JPS649351U - - Google Patents

Info

Publication number
JPS649351U
JPS649351U JP10304887U JP10304887U JPS649351U JP S649351 U JPS649351 U JP S649351U JP 10304887 U JP10304887 U JP 10304887U JP 10304887 U JP10304887 U JP 10304887U JP S649351 U JPS649351 U JP S649351U
Authority
JP
Japan
Prior art keywords
door
ion processing
roller
main body
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10304887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10304887U priority Critical patent/JPS649351U/ja
Publication of JPS649351U publication Critical patent/JPS649351U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP10304887U 1987-07-04 1987-07-04 Pending JPS649351U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10304887U JPS649351U (enrdf_load_stackoverflow) 1987-07-04 1987-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10304887U JPS649351U (enrdf_load_stackoverflow) 1987-07-04 1987-07-04

Publications (1)

Publication Number Publication Date
JPS649351U true JPS649351U (enrdf_load_stackoverflow) 1989-01-19

Family

ID=31333512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10304887U Pending JPS649351U (enrdf_load_stackoverflow) 1987-07-04 1987-07-04

Country Status (1)

Country Link
JP (1) JPS649351U (enrdf_load_stackoverflow)

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