has a pipe shape, the optical element array 410 pressed against the abutting surface 431 of the optical main block 421 has the vacuum chuck 451 pivoted so that the side surface 406 has an angle along the abutting surface 431. And the angle around the Z axis is adjusted to a predetermined angle.

  In this way, by forming the chuck dome 403 in the optical element array 410 and using the assembly device 450 having the pipe-shaped vacuum chuck 451, the assembly device 450 is not provided with a rotation mechanism of θx, θy, and θz. All angles of the optical element array 410 can be adjusted.

  In the optical element array 410 whose angle has been adjusted by the above-described operation, the X position and the Y position are adjusted so that optimum optical coupling can be obtained by moving the X and Y directions of the XYZ stage 458. Thereafter, the Z direction of the XYZ stage 458 is moved downward to bring the optical element array 410 and the reflection surface holding unit 427 into contact with each other. After contacting the optical element array 410 and the reflection surface holding portion 427, after confirming again whether or not the optimum optical coupling is obtained, fine adjustment in the X and Y directions is performed as necessary. The multiplexer / demultiplexer is completed by fixing the main block 421 by a technique such as adhesion.

  With such an assembling apparatus 450 and an assembling method, the assembling apparatus 450 does not require a complicated rotating mechanism such as a three-axis rotating stage, and the assembling apparatus itself has a simple structure, so that the manufacturing cost can be reduced. Since all the rotating shafts are assembled without having to be adjusted to a predetermined angle, the assembling procedure is simplified, and the assembling time and assembling work can be reduced.

  The optical element of the optical element array 410 is not limited to the concave mirror 405 that reflects the light beam as described above, and may be, for example, a plane mirror, a dielectric multilayer filter, a diffraction grating, a lens, or the like. The same effect as 410 is produced.

  In the above description, the optical element array 410 in which the chuck dome 403 is formed on the surface 402 facing the mirror forming surface 404 has been described. However, the chuck dome may be formed so as not to overlap the optical element. The same effects as the optical element array 410 are exhibited.

<Ninth embodiment>
FIG. 36 is a diagram for explaining an optical multiplexer / demultiplexer according to the ninth embodiment of the present invention, and shows a state when the waveguide element block of the optical multiplexer / demultiplexer is inclined.

  The optical multiplexer / demultiplexer according to the present embodiment includes a waveguide element block 501 in which waveguide elements 502 to 505 made of concave mirrors are formed, and a beam splitter block 506 in which beam splitters 507 to 510 are formed. is doing. The beam branching element block 506 is held by block holding structures 511 and 512 formed in the coupling element block, and is disposed opposite to the waveguide element block 501. The coupling element block and the waveguide element block 501 are separated. Therefore, unlike the conventional optical multiplexer / demultiplexer shown in FIG. 44, the block holding structures 511 and 512 are separated from the waveguide element block 501.

  By adopting a configuration in which the block holding structures 511 and 512 are separated from the waveguide element block 501, even if the angle of the waveguide element block 501 is shifted, the angle of the beam splitter block 506 does not change, and the beam splitters 507 to 510 do not change. There is no effect on the angle deviation. Therefore, even if the propagating light beam enters and reflects the light beam splitting elements 507 to 510, the angular deviation of the propagating optical axis is not amplified, and an extremely large deviation does not occur in the incident position of the propagating light beam to the waveguide elements 502 to 505. .

  On the other hand, since the waveguide elements 502 to 505 have a condensing power, the angular deviation can be corrected each time the propagating light beam is reflected on the waveguide elements 502 to 505. Therefore, as in the conventional optical multiplexer / demultiplexer shown in FIG. 44, the angle deviation of the propagating light beam can be suppressed as compared with the case where the holding structure is integrally formed with the waveguide element block.

  For example, the mirror curvature radius of the waveguide elements 502 to 505 is about 5 mm, the distance between the waveguide elements 502 to 505 and the beam branching elements 507 to 510 is also about 5 mm, and the incident / reflection angle of the propagating light beam to the waveguide elements 502 to 505 Let us consider a case where the design value is 11.31 °. When the waveguide element block 501 is inclined by 5 °, the incident / reflection angle of the propagating light beam to the waveguide elements 502 to 505 is conventionally about 2 ° to 17 °, whereas in this embodiment, it is 10 ° to It is about 14 °, and the error from the design value of the incident / reflection angle is small. Therefore, according to the present embodiment, it is possible to suppress the influence of the angle shift of the waveguide element block 501 on the optical axis shift, that is, the increase in excess loss.

  The present invention has been described with reference to the case where the present invention is applied to an optical multiplexer / demultiplexer. However, the present invention uses a beam splitter having a function of transmitting a specific amount of light among incident rays and reflecting the remaining amount of light. Even when the present invention is applied to such a device, that is, an optical coupler or an optical distributor, it is possible to provide substantially the same effect as that of the optical multiplexer / demultiplexer.

Claims (31)

A plurality of light emitting and receiving elements that perform at least one of light reception and light emission;
A plurality of beam branching elements that transmit a part of the incident light beam and reflect the rest,
A plurality of coupling elements arranged on an optical path connecting the corresponding light emitting / receiving element and the beam branching element;
Including a waveguide element disposed on an optical path until a reflected light beam from a certain light beam branching element enters another light beam branching element;
An optical multiplexer / demultiplexer, wherein all of the coupling elements are integrally formed in a single coupling element block. The optical multiplexer / demultiplexer according to claim 1,
The optical multiplexer / demultiplexer, wherein the coupling element is a concave mirror made of a spherical surface. The optical multiplexer / demultiplexer according to claim 1,
The optical multiplexer / demultiplexer, wherein the waveguide element is a concave mirror. The optical multiplexer / demultiplexer according to claim 2,
An optical multiplexer / demultiplexer, wherein an incident angle of light incident on the coupling element is smaller than 45 °. The optical multiplexer / demultiplexer according to claim 1,
An optical multiplexer / demultiplexer characterized in that the optical axes of light rays received and emitted by each of the light receiving and emitting elements are all arranged on a single plane. The optical multiplexer / demultiplexer according to claim 1,
The optical coupling / demultiplexing device, wherein the coupling element block includes a fixing structure for holding the light emitting / receiving element. The optical multiplexer / demultiplexer according to claim 6,
The optical multiplexer / demultiplexer, wherein the fixed structure is one of a V groove and a U groove. The optical multiplexer / demultiplexer according to claim 1,
The coupling element block includes a holding structure that holds at least one of the light beam branching element and the waveguide element. The optical multiplexer / demultiplexer according to claim 1,
An optical multiplexer / demultiplexer, wherein all of the waveguide elements are arranged in a single waveguide element block. The optical multiplexer / demultiplexer according to claim 1,
The optical multiplexer / demultiplexer, wherein the waveguide element and the beam splitter are arranged via a space. The optical multiplexer / demultiplexer according to claim 9,
The coupling element block includes a holding structure for holding the beam splitter.
An optical multiplexer / demultiplexer characterized in that the coupling element block and the waveguide element block are separated. The optical multiplexer / demultiplexer according to claim 6,
The light receiving / emitting element is characterized in that a straight line formed by connecting the light receiving and emitting points of adjacent light receiving and emitting elements and an optical axis of a light beam received and emitted by the light receiving and emitting element are orthogonal to each other. Waver. The optical multiplexer / demultiplexer according to claim 6,
The coupling element block is:
A plate-like substrate in which one end and the other end are parallel;
A first V-groove formed linearly at one end of the substrate on the surface of the substrate;
Each of the coupling elements is arranged on one inclined surface constituting the first V-groove,
The fixing structure is linear on the surface of the substrate so as to be perpendicular to the first V-groove and to face each of the coupling elements so as to be connected to the first V-groove from the other end of the substrate. An optical multiplexer / demultiplexer comprising a plurality of V-grooves. The optical multiplexer / demultiplexer according to claim 13,
The structure further includes a structure that has a U-shaped planar shape formed by wall surfaces on three sides, and is disposed above the first V-groove so that the side on which the wall surface is not formed faces the plurality of V-grooves. ,
The structure is
A light-branching element holding structure including a shelf in which positions corresponding to the coupling elements arranged in the first V-groove are cut out,
A waveguide element holding structure comprising a protrusion formed above the beam branching element holding structure,
The light beam branching elements are respectively arranged in the notched portions of the shelves constituting the light beam branching element holding structure,
An optical multiplexer / demultiplexer characterized in that both ends of the waveguide element are held by protrusions constituting the waveguide element holding structure. The optical multiplexer / demultiplexer according to claim 13,
A light-branching element holding structure comprising a plurality of planar comb-like wall portions formed on one end portion of the substrate and the inclined surface of the first V-groove and partitioning each of the coupling elements;
The optical branching filter is disposed on the upper surface of a wall portion constituting the beam splitting element holding structure. The optical multiplexer / demultiplexer according to claim 15,
A lateral U-shaped structure formed so as to straddle both longitudinal ends of the first V-groove;
The optical multiplexer / demultiplexer, wherein the waveguide element is disposed on a lower surface of a ceiling portion of the structure. The optical multiplexer / demultiplexer according to claim 13,
Further comprising a frame in which the beam branching elements are arranged and arranged;
The coupling element block is:
A light-branching element holding structure comprising a pair of protrusions formed on two side end portions sandwiching one end portion and the other end portion of the substrate, respectively, and the surface facing the coupling element is a flat inclined surface;
A pair of two side end portions of the substrate that are formed at positions closer to the other end portion of the substrate than the beam branching element holding structure, and whose surfaces facing the coupling element are flat inclined surfaces. And further comprising a waveguide element holding structure consisting of protrusions,
Both ends of the frame on which the beam branching element is arranged are held in contact with the inclined surfaces of the protrusions constituting the beam branching element holding structure,
An optical multiplexer / demultiplexer characterized in that both ends of the waveguide element are held in contact with inclined surfaces of protrusions constituting the waveguide element holding structure. The optical multiplexer / demultiplexer according to claim 13,
Further comprising a frame in which the beam branching elements are arranged and arranged;
The waveguide element is longer in the longitudinal direction than the frame,
The coupling element block is:
A side wall formed on one end of the substrate and two side ends sandwiching the one end and the other end;
A pair of side walls formed on the two side wall portions of the substrate are cut out from the vicinity of the center of the one end portion and the other end portion of the substrate to the other end portion, and the surfaces facing the coupling element are flat. A light-branching element holding structure comprising an inclined surface of
The side walls formed on the two side wall portions of the substrate are further cut out from a portion closer to the other end portion of the substrate than the inclined surface of the beam branching element holding structure to the other end portion. A waveguide element holding structure comprising a pair of inclined surfaces with flat back surfaces;
Both ends of the frame on which the beam branching element is arranged are held in contact with the inclined surface of the beam branching element holding structure,
An optical multiplexer / demultiplexer, wherein both ends of the waveguide element are held in contact with inclined surfaces of the waveguide element holding structure. The optical multiplexer / demultiplexer according to claim 1,
A light receiving and emitting element fixing block having a light receiving and emitting element fixing structure that positions each of the light emitting and receiving elements in parallel with a constant interval and positions each end face of the light receiving and emitting elements on the same plane;
A light-branching element block that arranges each of the light-branching elements on the same plane at the same regular intervals as the light-receiving / emitting elements;
A waveguide element block in which each of the waveguide elements is arranged on the same plane at the same regular intervals as the light emitting and receiving elements;
The light receiving / emitting element fixing block, the coupling element block, the light beam branching element block, and the waveguide element block are arranged through a space, and the coupling element block and the waveguide element block are opposed to each other in parallel. An optical main block disposed in parallel between the coupling element block and the waveguide element block; and
The coupling element block arranges each of the coupling elements on the same plane at the same regular intervals as the light receiving and emitting elements,
The coupling element reflects light from the light emitting / receiving element into parallel light and reflects light to the light emitting / receiving element to collect light.
The waveguide element block is positioned such that light rays from the coupling element are reflected by a coupling element adjacent to the coupling element;
The optical multiplexer / demultiplexer, wherein the beam splitter block is positioned so that the beam splitter is disposed on an optical path between the coupling element and the waveguide element. The optical multiplexer / demultiplexer according to claim 19,
At least one of the coupling elements is a concave mirror made of a spherical surface having a radius of about twice the distance from the light emitting / receiving element to the coupling element. The optical multiplexer / demultiplexer according to claim 19,
At least one of the coupling elements is a concave mirror made of a spherical surface having a radius substantially equal to the distance from the light emitting / receiving element to the coupling element. The optical multiplexer / demultiplexer according to claim 19,
At least one of the coupling elements is a plane mirror having a plane perpendicular to the optical axis of the light emitting / receiving element. The optical multiplexer / demultiplexer according to claim 19,
The optical multiplexer / demultiplexer, wherein the waveguide element is a concave mirror. The optical multiplexer / demultiplexer according to claim 19,
The light emitting / receiving element fixing block includes a flange having a surface perpendicular to the optical axis of the light emitting / receiving element,
The optical multiplexer / demultiplexer, wherein the optical main block includes a light receiving / emitting element fixing surface that contacts the surface of the flange and fixes the light receiving / emitting element fixing block. The optical multiplexer / demultiplexer according to claim 19,
The light emitting / receiving element is an optical fiber,
The light receiving / emitting element fixing block includes, as the light receiving / emitting element fixing structure, a plurality of any one of a V groove, a U groove and a square cross section groove for fixing the optical fiber. The optical multiplexer / demultiplexer according to claim 19,
The beam splitter block is:
A plate-like member;
Provided with a plurality of through holes provided in the plate member at regular intervals,
The optical multiplexer / demultiplexer, wherein the beam splitter is disposed so as to close the through hole. The optical multiplexer / demultiplexer according to claim 19,
The beam splitter block is:
An optically transparent plate-like member;
A non-reflective coating layer formed on one surface of the plate-like member,
An optical multiplexer / demultiplexer, wherein the beam branching elements are arranged at regular intervals on the other surface of the plate-like member. The optical multiplexer / demultiplexer according to claim 9,
The optical multiplexer / demultiplexer, wherein the waveguide element block further includes a protrusion having a curved surface on a surface opposite to a surface on which the waveguide elements are arranged. The optical multiplexer / demultiplexer according to claim 28,
The optical multiplexer / demultiplexer, wherein the protrusion is formed at the center of the waveguide element block. A gripping means capable of gripping a protrusion formed of a curved surface formed in a waveguide element block in which the waveguide elements are arranged;
Position adjusting means capable of moving the gripping means vertically and horizontally;
An optical multiplexer / demultiplexer assembling apparatus comprising: a reaction force generating unit that generates a reaction force in accordance with the movement of the gripping unit. In the assembly apparatus of the optical multiplexer / demultiplexer of Claim 30,
An assembly apparatus for an optical multiplexer / demultiplexer, wherein the gripping means is a vacuum chuck having a pipe having an inner diameter smaller than the diameter of the projection of the waveguide element block at the tip.

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