JPWO2006098370A1 - DELAY CIRCUIT, MICROCHIP HAVING ADJUSTING MECHANISM FOR EFFECTIVE PASSING TIME OF PATH, AND METHOD FOR MANUFACTURING THE SAME - Google Patents

Abstract

The present invention provides a new delay that can adjust the effective time required for passing through the delay device within a desired range by performing a partial change operation on the flow path configuration that has been prepared in advance. An apparatus structure and a manufacturing method thereof are provided. For example, the obstruction structure (202) that can prevent the progress of the liquid on the streamline along the side wall surface that is the shortest path from the side wall surface that is the shortest path to the internal region of the flow path extension (201). To the streamline where the liquid travels along both the side wall surface which is the shortest path and the side wall surface of the obstacle structure, so that the tip of the downstream part of the flow path is changed from the end of the upstream part of the flow path. The flow line that reaches the liquid is extended and the passage time is extended (delay amount). The adjustment of the extension (delay amount) of the passage time can be set in a wide range by selecting the amount of overhanging the obstacle structure and the number of obstacle structures to be provided.

Description

  The present invention relates to a microchip having a flow path for a liquid sample, which is used for biochemical inspection, and a method for producing the microchip, and in particular, a liquid sample in which solute molecules to be subjected to biochemical inspection are dissolved. Passing through a channel provided on the microchip, a microchip having a mechanism capable of adjusting an effective time required for passing through a predetermined region of the channel within a desired range, and a predetermined region of the channel. The present invention relates to a method for adjusting an effective time required for passage.

  As a biochemical test, for example, when analyzing solute molecules contained in a small amount of collected liquid sample, it is essential to use a small-capacity test container that is suitable for handling a small amount of sample. It becomes. For this purpose, a “microchip” composed of a micro-sized liquid reservoir and a flow path is being used as a micro-capacity inspection container. A “microchip” has a concave portion of a predetermined pattern that serves as a liquid reservoir and a flow path on a substrate surface, and a lid portion that covers the substrate surface is provided so that the concave portion on the substrate surface is connected to the lower surface of the flow path and both side walls. The lower surface of the lid that covers the opening constitutes the upper surface of the flow path, so that, for example, a “flow path space” having a rectangular cross-sectional shape surrounded by four surfaces on the top and bottom and both sides is formed. Is done.

  In biochemical inspection using a “microchip”, various solute molecules dissolved in a solvent are transported to a desired site via a flow path in the “microchip”, and various kinds of Subject to biochemical examination. At that time, various transport means are used as means for transporting the target solute molecule to a desired site in the “microchip” via the channel.

  For example, when a solute molecule to be transported is movable by an electric field formed in a solution, a potential gradient is formed along a flow path used for transportation, and this potential gradient (electric field) is There is a method of transporting a target solute molecule to a desired site by utilizing and moving the solute molecule in a solvent filled in the flow path. By using a transport method that applies this electrophoresis (or electroosmotic flow), it is housed in a separate reservoir that is connected to the reaction cell that extends the DNA strand via an independent channel. A method of introducing (transporting) each dNTP in each of the four types of dNTP (nucleotide) solutions into the reaction cell at a desired time timing by controlling the timing of electric field application to each flow path has been proposed ( Patent Document 1: Japanese Patent Laid-Open No. 2001-5637).

  Also proposed is a method of making a microvalve / micropump on a substrate using the liquid transport principle of a tubing pump and transporting the liquid in a flow path formed by integrating the microvalve / micropump. (Patent Document 2: Japanese Patent Application Laid-Open No. 2004-291187). This micro pump uses an electrostatically driven micro flanger-type pressurizing / depressurizing mechanism to open and close the microvalves and control the opening and closing timings of the continuously arranged microvalves. Thus, a liquid transport mechanism (a minute metering pump) equivalent to a tubing pump is configured. By adjusting the applied voltage used to drive the micro-flange type pressurizing / depressurizing mechanism, the application cycle, etc., the amount of liquid transported per unit time (flow velocity) is adjusted within a certain range by the micropump. It is possible to do.

  In addition, since the flow path in the “microchip” has a minute cross-sectional area, utilizing the capillary phenomenon due to the wettability of the inner wall surface of the flow path and the liquid sample, and the surface tension of the liquid sample itself, A method of transporting a liquid sample through the flow path can also be used. At that time, the capillary phenomenon can change the wettability of the solvent on the inner wall surface of a partial region of the channel by utilizing the feature that the function is lost when the inner wall surface of the channel and the liquid sample become poor in wettability. By adopting a structure, in a state where the wettability of the solvent is inferior, transport of the solution by capillary action does not occur beyond the region, while in a state where the solvent wettability is excellent, the capillary beyond the region is used. A “microchip” provided with a “distribution control mechanism” in which solution transportation by a phenomenon proceeds has been proposed (Patent Document 3: Japanese Patent Application Laid-Open No. 2003-43052). For example, as a region where the inner wall surface is formed of a material with poor solvent wettability in the flow path, when the solvent is water, the degree of hydrophobicity changes depending on the temperature. By providing a region to be formed and adjusting the temperature of the region to change the degree of hydrophobicity, a state in which solution transport occurs by capillary action beyond the region (circulation) and a state in which it does not occur (stop) Selection becomes possible. Specifically, when the temperature of such a region is changed by using a “temperature control device”, for example, a Peltier element, those that show high hydrophobicity in the vicinity of room temperature generally rise in temperature and The degree of hydrophobicity is reduced, and the solution can be transported by capillary action beyond the “hydrophobic region”.

  By adjusting the flow rate of the liquid flowing through the flow path using the microvalve / micropump which is manufactured by being integrated on the substrate, the time required for the liquid to pass through a predetermined region in the flow path is reduced. It is possible to control. In addition, by providing a “hydrophobic region” in a part of the flow path and adjusting the temperature, the degree of hydrophobicity of the inner wall surface of the “hydrophobic region” is changed, and whether or not the solution can be transported by capillary action By utilizing a “switch mechanism” that selects “a”, it is possible to control a “waiting time” until the liquid can pass through a predetermined region in the flow path. However, in these means, an adjustment mechanism such as a “microvalve / micropump” or a “temperature adjustment device” is integrated with the flow path in the “microchip”, and at the same time, the “microvalve / micropump” It is necessary to provide an “external circuit section for operation control” for controlling the operation of an adjusting mechanism such as “or a temperature adjusting device”.

In particular, since a configuration in which an adjustment mechanism such as a “microvalve / micropump” or “temperature control device” is integrated with the flow path in the “microchip” is adopted, the liquid reservoir of the microchip itself, the flow path configuration In addition to the above manufacturing, the process of integrating these built-in adjustment mechanisms is a factor that significantly increases the manufacturing cost of each “microchip”. In addition, since the “microvalve / micropump” and the “hydrophobic region” are integrated into a part of the flow path, the liquid is stored in the microchip itself. Restrictions are added.
JP 2001-5637 A JP 2004-291187 A JP 2003-43052 A

  On the other hand, in “in-situ” inspection “microchip” carried out at home or outdoors, “operation control” controls the operation of the above-mentioned adjustment mechanism such as “microvalve / micropump” or “temperature controller”. Therefore, a configuration that does not require an external device such as an “external circuit unit” is desired. At the same time, disposable “in-situ” inspection “microchips” are required to have a structure that can be manufactured at low cost. Currently, the items measured in the “in-situ” test using the “microchip” are a small number of items such as urine pH and blood glucose level. However, in the future, many inspection items are being examined as inspection items for which application of “in-situ” inspection is desired. Among the items that are under consideration for “in-situ” inspection using a “microchip”, a flow path in the “microchip” is used when performing a reaction used to detect a target substance contained in a sample. There are many items that need to be adjusted in order to adjust the timing at which the liquid sample reaches the reaction field (site) by adjusting the effective traveling speed of the liquid sample transported through. For example, as described above, a “microchip” configuration that requires an external device, or a “microvalve / micropump” having a high production cost is integrated in a “microchip”. The “chip” configuration is a major obstacle to widespread use as a “microchip” for disposable “in-situ” inspection.

  Furthermore, generally, the timing at which the liquid sample should reach the reaction field (site) used for detection differs for each inspection item. In other words, when the “in-situ” inspection method using “microchip” is applied to many items to be inspected, many types of “micro-chips” that are suitable for each inspection item and adjusted to the arrival timing of the liquid sample. It is necessary to prepare a “chip”. Individually designing and manufacturing “microchips” in which the arrival timing of the liquid sample is adjusted for each of various types of inspection items also contributes to an increase in the manufacturing cost of “microchips”.

  That is, in the “microchip” for “in situ” inspection, “microvalve / micropump” is used as a “microchip” as means for adjusting the timing at which the liquid sample should reach the reaction field (site) used for detection. A structure requiring an external device such as an “integrated circuit” or an “external circuit section for operation control” for controlling the operation of the adjusting mechanism such as the “microvalve / micropump” and the “temperature adjusting device”. Instead, it is desirable to use a technique for adjusting the arrival timing of the liquid sample by changing the flow path configuration of the “microchip” itself. For example, by incorporating a “delay device” that can be used to adjust the arrival timing of the liquid sample in the flow path configuration of the “microchip” itself, the effective time required for passing through a predetermined region of the flow path can be reduced. It is desirable to use a “microchip” having a “delay time adjustment function” that can be adjusted within a desired range. Specifically, in the flow path configuration of the “microchip” itself, the flow path configuration of the “delay device” portion is changed after adopting a common configuration for the flow path except for the “delay device”. "Microchip" with built-in versatile "delay device" that can achieve a "delay time adjustment function" that can adjust the effective time required to pass through a predetermined area of the flow path within a desired range Use of is desirable. In other words, a “variable flow path portion” including a “flow path common portion” that adopts a basic flow path configuration having versatility that can handle a plurality of inspection items, and a “delay device” in the flow path. In the “microchip” used in combination with the “delay device”, the “delay device” can be changed by performing a partial change operation on the pre-manufactured flow path configuration after the fabrication. A proposal of a new “delay device” having a “delay time adjustment function” capable of adjusting an effective required time required for passing through the “variable flow path portion” in a desired range is desired.

  The present invention solves the above-mentioned problems, and an object of the present invention is to be integrally formed with other “channel common parts” in a form of being inserted into the channels constituting the “microchip”. The "delay device" is capable of passing through the "variable flow channel portion" including the "delay device" by applying a partial change operation to the pre-fabricated flow channel configuration after the fabrication. It is another object of the present invention to provide a new “delay device” having a “delay time adjustment function” capable of adjusting an effective required time required for a desired range within a desired range, and a manufacturing method thereof.

  The present inventor has proceeded with studies to solve the above problems. At that time, the flow path constituting the “microchip” has a minute cross-sectional area, and the capillary phenomenon due to the wettability of the inner wall surface of the flow path and the liquid sample and the surface tension of the liquid sample itself is used. Thus, when adopting a method of transporting a liquid sample through the flow path, the “length” of the flow path through which the liquid sample is transported along with the capillary phenomenon, or “ It has been found that when the “advance speed” is changed, the time required for the liquid sample to pass through the “channel portion (region)” can be changed within a “certain range”. In addition, the “length” of the flow channel through which the liquid sample is transported with capillary action or the “advance speed” of the liquid sample due to capillary action is mainly based on the mechanism described below. It has been found that by changing the wettability between the wall surface and the liquid sample and the “streamline” along the inner wall surface, it can be changed within a “certain range”.

  First, the surface tension of a liquid sample itself having a predetermined composition generally depends on the surrounding gas phase atmosphere, its pressure and temperature, but if the surrounding gas phase atmosphere, its pressure and temperature conditions are maintained under the same conditions, Depending on only the curvature of the gas / liquid interface, an equivalent surface tension can be obtained with high reproducibility. On the other hand, depending on the wettability of the inner wall surface of the channel and the liquid sample, when the contact boundary between the liquid sample and the inner wall surface of the channel advances, the curvature of the gas / liquid interface formed in the channel changes. The change in the surface tension accompanying the change in curvature at the gas / liquid interface determines the “advance speed” of the liquid sample due to the capillary phenomenon. When the wettability between the inner wall surface of the flow channel and the liquid sample is reduced, the “velocity” at which the contact boundary between the liquid sample and the inner wall surface of the flow channel advances is reduced. The “speed” also decreases correspondingly. Conversely, increasing the wettability of the inner wall surface of the flow channel and the liquid sample increases the “speed” at which the contact boundary between the liquid sample and the inner wall surface of the flow channel advances, so the liquid sample due to this capillary phenomenon The "progression speed" of the correspondingly increases.

  On the other hand, the “streamline” where the “progress” of the liquid sample due to capillary action advances is caused by the contact boundary between the liquid sample and the inner wall surface of the flow path, which is caused by the wettability of the inner wall surface and the liquid sample. It will be along the way. In other words, if the effective "total length" of the "streamline" along the path along which the contact boundary between the liquid sample and the inner wall surface of the flow path advances, the "advance speed" of the liquid sample due to capillary action Even if the liquid sample itself does not change, the time required for the liquid sample to pass through the “flow channel portion (region)” can be lengthened. In other words, the path along which the contact boundary between the liquid sample and the inner wall surface of the flow path advances depends on the wettability of the inner wall surface of the flow path and the liquid sample. Along the “inner wall surface of the channel”. If the “total length” of the “inner wall surface of the channel” having excellent wettability with the liquid sample is extended, the effective “total length” of the “streamline” can be extended.

Based on the above knowledge, the present inventor relates to the “flow path portion (region)” constituting the “delay device”.
By increasing or decreasing the wettability between the inner wall surface of the flow channel and the liquid sample, the “advance speed” of the liquid sample due to the capillary phenomenon progresses along the inner wall surface of the “channel portion (region)”. Increase or decrease, or
"Streamline" along the inner wall surface, determined by the wettability of the inner wall surface of the channel and the liquid sample, is increased or decreased by partially adding the inner wall surface,
By applying these two means, we found that this functioned as a “delay device” that can adjust the time required for the liquid sample to pass through the “channel part (region)” within a “certain range”. The invention has been completed.

That is, the delay device according to the first aspect of the present invention is
When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel extension provided in the middle of the channel;
It has a configuration formed by forming an obstacle structure that occupies a part of the flow path expansion portion,
When the liquid surface end of the liquid travels from the upstream portion of the flow path to the downstream portion of the flow path via the flow path extension, the obstruction structure prevents the liquid surface end from proceeding, and the flow path Along with the extension of the streamline of the liquid liquid surface edge passing through the expansion part,
The delay device is characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved.

At that time, the flow channel expanding portion has a flow channel width expanded from the width of the flow channel,
The length of the shortest path connecting the outlet to the flow channel extension portion in the upstream portion of the flow channel and the inlet from the flow channel extension portion to the downstream portion of the flow channel is selected to be equal to the expanded flow channel width. It can be set as a structure.

In the delay device according to the first aspect of the present invention, for example,
A substrate made of a plastic material is selected as the substrate that forms the flow channel upstream portion and the flow channel downstream portion, and the flow channel expansion portion provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion. ,
The obstacle structure added to the flow path extension is:
The plastic material constituting the substrate is deformed to select a mode in which a shape of a wall-like structure protruding from the side wall surface serving as the shortest path to the internal region is formed in the flow channel expansion portion. Is possible.

Alternatively, the obstacle structure added to the flow path extension is:
At least the upper surface is an obstacle having a surface made of a lyophobic material with poor wettability to the liquid,
A mode is selected in which the obstruction having a planar shape protruding from the side wall surface serving as the shortest path to the internal region is added to the flow channel expansion portion on the bottom surface of the flow channel expansion portion. It is also possible.

Furthermore, the obstacle structure added to the flow path extension is:
From the side wall surface serving as the shortest path to the internal region in the flow path expansion portion, a plurality of these are formed,
The flow path is changed from the outlet from the upstream portion of the flow path by changing the flow path along which the liquid travels along both the side wall surface serving as the shortest path and the side wall surfaces of the plurality of obstacle structures. It is also possible to select an embodiment in which the stream line of the liquid that reaches the inlet to the downstream part is extended.

The delay device according to the second aspect of the present invention is:
When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel upstream portion formed on the substrate, and a channel downstream portion;
An upstream extension channel communicating with the upstream portion of the channel, and a downstream extension channel communicating with the downstream portion of the channel;
Between the upstream extension flow path and the downstream extension flow path, it has a configuration formed by a communication flow path added to the arrangement for connecting the two extension flow paths,
When the liquid surface end advances from the upstream portion of the flow path to the downstream portion of the flow path via the communication flow path, the position where the communication flow path is added is adjusted, and the upstream extension flow path is connected. As the streamline is extended by the total of the channel length via the channel and the downstream extension channel,
The delay device is characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved.

In the delay device according to the second aspect of the present invention, for example,
Between the upstream extension channel and the downstream extension channel, the connection channel is added to an arrangement for connecting the extension channels, and the communication channel forms a new groove structure on the substrate surface. The aspect currently produced by can be selected.

Or
The communication channel is added between the upstream extension channel and the downstream extension channel to connect the extension channels, and at least the side wall surface has wettability to the liquid. It is also possible to select an embodiment which is a surface made of a solvophilic material.

The delay device according to the third aspect of the present invention is:
When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
Based on the shortest distance connecting the end of the upstream portion of the flow path and the tip of the downstream portion of the flow path,
The total length of the flow channel is selected to be longer than the shortest distance, and the detour flow channel is arranged so that the end of the flow channel upstream portion and the tip of the flow channel downstream portion communicate with each other. It has a configuration formed by adding the bypass channel,
When the liquid surface end of the liquid travels from the upstream portion of the flow path to the downstream portion of the flow path via the bypass flow path, the flow of the liquid proceeds by changing the total length of the flow path of the bypass flow path portion. Try to extend the line,
The delay device is characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved.

In the delay device according to the third aspect of the present invention, for example,
The substrate made of a plastic material is selected as the substrate that forms the bypass channel provided in the portion connecting the channel upstream portion and the channel downstream portion, and the channel upstream portion and the channel downstream portion,
The detour channel, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated,
A mode in which the plastic material constituting the substrate is deformed and a groove structure is newly formed on the substrate surface can be selected.

The delay device according to the fourth aspect of the present invention is:
When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel upstream portion formed on the substrate, and a channel downstream portion;
It has a configuration comprising a connection flow path for a flow rate adjustment region that communicates a flow path upstream portion and a flow path downstream portion,
As the surface of the connection flow path for the flow rate adjustment region,
By selecting a surface made of a solvophilic material that exhibits wettability to liquid, or a surface made of a lyophobic material that has poor wettability to liquid,
By increasing or decreasing the speed at which the liquid travels in the connection channel by capillary action,
The delay device is characterized in that adjustment of a delay amount of time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved.

that time,
Selected as the surface of the connecting channel,
The surface made of a lyophilic material that exhibits wettability to the liquid, or the surface made of a lyophobic material that has poor wettability to the liquid,
Select a form made of a thin film made of a solvophilic material or a thin film made of a lyophobic material that covers the surface of the connection flow channel in the form of holding the liquid in the recess formed on the substrate. can do.

The delay device according to the fourth aspect of the present invention is:
When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel upstream portion formed on the substrate, and a channel downstream portion;
An upstream surface formed of a surface made of a solvophilic material connected to the upstream portion of the flow path, formed on a partial region of the substrate surface, having a surface made of a lyophobic material having poor wettability to liquid A part extension flow path, and a downstream part extension flow path formed on a surface made of a solvophilic material, in communication with the downstream portion of the flow path,
A configuration formed by a communication channel formed on a surface made of a solvophilic material, which is added to an arrangement for connecting the two extension channels between the upstream extension channel and the downstream extension channel. Have
When the liquid surface end advances from the upstream portion of the flow path to the downstream portion of the flow path via the communication flow path, the position where the communication flow path is added is adjusted, and the upstream extension flow path is connected. As the streamline is extended by the total of the channel length via the channel and the downstream extension channel,
The delay device is characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved.

In any of the delay devices according to the first to fifth embodiments of the present invention described above,
The flow channel upstream portion and the flow channel downstream portion having a predetermined flow channel width are:
A liquid is held in a recess formed on the substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid,
The liquid preferably travels in the upstream portion of the flow channel and in the downstream portion of the flow channel by capillary action.

In the delay device according to the first aspect of the present invention,
The flow path extension is
Preferably, the liquid is held in a recess formed on the substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid. .

In the delay device according to the second aspect of the present invention,
An upstream extension channel connected to the end of the upstream portion of the channel, and a downstream extension channel connected to the tip of the downstream portion of the channel,
Preferably, the liquid is held in a recess formed on the substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid. .

In addition, in any of the delay devices according to the first to fifth embodiments of the present invention described above,
For the flow path in the form of holding the liquid in the recess formed on the substrate, constituting the delay device,
Providing a lid to be joined to the upper surface of the substrate;
It is preferable that the liquid traveling in the flow path is in contact with the recess formed on the substrate and the lower surface of the lid.

The present invention also provides a microchip invention that uses the delay device according to the present invention described above, that is, the microchip according to the present invention includes:
Having a flow path in the form of holding the liquid in the recess formed on the substrate;
Providing a lid covering the substrate surface;
The concave portion of the substrate surface forms the lower surface and both side wall surfaces of the flow channel, and the lower surface of the lid portion covering the opening portion configures the upper surface of the flow channel, thereby forming a flow channel space.
A microchip that uses transport means in which the liquid travels in the flow path space by capillary action,
As one of the elements constituting the flow path in the microchip, at least one of delay devices adopting a structure in which the upper surface of the substrate is covered with a lid is included in the flow path. It is a microchip.

The method for manufacturing the delay device according to the first aspect of the present invention, particularly,
A method of manufacturing a delay device in an embodiment in which a failure structure is formed by plastic deformation using a substrate made of a plastic material.
Select a substrate made of plastic material,
The substrate surface has a desired planar shape and depth to be used for the flow channel upstream portion and the flow channel downstream portion, and the flow channel extension portion provided between the flow channel upstream portion and the flow channel downstream portion. Forming a recess in advance,
An obstruction structure added to the flow path expansion section,
In the flow path expanding portion, the plastic material constituting the substrate is deformed and formed into a shape of a wall-like structure protruding from the side wall surface serving as the shortest path to the internal region in the flow path expanding portion. As
Corresponding to the outer surface shape of the mold by pressing a convex mold from the upper surface of the substrate to the portion where the obstacle structure is to be formed in the flow path expanding portion, and deforming the plastic material constituting the substrate. Forming a concave shape and forming a shape of a wall-like structure surrounding the concave shape by a plastic material that is excluded along with the concave shape;
Thereafter, removing the convex mold, leaving the shape of the wall-like structure surrounding the concave shape,
The delay device characterized in that the shape of the wall-like structure surrounding the obtained concave shape is used as the shape of the wall-like structure protruding from the side wall surface serving as the shortest path to the internal region in the flow path expansion portion. It is a manufacturing method.

Further, in the delay device according to the first aspect of the present invention, a method of manufacturing the delay device in an aspect using an obstacle made of a lyophobic material,
The substrate surface has a desired planar shape and depth to be used for the flow channel upstream portion and the flow channel downstream portion, and the flow channel extension portion provided between the flow channel upstream portion and the flow channel downstream portion. Forming a recess in advance,
As an obstacle structure added to the flow path extension,
In the flow path expansion portion, as a step of adding the obstacle having a planar shape protruding from the side wall surface serving as the shortest path to the internal region of the flow path expansion portion on the bottom surface of the flow path expansion portion,
A solvent-phobic material having poor wettability with respect to the liquid is printed and applied in a desired planar shape on the bottom surface of the flow path expanding portion on the portion to which the obstacle is to be added. Comprising a step of forming a printed coating layer having a surface made of a conductive material,
A printed coating layer of the lyophobic material having a desired planar shape is added on the bottom surface of the flow path extension portion, and from the side wall surface serving as the shortest path, an internal region is formed in the flow path extension portion. This is a method for manufacturing a delay device, characterized in that the delay device is used as an obstruction having a planar shape that protrudes toward the surface.

Further, a method for manufacturing the delay device according to the second aspect of the present invention, particularly,
The method for producing the delay device of the aspect in which the communication channel is produced by newly forming a groove structure on the substrate surface,
On the surface of the substrate, the flow channel upstream portion and the flow channel downstream portion, the upstream extension flow channel communicating with the end of the flow channel upstream portion, and the downstream extension flow communicating with the tip of the flow channel downstream portion A recess having a desired planar shape and depth to be used for the road is formed in advance.
Between the upstream extension channel and the downstream extension channel,
As a communication channel added to a desired arrangement for connecting the two extension channels, as a step of newly forming a groove structure on the substrate surface,
A step of cutting the substrate surface into a groove shape so as to straddle between the upstream extension channel and the downstream extension channel,
A method of manufacturing a delay device, characterized in that a cutting groove formed by cutting the substrate surface is used as the communication channel connecting the two extension channels.

Further, a method for manufacturing the delay device according to the third aspect of the present invention, particularly,
The detour channel is a method for producing a delay device in an embodiment in which a plastic material constituting the substrate is deformed and a groove structure is newly formed on the substrate surface.
Select a substrate made of plastic material,
On the surface of the substrate, a recess having a desired planar shape and depth to be used in the upstream portion and the downstream portion of the flow path is formed in advance.
As the detour channel, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated with each other,
As a step of adding a deformation to the plastic material constituting the substrate and forming a new groove structure on the substrate surface,
A peripheral portion corresponding to the outer edge of the planar shape of the detour channel protrudes from the upper surface of the substrate to a portion where the detour channel is to be formed, and a mold having a depressed center portion corresponding to the inner edge is pressed. ,
The plastic material constituting the substrate is deformed to form a concave shape corresponding to the peripheral portion shape of the mold and a convex shape corresponding to the central portion shape,
Thereafter, the mold is removed, and a step of leaving a structure in which the outer edge portion has a concave shape and the inside thereof has a convex shape on the plastic-deformed upper surface of the substrate,
In the obtained plastic deformation structure, a groove structure having a concave shape at the outer edge is added to the detour channel added to an arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated with each other. It is a manufacturing method of the delay device characterized by using as above.

A method for producing a delay device described in the delay device according to the fifth aspect of the present invention,
Desired plane used for the configuration of the flow path structure for adjusting the delay time provided on the substrate surface between the flow channel upstream portion and the flow channel downstream portion, and between the flow channel upstream portion and the flow channel downstream portion. Pre-form a recess having a shape and depth,
Furthermore, a partial region of the substrate surface having a surface made of a lyophobic material is provided in a constituent region of the flow path structure, and in the partial region of the substrate surface,
Connected to the end of the upstream portion of the flow path, and having a planar shape of the flow path, and is connected to the upstream extension flow path formed of a surface made of a solvophilic material, and the front end of the flow path downstream portion, Each of the downstream extension channels formed by a surface made of a solvophilic material having a channel-like planar shape is formed in advance,
Between the upstream extension channel and the downstream extension channel,
As a step of forming a flow path formed of a surface made of a solvophilic material having a planar shape of a flow path, which is used as a communication flow path added to a desired arrangement for connecting the two extended flow paths,
In order to straddle between the upstream extension channel and the downstream extension channel,
A solvophilic material is printed and applied in a desired planar shape on the upper surface of a partial region of the substrate surface having a surface made of a lyophobic material, and at least the upper surface has a surface made of a solvophilic material. Comprising the step of forming a coating layer,
In the method of manufacturing a delay device, a print coating layer having a surface made of a solvophilic material formed on the surface of the substrate is used as the communication channel connecting the two extension channels.

  The delay device according to the present invention uses a flow path having a minute cross-sectional area, and utilizes the capillary phenomenon due to the wettability of the inner wall surface of the flow path and the liquid sample, and the surface tension of the liquid sample itself. A method of transporting a liquid sample is adopted, and a flow channel having a “common configuration” is prepared in advance, and then a part of the flow channel is connected to a portion of the flow channel through which the liquid sample is transported along with the capillary phenomenon. By performing an operation to change the “length” or “traveling speed” of the liquid sample due to capillarity, the time required for the liquid sample to pass through the “channel portion (region)” is set to a “certain range”. Therefore, the delay time can be set for each microchip by using it as a delay device built in the microchip. In particular, the advantage that a delay time in such a delay device can be set after a flow channel having a “common configuration” is prepared in advance is a microchip in which a basic flow channel configuration is shared for various applications. Can be applied.

It is a top view which shows typically the structure of an example of the microchip using the delay apparatus concerning this invention. It is a figure which shows typically the structural example of the delay apparatus concerning the 1st form of this invention. It is a figure which shows typically the adjustment mechanism of the delay time in the delay apparatus concerning the 1st form of this invention. It is a figure which shows typically the adjustment mechanism of delay time in the delay apparatus concerning the 2nd form of this invention. It is a figure which shows typically the adjustment mechanism of delay time in the delay apparatus concerning the 5th form of this invention. It is a figure which shows typically the adjustment mechanism of the delay time in the delay apparatus concerning the 3rd form of this invention. It is a figure which shows typically the adjustment mechanism of delay time in the delay apparatus concerning the 4th form of this invention. FIG. 4 is a cross-sectional view schematically showing the role of liquid wettability on the flow path wall surface with respect to the capillary phenomenon used as a liquid transport means and the traveling speed of the gas-liquid interface due to the capillary phenomenon in the delay device according to the present invention.

  In addition, each code | symbol shown in a figure has the following meaning.

001 Substrate 002 Metal iron (convex mold)
003 stamp (solvent-phobic material printing application means)
004 Mold (Die for forming detour channel)
DESCRIPTION OF SYMBOLS 100 Flow path 200 Variable passage time delay device 201 Flow path expansion part 202 Obstacle 205 Extension flow path 206 Connection flow path 207 Hydrophobic material surface coating 208 Adjustment area 209 Detour flow path 305 Air hole 300 Sample inlet 301 Buffer liquid introduction Mouth 302 Liquid reservoir 303 Pretreatment tank 304 Reaction tank 400 Separation filter 500 Liquid switch 501 Trigger flow path 600 Contact angle 601 Liquid 602 Flow path inner wall surface 603 Vector sum of surface tension 604 Travel direction of gas-liquid interface

Regarding the delay device according to the present invention described above,
When described in more detailed terms, it can be described as follows.

That is, the delay device according to the first aspect of the present invention is
In the flow path in the form of holding the liquid in the recess formed on the substrate, the liquid travels in the flow path from the upstream portion of the flow path to the downstream portion of the flow path by capillary action.
A liquid surface end in the liquid traveling direction has a flow channel-like structure provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion, from the tip of the flow channel upstream portion to the end of the flow channel downstream portion. A delay device having a function of adjusting the time required for the
The liquid is a solution in which a solute is dissolved in a solvent,
The delay device is:
With respect to the channel upstream portion and the channel downstream portion having a predetermined channel width,
A channel expansion portion having an expanded channel width with reference to the channel width of the channel upstream portion and the channel downstream portion,
Provided in a form in which the end of the upstream portion of the flow channel and the tip of the downstream portion of the flow channel are connected via the flow channel expanding portion, constituting the flow channel structure,
Due to capillary action, the liquid travels from the tip of the upstream portion of the flow channel to the end of the upstream portion of the flow channel, and the liquid flows into the flow channel extension from the end of the upstream portion of the flow channel. In the process in which the liquid that has flowed into the channel expanding portion reaches the tip of the downstream portion of the flow path, then proceeds in the downstream portion of the flow path by capillary action, and reaches the end of the downstream portion of the flow path.
The flow path extension is
In the flow channel expansion portion, the stream line in which the liquid travels is the shortest path connecting the end of the flow channel upstream portion and the front end of the flow channel downstream portion along the side wall surface of the flow channel expansion portion. The side wall surface serving as the shortest path is made of a material whose wettability with the liquid is selected within a predetermined range,
From the side wall surface serving as the shortest path, to the internal region of the flow path extension portion, an obstacle structure capable of preventing the liquid from traveling on the streamline along the side wall surface serving as the shortest path is added,
By changing to the streamline where the liquid travels along both the side wall surface which becomes the shortest path and the side wall surface of the obstacle structure, To reach the tip, extend the streamline of the liquid,
The delay device is provided with a function of adjusting a time required for the liquid surface end in the liquid traveling direction to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path.

At that time, in the planar shape of the flow path expansion portion,
The length of the shortest path connecting the end of the channel upstream portion and the tip of the channel downstream portion is:
It can be set as the structure which is equal to the said expanded flow path width which this flow path expansion part has.

In the delay device according to the first aspect of the present invention, for example,
A substrate made of a plastic material is selected as the substrate that forms the flow channel upstream portion and the flow channel downstream portion, and the flow channel expansion portion provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion. ,
The obstacle structure added to the flow path extension is:
The plastic material constituting the substrate is deformed to select a mode in which a shape of a wall-like structure protruding from the side wall surface serving as the shortest path to the internal region is formed in the flow channel expansion portion. Is possible.

Alternatively, the obstacle structure added to the flow path extension is:
At least the upper surface is an obstacle having a surface made of a lyophobic material with poor wettability to the liquid,
A mode is selected in which the obstruction having a planar shape protruding from the side wall surface serving as the shortest path to the internal region is added to the flow channel expansion portion on the bottom surface of the flow channel expansion portion. It is also possible.

Furthermore, the obstacle structure added to the flow path extension is:
From the side wall surface serving as the shortest path to the internal region in the flow path expansion portion, a plurality of these are formed,
The flow path is changed from the end of the upstream portion of the flow path to the downstream of the flow path by changing the flow path along the side wall surface serving as the shortest path and the side wall surfaces of the plurality of obstacle structures. It is also possible to select a mode in which the stream line of the liquid that reaches the tip of the part is extended.

The delay device according to the second aspect of the present invention is:
In the flow path in the form of holding the liquid in the recess formed on the substrate, the liquid travels in the flow path from the upstream portion of the flow path to the downstream portion of the flow path by capillary action.
A liquid surface end in the liquid traveling direction has a flow channel-like structure provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion, from the tip of the flow channel upstream portion to the end of the flow channel downstream portion. A delay device having a function of adjusting the time required for the
The liquid is a solution in which a solute is dissolved in a solvent,
The delay device is:
With respect to the channel upstream portion and the channel downstream portion having a predetermined channel width,
An upstream extension channel connected to the end of the upstream portion of the channel, and a downstream extension channel connected to the tip of the downstream portion of the channel,
Between the upstream extension channel and the downstream extension channel,
Add a communication channel to the arrangement that connects the two extended channels,
The flow channel-like structure is configured to connect the end of the flow channel upstream portion and the tip of the flow channel downstream portion,
In the streamline path in which the liquid travels from the end of the upstream portion of the flow path to the tip of the downstream portion of the flow path via the upstream extension flow path, the communication flow path, and the downstream extension flow path,
From the end of the upstream portion of the flow path to the portion where the communication flow path is connected to the upstream extension flow path, the flow length of the upstream extension flow path portion,
By changing the channel length of the downstream extension channel part from the part where the communication channel is connected to the downstream extension channel to the tip of the downstream part of the channel, the flow is changed. Extending the streamline of the liquid traveling from the end of the upstream portion of the passage to the tip of the downstream portion of the passage;
The delay device is provided with a function of adjusting a time required for the liquid surface end in the liquid traveling direction to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path.

In the delay device according to the second aspect of the present invention, for example,
Between the upstream extension channel and the downstream extension channel, the connection channel is added to an arrangement for connecting the extension channels, and the communication channel forms a new groove structure on the substrate surface. The aspect currently produced by can be selected.

Or
The communication channel is added between the upstream extension channel and the downstream extension channel to connect the extension channels, and at least the side wall surface has wettability to the liquid. It is also possible to select an embodiment which is a surface made of a solvophilic material.

The delay device according to the third aspect of the present invention is:
In the flow path in the form of holding the liquid in the recess formed on the substrate, the liquid travels in the flow path from the upstream portion of the flow path to the downstream portion of the flow path by capillary action.
A liquid surface end in the liquid traveling direction has a flow channel-like structure provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion, from the tip of the flow channel upstream portion to the end of the flow channel downstream portion. A delay device having a function of adjusting the time required for the
The liquid is a solution in which a solute is dissolved in a solvent,
The delay device is:
With respect to the channel upstream portion and the channel downstream portion having a predetermined channel width,
Based on the shortest distance connecting the end of the upstream portion of the flow path and the tip of the downstream portion of the flow path,
The total length of the flow channel is selected to be longer than the shortest distance, and the detour flow channel is arranged so that the end of the flow channel upstream portion and the tip of the flow channel downstream portion communicate with each other. Add the detour channel to configure the channel structure,
In the streamline path where the liquid travels, reaching the tip of the downstream portion of the flow path from the end of the upstream portion of the flow path via the bypass flow path,
By changing the total length of the flow path of the bypass flow path portion, the flow line that the liquid travels from the end of the flow path upstream portion to the front end of the flow path downstream portion is extended,
The delay device is provided with a function of adjusting a time required for the liquid surface end in the liquid traveling direction to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path.

In the delay device according to the third aspect of the present invention, for example,
The substrate made of a plastic material is selected as the substrate that forms the bypass channel provided in the portion connecting the channel upstream portion and the channel downstream portion, and the channel upstream portion and the channel downstream portion,
The detour channel, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated,
A mode in which the plastic material constituting the substrate is deformed and a groove structure is newly formed on the substrate surface can be selected.

The delay device according to the fourth aspect of the present invention is:
In the flow path in the form of holding the liquid in the recess formed on the substrate, the liquid travels in the flow path from the upstream portion of the flow path to the downstream portion of the flow path by capillary action.
A liquid surface end in the liquid traveling direction has a flow channel-like structure provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion, from the tip of the flow channel upstream portion to the end of the flow channel downstream portion. A delay device having a function of adjusting the time required for the
The liquid is a solution in which a solute is dissolved in a solvent,
The delay device is:
With respect to the channel upstream portion and the channel downstream portion having a predetermined channel width,
The flow channel-like structure is configured by a connection flow channel configured to hold a liquid in a recess formed on a substrate, which communicates the end of the flow channel upstream portion and the tip of the flow channel downstream portion,
As the surface of the connection channel,
By selecting a surface made of a solvophilic material that exhibits wettability with respect to the liquid, or a surface made of a lyophobic material with poor wettability with respect to the liquid,
Due to capillary action, the liquid travels from the end of the upstream portion of the flow path to the tip of the downstream portion of the flow path by increasing or decreasing the speed at which the liquid travels in the connection flow path. To shorten or extend the time required,
The delay device is provided with a function of adjusting a time required for the liquid surface end in the liquid traveling direction to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path.

that time,
Selected as the surface of the connecting channel,
The surface made of a lyophilic material that exhibits wettability to the liquid, or the surface made of a lyophobic material that has poor wettability to the liquid,
Select a form made of a thin film made of a solvophilic material or a thin film made of a lyophobic material that covers the surface of the connection flow channel in the form of holding the liquid in the recess formed on the substrate. can do.

Furthermore, the delay device according to the fifth aspect of the present invention is:
In the flow path in the form of holding the liquid in the recess formed on the substrate, the liquid travels in the flow path from the upstream portion of the flow path to the downstream portion of the flow path by capillary action.
A liquid surface end in the liquid traveling direction has a flow channel-like structure provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion, from the tip of the flow channel upstream portion to the end of the flow channel downstream portion. A delay device having a function of adjusting the time required for the
The liquid is a solution in which a solute is dissolved in a solvent,
The delay device is:
With respect to the channel upstream portion and the channel downstream portion having a predetermined channel width,
A partial region of the substrate surface having a surface made of a lyophobic material having poor wettability to the liquid is provided, and in the partial region of the substrate surface,
An upstream extension channel formed on a surface made of a solvophilic material, which is connected to the end of the upstream portion of the channel and has a channel-like planar shape and exhibits wettability with respect to the liquid, and the channel Each provided with a downstream extension channel formed by a surface made of a solvophilic material, which is in communication with the tip of the downstream portion, has a channel-like planar shape, and exhibits wettability with respect to the liquid;
Between the upstream extension channel and the downstream extension channel,
A connection channel formed by a surface made of a solvophilic material having a channel-like planar shape and showing wettability with respect to the liquid is added to the arrangement connecting the two extension channels,
The flow channel-like structure is configured to connect the end of the flow channel upstream portion and the tip of the flow channel downstream portion,
In the streamline path in which the liquid travels from the end of the upstream portion of the flow path to the tip of the downstream portion of the flow path via the upstream extension flow path, the communication flow path, and the downstream extension flow path,
From the end of the upstream portion of the flow path to the portion where the communication flow path is connected to the upstream extension flow path, the flow length of the upstream extension flow path portion,
By changing the channel length of the downstream extension channel part from the part where the communication channel is connected to the downstream extension channel to the tip of the downstream part of the channel, the flow is changed. Extending the streamline of the liquid traveling from the end of the upstream portion of the passage to the tip of the downstream portion of the passage;
The delay device is provided with a function of adjusting a time required for the liquid surface end in the liquid traveling direction to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path.

In any of the delay devices according to the first to fifth embodiments of the present invention described above,
The flow channel upstream portion and the flow channel downstream portion having a predetermined flow channel width are:
A liquid is held in a recess formed on the substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid,
The liquid preferably travels in the upstream portion of the flow channel and in the downstream portion of the flow channel by capillary action.

In the delay device according to the first aspect of the present invention,
The flow path extension is
Preferably, the liquid is held in a recess formed on the substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid. .

In the delay device according to the second aspect of the present invention,
An upstream extension channel connected to the end of the upstream portion of the channel, and a downstream extension channel connected to the tip of the downstream portion of the channel,
Preferably, the liquid is held in a recess formed on the substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid. .

In addition, in any of the delay devices according to the first to fifth embodiments of the present invention described above,
For the flow path in the form of holding the liquid in the recess formed on the substrate, constituting the delay device,
Providing a lid to be joined to the upper surface of the substrate;
It is preferable that the liquid traveling in the flow path is in contact with the recess formed on the substrate and the lower surface of the lid.

The present invention also provides a microchip invention that uses the delay device according to the present invention described above, that is, the microchip according to the present invention includes:
Having a flow path in the form of holding the liquid in the recess formed on the substrate;
Providing a lid covering the substrate surface;
The concave portion of the substrate surface forms the lower surface and both side wall surfaces of the flow channel, and the lower surface of the lid portion covering the opening portion configures the upper surface of the flow channel, thereby forming a flow channel space.
A microchip that uses transport means in which the liquid travels in the flow path space by capillary action,
As one of the elements constituting the flow path in the microchip, at least one of delay devices adopting a structure in which the upper surface of the substrate is covered with a lid is included in the flow path. It is a microchip.

The method for manufacturing the delay device according to the first aspect of the present invention, particularly,
A substrate made of a plastic material is selected as the substrate that forms the flow channel upstream portion and the flow channel downstream portion, and the flow channel expansion portion provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion. ,
The obstacle structure added to the flow path extension is:
A delay device having an aspect in which the plastic material constituting the substrate is deformed and formed into a shape of a wall-like structure projecting from the side wall surface serving as the shortest path to the internal region of the flow path expansion portion. The method to make is
Select a substrate made of plastic material,
A desired planar shape and depth to be used for the flow channel upstream portion and the flow channel downstream portion on the substrate surface, and the flow channel expansion portion provided in a portion connecting the flow channel upstream portion and the flow channel downstream portion. A recess having a thickness is formed in advance,
An obstruction structure added to the flow path expansion section,
A shape of a wall-like structure that protrudes from the side wall surface serving as the shortest path to the inner area of the flow path expansion section by deforming the plastic material constituting the substrate in the recess used for the flow path expansion section. As a process to form
Corresponding to the outer surface shape of the mold by pressing a convex mold from the upper surface of the substrate to the portion where the obstacle structure is to be formed in the flow path expanding portion, and deforming the plastic material constituting the substrate. Forming a concave shape and forming a shape of a wall-like structure surrounding the concave shape by a plastic material that is excluded along with the concave shape;
Thereafter, removing the convex mold, leaving the shape of the wall-like structure surrounding the concave shape,
The delay device characterized in that the shape of the wall-like structure surrounding the obtained concave shape is used as the shape of the wall-like structure protruding from the side wall surface serving as the shortest path to the internal region in the flow path expansion portion. It is a manufacturing method.

Further, the obstacle structure added to the flow path expanding portion is:
At least the upper surface is an obstacle having a surface made of a lyophobic material with poor wettability to the liquid,
A delay having an aspect formed by adding the obstruction having a planar shape protruding from the side wall surface serving as the shortest path to the inner region of the flow channel expansion portion on the bottom surface of the flow channel expansion portion. The method of making the device is
A desired planar shape and depth to be used for the flow channel upstream portion and the flow channel downstream portion on the substrate surface, and the flow channel expansion portion provided in a portion connecting the flow channel upstream portion and the flow channel downstream portion. A recess having a thickness is formed in advance,
As an obstacle structure added to the flow path extension,
In the recess used for the flow path expansion portion, the obstruction having a planar shape protruding from the side wall surface serving as the shortest path to the internal region is added to the bottom surface of the flow path expansion portion. As a process to
A solvent-phobic material having poor wettability with respect to the liquid is printed and applied in a desired planar shape on the bottom surface of the flow path expanding portion on the portion to which the obstacle is to be added. Comprising a step of forming a printed coating layer having a surface made of a conductive material,
A printed coating layer of the lyophobic material having a desired planar shape is added on the bottom surface of the flow path extension portion, and from the side wall surface serving as the shortest path, an internal region is formed in the flow path extension portion. This is a method for manufacturing a delay device, characterized in that the delay device is used as an obstruction having a planar shape that protrudes toward the surface.

On the other hand, a method for manufacturing the delay device according to the second aspect of the present invention, particularly,
Between the upstream extension channel and the downstream extension channel, the connection channel is added to an arrangement for connecting the extension channels, and the communication channel forms a new groove structure on the substrate surface. A method of manufacturing the delay device of the aspect manufactured in
On the surface of the substrate, the flow channel upstream portion and the flow channel downstream portion, the upstream extension flow channel communicating with the end of the flow channel upstream portion, and the downstream extension flow communicating with the tip of the flow channel downstream portion A recess having a desired planar shape and depth to be used for the road is formed in advance.
Between the upstream extension channel and the downstream extension channel,
As a communication channel added to a desired arrangement for connecting the two extension channels, as a step of newly forming a groove structure on the substrate surface,
A step of cutting the substrate surface into a groove shape so as to straddle between the upstream extension channel and the downstream extension channel,
A method of manufacturing a delay device, characterized in that a cutting groove formed by cutting the substrate surface is used as the communication channel connecting the two extension channels.

Furthermore, a method for manufacturing the delay device according to the third aspect of the present invention, particularly,
The substrate made of a plastic material is selected as the substrate that forms the bypass channel provided in the portion connecting the channel upstream portion and the channel downstream portion, and the channel upstream portion and the channel downstream portion,
The detour channel, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated,
A method for producing a delay device in an aspect produced by modifying a plastic material constituting the substrate and newly forming a groove structure on the surface of the substrate,
Select a substrate made of plastic material,
On the surface of the substrate, a recess having a desired planar shape and depth to be used in the upstream portion and the downstream portion of the flow path is formed in advance.
As the detour channel, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated with each other,
As a step of adding a deformation to the plastic material constituting the substrate and forming a new groove structure on the substrate surface,
A peripheral portion corresponding to the outer edge of the planar shape of the detour channel protrudes from the upper surface of the substrate to a portion where the detour channel is to be formed, and a mold having a depressed center portion corresponding to the inner edge is pressed. ,
The plastic material constituting the substrate is deformed to form a concave shape corresponding to the peripheral portion shape of the mold and a convex shape corresponding to the central portion shape,
Thereafter, the mold is removed, and a step of leaving a structure in which the outer edge portion has a concave shape and the inside thereof has a convex shape on the plastic-deformed upper surface of the substrate,
In the obtained plastic deformation structure, a groove structure having a concave shape at the outer edge is added to the detour channel added to an arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated with each other. It is a manufacturing method of the delay device characterized by using as above.

A method for producing a delay device described in the delay device according to the fifth aspect of the present invention,
Desired planar shape used for the configuration of the channel-like structure provided on the surface of the substrate at a portion connecting the channel upstream portion and the channel downstream portion, and the channel upstream portion and the channel downstream portion. As well as forming a recess having a depth in advance,
Furthermore, a partial region of the substrate surface having a surface made of a lyophobic material is provided in a constituent region of the flow channel structure, and in the partial region of the substrate surface,
An upstream extension channel formed on a surface made of a solvophilic material, which is connected to the end of the upstream portion of the channel and has a channel-like planar shape and exhibits wettability with respect to the liquid, and the channel Each downstream extension channel formed by a surface made of a solvophilic material, which is in communication with the tip of the downstream portion and has a channel-like planar shape and exhibits wettability with respect to the liquid, is formed in advance,
Between the upstream extension channel and the downstream extension channel,
As a connecting flow path added to a desired arrangement for connecting the two extended flow paths, a surface made of a solvophilic material having a flow path-like planar shape on the substrate surface and showing wettability to the liquid. As a process of forming the formed flow path,
In order to straddle between the upstream extension channel and the downstream extension channel,
A solvophilic material having wettability to the liquid is printed and applied in a desired planar shape on a partial region upper surface of the substrate surface having a surface made of a lyophobic material, and at least the upper surface is a lyophilic solvent Comprising a step of forming a print coating layer having a surface made of a functional material,
In the method of manufacturing a delay device, a print coating layer having a surface made of a solvophilic material formed on the surface of the substrate is used as the communication channel connecting the two extension channels.

  Hereinafter, the present invention will be described in more detail with reference to the drawings.

  In the delay device according to the present invention, the liquid to be transported flows from the upstream portion of the flow path in the flow path in the form of holding the liquid in the recess formed on the substrate by capillary action in the flow path. A configuration that proceeds to the downstream part of the road is adopted. At that time, in order to adjust the time required for the liquid surface end in the liquid traveling direction to reach from the front end of the flow channel upstream portion to the end of the flow channel downstream portion, the flow channel upstream portion and the flow channel downstream portion are A channel-like structure capable of setting / adjusting the delay time within a certain range is provided at the connected portion. That is, in the delay device according to the present invention, when the liquid is transported by capillary action, the gas-liquid interface (liquid surface end) at the tip of the liquid extends from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path. The time required for passage through the upstream portion of the flow path and the time required for passage through the downstream portion of the flow path are kept constant, and the flow provided at the portion connecting the upstream portion of the flow path and the downstream portion of the flow path is maintained. A transit time setting type delay circuit capable of setting / adjusting the time passing through the road-like structure within a certain range is configured.

  Since the delay device itself uses a capillary phenomenon as a liquid transport means, it is not necessary to add a pump mechanism or the like for applying a pressure difference for forcibly transporting the liquid. At the same time, as a component constituting a microchip composed of flow paths formed on the substrate, when used in a form embedded in the substrate, liquid transport in the flow path of the microchip also utilizes capillary action It is possible to select a configuration to be performed.

  FIG. 1 shows an example of a microchip that uses a set delay circuit according to the present invention as a component. The microchip whose channel configuration is shown in the plan view of FIG. 1 employs a configuration in which a lid portion that covers the upper surface of the substrate 001 is formed on a recess having a predetermined channel pattern formed on the substrate 001. is doing. Therefore, the open portion above the recess is covered with the lower surface of the lid, the recess formed in the substrate 001 is a bottom surface and both side wall surfaces, and the lower surface of the lid is a flow path constituting the upper surface. In this flow path, the liquid is transported by capillary action while being in contact with the bottom surface, both side wall surfaces, and the top surface of the flow path.

  When the liquid is transported using the capillary effect, the width and depth of the recess that is the flow path are appropriately selected according to the degree of wettability between the material constituting the flow path wall surface and the liquid. For example, in the biochemical microchip as illustrated in FIG. 1, the width of the recess used in the flow path is in the range of about 20 μm to 500 μm, more preferably about 100 μm, and the depth is 5 μm to 50 μm. The range is about 20 μm. In the recess of this size range, for example, when transporting a liquid such as an aqueous solution using the capillary effect, the wettability of the liquid as a wall surface material of the recess is 60 ° or less when expressed by a contact angle. It is desirable to use a material of 40 ° or less. As an example of a material exhibiting the above-mentioned contact angle with respect to a liquid using an aqueous solvent, examples of the inorganic substrate material include glass, quartz, and a natural oxide film on silicon. Examples of the resin material include polyethylene terephthalate, Examples include polyvinyl alcohol, epoxy resin, and other hydrophilic engineering plastics.

  In the microchip shown in FIG. 1, first, a liquid sample is sampled in a plasma separation filter 400 from a blood sample to a buffer solution, and a soluble sample contained in the plasma is sampled. The concentration is made uniform while staying in the mixing tank 303 once. Thereafter, the liquid is transferred to the reaction tank 304 through the liquid switch 500. The setting type delay circuit 200 according to the present invention is used for a portion branched from the main flow channel immediately after the plasma separation filter 400 and connected to the trigger flow channel 501 in the liquid switch 500.

  The plasma separation filter 400 portion uses the configuration disclosed in the pamphlet of International Publication No. 03/035233, and is provided with a separation wall structure that functions as a solid-liquid separation filter between two parallel flow paths. A mechanism is adopted in which soluble components contained in plasma are diffused with a concentration gradient from a blood sample to a buffer solution via a solid-liquid separation filter. At that time, the blood sample is dropped into the sample introduction port 300 through the hole provided with the lid. On the other hand, the liquid reservoir 302 provided at the other end of the flow channel 101 is provided with an air port, and the blood sample in the sample introduction port 300 is opened at the other end, and the inside of the flow channel 101 is capillaryized. Transported by. In addition, when the liquid reservoir 302 is filled with the transported liquid, the amount of blood to be dropped is set so that there is no difference in the level of the liquid level between the sample inlet 300 and the liquid reservoir 302. Any further transportation will stop.

  On the other hand, the buffer liquid is supplied to the buffer liquid inlet 301, and the other end of the main channel is provided with an air port 305, and the other end is opened, and is transported by capillary action in the main channel. The liquid switch 500 uses the switch configuration disclosed in the pamphlet of International Publication No. 04/051229. The main channel liquid switch 500 and the connecting portion have a short-length channel portion whose wall surface is covered with a hydrophobic material coating. In this short-length channel portion, the buffer solution The wettability with respect to the wall surface of the liquid switch is poor, and the capillary phenomenon prevents the liquid from flowing into the liquid switch 500 beyond this short portion. On the other hand, since the trigger channel 501 connected to the liquid switch 500 has a wall surface made of a hydrophilic material capable of transporting a liquid by capillary action, the trigger channel 501 enters the liquid switch 500. The liquid is transported. Note that the inner wall of the liquid switch 500 itself is formed of a wall made of a hydrophilic material, and the transport of the liquid from the trigger channel 501 continues. Thereafter, when the liquid supplied from the trigger channel 501 reaches the liquid channel 500 and the connecting portion of the main channel and comes into contact with the liquid surface end in the main channel, the liquid in the main channel is also liquid via this contact point. Begin moving into switch 500. It is as if the liquid supplied from the trigger channel 501 becomes “priming water”, and the inflow of the liquid in the main channel into the liquid switch 500 starts.

  Specifically, there is a slight difference between the liquid level of the buffer liquid inlet 301 and the liquid level of the main flow path, and once in the hydrophobic region provided at the connection portion with the liquid switch 500 of the main flow path. The stopped liquid end surface shows a slightly convex shape, but is balanced within a range not exceeding the contact angle between the hydrophobic wall surface and the buffer liquid. At that time, the liquid supplied from the trigger channel 501 also has a convex shape with respect to the hydrophobic region. When the length of the hydrophobic region provided in the connecting portion with the liquid switch 500 of the main channel is set appropriately, the convex tips of both liquid surfaces come into contact with each other, and when they communicate with each other, the hydrophobic wall and the buffer solution contact each other. The horn exceeds the balanced state. As a result, the liquid starts to flow through the liquid switch 500 and the connecting portion of the main channel.

  When the liquid switch 500 is in the “ON” state, fills the liquid switch 500, and the liquid surface end advances to the flow path 102, the conductance (flow path cross-sectional area) of the main flow path is the conductance (flow current) of the trigger flow path 501. Most of the liquid flow is through the main flow path because it is much larger than the road cross-sectional area. That is, while remaining in the mixing tank 303, the liquid sample whose concentration has been made uniform is transported to the reaction tank 304 via the liquid switch 500 and the channel 102. This reaction tank 304 is a liquid reservoir for mixing and analyzing a soluble component derived from plasma having a uniform concentration with its detection reagent. In the microchip shown in FIG. 1, the reaction vessel 304 portion optically measures the concentration of the reaction product resulting from the reaction with the detection reagent, and the lid covering the surface is formed of a transparent member. Yes.

  The setting type delay circuit 200 according to the present invention is used for a portion branched from the main flow channel immediately after the plasma separation filter 400 and connected to the trigger flow channel 501 in the liquid switch 500. In the mixing tank 303 to be provided, it has a role of setting a time for the liquid sample to stay in order to make the concentration uniform. Specifically, it is necessary to optimize the time for holding in the mixing tank 303 in consideration of the viscosity of the buffer solution to be used and the concentration diffusion coefficient of soluble components in plasma, which should be made uniform in concentration. . In accordance with the optimized residence time, the liquid level end extends from the branch point from the main flow path provided immediately after the plasma separation filter 400 via the setting delay circuit 200 to the tip of the trigger flow path 501. Adjust and set the time required to reach within a certain range.

  Next, the configuration of the setting type delay circuit according to the present invention and the operation principle thereof will be specifically described.

(First embodiment)
An example of the delay circuit according to the first embodiment of the present invention is shown in FIG.

  FIG. 2 shows a delay circuit according to the first embodiment of the present invention, which is employed as a channel-like structure provided in a portion connecting the channel upstream portion and the channel downstream portion constituting the delay circuit. An example of a flow path expansion unit 201 and a failure structure added to the flow path expansion unit 201 is shown.

The flow path expanding portion 201 illustrated in FIG. 2 is provided with an arrangement for connecting the flow path upstream portion and the flow path downstream portion with respect to the flow path 100, and is a recess formed integrally with the upper surface of the substrate 001. It is made as. Compared with the channel width of the channel 100 _{(W 0),} is set significantly large channel width of the flow channel extension 201 _{(W 1).} In the embodiment shown in FIG. 2A, the end of the upstream portion of the flow channel and the tip of the downstream portion of the flow channel connected by the flow channel expanding portion 201 have a rectangular shape. It arrange | positions in the position along one side wall surface.

  In a situation where no obstacle structure is added to the flow channel expanding portion 201, the liquid that has traveled in the upstream portion of the flow channel due to capillary action flows into the flow channel expanding portion 201 from the end of the upstream portion of the flow channel. . Thereafter, the liquid end surface expands into the flow channel expanding portion 201 in contact with the side wall surface by utilizing the wettability of the liquid with respect to the bottom surface, the wall surface, and the upper surface constituting the flow channel expanding portion 201. As a result, when the contact angle between the wall surface and the liquid is less than 90 ° due to the wettability of the liquid, the shape of the liquid end surface (gas-liquid interface) becomes concave on the liquid phase side, and is flatter due to surface tension. A force acts in a direction to achieve a simple gas-liquid interface, and the transport of the liquid from the upstream side of the flow path to the flow path extension 201 continues. In that case, the liquid end surface (gas-liquid interface) which spreads in the flow path expansion part 201 advances along the solvophilic wall surface. If one side wall surface of the channel expansion portion 201 that connects the end of the upstream portion of the flow channel and the tip of the downstream portion of the flow channel at the shortest distance is selected as the solvophilic wall surface, the shortest distance is connected. The liquid end surface (gas-liquid interface) advances along one side wall surface of the flow path expanding portion 201 and reaches the tip of the downstream portion of the flow path. Thereafter, the liquid proceeds from the tip of the downstream portion of the flow channel into the flow channel downstream. In other words, the time required for substantially passing through the flow channel expanding portion 201 is one side wall surface of the flow channel expanding portion 201 in which the liquid end surface (gas-liquid interface) is selected as the solvophilic wall surface. , The time required to travel the streamline connecting the end of the upstream portion of the flow path and the tip of the downstream portion of the flow path at the shortest distance.

  A situation in which an obstruction structure is added to the flow channel expanding portion 201, for example, as shown in FIG. 2A, the end of the flow channel upstream portion and the tip of the flow channel downstream portion are connected with the shortest distance. When the obstacle 202 having a form protruding from one side wall surface of the flow path expanding portion 201 is formed, the liquid end surface (gas-liquid interface) advances along the outer periphery of the obstacle 202. At that time, the time required for the liquid end surface (gas-liquid interface) to reach the tip of the downstream portion of the flow path is determined according to the streamline connecting the end of the upstream portion of the flow channel and the tip of the downstream portion of the flow channel at the shortest distance. This corresponds to the time required for substantially passing through the flow path expanding portion 201. As shown in FIG. 3A, when the protruding amount of the obstacle 202 in the protruding form is small, the time extension (delay amount) required to substantially pass through the flow path expanding portion 201 is small. As shown in (b) of FIG. 3, when the amount of protrusion of the obstacle 202 increases, the time extension (delay amount) required to substantially pass through the flow path expanding portion 201 is large according to the amount of protrusion. Become.

  In FIG. 2C, when the substrate 001 is formed as the obstacle 202 with a plastic material, for example, a thermoplastic organic material, the tip of a heated metal trowel 002 is pressed against this part to perform processing. An example in which a concave depression is formed and a wall-like protrusion is formed on the outer edge of the depression will be shown. The wall-like protrusion on the outer edge is made of a thermoplastic organic material. When the wall height is optimized, there is substantially no gap with the upper surface, and the liquid end face (gas-liquid interface) is the wall-like shape. It becomes a form which advances along the outer edge of the protrusion.

  2D, as another embodiment, a coating layer made of a hydrophobic material is printed on the bottom surface of the flow path expanding portion 201 by using a printing coating means, for example, a stamp 003. The form to apply is shown. Since the upper surface of the coating layer made of the hydrophobic material constitutes a hydrophobic surface, it is difficult for the liquid end surface (gas-liquid interface) to proceed beyond the upper surface of the coating layer. The liquid end face (gas-liquid interface) advances along the outer periphery. That is, it is possible to achieve a flow suppression mechanism that functions as the obstacle 202 provided in the flow path expanding portion 201 by using an application layer made of a hydrophobic material.

  In addition, as illustrated in FIG. 2 (e), in the situation where a plurality of obstacle structures are added to the flow path expanding portion 201, the liquid end surface (gas-liquid interface) is similarly formed of these obstacles 202. Proceed along the perimeter. At that time, the time required for the liquid end surface (gas-liquid interface) to reach the tip of the downstream portion of the flow path is determined according to the streamline connecting the end of the upstream portion of the flow channel and the tip of the downstream portion of the flow channel at the shortest distance. This corresponds to the time required for substantially passing through the flow path expanding portion 201. In the form of (e) of FIG. 2, when reaching the tip of the downstream portion of the flow path from the end of the upstream portion of the flow path along the side wall surface, the streamline that becomes the shortest distance including the outer periphery of these obstacles 202 is obtained. Accordingly, the time required for the liquid end surface (gas-liquid interface) to reach the tip of the downstream portion of the flow path corresponds to the time required for substantially passing through the flow path expanding portion 201.

As shown in FIGS. 3 (a) and 3 (b), the length of one side wall surface of the channel expanding portion 201 connecting the end of the channel upstream portion and the tip of the channel downstream portion at the shortest distance. When the length (shortest path length) and the flow path width (W ₁ ) of the flow path expansion section 201 are selected equally, the shortest path length is set in a situation where a failure structure is added to the flow path expansion section 201. The situation where the liquid end surface (gas-liquid interface) reaches the obstacle provided on the side wall surface, and then the liquid end surface (gas-liquid interface) proceeds more reliably along the streamline around the outer periphery of the obstacle is achieved. it can.

If the flow path width (W ₁ ) of the flow path expansion part 201 is significantly narrower than the shortest path length, the liquid end face (gas-liquid interface) is formed on the obstacle provided on the side wall having the shortest path length. The liquid end surface (gas-liquid interface) may reach the opposite side wall surface long before reaching. In that case, the progress of the liquid end surface (gas-liquid interface) along the side wall surface having the shortest path length is delayed until the liquid end surface (gas-liquid interface) is substantially perpendicular to the opposing side wall surface, Progress of the liquid end surface (gas-liquid interface) along the opposing side wall surface is promoted. Thereafter, the liquid end surface (gas-liquid interface) is substantially perpendicular to the both side wall surfaces, so that the liquid progresses. Therefore, the passage time extension (delay amount) by the obstacle 202 provided at the end is increased. , Virtually none. That is, even when the obstacle 202 is not provided, when the flow path width (W ₁ ) of the flow path expanding portion 201 is significantly narrower than the shortest path length, the liquid end face (gas-liquid) is opposed to both side walls. After the substantially orthogonal state is achieved, the progress of the liquid level is resumed. Therefore, there is no substantial difference in the passage time between the two.

Note that in the embodiment shown in FIG. 2, the depth of the channel 100 _{(D 0)} and the depth of the flow channel extension 201 _{(D 1)} and equal, provided the lid covering the upper surface of the substrate 001, a bottom A mode is selected in which the liquid level advances from the flow channel 100 to the flow channel expansion unit 201 in a state where the liquid is in contact with both of the upper surfaces. Manner to equalize the depth of the channel 100 (D ₀₎ and the depth of the flow channel extension 201 (D ₁₎ is in terms of easily performing a process of forming collectively a flow path on the upper surface of the substrate 001 This is a preferred embodiment.

In the delay device according to the first aspect of the present invention,
From the side wall surface serving as the shortest path, to the internal region of the flow path extension portion, an obstacle structure capable of preventing the liquid from traveling on the streamline along the side wall surface serving as the shortest path is added,
By changing to the streamline where the liquid travels along both the side wall surface which becomes the shortest path and the side wall surface of the obstacle structure, To reach the tip, extend the streamline of the liquid,
A function for adjusting the time required for the liquid surface end in the traveling direction of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is provided. Adjustment of the extension (delay amount) of the passage time can be set in a considerably wide range by selecting the amount of overhanging the obstacle structure and the number of obstacle structures to be provided.

  The side wall surface that is the shortest path is the shortest path that connects the end of the upstream channel portion and the tip of the downstream channel portion along the side wall surface of the flow channel extension 201. , And a material whose wettability with the liquid is selected within a predetermined range. For example, the channel 100 and the channel extension 201 can be formed by general lithography and chemical etching means when a substrate 001 made of an inorganic material, for example, silicon, silicon oxide film, glass, quartz, or the like is used. Specifically, the flow path pattern is transferred to the substrate using a photomask and a photoresist, and the flow path pattern portion is chemically etched. Alternatively, the flow channel 100 and the flow channel expansion portion 201 may be a press using a mold, injection molding, or the like when a thermoplastic organic material such as polymethyl methacrylate, polyethylene terephthalate, polystyrene, or the like is selected as the substrate 001. It is possible to form using this processing means.

  The bottom surface and the side wall surfaces of the recesses used for the flow channel 100 and the flow channel expanding portion 201 are surfaces made of a solvophilic material having wettability with respect to the solvent used by the liquid transported by capillary action. When the liquid to be transported uses a solvent mainly composed of water, such as a buffer solution, the surface is made of a hydrophilic material having wettability with water. On the other hand, when the liquid to be transported uses a hydrophobic organic solvent, the surface is made of a hydrophobic material having wettability with the hydrophobic organic solvent. Similarly, the lower surface of the lid that covers the upper surface of the substrate and becomes the upper surface of the flow path is also a surface made of a solvophilic material having wettability with respect to the solvent used by the liquid to be transported.

  If the material of the substrate and the lid itself does not satisfy such requirements, a coating layer made of a solvophilic material is appropriately formed on the surface, and the desired wettability, that is, from the range of a desired contact angle of less than 90 °. It is set as the surface which shows the contact angle with the said selected liquid selected. When a liquid using an aqueous solvent is targeted, examples of a coating material that can be used for forming a coating layer made of a hydrophilic material include polyacrylamide gels, phospholipid-like materials such as MPC (2-methacryloyloxyethylphosphoric acid). Colin, trade name Lipidure, Nippon Oil & Fat Co., Ltd.) and other hydrophilic coupling agents.

  The obstacle 202 is formed before the lid is bonded to the upper surface of the substrate on which the channel 100 and the channel expansion region 201 are formed. The obstacle 202 can also be formed as a wall-like obstacle as shown in FIG. For example, when the substrate is made of a thermoplastic resin material, a wall-shaped obstacle that blocks the flow can be formed by pressing the iron 002 and heating and deforming a part of the flow path expanding portion 201. In this case, examples of the thermoplastic resin material that can be used in this form include polyethylene terephthalate, polymethyl methacrylate, polystyrene, and polycarbonate.

  On the other hand, when the substrate is made of an inorganic material, the wall-like obstacle 202 can be formed using a photosensitive material such as a thick film resist. In that case, it can be realized by covering the substrate with a thick film resist having a depth of the flow path and then removing portions other than the obstacle 202 by general exposure and development processing.

  The obstacle 202 can also be realized by making a part of the surface of the flow path expanding portion 201 lyophobic. For example, as shown in FIG. 2D, the stamp 003 made of a hydrophobic rubber material such as polydimethylsiloxane (PDMS) can be pressed and released (stamp processing). The surface of the part in contact with the stamp becomes hydrophobic with a polydimethylsiloxane (PDMS) coating so that the contact angle of water is approximately 100 °, and serves as an obstacle 202 to prevent the liquid from proceeding. Can do. The hydrophobic surface coating layer can also be realized by printing with a printing apparatus having an inkjet mechanism using hydrophobic ink. Alternatively, the lyophobic surface coating layer may be formed by, for example, a method in which a portion other than the obstacle 202 is removed by exposure and development using a mask after the hydrophilic substrate is covered with a hydrophobic photoresist. Can be formed.

  For example, when S1818 (Rohm and Haas Electronic Materials Co., Ltd.) is used as a substrate and glass as a photo resist, as shown in the measurement examples of water contact angles summarized in Table 1 below, The contact angle of 6.4 ° and the glass surface removed by developing after applying the photoresist is 34.1 ° and 40 ° or less, but 73.5 ° on the surface coated with the photoresist. Contact angle. Therefore, a clean glass surface or a photo resist showing a contact angle of 40 ° or less is coated with a photo resist having an increased hydrophobicity, although the capillary effect functions effectively on a glass surface that has been applied and developed and then removed. On the finished surface, the progression of the liquid is extremely slow. That is, the portion covered with the photoresist layer that has not been removed by development functions as an obstacle that inhibits the progress of the aqueous liquid due to capillary action.

Next, how to adjust the delay time in the first embodiment will be described.

  A delay device provided in the trigger channel in the biochemical microchip having the shape shown in FIG. 1 is formed on a glass substrate. At that time, a concave portion which is the flow channel 100 and a flow channel expanding portion 201 are formed on the glass surface of the substrate material by dry etching on the substrate. An obstruction 202 is formed on the formed flow path expanding portion 201 using a photoresist, and a glass lid covering the upper surface is joined to manufacture a microchip. In this configuration of the delay device, the width of the concave portion which is the flow channel 100 is selected to be 100 μm, the depth is 20 μm, the flow channel expanding portion 201 is 20 μm in depth, and the planar shape is selected to be a square having a side of 5 mm. At that time, the inner wall surface of the channel 100 formed by dry etching has a contact angle corresponding to the condition 3 in Table 1.

  When water is introduced into the microchip from the liquid reservoir, the water flows along the side wall surface connecting the inlet and the outlet in the flow channel expanding portion 201 having the glass surface developed and removed after applying the photoresist by the capillary effect. It progresses at a speed of about 2.5 mm per second. Therefore, when an obstacle is not formed, the water reaches from the inlet to the outlet of the flow path expansion unit 201 in about 2 seconds. On the other hand, as shown in FIG. 2A, when the obstacle 202 is formed so as to project to the center of the flow path expanding portion 201, it reaches the outlet from the inlet of the flow path expanding portion 201 in about 4 seconds. That is, with the provision of the obstacle 202, a delay of about 2 seconds is achieved. Specifically, due to the obstacle 202 having a shape projecting from the side wall surface connecting from the inlet to the outlet of the flow path expanding portion 201, the streamline of the liquid surface at the tip of the water traveling by the capillary effect is from the side wall surface on the inlet side. Along the periphery of the obstacle 202, the outlet becomes a streamline that advances to the side wall surface on the side. In other words, the streamline of the liquid surface at the tip of the water that travels by this capillary effect is extended due to the obstacle 202, and as a result, a delay time of about 2 seconds is added.

  If the length of one side of the square channel expansion portion is L and the width of the obstacle 202 protruding from the one side is Y, the extension of the streamline along the periphery of the obstacle 202 is approximately 2Y. At that time, the delay time T caused by the extension of the streamline caused by the obstacle 202 is a value expressed by the following equation 1 where V is the traveling speed of the liquid level along the periphery of the obstacle 202.

T = 2Y / V (Formula 1)
Conversely, the overhang amount Y of the obstacle 202 necessary to obtain the desired delay time T can be determined from this equation 1. As shown in FIG. 3B, the overhang amount Y of the obstacle 202 is not more than one side length L. Further, a part of the liquid entering from the inlet reaches the outlet as the liquid level advances along the remaining three sides of the flow path expanding portion 201. Therefore, the delay time T that can be set by using one obstacle 202 has an upper limit, and the upper limit Tmax is a value represented by the following Expression 2.

Tmax = 2L / V (Formula 2)
That is, when one obstruction 202 is provided for a square-shaped flow path expanding section 201 having a side of 5 mm, the upper limit value Tmax of the delay time is about 4 seconds, and the overhang amount Y of the obstruction 202 is set to 0 to 5 mm. It can be seen that the delay time T can be set in the range of 0 to 4 seconds by selecting in this range.

  As shown in FIG. 2E, the liquid level advances along the remaining three sides of the flow path expanding portion 201 by installing the obstacle 202 on the other side of the flow path expanding portion 201. If the time to reach the exit is extended and the number of obstacles 202 provided on one side is increased, the upper limit value of the delay time that can be set can be further increased. For example, when N obstacles 202 are provided on one side, if a streamline extension amount approximately N times the streamline extension amount in the case of providing one obstacle 202 is achieved, the delay time is accordingly increased. T can also be set to about N times.

  When a substrate other than glass is used, or when the inside of the flow path is covered with a surface treatment agent, the advance speed of the liquid level that advances along the side wall surface of the flow path expanding portion 201 by the capillary effect in advance. V is measured in advance. Based on the measured value of the traveling speed V, the length L of one side of the flow path expansion portion 201 necessary to obtain the desired setting range of the delay time T by applying the formulas 1 and 2 and the overhang of the obstacle The range of the quantity Y can be estimated.

  By the way, the glass surface removed by developing after applying the photoresist is left behind so that the organic matter used in the process covers the surface, so the wettability with water is inferior to the clean glass surface. Yes. After development / removal, an ashing treatment is performed to oxidize the organic material covering the surface, and the wettability with water is greatly recovered. As a result, due to the capillary effect, water travels at a speed of about 10 mm per second along the side wall surface connecting the inlet and the outlet in the flow channel expansion portion 201 portion. Accordingly, when one obstruction 202 is provided for the square-shaped flow path expanding portion 201 having a side of 5 mm, which shows the glass surface subjected to the ashing process, the upper limit value Tmax of the delay time is about 1 from Equation 2. Expected seconds. In that case, in order to set the settable range of the delay time T to 0 to 4 seconds, a plurality of obstacles 202 are provided on each side of the flow path expanding portion 201 indicating the glass surface subjected to the ashing process. It can be seen that the mode needs to be selected.

(Second embodiment)
An example of the delay circuit according to the second embodiment of the present invention is shown in FIG.

In the form shown in FIG. 4, as a flow channel-like structure provided at a site connecting the flow channel upstream portion and the flow channel downstream portion, with respect to the flow channel upstream portion and the flow channel downstream portion having a predetermined flow channel width. ,
An upstream extension channel that communicates with the end of the upstream portion of the channel, and a downstream extension channel that communicates with the tip of the downstream portion of the channel,
Between the upstream extension channel and the downstream extension channel, a connecting channel 206 is added to the arrangement connecting the extension channels 205, and the end of the upstream portion of the channel and the tip of the downstream portion of the channel are added. The structure which connects and is used.

  As shown in FIG. 4A, the flow channel 100 and the two extended flow channels 205 connected thereto are integrally formed on the substrate 001 in advance. Since the two extended flow paths 205 shown in (a) of FIG. 4 are not in communication, the upstream portion and the downstream portion of the flow path are separated in this state. Thereafter, as shown in FIG. 4B, when a new groove is formed by cutting the surface of the substrate 001 so as to straddle the two extended flow paths 205, two lines are formed through the groove. The extended flow path 205 is communicated.

As shown in FIG. 4B, the liquid travels from the end of the upstream portion of the flow path to the tip of the downstream portion of the flow path via the upstream extended flow path, the communication flow path, and the downstream extended flow path. In the streamline path,
The length (L ₁ ) of the upstream extension channel portion from the end of the upstream channel portion to the site where the communication channel is connected to the upstream extension channel,
The flow path length (L ₂ ) of the downstream extension flow path portion from the portion where the communication flow path is connected to the downstream extension flow path to the tip of the flow path downstream portion,
The sum of the channel length of the communication channel itself is
The total channel length of this channel-like structure is obtained. Therefore, in the configuration of FIG. 4C and the configuration of FIG. 4B, the flow path length (L _{1) of the} upstream extended flow path portion is different because the position where the communication flow path 206 is formed is different. ) And the flow path length (L ₂ ) of the downstream extended flow path portion. That is, the adjustment of the extension (delay amount) of the target passage time is performed by selecting the position where the communication channel 206 is formed, so that the channel length (L ₁ ) of the upstream extension channel portion and the downstream extension This is achieved by changing the sum of the flow path length and the flow path length (L ₂ ).

In the configuration shown in FIG. 4, the two extension flow paths 205 are not communicated in the initial state, but may be configured such that both communicate with each other at the tip portion. In that case, in the state where the communication channel 206 is not added, the extension (delay amount) of the passage time is maximized, and the channel length of the upstream extension channel part is selected by selecting the position where the communication channel 206 is formed. As a result of reducing the sum of the channel length (L ₂ ) of (L ₁ ) and the downstream extension channel portion, the passage time is extended (delay amount). The planar shape of the extension channel 205 can be selected as long as it does not interfere with the formation of the communication channel 206.

  In the form illustrated in FIG. 4, the liquid needs to travel by capillary action through the communication channel 206, and the wall surface of the communication channel 206 is made of a solvophilic material that exhibits wettability to the liquid. It needs to be a surface. In other words, when the wall surface of the communication channel 206 is formed by cutting the surface of the substrate 001 to newly provide a groove, the substrate 001 itself is formed of a solvophilic material. Is required. In addition, when selecting the aspect which forms a groove | channel newly by cutting the surface of the board | substrate 001 and forms the film of a solvophilic material in the processed surface, the board | substrate 001 itself is not necessarily solvophilic material. It is not necessary to be formed with. In addition, when targeting an aqueous liquid, examples of hydrophilic materials that can be used for the production of the substrate 001 itself include glass and quartz as inorganic materials, and examples of resin materials include polyethylene reefphthalate and polyvinyl alcohol. Etc.

  The cutting process for forming the communication channel 206 is performed on the substrate on which the channel 100 is formed before the lid is bonded to the upper surface thereof. The cutting groove used as the communication channel 206 is set in a range where the total length of the groove straddles the two extension channels 205 but does not become longer than necessary. The groove width (cutting width) is preferably not extremely narrower than the channel width of the extension channel 205 and is preferably in a range suitable for transportation by capillary action. For example, it can be provided by cutting the surface of the substrate so as to straddle the two extended flow paths 205 with an appropriate cutting width by using an ultra-thin blade micro cutting grindstone used for dicing. Since the cross section by this micro cutting grindstone is sharp, the communication part of the cross section of the extension flow path 205 and the cross section of the connection flow path 206 will be in a favorable connection state.

In the second embodiment, the position where the communication channel 206 is formed can be easily determined as follows. That is, when the flow path configuration as shown in FIG. 4B is selected, the traveling speed of the liquid level in the extended flow path 205 is V, and from the starting point of the extended flow path 205 to the formation position of the communication flow path 206. When the flow path length Y and the time required to pass through the connecting flow path 206 are t, the total time T required to pass through the extended flow path 205 is:
T = t + 2Y / V (Formula 3)
Can be estimated. According to Equation 3, the flow path length Y from the starting point of the extension flow path 205 to the formation position of the communication flow path 206 can be selected so that the target delay time (2Y / V) is achieved. is there.

(Fifth embodiment)
In the delay device according to the second aspect of the present invention, a groove structure formed by cutting a substrate is used as the communication channel 206 that communicates the two extension channels 205 with each other. On the other hand, in the delay device according to the fifth aspect of the present invention, the lyophilic solvent formed in the flow path pattern shape by forming the solvophilic region in the flow path pattern shape on the lyophobic surface. Since the wettability with respect to the liquid is good and the lyophobic surface in the surrounding area is poor in wettability, the solvophilic region formed in this flow path pattern is utilized by capillary action. Focusing on the point that it can be used as a flow path, the two extended flow paths and the communication flow path that communicates the two extended flow paths are constituted by the flow path system by the surface treatment. In addition, the method disclosed in International Publication No. 03 / 044519A1 is applied to the method of forming a solvophilic region in a flow path pattern on the lyophobic surface.

  An example of the delay circuit according to the fifth embodiment of the present invention is shown in FIG.

In the form shown in FIG. 5, as a flow channel-like structure provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion, with respect to the flow channel upstream portion and the flow channel downstream portion having a predetermined flow channel width. ,
A partial area 207 of the substrate surface having a surface made of a lyophobic material having poor wettability with respect to the liquid is provided, and in the partial area 207 of the substrate surface,
An upstream extension channel formed by a surface made of a solvophilic material, which is connected to the end of the channel upstream portion and has a channel-like planar shape and exhibits wettability with respect to a liquid, and a channel downstream portion Each provided with a downstream extension channel formed by a surface made of a solvophilic material, which is in communication with the tip and has a channel-like planar shape and exhibits wettability with respect to a liquid;
Between the upstream extension channel and the downstream extension channel,
A connection channel formed by a surface made of a solvophilic material having a channel-like planar shape and showing wettability with respect to the liquid is added to the arrangement connecting the two extension channels,
A structure is employed in which the end of the upstream portion of the flow path is connected to the tip of the downstream portion of the flow path.

  For example, the channel 100 itself adopts a form in which liquid is held in a recess formed on the substrate, and the channel upstream portion and the channel downstream portion having a predetermined channel width are formed on the substrate. The inner wall surface of the recess that is in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability with respect to the liquid. When the liquid progresses in the portion by capillary action, the flow channel structure illustrated in FIG. 5 is formed in a recess having a predetermined area formed on the substrate.

  Specifically, in FIG. 2, the flow path 100 that uses a recess formed on the substrate, such as that used as the flow path expansion portion 201, has a depth equal to that of the flow path 100 and has a predetermined area. It is assumed that the end of the channel upstream portion and the tip of the channel downstream portion of the channel 100 are connected. The bottom surface and the side wall surface of the recess having the predetermined area are surfaces covered with a coating layer 207 of a lyophobic material having poor wettability with respect to the liquid. Formed on the upper surface of the coating layer 207 of the lyophobic material with a surface made of a solvophilic material having a channel-like planar shape and showing wettability with respect to a liquid so as to be connected to the end of the upstream portion of the channel A downstream extension flow formed on a surface made of a solvophilic material, which is in communication with the upstream extension flow channel and the tip of the downstream portion of the flow channel and has a planar shape of the flow channel and exhibits wettability to liquid Form a road.

  For example, as illustrated in FIG. 1, when using the delay circuit according to the fifth aspect of the present invention as one of the elements constituting the microchip, a lid is placed on the upper surface of the substrate 001. In order to employ the covering structure, the flow channel structure illustrated in FIG. 5 needs to be formed in a recess formed on the substrate and having a predetermined area.

  When the liquid to be circulated is a liquid using an aqueous solvent such as a microchip as illustrated in FIG. 1, the setting type delay circuit illustrated in FIG. The channel 205 and the communication channel 206 are realized as a hydrophilic film having a predetermined pattern shape formed on the hydrophobic material 207. The coating layer made of the hydrophobic material 207 covering the surface of the substrate 001 is, for example, a dilute solution of PMMA, a xylene solution of silazane, or a silane coupling agent described in International Publication No. 03/044519, This can be realized by spin-coating the upper surface of the substrate 001. The coating layer of the hydrophobic material 207 is used for the purpose of making the surface hydrophobic when the substrate 001 itself is a hydrophilic material, and when the substrate 001 itself is a hydrophobic material, By utilizing the surface, the coating layer of the hydrophobic material 207 can be omitted.

  The extended flow path 205 connected to the flow path 100 is formed by patterning a coupling agent having a hydrophilic surface on the coating layer of the hydrophobic material 207 by a method disclosed in International Publication No. 03/044519. This can be realized (FIG. 5B). The communication channel 206 is a hydrophilic material, for example, CAM (carboxymethylcellulose), collagen, starch, etc., and a solution of a coupling agent having affinity with the hydrophobic material 207, or a mixture thereof. Alternatively, a sol solution containing these materials can be applied in a predetermined pattern to be formed. This coating operation is preferably performed using a method suitable for the viscosity of the liquid to be applied, such as an ink jet method, a stamp method, or a dip pen method. In addition, by forming the communication channel 206 at a predetermined position of the extension channel 205, the extension of the passage time (delay amount) can be adjusted.

  For example, the case where glass (contact angle ˜6 °) is selected as the hydrophilic material constituting the substrate will be described. Except for the corresponding part of the channel with a width of 1 mm, a stamp made by PDMS that contacts the substrate surface in other areas is pressed against the glass substrate surface to make the substrate surface excluding the corresponding part hydrophobic (contact) Angle ~ 100 °). Then, after sticking a double-sided adhesive tape (Sumitomo 3M Co., Ltd.) having a thickness of 0.3 mm as a spacer to a part of the substrate, an acrylic resin (PMMA, contact angle˜80 °) lid is attached, A gap of about 0.3 mm is provided between the lids. When water is introduced into the end of the flow path equivalent portion of the clean glass surface having this configuration, the water level of the water advances only at a flow rate equivalent portion where the clean glass surface is exposed at about 10 mm per second. , It does not leak into the region where the other hydrophobic treatment is performed. In this case, the communication channel 206 is realized by applying a polyacrylamide solution to the surface of the region that has been subjected to the hydrophobization treatment, and drying and solidifying it to produce a highly hydrophilic coating layer (by the way, The contact angle of the surface solidified with polyacrylamide is 1 ° or less).

  The above-described embodiment is an embodiment in which an aqueous solution is used as the liquid flowing in the flow path. However, when the liquid flowing in the flow path is an oily solution using a hydrophobic organic solvent, the coating layer on the upper surface of the substrate 001 is used. Uses a coating layer of a lyophobic material having poor wettability with respect to such a hydrophobic organic solvent, and the extended flow path 205 and the communication flow path 206 are solvophilic, exhibiting wettability with respect to such a hydrophobic organic solvent. Use a coating layer that uses the material.

(Third embodiment)
An example of the delay circuit according to the third embodiment of the present invention is shown in FIG.

In the delay device illustrated in FIG. 6, as a flow path-like structure provided at a site connecting the flow path upstream portion and the flow path downstream portion,
For a channel upstream portion and a channel downstream portion having a predetermined channel width,
Based on the shortest distance connecting the end of the upstream portion of the flow path and the tip of the downstream portion of the flow path,
The total length of the flow path is selected to be longer than the shortest distance, and the detour flow is arranged in a configuration in which the end of the flow path upstream portion and the tip of the flow path downstream portion are communicated with each other. The structure which adds a road is adopted.

In the embodiment illustrated in FIG.
A substrate made of a plastic material is selected as a substrate 001 that forms a bypass channel provided in a portion connecting the channel upstream portion and the channel downstream portion, and the channel upstream portion and the channel downstream portion,
The detour channel 209, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated,
The substrate is manufactured by deforming the plastic material constituting the substrate 001 and newly forming a groove structure on the surface of the substrate 001.

Specifically, initially, as shown in FIGS. 6A and 6B, the substrate 001 in which the recesses having the same cross-sectional shape as the flow channel 100 are formed of the plastic material also in the portion where the bypass flow channel 209 is formed. It is formed on the surface. Thereafter, as shown in FIG. 6 (d), a peripheral portion corresponding to the outer edge of the planar shape of the target detour channel protrudes, and a mold 004 having a depressed central portion corresponding to the inner edge is pressed,
The plastic material constituting the substrate 001 is deformed to form a concave shape corresponding to the peripheral portion shape of the mold 004 and a convex shape corresponding to the central portion shape,
Thereafter, the mold 004 is removed, and a structure in which the outer edge portion has a concave shape and the inside thereof has a convex shape is left on the plastic-deformed upper surface of the substrate. After finishing this processing, the plastically deformed portion is covered with a lid that covers the upper surface of the substrate 001.

  At this time, as shown in FIG. 6 (d), the level of the concave shape corresponding to the peripheral portion shape of the mold 004 remains in the region of the convex shape corresponding to the central portion shape. It is lower than the bottom level. As a result, the liquid supplied from the end of the upstream portion of the flow path first has its liquid surface end (by capillary action along the bypass flow path 209 constituted by the concave side wall surface and the bottom surface of the outer edge portion. The gas-liquid interface will progress. Thereafter, the liquid surface end (gas-liquid interface) reaches the position directly below the position of the tip of the downstream portion of the flow path, the liquid fills the entire concave shape of the outer edge, and the liquid surface at the position immediately below However, the progress of the liquid level to the downstream portion of the flow path does not occur until the level of the bottom surface of the downstream end of the flow path is reached. That is, the amount of liquid that fills the concave shape of the outer edge is much larger than the amount of liquid that fills the original flow path, so the liquid surface end (gas-liquid interface) actually reaches the tip of the downstream part of the flow path and flows. The time required to travel is significantly longer than the time required to travel through the original flow path. That is, in the delay circuit according to the third aspect of the present invention, by changing the total length of the flow path of the bypass flow path portion, the liquid reaching the tip of the flow path downstream portion from the end of the flow path upstream portion is changed. The function of adjusting the time required for the liquid surface end in the liquid traveling direction to reach from the tip of the upstream portion of the flow channel to the end of the downstream portion of the flow channel is achieved by extending the traveling stream line.

  Therefore, the substrate 001 to be subjected to plastic deformation processing by the mold 004 uses a substrate made of a thermoplastic resin such as polystyrene, acrylic resin, or proethylene terephthalate. In addition, since the surface of these resin substrates has a contact angle of 70 ° or more and poor wettability with water, after the plastic deformation treatment, before attaching the lid, a hydrophilic surface such as the aforementioned polyacrylamide is appropriately used. A treating agent is used to make the surface hydrophilic. On the other hand, the mold 004 is made of a tough material such as copper, nickel, brass, and stainless steel by sharpening the peripheral portion as shown in FIG. 6D, and the vicinity of the center is recessed from the tip of the peripheral portion. This can be achieved by processing the shape hollowed in position. The mold 004 having such a shape is heated to press the channel 100 against the substrate 001 formed as shown in FIG. Then, the plastic material constituting the substrate 001 is pushed toward the inside of the mold at the tip of the mold 004, and the rise on the outside of the mold can be minimized. As a result, when the mold 004 is peeled off, it is engraved at the peripheral portion of the mold 004 and becomes a bypass channel 209. The bypass flow path 209 is in communication with the flow path 100 in the vicinity of the upper surface thereof. In addition, in order to improve the mold release after performing the plastic deformation process, this process can be performed by processing the mold surface with a fluororesin or treating with a mold release agent based on silicone oil or the like. Can be realized with a high yield.

  In addition, the arrow shown in (c) of FIG. 6 indicates that the liquid level supplied from the end of the upstream portion of the flow path is the liquid level along the flow path constituted by the side wall surface and the bottom surface of the bypass flow path 209. It shows the path along which the end (gas-liquid interface) travels.

  In the delay circuit according to the third aspect of the present invention, the extension (delay amount) of the passage time obtained by one detour channel 209 is the length of the outer edge of the detour channel 209 or the recess of the outer edge. It is determined by the amount of liquid required to fill the entire shape. In other words, the longer the detour channel 209 is, the longer the delay time is. Therefore, prepare a short mold 004 and a long mold 004 for the detour channel 209 and select which mold to use. It is possible to set the delay time. In addition, by forming a plurality of bypass channels 209 on the channel as the entire delay circuit, a total delay time that is an integral multiple of the extension of the transit time (delay amount) obtained by one bypass channel 209 is obtained. It is also possible to adopt a setting form.

  The procedure for setting the delay time using the third embodiment of the present invention reaches the outlet from the inlet of the bypass channel 209 as in the first embodiment and the second embodiment. It depends on the time it takes. In FIG. 6C, the traveling speed V at which the liquid level advances by the capillary effect along the side wall surface of the bypass channel 209 and the flow reaching the outlet from the inlet along the side wall surface of the bypass channel 209. From the amount of extension of the line, it is possible to estimate the time required to reach the exit from the entrance.

(Fourth embodiment)
An example of a delay circuit according to the fourth embodiment of the present invention is shown in FIG.

In the delay device illustrated in FIG. 7, as a flow path-like structure provided at a site connecting the flow path upstream portion and the flow path downstream portion,
For a channel upstream portion and a channel downstream portion having a predetermined channel width,
In this embodiment, a connection flow channel is used in which a liquid is held in a recess formed on the substrate, the end of the flow channel upstream portion and the tip of the flow channel downstream portion communicating with each other. At that time, as the surface of this connection channel,
By selecting a surface made of a solvophilic material that exhibits wettability to liquid, or a surface made of a lyophobic material that has poor wettability to liquid,
The time required for the liquid to travel from the end of the upstream portion of the flow path to the tip of the downstream portion of the flow path is shortened by increasing or decreasing the speed at which the liquid travels in this connection flow path by capillary action. Or, I'm trying to extend it.

  The delay circuit according to the fourth aspect of the present invention can shorten or extend the time required for the liquid to travel from the end of the upstream portion of the flow channel to the tip of the downstream portion of the flow channel. In addition to the above-described delay time (time extension), there is also a mode in which a negative delay time (time reduction) is set. Application different from the delay circuit according to the embodiment is also possible.

  This delay time is applied to the liquid in the material of the coating layer that forms the connection channel that connects the end of the upstream portion of the flow channel and the tip of the downstream portion of the flow channel, in FIG. It is determined by selecting a solvophilic material exhibiting wettability or a lyophobic material having poor wettability to liquid.

  In the configuration illustrated in FIG. 7, with respect to the flow channel 100 using the recess formed on the substrate 100, the adjustment region 208 has a predetermined wettability so as to cover the bottom surface and the side wall surface of the flow channel. A coating layer of a material having This coating layer is formed by printing a solution containing a desired coating material by an ink jet mechanism or the like according to the liquid viscosity, stamping, or once coating uniformly, and then performing lithography, etc. This can be realized by applying a method such as patterning to a desired planar shape by the general method.

  Next, the relationship between the time required for the liquid to pass through the adjustment region 208 and the wettability of the coating layer will be described. FIG. 8 shows the principle of transport of liquid by capillary action.

  In general, when a liquid comes into contact with a surface, the angle formed between the surface and the gas-liquid interface of the liquid depends on the wettability of the surface with respect to the liquid and shows a specific angle (contact angle 600). . This angle (contact angle) depends on the affinity of the material constituting the surface for the liquid (solvent). Specifically, in the solvophilic material showing the affinity for the liquid, the contact angle is less than 90 °, and decreases as the affinity increases (the degree of solvophilicity increases). Conversely, in a lyophobic material with poor affinity for the liquid, the contact angle exceeds 90 ° and increases with increasing degree of lyophobic properties (affinity becomes even lower).

  When the liquid in the flow channel comes into contact with the surface of the flow channel in a state where the contact angle 600 is less than 90 °, the shape of the gas-liquid interface (liquid surface end) in the flow channel is It becomes a concave shape. At this time, since the surface tension of the liquid surface acts in a direction in which the shape of the gas-liquid interface (liquid surface end) is flattened, the vector sum 603 of the surface tension of the liquid surface is a direction from the liquid toward the gas phase. It becomes. Due to this surface tension, the center of the gas-liquid interface (the end of the liquid surface) advances in the traveling direction 604. As a result, the concave shape of the gas-liquid interface (liquid surface end) in the channel is flattened, and the angle formed by the liquid-gas interface with respect to the channel surface is larger than the initial contact angle 600. In this state, the liquid on the channel surface wets and spreads, and the position where the liquid on the channel surface is in contact also advances until the initial contact angle 600 is reached again. That is, in the above-described process, the entire gas-liquid interface (liquid surface end) in the flow path proceeds in the traveling direction 604 while maintaining the original concave shape. In this phenomenon, if the contact angle 600 is the same, the narrower the flow path width, the smaller the radius of curvature of the concave shape of the gas-liquid interface (liquid surface end) in the flow path. The vector sum 603 of the surface tension of the liquid surface per cross-sectional area becomes relatively large. That is, the transport process of the liquid due to the surface wettability with respect to the liquid and the surface tension at the gas-liquid interface is the most straightforward in capillaries such as glass materials having a fine tube diameter and good wettability to water. Since this is an observed phenomenon, it is conventionally called a capillary phenomenon.

The shape of the gas-liquid interface (liquid surface end) is affected by the pressure difference between the gas phase and the liquid phase in addition to the surface tension. For example, if the gas phase side is not an open end, the pressure on the gas phase side increases with the progress of the liquid level, and the pressure difference between the gas phase and the liquid phase is increased by the vector sum 603 of the surface tension of the liquid level. At equilibrium, further liquid level stops. Conversely, in the state where the gas phase side is an open end and the extrusion pressure is applied to the liquid phase side, the shape of the gas-liquid interface (liquid surface end) in the flow path is in the gas phase direction at the center. Convex shape. At that time, the contact angle indicated by the gas-liquid interface (liquid surface end) showing a convex shape in the gas phase direction from the contact angle (θ ₀ ) in a state where there is no pressure difference between the gas phase and the liquid phase. When (θ ₁ ) is large, the flow path is such that the contact angle on the flow path surface is equal to the contact angle (θ ₀ ) in a state where no pressure difference exists between the gas phase and the liquid phase. The liquid wets and spreads on the surface. Thereafter, due to the pressure difference, the shape of the gas-liquid interface (liquid surface end) in the flow channel is restored to the convex shape in the central portion again in the gas phase direction. Apparently, the phenomenon in which the liquid is pushed out due to the pressure difference is also microscopically between the contact angle depending on the wettability of the flow path surface with respect to the liquid, the surface tension of the liquid surface, and between the gas phase and the liquid phase. This is a phenomenon that depends on the shape of the gas-liquid interface (liquid surface end) in the flow path, which is governed by the pressure difference. That is, the contact angle (θ _{1 on the} channel surface) indicated by the shape of the gas-liquid interface (liquid surface end) in the channel, which is governed by the surface tension of the liquid level and the pressure difference between the gas phase and the liquid phase. ) And the contact angle (θ ₀ ) in a state where there is no pressure difference between the gas phase and the liquid phase, the liquid level does not advance in any direction. In the liquid switch described in FIG. 1 described above, the state in which the progress of the liquid level in the main channel stops corresponds to the above situation.

When the channel widths are equal, the better the wettability of the channel surface with respect to the liquid, the smaller the contact angle (θ ₀ ) when there is no pressure difference between the gas phase and the liquid phase. The concave shape of the inner gas-liquid interface (liquid surface end) has a smaller radius of curvature at the center. That is, as the wettability of the flow path surface with respect to the liquid becomes higher, the contact angle 600 becomes smaller, and accordingly, the surface tension vector sum 603 becomes larger, so that the moving speed of the liquid surface becomes faster. Conversely, as the wettability of the channel surface with respect to the liquid decreases, the contact angle (θ ₀ ) increases in the absence of a pressure difference between the gas phase and the liquid phase, The concave shape of the liquid interface (liquid surface end) has a larger radius of curvature at the center. That is, as the wettability of the channel surface with respect to the liquid decreases, the contact angle 600 increases, and the vector sum 603 of the surface tension decreases accordingly, so that the moving speed of the liquid surface decreases.

In addition, when the wettability of the flow path surface with respect to the liquid is further inferior and the contact angle (θ ₀ ) in a state where no pressure difference exists between the gas phase and the liquid phase exceeds 90 °, the weight of the liquid itself Because of this, there is a slight pressure difference between the gas phase and the liquid phase, so that the slight pressure difference and the surface tension are balanced, that is, the gas-liquid interface (liquid surface end) in the flow path. Is slightly convex in the gas phase direction at the center. When the gas-liquid interface (liquid surface end) in the flow path has a slightly convex shape, the contact angle (θ ₁ ) on the flow path surface has no pressure difference between the gas phase and the liquid phase. When the state becomes equal to the contact angle (θ ₀ ) in the state, the liquid level does not advance in any direction. For example, a droplet dropped on the surface is in a state where the pressure difference between the gas phase and the liquid phase due to the weight of the liquid itself and the surface tension are balanced, and the contact angle (θ ₁ ) on the surface. Corresponds to an equilibrium state with a certain shape in a state equal to the contact angle (θ ₀ ) in a state where there is no pressure difference between the gas phase and the liquid phase.

In the delay circuit according to the fourth aspect of the present invention, a coating layer made of a material having different wettability with respect to the liquid is provided on the bottom surface and the side wall surface of the flow path, so that the gas phase and the liquid phase are formed on the surface. By changing the contact angle (θ ₀ ) in a state where there is no pressure difference, the speed at which the liquid level advances in the adjustment region 208 by capillary action is changed.

  Therefore, if the contact region is larger than the surface of the flow channel 100 communicated with the control region 208, that is, if the control region 208 is formed of a coating layer made of a material having a low degree of hydrophilicity, a liquid using a water solvent is used. Progress is slowed in the regulation region 208. That is, an extension of the time required to pass through the adjustment region 208 (positive delay time) is obtained. On the other hand, if the adjustment region 208 is formed of a coating layer made of a material having a small contact angle, that is, a high degree of hydrophilicity, at least in the adjustment region 208, the liquid using the water solvent proceeds faster. As a result, a reduction in the time required to pass through the adjustment region 208 (negative delay time) is obtained. Thus, if the wettability with water, that is, the contact angle with water, indicated by the material used for the coating layer forming the adjustment region 208 is different, the liquid using the aqueous solvent passes through the adjustment region 208. The time required will be different.

  Specifically, when the surface of the channel 100 is made of a highly hydrophilic material such as a silicon oxide film, glass, or quartz, the contact angle with water is 10 ° or less. At this time, if the adjustment region 208 is formed of a coating layer of epoxy resin (such as novolac) or acrylic resin having a contact angle with water of 70 ° to 80 °, the time required to pass through the adjustment region 208 (positive) Delay time).

  However, if the adjustment region 208 is formed by applying a hydrophobic treatment such as a PDMS stamp or silazane treatment with a contact angle exceeding 100 °, the other part of the flow path may be hydrophilic and have a capillary effect. The progress of the liquid level near the bottom of the flow path stops when it enters the adjustment region 208. Therefore, in order for the liquid level of the aqueous liquid to proceed beyond the adjustment region 208, the wettability of the hydrophobic material forming the adjustment region 208 with water determines the degree of hydrophilicity of the other surface of the channel. It is necessary to make a selection in consideration. In a flow channel having a rectangular cross section of 100 μm width and 20 μm depth dug on a glass substrate, when the hydrophobic treatment is performed only on the bottom surface portion of the adjustment region, the contact angle of water with the material used for the hydrophobic treatment is 90 degrees or less is preferable.

  Next, a procedure for adjusting the delay time in the fourth embodiment will be described.

A concave portion, which is a flow path having a width of 100 μm and a depth of 20 μm, is formed on a glass substrate, and an adjustment region 208 is formed thereon using a photoresist (S1818, Rohm, Ando, Haas Electronic Materials Co., Ltd.) A microchip is manufactured by bonding a glass lid on a substrate. When water is introduced into the flow path of the microchip, water (liquid surface end) travels in the flow path at about 2.5 mm per second due to the capillary effect in portions other than the adjustment area 208, but when reaching the adjustment area 208, Its traveling speed drops to about 0.5 mm per second. This is because the bottom surface of the flow path in the adjustment region 208 has poor wettability with water (contact angle of about 70 °), and therefore the liquid surface end in contact with the glass lid with excellent wettability with water, This is because a positional deviation occurs between the liquid surface end and the liquid surface. After the liquid surface end exceeds the adjustment region 208, the liquid surface end in contact with the bottom surface of the flow channel having excellent wettability with water again advances rapidly, and the glass lid with excellent wettability with water is obtained. Move until it coincides with the position of the liquid surface edge in contact with According to this effect, if the length of the adjustment region 208 in FIG. 7A is Y, the liquid travel speed in the control region 208 is V, and the liquid travel speed in the channel 100 other than the control region 208 is V1. The delay time T can be estimated by Equation 4.
T = Y × {(1 / V2) − (1 / V1)} (Formula 4)
For example, calculating backward from Equation 4, in the above microchip, in order to generate a delay time of 10 seconds, the flow path length of the adjustment region 200 needs to be about 6.3 mm.

  Conversely, if the adjustment region 208 is formed of a material having a contact angle smaller than that of the surface of the flow channel 100, for example, a polyacrylamide gel (contact angle of 1 ° or less), the time required to pass through the adjustment region 208 is reduced. Shortening (negative delay time) is obtained.

  The delay device according to the present invention uses various microchip-type biochips used for analysis work on a small amount of liquid sample used in the field of clinical examination or biochemical analysis, or uses a minute reaction field. As a delay means that can adjust the time required for the liquid to reach a predetermined area in a microchip-type chemical synthesis chip reaction system of a very small volume used for carrying out various synthesis reactions. Widely available.

Claims (23)

When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel extension provided in the middle of the channel;
It has a configuration formed by forming an obstacle structure that occupies a part of the flow path expansion portion,
When the liquid surface end of the liquid travels from the upstream portion of the flow path to the downstream portion of the flow path via the flow path extension, the obstruction structure prevents the liquid surface end from proceeding, and the flow path Along with the extension of the streamline of the liquid liquid surface edge passing through the expansion part,
A delay device characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved. The flow channel expanding portion has a flow channel width expanded from the width of the flow channel,
The length of the shortest path connecting the outlet to the flow channel extension portion in the upstream portion of the flow channel and the inlet from the flow channel extension portion to the downstream portion of the flow channel is selected to be equal to the expanded flow channel width. The delay device according to claim 1, wherein: A substrate made of a plastic material is selected as the substrate that forms the flow channel upstream portion and the flow channel downstream portion, and the flow channel expansion portion provided at a portion connecting the flow channel upstream portion and the flow channel downstream portion. ,
The obstacle structure added to the flow path extension is:
The plastic material which comprises the said board | substrate is deform | transformed, It forms in the shape of the wall-like structure which protrudes to an internal area | region from the side wall surface used as the said shortest path | route to this flow-path expansion part. Item 2. The delay device according to Item 1. The obstacle structure added to the flow path extension is:
At least the upper surface is an obstacle having a surface made of a lyophobic material with poor wettability to the liquid,
The obstruction having a planar shape protruding from the side wall surface serving as the shortest path to the internal region is added to the flow channel expansion portion on the bottom surface of the flow channel expansion portion. The delay device according to claim 1. The obstacle structure added to the flow path extension is:
From the side wall surface serving as the shortest path to the internal region in the flow path expansion portion, a plurality of these are formed,
The flow path is changed from the outlet from the upstream portion of the flow path by changing the flow path along which the liquid travels along both the side wall surface serving as the shortest path and the side wall surfaces of the plurality of obstacle structures. The delay device according to claim 1, wherein an extension of a stream line of the liquid reaching the inlet to the downstream portion is intended. When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel upstream portion formed on the substrate, and a channel downstream portion;
An upstream extension channel communicating with the upstream portion of the channel, and a downstream extension channel communicating with the downstream portion of the channel;
Between the upstream extension flow path and the downstream extension flow path, it has a configuration formed by a communication flow path added to the arrangement for connecting the two extension flow paths,
When the liquid surface end advances from the upstream portion of the flow path to the downstream portion of the flow path via the communication flow path, the position where the communication flow path is added is adjusted, and the upstream extension flow path is connected. As the streamline is extended by the total of the channel length via the channel and the downstream extension channel,
A delay device characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved. Between the upstream extension channel and the downstream extension channel, the connection channel is added to an arrangement for connecting the extension channels, and the communication channel forms a new groove structure on the substrate surface. The delay device according to claim 6, wherein the delay device is manufactured by: The communication channel is added between the upstream extension channel and the downstream extension channel to connect the extension channels, and at least the side wall surface has wettability to the liquid. The delay device according to claim 6, wherein the delay device is a surface made of a solvophilic material. When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
Based on the shortest distance connecting the end of the upstream portion of the flow path and the tip of the downstream portion of the flow path,
The total length of the flow channel is selected to be longer than the shortest distance, and the detour flow channel is arranged so that the end of the flow channel upstream portion and the tip of the flow channel downstream portion communicate with each other. It has a configuration formed by adding the bypass channel,
When the liquid surface end of the liquid travels from the upstream portion of the flow path to the downstream portion of the flow path via the bypass flow path, the flow of the liquid proceeds by changing the total length of the flow path of the bypass flow path portion. Try to extend the line,
A delay device characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved. The substrate made of a plastic material is selected as the substrate that forms the bypass channel provided in the portion connecting the channel upstream portion and the channel downstream portion, and the channel upstream portion and the channel downstream portion,
The detour channel, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated,
The delay device according to claim 9, wherein the delay device is produced by deforming a plastic material constituting the substrate and newly forming a groove structure on the surface of the substrate. When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel upstream portion formed on the substrate, and a channel downstream portion;
It has a configuration comprising a connection flow path for a flow rate adjustment region that communicates a flow path upstream portion and a flow path downstream portion,
As the surface of the connection flow path for the flow rate adjustment region,
By selecting a surface made of a solvophilic material that exhibits wettability to liquid, or a surface made of a lyophobic material that has poor wettability to liquid,
By increasing or decreasing the speed at which the liquid travels in the connection channel by capillary action,
A delay device characterized in that adjustment of a delay amount of time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved. Selected as the surface of the connecting channel,
The surface made of a lyophilic material that exhibits wettability to the liquid, or the surface made of a lyophobic material that has poor wettability to the liquid,
It is formed of a thin film made of a solvophilic material or a thin film made of a lyophobic material that covers the surface of the connecting flow channel in a form of retaining liquid in the recess formed on the substrate. The delay device according to claim 11. When the liquid travels in the flow path formed on the substrate from the upstream side of the flow path to the downstream side of the flow path due to capillary action, the liquid liquid A delay device having a function of adjusting a time required for the surface edge to reach,
The channel structure for adjusting the delay time provided between the channel upstream portion and the channel downstream portion is:
A channel upstream portion formed on the substrate, and a channel downstream portion;
An upstream surface formed of a surface made of a solvophilic material connected to the upstream portion of the flow path, formed on a partial region of the substrate surface, having a surface made of a lyophobic material having poor wettability to liquid A part extension flow path, and a downstream part extension flow path formed on a surface made of a solvophilic material, in communication with the downstream portion of the flow path,
A configuration formed by a communication channel formed on a surface made of a solvophilic material, which is added to an arrangement for connecting the two extension channels between the upstream extension channel and the downstream extension channel. Have
When the liquid surface end advances from the upstream portion of the flow path to the downstream portion of the flow path via the communication flow path, the position where the communication flow path is added is adjusted, and the upstream extension flow path is connected. As the streamline is extended by the total of the channel length via the channel and the downstream extension channel,
A delay device characterized in that a delay in time required for the liquid surface end of the liquid to reach from the tip of the upstream portion of the flow path to the end of the downstream portion of the flow path is achieved. The flow channel upstream portion and the flow channel downstream portion having a predetermined flow channel width are:
A liquid is held in a recess formed on the substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid,
The delay device according to claim 1, wherein the liquid progresses in the upstream portion of the flow channel and in the downstream portion of the flow channel by a capillary phenomenon. The flow path extension is
A liquid is held in a recess formed on a substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid. The delay device according to any one of claims 1 to 5. An upstream extension channel connected to the end of the upstream portion of the channel, and a downstream extension channel connected to the tip of the downstream portion of the channel,
A liquid is held in a recess formed on a substrate, and the inner wall surface of the recess in contact with the liquid is formed of a surface made of a solvophilic material that exhibits wettability to the liquid. The delay device according to any one of claims 6 to 8. For the flow path in the form of holding the liquid in the recess formed on the substrate, constituting the delay device,
Providing a lid to be joined to the upper surface of the substrate;
The liquid that travels in the flow path is configured to come into contact with a recess formed on the substrate and a lower surface of the lid. Delay device. Having a flow path in the form of holding the liquid in the recess formed on the substrate;
Providing a lid covering the substrate surface;
The concave portion of the substrate surface forms the lower surface and both side wall surfaces of the flow channel, and the lower surface of the lid portion covering the opening portion configures the upper surface of the flow channel, thereby forming a flow channel space.
A microchip that uses transport means in which the liquid travels in the flow path space by capillary action,
A microchip, wherein at least one of the delay devices according to claim 17 is inherent in the flow path as one of the elements constituting the flow path in the microchip. A method for producing a delay device according to claim 3, comprising:
Select a substrate made of plastic material,
The substrate surface has a desired planar shape and depth to be used for the flow channel upstream portion and the flow channel downstream portion, and the flow channel extension portion provided between the flow channel upstream portion and the flow channel downstream portion. Forming a recess in advance,
An obstruction structure added to the flow path expansion section,
In the flow path expanding portion, the plastic material constituting the substrate is deformed and formed into a shape of a wall-like structure protruding from the side wall surface serving as the shortest path to the internal region in the flow path expanding portion. As
Corresponding to the outer surface shape of the mold by pressing a convex mold from the upper surface of the substrate to the portion where the obstacle structure is to be formed in the flow path expanding portion, and deforming the plastic material constituting the substrate. Forming a concave shape and forming a shape of a wall-like structure surrounding the concave shape by a plastic material that is excluded along with the concave shape;
Thereafter, removing the convex mold, leaving the shape of the wall-like structure surrounding the concave shape,
The delay device characterized in that the shape of the wall-like structure surrounding the obtained concave shape is used as the shape of the wall-like structure protruding from the side wall surface serving as the shortest path to the internal region in the flow path expansion portion. Manufacturing method. A method of making a delay device according to claim 4, comprising:
The substrate surface has a desired planar shape and depth to be used for the flow channel upstream portion and the flow channel downstream portion, and the flow channel extension portion provided between the flow channel upstream portion and the flow channel downstream portion. Forming a recess in advance,
As an obstacle structure added to the flow path extension,
In the flow path expansion portion, as a step of adding the obstacle having a planar shape protruding from the side wall surface serving as the shortest path to the internal region of the flow path expansion portion on the bottom surface of the flow path expansion portion,
A solvent-phobic material having poor wettability with respect to the liquid is printed and applied in a desired planar shape on the bottom surface of the flow path expanding portion on the portion to which the obstacle is to be added. Comprising a step of forming a print coating layer having a surface made of a conductive material,
A printed coating layer of the lyophobic material having a desired planar shape is added on the bottom surface of the flow path extension portion, and from the side wall surface serving as the shortest path, an internal region is formed in the flow path extension portion. A method of manufacturing a delay device, characterized by being used as a planar obstacle that protrudes toward the surface. A method of making a delay device according to claim 7, comprising:
On the surface of the substrate, the flow channel upstream portion and the flow channel downstream portion, the upstream extension flow channel communicating with the end of the flow channel upstream portion, and the downstream extension flow communicating with the tip of the flow channel downstream portion A recess having a desired planar shape and depth to be used for the road is formed in advance.
Between the upstream extension channel and the downstream extension channel,
As a communication channel added to a desired arrangement for connecting the two extension channels, as a step of newly forming a groove structure on the substrate surface,
A step of cutting the substrate surface into a groove shape so as to straddle between the upstream extension channel and the downstream extension channel,
A method of manufacturing a delay device, characterized in that a cutting groove formed by cutting the substrate surface is used as the communication channel connecting the two extension channels. A method of making a delay device according to claim 10, comprising:
Select a substrate made of plastic material,
On the surface of the substrate, a recess having a desired planar shape and depth to be used in the upstream portion and the downstream portion of the flow path is formed in advance.
As the detour channel, which is added to the arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated with each other,
As a step of adding a deformation to the plastic material constituting the substrate and forming a new groove structure on the substrate surface,
A peripheral portion corresponding to the outer edge of the planar shape of the detour channel protrudes from the upper surface of the substrate to a portion where the detour channel is to be formed, and a mold having a depressed center portion corresponding to the inner edge is pressed. ,
The plastic material constituting the substrate is deformed to form a concave shape corresponding to the peripheral portion shape of the mold and a convex shape corresponding to the central portion shape,
Thereafter, the mold is removed, and a step of leaving a structure in which the outer edge portion has a concave shape and the inside thereof has a convex shape on the plastic-deformed upper surface of the substrate,
In the obtained plastic deformation structure, a groove structure having a concave shape at the outer edge is added to the detour channel added to an arrangement in which the end of the channel upstream portion and the tip of the channel downstream portion are communicated with each other. A method of manufacturing a delay device, characterized by being used as: A method for producing a delay device according to claim 13, comprising:
Desired plane used for the configuration of the flow path structure for adjusting the delay time provided on the substrate surface between the flow channel upstream portion and the flow channel downstream portion, and between the flow channel upstream portion and the flow channel downstream portion. Pre-form a recess having a shape and depth,
Furthermore, a partial region of the substrate surface having a surface made of a lyophobic material is provided in a constituent region of the flow path structure, and in the partial region of the substrate surface,
Connected to the end of the upstream portion of the flow channel, and having a planar shape of the flow channel, and is connected to the upstream extension flow channel formed of a surface made of a solvophilic material, and the tip of the downstream portion of the flow channel, Each of the downstream extension channels formed by a surface made of a solvophilic material having a channel-like planar shape is formed in advance,
Between the upstream extension channel and the downstream extension channel,
As a step of forming a flow path formed of a surface made of a solvophilic material having a planar shape of a flow path, which is used as a communication flow path added to a desired arrangement for connecting the two extended flow paths,
In order to straddle between the upstream extension channel and the downstream extension channel,
A solvophilic material is printed and applied in a desired planar shape on the upper surface of a partial region of the substrate surface having a surface made of a lyophobic material, and at least the upper surface has a surface made of a solvophilic material. Comprising the step of forming a coating layer,
A method of manufacturing a delay device, wherein a print coating layer having a surface made of a solvophilic material formed on the surface of the substrate is used as the communication channel connecting the two extension channels.