JPH0429653U - - Google Patents

Info

Publication number
JPH0429653U
JPH0429653U JP6839990U JP6839990U JPH0429653U JP H0429653 U JPH0429653 U JP H0429653U JP 6839990 U JP6839990 U JP 6839990U JP 6839990 U JP6839990 U JP 6839990U JP H0429653 U JPH0429653 U JP H0429653U
Authority
JP
Japan
Prior art keywords
shutter
heater
ion implanter
embedded
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6839990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6839990U priority Critical patent/JPH0429653U/ja
Publication of JPH0429653U publication Critical patent/JPH0429653U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6839990U 1990-06-27 1990-06-27 Pending JPH0429653U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6839990U JPH0429653U (enrdf_load_stackoverflow) 1990-06-27 1990-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6839990U JPH0429653U (enrdf_load_stackoverflow) 1990-06-27 1990-06-27

Publications (1)

Publication Number Publication Date
JPH0429653U true JPH0429653U (enrdf_load_stackoverflow) 1992-03-10

Family

ID=31602808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6839990U Pending JPH0429653U (enrdf_load_stackoverflow) 1990-06-27 1990-06-27

Country Status (1)

Country Link
JP (1) JPH0429653U (enrdf_load_stackoverflow)

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