JPS6488140A - Surface inspecting device - Google Patents

Surface inspecting device

Info

Publication number
JPS6488140A
JPS6488140A JP24393987A JP24393987A JPS6488140A JP S6488140 A JPS6488140 A JP S6488140A JP 24393987 A JP24393987 A JP 24393987A JP 24393987 A JP24393987 A JP 24393987A JP S6488140 A JPS6488140 A JP S6488140A
Authority
JP
Japan
Prior art keywords
defect
classification
circuit
arithmetic circuit
similarity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24393987A
Other languages
Japanese (ja)
Other versions
JPH0814548B2 (en
Inventor
Chiaki Fukazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62243939A priority Critical patent/JPH0814548B2/en
Publication of JPS6488140A publication Critical patent/JPS6488140A/en
Publication of JPH0814548B2 publication Critical patent/JPH0814548B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To facilitate classification decision making by the kinds of detects by providing a 1st deciding means which decides the kind of a defect and a 2nd deciding means which decides the extent of a defect corresponding to the kind of the defect from the decision result of the 1st means. CONSTITUTION:A feature extracting circuit 2 extracts the features of the defect according to the scanning information of a detection part 1 and outputs them to a kind arithmetic circuit 23 and a classification arithmetic circuit 36. The kind arithmetic circuit 23 analyzes the extracted information to calculate the similarity with a parameter stored in a memory 13, and a kind determining circuit 33 determines the kind of the defect whose similarity becomes maximum. Then a selecting circuit 26 selects a parameter regarding the classification of the defect weighed corresponding to the kind of the defect in one of memories 16a, 16b...16n and a classification arithmetic circuit 36 analyzes the extracted information to calculate the similarity with the parameter selected by the selecting circuit 26; and a classification determining circuit 46 determines the classification of the defect whose similarity becomes maximum.
JP62243939A 1987-09-30 1987-09-30 Surface inspection device Expired - Lifetime JPH0814548B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62243939A JPH0814548B2 (en) 1987-09-30 1987-09-30 Surface inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62243939A JPH0814548B2 (en) 1987-09-30 1987-09-30 Surface inspection device

Publications (2)

Publication Number Publication Date
JPS6488140A true JPS6488140A (en) 1989-04-03
JPH0814548B2 JPH0814548B2 (en) 1996-02-14

Family

ID=17111283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62243939A Expired - Lifetime JPH0814548B2 (en) 1987-09-30 1987-09-30 Surface inspection device

Country Status (1)

Country Link
JP (1) JPH0814548B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10302049A (en) * 1997-04-28 1998-11-13 Kumamoto Techno Porisu Zaidan Image identification device, its method, image detection/ identification device provided with the image identification device and medium recording image identification program

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61245045A (en) * 1985-04-23 1986-10-31 Nisshin Steel Co Ltd Automatic surface defect inspecting method for metallic band

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61245045A (en) * 1985-04-23 1986-10-31 Nisshin Steel Co Ltd Automatic surface defect inspecting method for metallic band

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10302049A (en) * 1997-04-28 1998-11-13 Kumamoto Techno Porisu Zaidan Image identification device, its method, image detection/ identification device provided with the image identification device and medium recording image identification program

Also Published As

Publication number Publication date
JPH0814548B2 (en) 1996-02-14

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