JPS6487788A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS6487788A JPS6487788A JP14015687A JP14015687A JPS6487788A JP S6487788 A JPS6487788 A JP S6487788A JP 14015687 A JP14015687 A JP 14015687A JP 14015687 A JP14015687 A JP 14015687A JP S6487788 A JPS6487788 A JP S6487788A
- Authority
- JP
- Japan
- Prior art keywords
- soln
- etching
- chlorate
- ferric
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14015687A JPH0811835B2 (ja) | 1986-07-15 | 1987-06-05 | エッチング方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61-164875 | 1986-07-15 | ||
JP16487586 | 1986-07-15 | ||
JP14015687A JPH0811835B2 (ja) | 1986-07-15 | 1987-06-05 | エッチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6487788A true JPS6487788A (en) | 1989-03-31 |
JPH0811835B2 JPH0811835B2 (ja) | 1996-02-07 |
Family
ID=26472760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14015687A Expired - Fee Related JPH0811835B2 (ja) | 1986-07-15 | 1987-06-05 | エッチング方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0811835B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001348685A (ja) * | 2000-06-06 | 2001-12-18 | Yoshikazu Kobayashi | 塩化第二銅・塩素酸ナトリウム系エッチング液の管理システム |
WO2016006373A1 (ja) * | 2014-07-08 | 2016-01-14 | メック株式会社 | エッチング剤および補給液 |
-
1987
- 1987-06-05 JP JP14015687A patent/JPH0811835B2/ja not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001348685A (ja) * | 2000-06-06 | 2001-12-18 | Yoshikazu Kobayashi | 塩化第二銅・塩素酸ナトリウム系エッチング液の管理システム |
WO2016006373A1 (ja) * | 2014-07-08 | 2016-01-14 | メック株式会社 | エッチング剤および補給液 |
JP2016017209A (ja) * | 2014-07-08 | 2016-02-01 | メック株式会社 | エッチング剤および補給液 |
CN106661739A (zh) * | 2014-07-08 | 2017-05-10 | Mec股份有限公司 | 蚀刻剂及补给液 |
EP3168328A4 (en) * | 2014-07-08 | 2018-03-21 | Mec Company Ltd. | Etching agent and replenishing liquid |
Also Published As
Publication number | Publication date |
---|---|
JPH0811835B2 (ja) | 1996-02-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |