JPS64973Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION This invention relates to an improvement in the over-element of a filter for purifying chemical solutions for cleaning or engraving electronic equipment parts.

Due to the nature of the products we handle, chemical solutions for cleaning and engraving integrated circuit boards such as electronic device parts, such as ICs and LSIs, are extremely sensitive to impurities. The pore diameter of the filter also requires overaccuracy on the order of submicrons, and up until now, the same filter has been placed inside a cylindrical container made of chemically resistant synthetic resin material such as tetrafluoroethylene (Teflon) or polypropylene. A so-called laminated type filter has been used, which is made by stacking several layers of material made of a dish-shaped mesh plate with a porous film made of tetrafluoroethylene attached to the surface.
With this type, sufficient overarea cannot be obtained,
Due to the low processing capacity, recently, as shown in Figure 1A, polypropylene with a thickness of about 0.3 mm is used on both the front and back sides of a porous film material 1 made of tetrafluoroethylene resin with a thickness of about 50 μm to 100 μm. The reinforcing net cloth 2 is layered, and the layered material is pleated in the shape of a chrysanthemum, and porous tubes 3a, 3 made of tetrafluoroethylene or polypropylene are inserted inside and outside the layer.
b is fitted and inserted, and end plates 4a made of the same material are placed on the top and bottom,
A so-called pleated type filter is used in which a filter element subjected to process 4b is housed in a cup-shaped container a made of the same synthetic resin material as shown in FIG.

In this type of filter, the upper and lower end plates 4
When applying a and 4b, it is not possible to use a normal adhesive such as epoxy resin to prevent contamination of the processing solution, so a molten resin of the same material as the end plates 4a and 4b and material 1 is used. It is applied into the grooves of the plates 4a and 4b, and the above-mentioned element material is inserted therein to join them together.

By the way, in the above-mentioned conventional method, reinforcing mesh cloth is simply superimposed on both sides of the film material in a sandwich pattern, so when pleating this, the film material slides on the mesh cloth, resulting in folding. The height of the peaks may become uneven, and the film material may protrude from between the front and back mesh fabrics.Also, due to the high viscosity of the adhesive when joining the end plates, the wettability with the material ( (adhesion) is poor, and the edge of the film material curls up as shown in Figure 1 (c), or the adhesive does not penetrate sufficiently into the small gap between the film material and the net cloth, resulting in poor adhesion.
This may result in defective products with poor sealing properties.

Therefore, this idea is an attempt to solve the above problem.The left and right edges of the central film material and the net cloth layered on both the front and back sides are glued and integrated, and this is pleated in the shape of a chrysanthemum. A porous tube made of synthetic resin is inserted, and end plates of the same material are joined above and below it to prevent the film material and the net cloth from slipping during pleating. It is characterized by being able to maintain sufficient airtightness.

To explain this invention with reference to the drawings, in Fig. 1A, 1 is a porous film made of a chemical-resistant, heat-resistant, and weather-resistant resin such as tetrafluoroethylene or polypropylene and having a thickness of about 50 μm to 100 μm. It is the same as the previous one in that a reinforcing net cloth 2 made of polypropylene with a thickness of about 0.3 mm is overlaid on both the front and back sides, but the overlapping parts are the left and right edges. are welded 5 by means of high frequency, ultra-high frequency waves, etc., and form a band material l in which the three are integrated.

This strip l is pleated in the shape of a chrysanthemum, as shown in b of the same figure, and porous tubes 3a and 3b made of tetrafluoroethylene or polypropylene are fitted inside and outside, and tubes 3a and 3b made of polytetrafluoroethylene or polypropylene are inserted above and below the tubes. 3
As shown in the figure, plate-shaped end plates 4a and 4b made of a synthetic resin coated with a thick adhesive n made of the same resin melted into the grooves are fitted and joined together. The welded portions 5 on both side edges of the strip l, to which the material 1 and the net cloth 2 are welded, are embedded in the adhesive n as shown in FIG.

As described above, in this invention, the edges of both sides of the film material 1 and the net cloth 2 superimposed on at least one side of the film material 1 are welded to form an integrated band material l, and then the pleat processing is performed. In this case, the film material is given sufficient rigidity by the mesh cloth, there is no deviation from the mesh cloth, and the height of the folds can be processed to be uniform, and when joining with the end plate, Since the film material and the net cloth are bonded and fixed together at both edges, there is no need to worry about the edges of the film material rolling up, and there is no risk of poor adhesion, resulting in a product with high sealing properties. be able to.

[Brief explanation of drawings]

FIG. 1A is a perspective view showing a conventional superposition state of film material and net cloth. The same figure is a cross-sectional view of the filter. C is an explanatory diagram of the state of bonding of conventional film material and net cloth to end plates. FIG. 2A is a perspective view showing a state in which the film material and the net cloth are combined according to this invention. Second
Figure B is a partial perspective view showing the state of connection between the material, the tube, and the end plate. FIG. 3 is a sectional view of an embodiment of this invention. FIG. 4 is an explanatory diagram showing the state of connection with the end plate of this invention. In the figure, 1...Film material, 2...Net cloth, 3a, 3
b...tube, 4a, 4b...end plate, 5...welded part,
l...Strip material.

Claims (1)

[Scope of utility model registration request] Lay a net cloth made of the same material on at least one side of a porous thin film made of synthetic resin, weld the edges on both sides, pleat the welded strip material in a chrysanthemum shape to form a material, and An over-element for a filter for chemical liquids, which has synthetic resin end plates arranged on the upper and lower ends of the filter to ensure a liquid-tight seal.