JPS648730U - - Google Patents
Info
- Publication number
- JPS648730U JPS648730U JP10223587U JP10223587U JPS648730U JP S648730 U JPS648730 U JP S648730U JP 10223587 U JP10223587 U JP 10223587U JP 10223587 U JP10223587 U JP 10223587U JP S648730 U JPS648730 U JP S648730U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- thermocouple
- heater
- gap
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10223587U JPS648730U (it) | 1987-07-01 | 1987-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10223587U JPS648730U (it) | 1987-07-01 | 1987-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648730U true JPS648730U (it) | 1989-01-18 |
Family
ID=31331957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10223587U Pending JPS648730U (it) | 1987-07-01 | 1987-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648730U (it) |
-
1987
- 1987-07-01 JP JP10223587U patent/JPS648730U/ja active Pending