JPS64973Y2 - - Google Patents
Info
- Publication number
- JPS64973Y2 JPS64973Y2 JP1982176577U JP17657782U JPS64973Y2 JP S64973 Y2 JPS64973 Y2 JP S64973Y2 JP 1982176577 U JP1982176577 U JP 1982176577U JP 17657782 U JP17657782 U JP 17657782U JP S64973 Y2 JPS64973 Y2 JP S64973Y2
- Authority
- JP
- Japan
- Prior art keywords
- film material
- filter
- net cloth
- synthetic resin
- end plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 35
- 239000004744 fabric Substances 0.000 claims description 18
- 229920003002 synthetic resin Polymers 0.000 claims description 6
- 239000000057 synthetic resin Substances 0.000 claims description 6
- 235000007516 Chrysanthemum Nutrition 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 244000189548 Chrysanthemum x morifolium Species 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- -1 polypropylene Polymers 0.000 description 8
- 239000004743 Polypropylene Substances 0.000 description 7
- 229920001155 polypropylene Polymers 0.000 description 7
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 241000723353 Chrysanthemum Species 0.000 description 3
- 229920006172 Tetrafluoroethylene propylene Polymers 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Filtering Materials (AREA)
Description
【考案の詳細な説明】
この考案は電子機器部品を洗浄したり触刻した
りする薬液を浄化するためのフイルタの過エレ
メントの改良に関する。DETAILED DESCRIPTION OF THE INVENTION This invention relates to an improvement in the over-element of a filter for purifying chemical solutions for cleaning or engraving electronic equipment parts.
電子機器部品例えばICやLSI等の集積回路基板
を洗浄したり触刻したりするための薬液は、取扱
う製品の性質上、不純物の保有を極度にきらうと
ころから、このような薬液を浄化するためのフイ
ルタの孔径もサブミクロンオーダの過精度が要
求され、これまでには四弗化エチレン(テフロ
ン)又はポリプロピレンのような耐薬品性に富ん
だ合成樹脂材からなる筒状容器の内部に、同材質
の皿状網板の表面に四弗化エチレンからなる多孔
質のフイルムを貼り付けた材を数段積み重ねた
いわゆる積層型のフイルタが用いられてきたが、
このタイプのものは充分な過面積が得られず、
処理能力が低いために最近では、第1図イのよう
に四弗化エチレン樹脂からなる厚さ50μ〜100μ程
度の多孔質のフイルム材1の表裏両面に、厚さ
が0.3mm程度のポリプロピレンからなる補強用の
網布2を重ね合せ、この重ね合せたものを菊花状
にプリーツ加工をし、その内外に四弗化エチレン
又はポリプロピレン製の多孔のチユーブ3a,3
bを嵌挿すると共に上下には同材質の端板4a,
4bを施した過エレメントを、同図ロのように
同じ合成樹脂材からなるコツプ状の容器aに収納
したいわゆるプリーツ型のフイルタが用いられて
いる。 Due to the nature of the products we handle, chemical solutions for cleaning and engraving integrated circuit boards such as electronic device parts, such as ICs and LSIs, are extremely sensitive to impurities. The pore diameter of the filter also requires overaccuracy on the order of submicrons, and up until now, the same filter has been placed inside a cylindrical container made of chemically resistant synthetic resin material such as tetrafluoroethylene (Teflon) or polypropylene. A so-called laminated type filter has been used, which is made by stacking several layers of material made of a dish-shaped mesh plate with a porous film made of tetrafluoroethylene attached to the surface.
With this type, sufficient overarea cannot be obtained,
Due to the low processing capacity, recently, as shown in Figure 1A, polypropylene with a thickness of about 0.3 mm is used on both the front and back sides of a porous film material 1 made of tetrafluoroethylene resin with a thickness of about 50 μm to 100 μm. The reinforcing net cloth 2 is layered, and the layered material is pleated in the shape of a chrysanthemum, and porous tubes 3a, 3 made of tetrafluoroethylene or polypropylene are inserted inside and outside the layer.
b is fitted and inserted, and end plates 4a made of the same material are placed on the top and bottom,
A so-called pleated type filter is used in which a filter element subjected to process 4b is housed in a cup-shaped container a made of the same synthetic resin material as shown in FIG.
そして、この種のフイルタでは上下の端板4
a,4bを施す際、処理液の汚染を防止する意味
合いからエポキシ樹脂等の通常の接着剤を使用す
ることができず端板4a,4bや材1と同じ材
質の樹脂の溶融したものを端板4a,4bのみぞ
中に塗布し、そこに上記のエレメント材を差し込
んで両者を接合するようにしている。 In this type of filter, the upper and lower end plates 4
When applying a and 4b, it is not possible to use a normal adhesive such as epoxy resin to prevent contamination of the processing solution, so a molten resin of the same material as the end plates 4a and 4b and material 1 is used. It is applied into the grooves of the plates 4a and 4b, and the above-mentioned element material is inserted therein to join them together.
ところで、上記従来のものではフイルム材の
表裏両面に補強用の網布を単にサンドイツチ状に
重ね合せただけであるために、これをプリーツ加
工する際にフイルム材が網布上を滑るため、折
り山の高さが不均一になつたり、フイルム材が
表裏の網布の間からはみ出したりすることがあり
また、端板との接合時に、接着剤の粘度が高いた
め、材とのぬれ性(付着性)が悪く、フイルム
材の端縁が第1図ハのようにまくれ上がつたり
あるいはフイルム材と網布との小さな間隙中に
接着剤が充分に入り込まず、接着不良を起こし、
シール性の悪い欠陥品を生じることがある。 By the way, in the above-mentioned conventional method, reinforcing mesh cloth is simply superimposed on both sides of the film material in a sandwich pattern, so when pleating this, the film material slides on the mesh cloth, resulting in folding. The height of the peaks may become uneven, and the film material may protrude from between the front and back mesh fabrics.Also, due to the high viscosity of the adhesive when joining the end plates, the wettability with the material ( (adhesion) is poor, and the edge of the film material curls up as shown in Figure 1 (c), or the adhesive does not penetrate sufficiently into the small gap between the film material and the net cloth, resulting in poor adhesion.
This may result in defective products with poor sealing properties.
そこで、この考案は上記の不具合を解消しよう
とするもので、中央のフイルム材と表裏両面に
重ねた網布との左右縁辺を接着して一体化し、こ
れを菊花状にプリーツ加工し、内外に合成樹脂か
らなる多孔のチユーブを嵌挿すると共にその上下
に同材の端板を接合するようになし、プリーツ加
工に当たつてのフイルム材と網布とのずれを防
止する一方端板との気密性を充分に維持できるよ
うにしたことを特徴とする。 Therefore, this idea is an attempt to solve the above problem.The left and right edges of the central film material and the net cloth layered on both the front and back sides are glued and integrated, and this is pleated in the shape of a chrysanthemum. A porous tube made of synthetic resin is inserted, and end plates of the same material are joined above and below it to prevent the film material and the net cloth from slipping during pleating. It is characterized by being able to maintain sufficient airtightness.
図面参照の上この考案について説明すれば、第
1図イにおいて1は四弗化エチレン又はポリプロ
ピレン等の耐薬品性、耐熱、耐候性の樹脂からな
り厚さが50μ〜100μ程度の多孔質のフイルム材
であつて、その表裏両面には厚さが0.3mm程度で
ポリプロピレンからなる補強用の網布2が重ね合
されていることは前記のものと変りないが、その
重ね合せたものゝ左右縁辺は高周波、超短波等の
手段により溶着5され、三者が一体になつた帯材
lをなしている。 To explain this invention with reference to the drawings, in Fig. 1A, 1 is a porous film made of a chemical-resistant, heat-resistant, and weather-resistant resin such as tetrafluoroethylene or polypropylene and having a thickness of about 50 μm to 100 μm. It is the same as the previous one in that a reinforcing net cloth 2 made of polypropylene with a thickness of about 0.3 mm is overlaid on both the front and back sides, but the overlapping parts are the left and right edges. are welded 5 by means of high frequency, ultra-high frequency waves, etc., and form a band material l in which the three are integrated.
そして、この帯材lが同図ロのように菊花状に
プリーツ加工され、その内外には同じく四弗化エ
チレン又はポリプロピレンからなる多孔のチユー
ブ3a,3bが嵌挿され、またその上下には第3
図のようにみぞ内部に同材質の樹脂を溶融した接
着剤nを厚目に塗布した合成樹脂でなる皿状の端
板4a,4b、が嵌め込まれ接合されている。そ
して材1と網布2とが溶着された帯材lの両側
端縁の溶着部5は第4図のように接着剤n中に埋
め込まれた状態になつている。 This strip l is pleated in the shape of a chrysanthemum, as shown in b of the same figure, and porous tubes 3a and 3b made of tetrafluoroethylene or polypropylene are fitted inside and outside, and tubes 3a and 3b made of polytetrafluoroethylene or polypropylene are inserted above and below the tubes. 3
As shown in the figure, plate-shaped end plates 4a and 4b made of a synthetic resin coated with a thick adhesive n made of the same resin melted into the grooves are fitted and joined together. The welded portions 5 on both side edges of the strip l, to which the material 1 and the net cloth 2 are welded, are embedded in the adhesive n as shown in FIG.
以上のようにこの考案では、フイルム材1と
その少なくとも片面に重合した網布2との両側縁
辺を溶着して一体になつた帯材lとした上でプリ
ーツ加工するようにしたので、プリーツ加工に当
たり、フイルム材に網布によつて充分な剛性が
付与され、網布とのずれがなくなり折り山の高さ
を均一に加工することができ、また端板との接合
に当たつては、フイルム材と網布とが両側縁辺
で一つに結合された状態で固着されるのでフイル
ム材の端縁がまくれ上がる心配がなく、また接
着不良になる恐れがなく、シール性の高い製品を
うることができる。 As described above, in this invention, the edges of both sides of the film material 1 and the net cloth 2 superimposed on at least one side of the film material 1 are welded to form an integrated band material l, and then the pleat processing is performed. In this case, the film material is given sufficient rigidity by the mesh cloth, there is no deviation from the mesh cloth, and the height of the folds can be processed to be uniform, and when joining with the end plate, Since the film material and the net cloth are bonded and fixed together at both edges, there is no need to worry about the edges of the film material rolling up, and there is no risk of poor adhesion, resulting in a product with high sealing properties. be able to.
第1図イはフイルム材と網布との従来の重合
状態を示す斜視図。同ロはフイルタの断面図。同
ハは従来のフイルム材および網布と端板との接
合状態の説明図。第2図イはこの考案に係るフイ
ルム材と網布との結合状態を示す斜視図。第2
図ロは材とチユーブおよび端板との接合状態を
示す一部の斜視図。第3図はこの考案の実施例の
断面図。第4図はこの考案の端板との接合状態を
示す説明図。
図中、1…フイルム材、2…網布、3a,3
b…チユーブ、4a,4b…端板、5…溶着部、
l…帯材。
FIG. 1A is a perspective view showing a conventional superposition state of film material and net cloth. The same figure is a cross-sectional view of the filter. C is an explanatory diagram of the state of bonding of conventional film material and net cloth to end plates. FIG. 2A is a perspective view showing a state in which the film material and the net cloth are combined according to this invention. Second
Figure B is a partial perspective view showing the state of connection between the material, the tube, and the end plate. FIG. 3 is a sectional view of an embodiment of this invention. FIG. 4 is an explanatory diagram showing the state of connection with the end plate of this invention. In the figure, 1...Film material, 2...Net cloth, 3a, 3
b...tube, 4a, 4b...end plate, 5...welded part,
l...Strip material.
Claims (1)
面に同材質の網布を重ね合せ、それらの両側端縁
を溶着し、該溶着した帯材を菊花状にプリーツ加
工して材を形成し、該材の上下端部に合成樹
脂製端板を配設して液密に固着シールしてなる薬
液用フイルタの過エレメント。 Lay a net cloth made of the same material on at least one side of a porous thin film made of synthetic resin, weld the edges on both sides, pleat the welded strip material in a chrysanthemum shape to form a material, and An over-element for a filter for chemical liquids, which has synthetic resin end plates arranged on the upper and lower ends of the filter to ensure a liquid-tight seal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17657782U JPS5982516U (en) | 1982-11-24 | 1982-11-24 | Filtration element for chemical filters |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17657782U JPS5982516U (en) | 1982-11-24 | 1982-11-24 | Filtration element for chemical filters |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5982516U JPS5982516U (en) | 1984-06-04 |
JPS64973Y2 true JPS64973Y2 (en) | 1989-01-11 |
Family
ID=30383869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17657782U Granted JPS5982516U (en) | 1982-11-24 | 1982-11-24 | Filtration element for chemical filters |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5982516U (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59136103A (en) * | 1983-01-26 | 1984-08-04 | Daicel Chem Ind Ltd | Treatment of sealing end of separation membrane |
JPS60153902A (en) * | 1984-01-21 | 1985-08-13 | Kurabo Ind Ltd | Capsule type filter and its preparation |
JPH0632176Y2 (en) * | 1988-08-31 | 1994-08-24 | 株式会社土屋製作所 | Excessive element for precision filters |
JPH0641608Y2 (en) * | 1988-12-29 | 1994-11-02 | 東洋濾紙株式会社 | Cartridge type filter element |
JP4210964B2 (en) * | 1998-12-29 | 2009-01-21 | 株式会社安川電機 | Water purifier |
US7387656B2 (en) * | 2005-01-07 | 2008-06-17 | Mecs, Inc. | Fiber collecting media strip for a mist eliminator |
DE102007013178A1 (en) * | 2007-03-20 | 2008-09-25 | Hydac Filtertechnik Gmbh | Method for producing a filter element and filter element produced by the method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5458269A (en) * | 1977-09-29 | 1979-05-10 | Pall Corp | Tubular filter element |
-
1982
- 1982-11-24 JP JP17657782U patent/JPS5982516U/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5458269A (en) * | 1977-09-29 | 1979-05-10 | Pall Corp | Tubular filter element |
Also Published As
Publication number | Publication date |
---|---|
JPS5982516U (en) | 1984-06-04 |
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