JPH0418448U - - Google Patents

Info

Publication number
JPH0418448U
JPH0418448U JP5802090U JP5802090U JPH0418448U JP H0418448 U JPH0418448 U JP H0418448U JP 5802090 U JP5802090 U JP 5802090U JP 5802090 U JP5802090 U JP 5802090U JP H0418448 U JPH0418448 U JP H0418448U
Authority
JP
Japan
Prior art keywords
housing body
wafer
carrier
top plate
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5802090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5802090U priority Critical patent/JPH0418448U/ja
Publication of JPH0418448U publication Critical patent/JPH0418448U/ja
Pending legal-status Critical Current

Links

JP5802090U 1990-06-01 1990-06-01 Pending JPH0418448U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5802090U JPH0418448U (enrdf_load_stackoverflow) 1990-06-01 1990-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5802090U JPH0418448U (enrdf_load_stackoverflow) 1990-06-01 1990-06-01

Publications (1)

Publication Number Publication Date
JPH0418448U true JPH0418448U (enrdf_load_stackoverflow) 1992-02-17

Family

ID=31583253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5802090U Pending JPH0418448U (enrdf_load_stackoverflow) 1990-06-01 1990-06-01

Country Status (1)

Country Link
JP (1) JPH0418448U (enrdf_load_stackoverflow)

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