JPS6487788A - Etching method - Google Patents

Etching method

Info

Publication number
JPS6487788A
JPS6487788A JP14015687A JP14015687A JPS6487788A JP S6487788 A JPS6487788 A JP S6487788A JP 14015687 A JP14015687 A JP 14015687A JP 14015687 A JP14015687 A JP 14015687A JP S6487788 A JPS6487788 A JP S6487788A
Authority
JP
Japan
Prior art keywords
soln
etching
chlorate
ferric
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14015687A
Other languages
English (en)
Other versions
JPH0811835B2 (ja
Inventor
Robaatoson Arasutea
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Adeka Corp
Original Assignee
Asahi Denka Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Denka Kogyo KK filed Critical Asahi Denka Kogyo KK
Priority to JP14015687A priority Critical patent/JPH0811835B2/ja
Publication of JPS6487788A publication Critical patent/JPS6487788A/ja
Publication of JPH0811835B2 publication Critical patent/JPH0811835B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP14015687A 1986-07-15 1987-06-05 エッチング方法 Expired - Fee Related JPH0811835B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14015687A JPH0811835B2 (ja) 1986-07-15 1987-06-05 エッチング方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61-164875 1986-07-15
JP16487586 1986-07-15
JP14015687A JPH0811835B2 (ja) 1986-07-15 1987-06-05 エッチング方法

Publications (2)

Publication Number Publication Date
JPS6487788A true JPS6487788A (en) 1989-03-31
JPH0811835B2 JPH0811835B2 (ja) 1996-02-07

Family

ID=26472760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14015687A Expired - Fee Related JPH0811835B2 (ja) 1986-07-15 1987-06-05 エッチング方法

Country Status (1)

Country Link
JP (1) JPH0811835B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001348685A (ja) * 2000-06-06 2001-12-18 Yoshikazu Kobayashi 塩化第二銅・塩素酸ナトリウム系エッチング液の管理システム
WO2016006373A1 (ja) * 2014-07-08 2016-01-14 メック株式会社 エッチング剤および補給液

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001348685A (ja) * 2000-06-06 2001-12-18 Yoshikazu Kobayashi 塩化第二銅・塩素酸ナトリウム系エッチング液の管理システム
WO2016006373A1 (ja) * 2014-07-08 2016-01-14 メック株式会社 エッチング剤および補給液
JP2016017209A (ja) * 2014-07-08 2016-02-01 メック株式会社 エッチング剤および補給液
CN106661739A (zh) * 2014-07-08 2017-05-10 Mec股份有限公司 蚀刻剂及补给液
EP3168328A4 (en) * 2014-07-08 2018-03-21 Mec Company Ltd. Etching agent and replenishing liquid

Also Published As

Publication number Publication date
JPH0811835B2 (ja) 1996-02-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees